JPH0537490Y2 - - Google Patents

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Publication number
JPH0537490Y2
JPH0537490Y2 JP1987013302U JP1330287U JPH0537490Y2 JP H0537490 Y2 JPH0537490 Y2 JP H0537490Y2 JP 1987013302 U JP1987013302 U JP 1987013302U JP 1330287 U JP1330287 U JP 1330287U JP H0537490 Y2 JPH0537490 Y2 JP H0537490Y2
Authority
JP
Japan
Prior art keywords
arm
receiving member
arms
piezoelectric actuator
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987013302U
Other languages
Japanese (ja)
Other versions
JPS63121464U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987013302U priority Critical patent/JPH0537490Y2/ja
Publication of JPS63121464U publication Critical patent/JPS63121464U/ja
Application granted granted Critical
Publication of JPH0537490Y2 publication Critical patent/JPH0537490Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Description

【考案の詳細な説明】 産業上の利用分野 本考案は、圧電アクチユエータなどの微小変位
可変体の変位を拡大する機構に関する。
[Detailed Description of the Invention] Industrial Application Field The present invention relates to a mechanism for expanding the displacement of a minute displacement variable body such as a piezoelectric actuator.

従来の技術 圧電アクチユエータなどの微小変位を拡大する
変位拡大機構の一例を第2図に示す。図中1は固
定基部、2,2は固定基部1の両側に略平行配置
された一対のアームで、軸方向中間部を除く対向
内壁に溝2a,2aを形成している。3は固定基
部1に固定された両側がアーム2,2の溝2a,
2aに挿入固定されたロツド、4,4は溝2a,
2aに近い一端部側内壁に貫通した透孔2b,2
bに挿通された受け部材、5は受け部材4,4に
狭持された圧電アクチユエータ、6はアーム2,
2の他端側内壁間に固定された座屈バネを示す。
2. Description of the Related Art An example of a displacement amplification mechanism for amplifying minute displacements such as a piezoelectric actuator is shown in FIG. In the figure, reference numeral 1 denotes a fixed base, and 2 and 2 denote a pair of arms arranged substantially parallel to each other on both sides of the fixed base 1, and grooves 2a, 2a are formed in opposing inner walls excluding the axially intermediate portion. 3 is a groove 2a of the arms 2, 2 fixed to the fixed base 1,
Rod inserted and fixed in 2a, 4, 4 are grooves 2a,
Through holes 2b, 2 penetrate through the inner wall on one end side near 2a.
a receiving member inserted through b; 5 a piezoelectric actuator held between the receiving members 4; 6 an arm 2;
2 shows a buckling spring fixed between the inner walls on the other end side of FIG.

この変位拡大機構はアーム2の溝2aにロツド
3を挿入固定し、アーム2,2の両端部が互いに
近接離隔自在に支持して、アーム2,2他端に座
屈バネ6を固定する。そしてアーム2,2の穴2
b,2bに受け部材4,4を挿入し、受け部材
4,4間に圧電アクチユエータ5を狭持して治具
7,7で受け部材4、4を押圧して保持し、受け
部材4,4をアーム2,2及び圧電アクチユエー
タ5に接着固定し、固定が完了したら治具7,7
を外す。
In this displacement magnification mechanism, a rod 3 is inserted and fixed into a groove 2a of an arm 2, and both ends of the arms 2, 2 are supported so as to be able to approach and separate from each other, and a buckling spring 6 is fixed to the other end of the arms 2, 2. And arm 2, hole 2 of 2
Insert the receiving members 4, 4 into the receiving members 4, 2b, sandwich the piezoelectric actuator 5 between the receiving members 4, 4, and press and hold the receiving members 4, 4 with the jigs 7, 7. 4 to the arms 2, 2 and the piezoelectric actuator 5, and when the fixing is completed, the jigs 7, 7
Remove.

この変位拡大機構は圧電アクチユエータ5が伸
縮すると溝2a,2aを支点としてアーム他端が
近接離隔する。従つて支点から両端までの距離の
比分、アーム他端側の変位が拡大され座屈バネ6
は圧電アクチユエータ5の伸縮方向と直交した紙
面垂直方向に変位する。
In this displacement magnifying mechanism, when the piezoelectric actuator 5 expands and contracts, the other ends of the arms move toward and away from each other using the grooves 2a, 2a as fulcrums. Therefore, the displacement of the other end of the arm is increased by the ratio of the distance from the fulcrum to both ends, and the buckling spring 6
is displaced in a direction perpendicular to the plane of the drawing, which is perpendicular to the direction of expansion and contraction of the piezoelectric actuator 5.

