JPH0538062Y2 - - Google Patents

Info

Publication number
JPH0538062Y2
JPH0538062Y2 JP40887U JP40887U JPH0538062Y2 JP H0538062 Y2 JPH0538062 Y2 JP H0538062Y2 JP 40887 U JP40887 U JP 40887U JP 40887 U JP40887 U JP 40887U JP H0538062 Y2 JPH0538062 Y2 JP H0538062Y2
Authority
JP
Japan
Prior art keywords
substrate
diffraction grating
solution
semiconductor substrate
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40887U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63110578U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40887U priority Critical patent/JPH0538062Y2/ja
Publication of JPS63110578U publication Critical patent/JPS63110578U/ja
Application granted granted Critical
Publication of JPH0538062Y2 publication Critical patent/JPH0538062Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP40887U 1987-01-06 1987-01-06 Expired - Lifetime JPH0538062Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40887U JPH0538062Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-06 1987-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40887U JPH0538062Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-06 1987-01-06

Publications (2)

Publication Number Publication Date
JPS63110578U JPS63110578U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-15
JPH0538062Y2 true JPH0538062Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-09-27

Family

ID=30777355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40887U Expired - Lifetime JPH0538062Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-06 1987-01-06

Country Status (1)

Country Link
JP (1) JPH0538062Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS63110578U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-07-15

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