JPH0538643A - X-y table - Google Patents

Abstract

PURPOSE:To lessen the inertia weight of a traveling table, hinder pipings connected with cylinders from moving, and enhance the durability of the pipings by securing an X-axis and a Y-axis cylinder onto a stationary table. CONSTITUTION:An X-axis hydraulic cylinder 7 is installed on a stationary table 1, and at the tip of its rod 7C, a Y-axis guide 12 is furnished to move a traveling table in the X-direction through a Y-axis rail 15. On the same table 1 a Y-axis hydraulic cylinder 9 is furnished, and at its foremost, a stationary plate 16 is provided, being coupled with sliders 6. Thess sliders 6 move in the Y-direction along Y-axis guide rails 3 installed on the stationary table 1, while X-axis guide rails 5 engaged by the sliders 6 and fixed to the traveling table are moved in the Y-direction. Thereby the traveling table can be moved in any desired direction.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is an XY for positioning a moving table in the X-axis and Y-axis directions using an actuator.
Regarding the table.

[0002]

2. Description of the Related Art Generally, in machine tools, press molding machines, transfer machines, industrial robots, etc., X-axis, Y-axis
An electric or hydraulic XY table is used to position the workpiece in the axial direction.

A conventional XY table has a guide groove in the X-axis direction, and an X-axis table serving as a base of the XY table and the X-axis table guided by the guide groove of the X-axis table. A Y-axis table that is movably provided on the Y-axis table and has a guide groove in the Y-axis direction; a movable table that is movably provided on the Y-axis table by being guided by the guide groove of the Y-axis table; An X-axis actuator (X-axis direction moving mechanism) which is provided and slides and displaces the Y-axis table in the X-axis direction, and a Y-axis actuator (Y-axis actuator (Y-axis direction moving mechanism), which is provided on the Y-axis table and slide-displaces in the Y-axis direction. Axial movement mechanism).

As the X-axis and Y-axis actuators, a rotary type actuator in which an electric servomotor or a hydraulic motor and a ball screw are combined, or an actuator using a reciprocating hydraulic cylinder is used.

In the X-Y table constructed as described above, the movement in the X-axis direction moves the Y-axis table and the moving table integrally by operating the X-axis actuator, and the movement in the Y-axis direction moves in the Y-axis direction. By operating the actuator, the moving table is moved and positioned at a desired position.

[0006]

By the way, in the above-mentioned conventional XY table, when the movable table is moved in the X-axis direction, the entire Y-axis table is moved to move the movable table to the target position. Therefore always X
The axial actuator has to move the entire Y-axis table and the Y-axis actuator provided on the Y-axis table, which requires a large force.

Further, since the inertial weight when moving in the X-axis direction is large, it has been impossible to perform control at high speed and with high precision.

Further, since the Y-axis actuator is moved relative to the base (X-axis table), the wiring and piping connected to the Y-axis actuator move on the base (X-axis table) together with the Y-axis actuator, and the wiring and piping are connected. Etc. may be damaged by fatigue, and there was a problem in durability.

The present invention has been made in view of the above-mentioned problems of the prior art, and the present invention is configured to have two stages of a moving table and a base by providing an X-axis actuator and a Y-axis actuator on the base. It is intended to provide an XY table.

[0010]

In order to solve the above-mentioned problems, an XY table adopted by the present invention is a base, a moving table disposed above the base, and fixed to the base. An X-axis actuator having a rod that can expand and contract in the X-axis direction; a Y-axis actuator that has a rod that is fixed to the base and that can expand and contract in the Y-axis direction that is substantially perpendicular to the X-axis direction; A Y-axis rail extending in the Y-axis direction provided on one of the rods of the X-axis actuator, and provided on the other of the moving table or the rod of the X-axis actuator so that the Y-axis rail can slide. Y to guide
An axis guide member, an X-axis rail extending in the X-axis direction provided on either the moving table or the rod of the Y-axis actuator, and provided on the other of the moving table or the rod of the Y-axis actuator. , An X-axis guide member for slidably guiding the X-axis rail.