考案が解決しようとする問題点 ところで、圧電アクチユエータ5は長さのばら
つきが±5μm程度あるため、受け部材4をアー
ム2と圧電アクチユエータ5の間に介在させるこ
とにより、上記長さのばらつきを吸収するように
しているが、接着固定する際に、治具7に接着材
が付着すると、接着材が硬化後治具7を外す時に
アーム2と受け部材4間の接着も外れることがあ
つた。
Problems to be Solved by the Invention By the way, since the piezoelectric actuator 5 has a length variation of about ±5 μm, by interposing the receiving member 4 between the arm 2 and the piezoelectric actuator 5, the above length variation can be absorbed. However, if the adhesive adheres to the jig 7 during adhesive fixation, the bond between the arm 2 and the receiving member 4 may come off when the jig 7 is removed after the adhesive has hardened.

問題点を解決するための手段 本考案は上記問題点を解決するために提案され
たもので、軸方向中央部を除く側壁を支点として
支持され、かつ対向配置された一対のアームの支
点から近い一端部側の対向面に溝を設け、この溝
間に受け部材を介して微小変位可変体を接続し、
アームの他端部側の対向面間に座屈バネを接続し
たことを特徴とする。
Means for Solving the Problems The present invention was proposed to solve the above-mentioned problems, and is supported using the side wall excluding the central part in the axial direction as a fulcrum, and is close to the fulcrum of a pair of arms arranged opposite to each other. A groove is provided on the opposing surface on the one end side, and a minute displacement variable body is connected between the grooves via a receiving member,
A buckling spring is connected between opposing surfaces on the other end side of the arm.

作 用 組立軸と受け部との間の接着がなく、その結果
アームと受け部の接着ハズレがなくなり、十分強
い接着強度が得られる。
Function: There is no adhesion between the assembly shaft and the receiving part, and as a result, there is no adhesive failure between the arm and the receiving part, and a sufficiently strong adhesive strength can be obtained.

実施例 以下に本考案の実施例を第1図から説明する。
図において第2図と同一符号は同一物又は同一機
能を有する部分を示し説明を省略する。第2図機
構との相異点はアーム2の穴2bの代わりに切込
み溝2cを設け、この切込み溝2cに受け部材4
を嵌合し接着したことのみである。
Embodiment An embodiment of the present invention will be described below with reference to FIG.
In the figure, the same reference numerals as in FIG. 2 indicate the same parts or parts having the same function, and the explanation will be omitted. The difference from the mechanism in FIG. 2 is that a cut groove 2c is provided in place of the hole 2b in the arm 2, and a receiving member 4
The only thing that happened was that they were fitted and glued together.

この組み立ては固定基部1を固定した状態でロ
ツド3の両端にアーム2,2を嵌合し、このアー
ムの切込み溝2c,2cに、圧電アクチユエータ
5を狭持した状態の受け部材4を嵌合し、アーム
3,3の他端に座屈バネ6を仮固定する。そして
アーム2,2を平行に保持して、ロツド3とアー
ム2、受け部材4とアーム、座屈バネ6とアーム
2の各接続部を接着する。
This assembly involves fitting the arms 2, 2 to both ends of the rod 3 with the fixed base 1 fixed, and fitting the receiving member 4, which holds the piezoelectric actuator 5, into the cut grooves 2c, 2c of the arms. Then, the buckling spring 6 is temporarily fixed to the other ends of the arms 3, 3. Then, the arms 2 and 2 are held in parallel, and the connecting portions of the rod 3 and the arm 2, the receiving member 4 and the arm, and the buckling spring 6 and the arm 2 are bonded.

これにより、接着時にアーム2の受け部材4と
反対の面を押圧した状態で受け部材4とアーム2
の嵌合部に接着剤を塗布しても押圧治具とアーム
間に接着剤が付着しにくく、付着しても受け部材
4とアーム2の接着を損なうこともない。
This allows the receiving member 4 and the arm 2 to be bonded together while pressing the opposite side of the arm 2 to the receiving member 4.
Even if an adhesive is applied to the fitting portion of the arm, the adhesive will hardly adhere between the pressing jig and the arm, and even if it adheres, the adhesion between the receiving member 4 and the arm 2 will not be impaired.

