JPH0538047Y2 - - Google Patents
Info
- Publication number
- JPH0538047Y2 JPH0538047Y2 JP13638086U JP13638086U JPH0538047Y2 JP H0538047 Y2 JPH0538047 Y2 JP H0538047Y2 JP 13638086 U JP13638086 U JP 13638086U JP 13638086 U JP13638086 U JP 13638086U JP H0538047 Y2 JPH0538047 Y2 JP H0538047Y2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition material
- support body
- shaft
- gear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000463 material Substances 0.000 claims description 52
- 238000007740 vapor deposition Methods 0.000 claims description 39
- 230000006835 compression Effects 0.000 description 8
- 238000007906 compression Methods 0.000 description 8
- 238000001704 evaporation Methods 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 8
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13638086U JPH0538047Y2 (enrdf_load_stackoverflow) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13638086U JPH0538047Y2 (enrdf_load_stackoverflow) | 1986-09-04 | 1986-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6342158U JPS6342158U (enrdf_load_stackoverflow) | 1988-03-19 |
| JPH0538047Y2 true JPH0538047Y2 (enrdf_load_stackoverflow) | 1993-09-27 |
Family
ID=31039436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13638086U Expired - Lifetime JPH0538047Y2 (enrdf_load_stackoverflow) | 1986-09-04 | 1986-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538047Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-09-04 JP JP13638086U patent/JPH0538047Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6342158U (enrdf_load_stackoverflow) | 1988-03-19 |
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