Further, the X-axis and Y-axis actuators are hydraulic cylinders each including a piston that defines two chambers in the cylinder, and a rod that is fixed to the piston and protrudes from the cylinder. A pressure source connected to each chamber of the cylinder and supplying a pressure liquid to each chamber,
A tank that is connected to each chamber of each hydraulic cylinder and stores the liquid discharged from each chamber, and is provided between each chamber of each hydraulic cylinder, the pressure source, and the tank. It is desirable to provide a supply / discharge control means for controlling the supply / discharge of liquid to / from each chamber of the hydraulic cylinder, and a tank communication means for simultaneously communicating all the chambers of each hydraulic cylinder with the tank by an external operation. ..

[0012]

With the above structure, when the moving table is moved in the X-axis direction, the rod of the X-axis actuator is expanded and contracted, and the movement is performed via the Y-axis rail and the Y-axis guide member provided between the rod and the moving table. Move the table. At this time, since the X-axis rail and the X-axis guide member can slide between the rod of the Y-axis actuator and the moving table, relative movement in the X-axis direction is possible.

When the moving table is moved in the Y-axis direction, the rod of the Y-axis actuator is expanded and contracted,
The moving table is moved via an X-axis rail and an X-axis guide member provided between the rod and the moving table. At this time, since the Y-axis rail and the Y-axis guide member can slide between the rod of the X-axis actuator and the moving table, relative movement in the Y-axis direction is possible.

Further, by simultaneously communicating all the chambers of each hydraulic cylinder with the tank by an external operation, the liquid in the hydraulic cylinder can freely flow in and out, and the liquid of each hydraulic cylinder can be manually operated from the outside. The rod can be expanded and contracted, and the moving table can be manually moved.

[0015]

Embodiments of the present invention will be described below with reference to FIGS.

First, based on FIGS. 1 and 5, XY
The configuration of the table moving mechanism will be described.

In the figure, 1 indicates a fixed base as a base,
The fixing base 1 is formed in a plate shape, and a fixing hole 1 into which a screw or the like is inserted so as to be fixed to a work table (not shown) at a predetermined position.
A, 1A, ... Are drilled.

Reference numeral 2 denotes a moving table, which is formed in a plate shape and is arranged in parallel above the fixed base 1. Below the moving table 2 is shown in FIGS. As shown in FIG. 5, X-axis guide rails 5 and 5 ′ that extend in the X-axis direction described later, and Y-axis that extends in the Y-axis direction and is separated from the tip end side of one end of the X-axis guide rails 5 and 5 ′. Rail 1
5 and a light receiving portion 19B of the X-axis position detection sensor 19 provided in parallel with the X-axis guide rails 5 and 5 '.

Reference numerals 3 and 3 are provided on the fixed base 1 at predetermined intervals in the X-axis direction via spacers 4 and 4, and a Y-axis guide rail for guiding the movement of the moving table 2 in the Y-axis direction. , The engaging grooves 3A, 3A, ... With which the Y-axis direction sliding portion 6A of each slider 6 described later slidably engages are formed on the side surface of each Y-axis guide rail 3 in the extension direction. ing.

Reference numerals 5 and 5'are Y below the moving table 2.
Shown are X-axis guide rails which are provided on the lower side so as to be spaced apart from each other by a predetermined distance in the axial direction. On the side surfaces of the X-axis guide rails 5 and 5 ', like the Y-axis guide rail 3, the sliders 6 are provided. X
Engaging grooves 5A, 5A, ... With which the axial sliding portion 6B engages are formed in the extending direction. The X-axis guide rail 5 '
Has the function of an X-axis rail.

