JPH0540318Y2 - - Google Patents

Info

Publication number
JPH0540318Y2
JPH0540318Y2 JP1417087U JP1417087U JPH0540318Y2 JP H0540318 Y2 JPH0540318 Y2 JP H0540318Y2 JP 1417087 U JP1417087 U JP 1417087U JP 1417087 U JP1417087 U JP 1417087U JP H0540318 Y2 JPH0540318 Y2 JP H0540318Y2
Authority
JP
Japan
Prior art keywords
blade
chord length
stages
pressure side
spacing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1417087U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63123794U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1417087U priority Critical patent/JPH0540318Y2/ja
Publication of JPS63123794U publication Critical patent/JPS63123794U/ja
Application granted granted Critical
Publication of JPH0540318Y2 publication Critical patent/JPH0540318Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1417087U 1987-02-04 1987-02-04 Expired - Lifetime JPH0540318Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1417087U JPH0540318Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1417087U JPH0540318Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Publications (2)

Publication Number Publication Date
JPS63123794U JPS63123794U (enrdf_load_stackoverflow) 1988-08-11
JPH0540318Y2 true JPH0540318Y2 (enrdf_load_stackoverflow) 1993-10-13

Family

ID=30803907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1417087U Expired - Lifetime JPH0540318Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Country Status (1)

Country Link
JP (1) JPH0540318Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS63123794U (enrdf_load_stackoverflow) 1988-08-11

Similar Documents

Publication Publication Date Title
US4824325A (en) Diffuser having split tandem low solidity vanes
JP3356510B2 (ja) 遠心又は斜流形ポンプの羽根付きディフューザ
US20130309082A1 (en) Centrifugal turbomachine
JP2636356B2 (ja) 分子ポンプ
JP2020500271A (ja) 高効率二重吸込インペラ
GB1397179A (en) Turbomolecular vacuum pump
JPH0826877B2 (ja) ターボ分子ポンプ
JP3048583B2 (ja) 高真空ポンプ用のポンプ段
JP2000516321A (ja) 摩擦真空ポンプ
JPH0540318Y2 (enrdf_load_stackoverflow)
JP2002519575A5 (enrdf_load_stackoverflow)
US5456575A (en) Non-centric improved pumping stage for turbomolecular pumps
JPH0553955B2 (enrdf_load_stackoverflow)
JPS57191492A (en) Molecular turbo-pump
JP2002005078A5 (enrdf_load_stackoverflow)
KR870001411A (ko) 터어보 분자펌프
US10851801B2 (en) Centrifugal compressor system and diffuser
JP3978001B2 (ja) ターボ分子ポンプ
JPS6361799A (ja) タ−ボ分子ポンプ
JPH02264196A (ja) ターボ真空ポンプ
JPS6332957Y2 (enrdf_load_stackoverflow)
JPS61283794A (ja) タ−ボ分子ポンプ
SU1366709A1 (ru) Турбомолекул рный вакуумный насос
RU95116212A (ru) Многоступенчатый центробежный насос
GB1330150A (en) Impeller assemblies for high vacuum pumps