JPH0539626Y2 - - Google Patents
Info
- Publication number
- JPH0539626Y2 JPH0539626Y2 JP2743587U JP2743587U JPH0539626Y2 JP H0539626 Y2 JPH0539626 Y2 JP H0539626Y2 JP 2743587 U JP2743587 U JP 2743587U JP 2743587 U JP2743587 U JP 2743587U JP H0539626 Y2 JPH0539626 Y2 JP H0539626Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- barrel
- indicator
- detection device
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 36
- 238000001514 detection method Methods 0.000 claims description 18
- 238000001947 vapour-phase growth Methods 0.000 claims description 13
- 239000012071 phase Substances 0.000 claims description 2
- 230000002411 adverse Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2743587U JPH0539626Y2 (esLanguage) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2743587U JPH0539626Y2 (esLanguage) | 1987-02-27 | 1987-02-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136325U JPS63136325U (esLanguage) | 1988-09-07 |
| JPH0539626Y2 true JPH0539626Y2 (esLanguage) | 1993-10-07 |
Family
ID=30829462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2743587U Expired - Lifetime JPH0539626Y2 (esLanguage) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0539626Y2 (esLanguage) |
-
1987
- 1987-02-27 JP JP2743587U patent/JPH0539626Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63136325U (esLanguage) | 1988-09-07 |
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