Reference numerals 6, 6, ... Show four sliders provided between the X-axis guide rails 5 and 5'and the Y-axis guide rails 3, respectively. A Y-axis direction sliding portion 6A formed in a substantially U shape so as to be engaged with each engagement groove 3A of the guide rail 3 and guided and slid in the Y-axis direction, and an X-axis guide rail on the upper side. 5, and an X-axis direction sliding portion 6B formed in a substantially U-shape so as to be guided and slid in the X-axis direction engaged with the respective engaging grooves 5A of 5, and the X-axis direction sliding portion 6B. The slider 6 is composed of auxiliary plates 6C and 6D (see FIG. 4) that vertically connect the sliding portion 6A in the Y-axis direction, and the sliding portion 6B in the X-axis direction and the sliding portion 6A in the Y-axis direction of the slider 6.
The axes of and are formed so as to be offset by 90 degrees in the vertical position. Further, among the sliders 6, the pair of sliders 6 located on the lower side in FIG.
D is formed to be long in the Y-axis direction, and a fixing plate 16 described later is fixed to the end portion in the Y-axis direction.

Reference numeral 7 denotes an X-axis hydraulic cylinder as an X-axis actuator which is located below each Y-axis guide rail 3 and which is fixed to the fixed base 1 by penetrating each of the spacers 4 and 4. The axial hydraulic cylinder 7 is provided slidably in the cylinder 7A and the cylinder 7A, and a piston 7B (defines the inside of the cylinder 7A into two oil chambers (extension side oil chamber A and reduction side oil chamber B)). 6)) and a rod 7C fixed to the piston 7B and extending and contractible from the cylinder 7A. Further, a rod contracting feed / discharge port 7D and a rod extension feed / discharge port 7E are formed on the tip end side and the base end side of the cylinder 7A.
D and 7E are connected to a control valve device 21 described later via hydraulic pipes 8 and 8. In the present embodiment, each pressure oil pipe 8 does not move, so that it can be a rigid pipe made of metal.

9 is located above the X-axis hydraulic cylinder 7,
Each of the auxiliary parts 10 so as to be orthogonal to the X-axis hydraulic cylinder 7,
10 shows a Y-axis hydraulic cylinder as a Y-axis actuator fixed to the fixed base 1 via a holding unit 10 and a holding unit 11. The Y-axis hydraulic cylinder 9 is a cylinder 9A, which is substantially the same as the X-axis hydraulic cylinder 7. A piston 9B (see FIG. 6) slidably provided in the cylinder 9A and defining the interior of the cylinder 9A into two oil chambers (an oil chamber A on the extension side and an oil chamber B on the contraction side), and the piston 9B. And a rod 9C which is fixed to the cylinder 9A and extends and contracts from the cylinder 9A. A rod contracting feed / discharge port 9D and a rod extension feed / discharge port 9E are formed on the tip side and the base end side of the cylinder 9A. The respective supply / discharge ports 9D and 9E have control valve devices 2 to be described later.
1 and hydraulic lines 8 and 8 are connected.

Reference numeral 12 denotes a Y-axis guide member which is located at the tip end side of the rod 7C of the X-axis hydraulic cylinder 7 and fixed by a nut 13. The Y-axis guide member 12 is a support portion 12A.
, And a sliding portion 12B fixed to the support portion 12A by bolts 14, 14, ... And engaging with a Y-axis rail 15 described later by being formed in a substantially U-shape. Then, the Y-axis guide member 12 moves in the X-axis direction by the expansion and contraction of the rod 7C of the X-axis hydraulic cylinder 7, and accordingly, the Y-axis rail 15 moves in the X-axis direction. The moving table 2 is moved in the X-axis direction.

Reference numeral 15 denotes a Y-axis rail projectingly provided on the lower end of the moving table 2 so as to extend in the Y-axis direction.
Engagement grooves 15A, 1 are formed on both sides of the shaft rail 15 in the extending direction.
5A is formed, and the sliding portion 12 of the Y-axis guide member 12 is formed.
B is engaged. Then, when the movable table 2 moves in the Y-axis direction, the sliding portion 1 of the Y-axis guide member 12 is moved.
It is guided while sliding in 2B and moves in the Y-axis direction.