また本考案機構は座屈バネ6とロツド3を、同
じ材質(例えばリン青銅)を用いることにより座
屈バネ6とロツド3間の熱膨張は無視できる。ロ
ツド3の熱膨張量と、圧電アクチユエータ5と受
け部材2の各熱膨張量の和が略同一であれば、変
位拡大機構全体としての温度特性は0にすること
ができる。つまりロツド3と圧電アクチユエータ
5の材質を決めると、適当な受け部材2の熱膨張
係数が決定される。
Further, in the mechanism of the present invention, thermal expansion between the buckling spring 6 and the rod 3 can be ignored by using the same material (for example, phosphor bronze) for the buckling spring 6 and the rod 3. If the amount of thermal expansion of the rod 3 and the sum of the amounts of thermal expansion of the piezoelectric actuator 5 and the receiving member 2 are substantially the same, the temperature characteristics of the displacement amplifying mechanism as a whole can be set to zero. That is, once the materials of the rod 3 and the piezoelectric actuator 5 are determined, an appropriate coefficient of thermal expansion of the receiving member 2 is determined.

ここでロツド3の熱膨張係数をα1,圧電アクチ
ユエータ5の熱膨張係数をα2,受け部材4の熱膨
張係数をα3とし、それぞれの長さをl1,l2,l3
すると、その関係は次式のように表わされる。
Here, let the coefficient of thermal expansion of the rod 3 be α 1 , the coefficient of thermal expansion of the piezoelectric actuator 5 be α 2 , the coefficient of thermal expansion of the receiving member 4 be α 3 , and the respective lengths be l 1 , l 2 , l 3 . , the relationship is expressed as follows.

α1×l1=α2×l2+α3×l3 となり、受け部材4の熱膨張係数α3を α3=(α1×l1−α2×l2)/l3 と設定することにより、変位の温度特性を打消す
ことができる。
α 1 ×l 1 = α 2 ×l 2 + α 3 ×l 3 , and the thermal expansion coefficient α 3 of the receiving member 4 is set as α 3 = (α 1 ×l 1 − α 2 ×l 2 )/l 3 . By doing so, the temperature characteristics of displacement can be canceled out.

効 果 以上のように、本考案によれば組み立ての際の
接着不良が防止され、また座屈バネ,ロツド,受
け部材の材質を適切に選択することにより、圧電
アクチユエータ以外の材質のもつ熱膨張を打ち消
し合い変位の温度特性をなくすことができる。
Effects As described above, according to the present invention, poor adhesion during assembly can be prevented, and by appropriately selecting the materials of the buckling spring, rod, and receiving member, thermal expansion of materials other than the piezoelectric actuator can be reduced. can cancel out the temperature characteristics of displacement.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案の実施例を示す平面図、第2図
は変位拡大機構の一例を示す平面図である。 1……固定基部、2……アーム、3……ロツ
ド、4……受け部材、5……微小変位可変体(圧
電アクチユエータ)、6……座屈バネ。
FIG. 1 is a plan view showing an embodiment of the present invention, and FIG. 2 is a plan view showing an example of a displacement magnification mechanism. DESCRIPTION OF SYMBOLS 1...Fixed base, 2...Arm, 3...Rod, 4...Receiving member, 5...Small displacement variable body (piezoelectric actuator), 6...Buckling spring.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 軸方向中央部を除く側壁を支点として支持さ
れ、かつ対向配置された一対のアームの支点から
近い一端部側の対向面に溝を設け、この溝間に受
け部材を介して微小変位可変体を接続し、アーム
の他端部側の対向面間に座屈バネを接続したこと
を特徴とする変位拡大機構。
A groove is provided on the opposing surface of one end of a pair of arms, which are supported using the side wall excluding the central part in the axial direction as a fulcrum, and which is close to the fulcrum of the pair of arms, and a minute displacement variable body is inserted between the grooves via a receiving member. and a buckling spring is connected between opposing surfaces on the other end side of the arm.
JP1987013302U 1987-01-30 1987-01-30 Expired - Lifetime JPH0537490Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987013302U JPH0537490Y2 (en) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987013302U JPH0537490Y2 (en) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121464U JPS63121464U (en) 1988-08-05
JPH0537490Y2 true JPH0537490Y2 (en) 1993-09-22

Family

ID=30802237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987013302U Expired - Lifetime JPH0537490Y2 (en) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0537490Y2 (en)

Also Published As

Publication number Publication date
JPS63121464U (en) 1988-08-05

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