Reference numeral 16 is a rod 9 of the Y-axis hydraulic cylinder 9.
A fixing plate provided at the tip side of C is shown. The fixing plate 16 is fixed to the rod 9C via a cap bolt 17, and the auxiliary plates 6D, 6D formed on the slider 6 are fixed to the bolt 18 , 18, ..., The fixing plate 16 forms an X-axis guide member together with the X-axis direction sliding portion 6B and the auxiliary plate 6D. When the rod 9C of the Y-axis hydraulic cylinder 9 extends and contracts, the Y-axis direction sliding portion 6A of each slider 6 slides on each Y-axis guide rail 3 and moves in the Y-axis direction. Then, the X-axis guide rails 5'engaged with the X-axis direction sliding portions 6B are moved in the Y-axis direction, whereby the moving table 2 is moved in the Y-axis direction.

Reference numerals 19 and 20 denote an optical X-axis position detecting sensor and a Y-axis position detecting sensor, respectively, as moving position detecting means of the moving table 2, and the X-axis position detecting sensor 19 is provided.
Is a light emitting portion 19A having a light emitting element provided on the fixed plate 16 and a light receiving portion having a plurality of light receiving elements provided to extend in the X-axis direction of the movable table 2 facing the light emitting portion 19A. 19B, the light receiving section 19B is moved in accordance with the movement of the moving table 2 in the X-axis direction, the light from the light emitting section 19A is received by the light receiving element of the light receiving section 19B, and the position of this light receiving element is detected. By doing so, position detection in the X-axis direction is performed. In addition, the Y-axis position detection sensor 2
0 is configured similarly to the X-axis position detection sensor 19, and has a light emitting portion 20A provided on the fixed base 1, a fixing member 20B for fixing the light emitting portion 20A to the fixed base 1, and a light emitting portion 20A facing the light emitting portion 20A. Light receiving portion 20C fixed to the end surface of each slider 6
The light receiving unit 20C moves along with the movement of the moving table 2 in the Y axis direction, and the light from the light emitting unit 20A is received by the light receiving unit 20C to detect the position in the Y axis direction.

Next, the construction of the hydraulic circuit for controlling the hydraulic cylinders 7 and 9 will be described with reference to FIGS. 2 and 6.

Reference numeral 21 denotes a control valve device, and the control valve device 2
1 is provided at the end of the fixed base 1, and in the control valve device 21, an X-axis servo valve 22 as a supply / discharge control means, a Y-axis servo valve 23, and an X-axis bypass as a tank communication means. The control valve device 21 is generally composed of a valve 24, a Y-axis bypass valve 25, etc., and the control valve device 21 is connected to a hydraulic pump 26 and a tank 27 which are externally provided as pressure sources.
In addition, the hydraulic pump 26 is a pressure oil supply pipe 2 that branches in the middle.
8 is connected to the supply ports of the servo valves 22 and 23, and the tank 27 is connected to the discharge ports of the servo valves 22 and 23 via a pressure oil discharge pipe 29 that branches in the middle.

Here, the X-axis servo valve 22 and the Y-axis servo valve 23 are each composed of a 4-port 3-position electromagnetic proportional control valve, which is normally in the neutral position (a) and is energized from the outside. The neutral position (a) is switched to the switching position (b) or (c). Then, each servo valve 22,
23 is switched to the switching position (b) to supply the pressure oil from the hydraulic pump 26 to the reduction side oil chamber B of each hydraulic cylinder 7, 9 via the pressure oil supply pipe 28 and each pressure oil pipe 8. At the same time, the oil liquid in the extension-side oil chamber A is discharged to the tank 27 provided outside through the pressure oil pipes 8 and the pressure oil discharge pipes 29, and the rods 7C and 9C are moved to the cylinders 7A and 9A. To reduce each. On the other hand, by switching to the switching position (C), the pressure oil from the hydraulic pump 26 is supplied to the extension side oil chamber A of each hydraulic cylinder 7, 9 via the pressure oil supply pipe 28 and each pressure oil pipe 8. At the same time, the oil liquid in the reduction side oil chamber B is discharged to the tank 27 provided outside through the pressure oil pipes 8 and the pressure oil discharge pipe 29, and the rods 7C and 9C are connected to the cylinders 7A and 9C.
Extend with respect to A respectively.

Further, the X-axis bypass valve 24 and the Y-axis bypass valve 25 are constructed as hydraulic pilot type switching valves of 3 ports and 2 positions, and 2 ports of the 3 ports are the oil chambers A of the cylinders 7 and 9, respectively. , B is connected to each pressure oil pipe 8 for supplying pressure oil, and the remaining one port is pressure oil discharge pipe 29.
It is connected to the. Then, the bypass valves 24, 25
Is controlled by the pilot pressure in the pressure oil supply pipe 28.
A, 25A, and when the hydraulic pump 26 is driven, it is switched to the valve closing position by this pressure, and when the hydraulic pump 26 is stopped, it is switched to the valve opening position.
The pistons 7B, 9B of each cylinder 7, 9 are allowed to move freely.

21A and 21B are the servo valves 22 and 2, respectively.
3 shows a terminal of a control signal line for controlling No. 3, and the signal line is connected to the X-axis position detection sensor 19 and the Y-axis position detection sensor 20 together with a signal line (not shown) to control the position of the XY table. Is connected to a control circuit (not shown) that performs

The structure of the XY table in this embodiment is as described above. Next, the operation will be described with reference to FIGS.

First, by driving the hydraulic pump 26, the bypass valves 24 and 25 are switched to the closed positions by the pilot pressure in the pressure oil supply pipe 28, and the moving table 2 moves in the X-axis and Y-axis directions. Is controlled by the extension and contraction operations of the hydraulic cylinders 7 and 9 by the rods 7C and 9C.

Here, when the moving table 2 is moved in the X-axis direction, the X-axis servo valve 22 is set to the switching position (C) in order to extend the rod 7C of the X-axis hydraulic cylinder 7.
The pressure oil is supplied to the extension side oil chamber A and the pressure oil of the reduction side oil chamber B is discharged. As a result, the extended rod 7C moves the Y-axis guide member 12 provided at the tip of the rod 7C in the X-axis direction as indicated by the arrow x, and accordingly the Y-axis guide member 12 is moved.
The Y-axis rail 15 engaged with the shaft guide member 12 is also indicated by the arrow x
Move to. Since the Y-axis rail 15 is fixed to the moving table 2, the moving table 2 moves to the arrow x. Further, each X-axis guide rail 5 moves to the arrow x while sliding on the X-axis direction sliding portion 6B of each slider 6 by the movement of the moving table 2 at the arrow x. Further, the light-receiving unit 10C of the X-axis position detection sensor 19 also moves to the arrow x, and the light-receiving unit 19B detects the relative position to the light-emitting unit 19A provided on the fixed plate 16, so that the X-axis of the moving table 2 is detected. The movement in the direction is detected, and feedback control is performed to determine whether or not the movement position in the X-axis direction is a desired position.

On the other hand, when the movable table 2 is moved in the Y-axis direction, the Y-axis servo valve 23 is set to the switching position (C) so as to extend the rod 9C of the Y-axis hydraulic cylinder 9, and the extension side oil chamber A is set. The pressure oil is supplied to and the pressure oil in the reduction side oil chamber B is discharged. As a result, the extended rod 9C moves the fixed plate 16 provided at the tip of the rod 9C in the Y-axis direction as indicated by the arrow y, and moves the sliders 6 to the Y-axis guide rails 3 via the auxiliary plate 6D. Along with arrow y. Along with this, the X-axis guide rails 5 engaged with the sliders 6 also move in the direction of the arrow y, and the moving table 2
Is moved to the arrow y. At this time, the Y-axis guide member 12
The Y-axis rail 15 engaged with is also slid on the Y-axis guide member 12 and moved to the arrow y. Further, the light receiving portion 20C of the Y-axis detection sensor 20 also moves along with the movement of the slider 6 in the direction of the arrow y, and the light receiving portion 20C detects the relative position to the light emitting portion 20A provided on the fixed base 1 via the fixing member 20B. By doing so, the movement of the moving table 2 in the Y-axis direction is detected, and feedback control is performed regarding whether or not the moving position in the Y-axis direction is at a desired position.

The rod 7 of each hydraulic cylinder 7, 9
The movement of C and 9C in the reduction direction can be performed in the same manner as the movement in the extension direction described above. Further, the movements in the X-axis and Y-axis directions can be performed simultaneously.

Thus, in this embodiment, the fixed base 1 is provided with the X-axis hydraulic cylinder 7 and the Y-axis hydraulic cylinder 9, and the X-axis hydraulic cylinder 7 and the Y-axis hydraulic cylinder 9 are provided.
A Y-axis guide member 12 for guiding the Y-axis rail 15 fixed to the moving table 2 is provided at the tip of the rod 7C of the axial hydraulic cylinder 7. On the other hand, the tip of the rod 9C of the Y-axis hydraulic cylinder 9 is connected to an auxiliary plate 6D of the slider 6 on the lower side in FIG. 2 via a fixing plate 16, and each slider 6 is provided on the fixing base 1. The X-axis guide rails 5 are moved along the Y-axis guide rails 3 along the Y-axis, fixed to the moving table 2 and engaged with the sliders 6.
Is configured to move in the Y-axis direction, each of the rods 7C and 7C can be supplied by the pressure oil supply / discharge of the expansion-side oil chamber A and the contraction-side oil chamber B of the pressure oil of the X-axis hydraulic cylinder 7 and the Y-axis hydraulic cylinder 9.
The moving table 2 can be easily moved by reducing and expanding 9C.

Therefore, unlike the prior art, it is not necessary to vertically stack two tables (X-axis table and Y-axis table) each having a moving mechanism, and the fixed table 1 is fixed in the X-axis direction, Y-axis. Since the actuators in the axial direction can be provided, the load applied to each actuator is only the load of the moving table 2 and the work, and the capacity of the hydraulic pump 26 serving as a pressure source can be reduced, so that the compact and inexpensive XY table is provided. Can be manufactured.

Further, since the X-axis hydraulic cylinder 7 and the Y-axis hydraulic cylinder 9 which are the moving mechanism provided on the fixed base 1 can be accommodated within the area occupied by the fixed base 1, X-
The Y-table can be installed even in a narrow place.

Furthermore, by providing the bypass valves 24 and 25 in the middle of the hydraulic circuits that control the hydraulic cylinders 7 and 9, when the drive of the hydraulic pump 26 is stopped, the movable table 2 is manually moved. At this time, the position of each of the position detection sensors 19 and 20 is stored in the control circuit, so that the movable table 2 can be positioned by manual operation, and the moving stroke can be directly taught. Further, by performing feedback control with the position detection sensors 19 and 20, various effects such as accurate positioning of the moving table 2 can be achieved.

In the above embodiment, the hydraulic cylinders 7 and 9 are used as the X-axis actuator and the Y-axis actuator, but an electric actuator or the like for expanding and contracting the rod via the ball screw by the motor is used. May be.

Further, in the above embodiment, two X-axis guide rails 5 and 5 are provided in order to support a large load applied to the moving table 2 and to increase the moving accuracy of the moving table 2 in the X-axis and Y-axis directions. ′ And the Y-axis guide rail 3 are provided, the X-axis guide rail 5 ′ having a function as an X-axis rail may be provided, and when the size and weight are reduced, the X-axis guide rail 5 and the Y-axis guide rail 3 are provided. The guide rail 3 is not particularly necessary,
It can be abolished.

Further, in the above embodiment, the slider 6 is set to 4
Although it has been described as one provided individually, the present invention is not limited thereto,
It is also possible to provide a pair of sliders 6 on the Y-axis guide rails 3, and each slider 6 may be a slider in which the X-axis guide rails 5 have two sliding portions in the X-axis direction.

Furthermore, the X-axis guide rail 5 and the Y-axis rail 15 provided on the moving table 2 are formed as grooves, and the slider 6 and the Y-axis guide member 1 engaging with the grooves are formed.
2 may be configured as an engagement protrusion.

Further, in the above-mentioned embodiment, an example in which the hydraulic cylinders 7 and 9 are vertically stacked is shown. However, the Y-axis hydraulic cylinder 9 is provided on the head side (the right side in FIG. 2) of the X-axis hydraulic cylinder 7. By providing the hydraulic cylinders 7 and 9, it is possible to form an XY table having a low height without overlapping the hydraulic cylinders 7 and 9.

Further, the hydraulic pump 2 serves as a tank communication means.
By-pass valves 24 and 25 using pilot pressure from 6
However, it may be configured as an electromagnetic on-off valve that opens by an electric signal from the outside without using the pilot pressure.

[0048]

As described in detail above, according to the present invention, since the X-axis actuator and the Y-axis actuator are fixed to the base, when the table is moved in the X-axis direction or the Y-axis direction, the X-axis actuator and the Y-axis actuator are fixed. Since it is not necessary to move the axis actuator or the Y-axis actuator, the driving force thereof is relatively small, and since the inertial weight on the table side is small, high-speed and highly accurate control can be performed.

Further, since the actuators do not move relative to the base, the wirings and pipes connected to the actuators can be fixed, the wirings and pipes are not damaged by fatigue, and the durability is improved.

[Brief description of drawings]

FIG. 1 is a front view of an XY table according to an embodiment of the present invention.

FIG. 2 is a plan view from which a moving table as seen from the direction of arrows II-II in FIG. 1 is removed.

3 is a cross-sectional view as seen from the direction of arrows III-III in FIG.

FIG. 4 is a cross-sectional view as seen from the direction of arrows IV-IV in FIG.

FIG. 5 is a perspective view of a moving table according to the present embodiment.

FIG. 6 is a hydraulic circuit diagram of the present embodiment.

[Explanation of symbols]

 1 Fixed base (base) 2 Moving table 3 Y-axis guide rail 5 X-axis guide rail 5'X-axis guide rail (X-axis rail) 6 Slider 6B X-axis direction sliding part (X-axis guide member) 6D Auxiliary plate (X Axis guide member) 7 X-axis hydraulic cylinder (X-axis actuator) 9 Y-axis hydraulic cylinder (Y-axis actuator) 12 Y-axis guide member 15 Y-axis rail 16 Fixed plate (X-axis guide member) 19 X-axis position detection sensor 20 Y Axis position detection sensor 21 Control valve device 22 X-axis servo valve (supply / discharge control means) 23 Y-axis servo valve (supply / discharge control means) 24 X-axis bypass valve (tank communication means) 25 Y-axis bypass valve ( Tank communication means) 26 Hydraulic pump (pressure source) 27 Tank

[Procedure amendment]

[Submission date] September 6, 1991

[Procedure Amendment 1]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

Claims (2)

[Claims] 1. A base, a moving table disposed above the base, an X-axis actuator having a rod fixed to the base and capable of expanding and contracting in the X-axis direction, and the X-axis fixed to the base. A Y-axis actuator having a rod that can extend and contract in the Y-axis direction that is substantially perpendicular to the direction; Provided on either the moving table or the rod of the X-axis actuator, the Y-axis guide member slidably guiding the Y-axis rail, and provided on either the moving table or the rod of the Y-axis actuator. The X-axis rail extending in the X-axis direction and the other one of the moving table and the rod of the Y-axis actuator. And an X-Y table including an X-axis guide member that slidably guides the X-axis rail. 2. The X-axis and Y-axis actuators are
A hydraulic cylinder composed of a piston that defines the inside of the cylinder into two chambers, and a rod that is fixed to the piston and projects from the cylinder, and is connected to each chamber of each hydraulic cylinder. A pressure source that supplies a liquid, a tank that is connected to each chamber of each of the hydraulic cylinders and that stores the liquid discharged from each chamber, each chamber of each of the hydraulic cylinders, the pressure source, and the tank. Between the
Supply / discharge control means for controlling the supply / discharge of liquid to / from each chamber of each hydraulic cylinder, and tank communication means for simultaneously communicating all the chambers of each hydraulic cylinder with the tank by an external operation are provided. The XY table according to claim 1, wherein