JPH0536838U - Semiconductor manufacturing boat - Google Patents

Abstract

(57) [Summary] [Structure] The quartz boat for semiconductor production of the present invention is characterized in that quartz dummies 1 and 1 integrated with the quartz boat are formed at the ends of the product wafer installation grooves 2 and rows. It is what [Effects] According to the above configuration, heat and plasma are added to the product wafers installed at the ends of the product wafer installation groove arrays in the same manner as the wafers installed in the other groove arrays, and the wafer-to-wafer uniformity is improved. can do. Also,
No particles are generated even if vibrations and the like during the loading and unloading of the quartz boat continue many times, and the number of man-hours for exchanging dummy wafers can be saved.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a semiconductor manufacturing jig, and more particularly to the structure of a boat used for a plasma asher or the like.

[0002]

[Prior Art]

 Conventionally, this type of boat is made of quartz and has a dummy wafer installation groove 3 and a product wafer installation groove 2 as shown in the perspective view of FIG. Since the heat and plasma are applied to the entire wafer surface of the wafer installed at the edge of the groove for installing the product wafer, the acrylate rate becomes higher than that of wafers installed in other groove rows when ashing resist, etc. As a result, the dummy wafer (not shown) was installed in the dummy wafer installation groove 3 and used.

In addition, in a long boat with a large number of wafers loaded, a reinforcing member (not shown) between support rods is integrally connected in the middle of the length direction in order to increase mechanical strength. Since wafers cannot be loaded on the reinforcing member, dummy wafers were installed and used before and after that.

Further, the material of the boat is not limited to quartz, but may be SiC, quartz-coated SiC, or the like.

[0005]

[Problems to be solved by the device]

 By the way, when the above-mentioned conventional quartz boat is used with the dummy wafer installed in the dummy wafer installation groove, if the vibration during the loading and unloading of the quartz boat continues many times, the dummy wafer and the quartz will rub against particles. It causes the occurrence. Therefore, it is necessary to regularly replace the dummy wafer, which has a drawback that man-hours and material cost of the dummy wafer are increased.

[0006]

[Means for Solving the Problems]

 In order to solve the above-mentioned problems, the semiconductor manufacturing boat of the present invention is characterized in that a dummy integrated with the boat is formed at the end of the row of grooves for installing product wafers.

[0007]

[Action]

 According to the above configuration, heat and plasma are added to the product wafers installed at the end of the product wafer installation groove array in the same manner as the wafers installed in other groove arrays, improving the wafer-to-wafer uniformity. be able to.

[0008] Further, particles are not generated even when vibrations and the like when the boat is moved in and out continue many times, and the man-hours for exchanging dummy wafers can be omitted.

[0009]

【Example】

 The present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a quartz boat for a 6-inch wafer according to an embodiment of the present invention. In the figure, 1 and 1 are integrated quartz dummies, and 2 and 2 are grooves for installing product wafers. The height (h) of the integrated quartz dummies 1, 1 is the same as the height when the 6-inch product wafers are arranged in the product wafer installation grooves 2, 2 ... Rows, and the thickness (t) is about 8 to 15 mm. Is. Further, the distance between the product wafer mounting grooves 2, 2 is about 5 mm and the grooves are arranged at equal intervals, and the distance between the integrated quartz dummy and the product wafer mounting groove is set to about 5 to 10 mm.

According to the above configuration, even in the product wafers installed in the end of the product wafer installation grooves 2, 2 ... Rows, heat and plasma are applied in the same manner as the wafers installed in other groove rows. Therefore, the uniformity between wafers can be improved.

[0012] Furthermore, even if vibrations and the like at the time of loading and unloading the quartz boat are repeated many times, particles are not generated, and the man-hours for exchanging dummy wafers can be omitted.

In a long boat in which a reinforcing member is integrally connected in the middle of the length direction, the reinforcing member may be configured to also serve as a dummy.

[0014]

[Effect of the device]

 As explained above, this invention makes it possible for a product wafer installed at the end of a groove array for product wafer installation by an integrated dummy to add heat and plasma to the same level as wafers installed in other groove arrays. There is an effect that it is possible to improve the uniformity.

Further, particles are not generated even when vibrations and the like when the boat is put in and out continue many times, and there is an effect that man-hours such as replacement of dummy wafers can be omitted.

[Brief description of drawings]

FIG. 1 is a perspective view of a quartz boat according to an embodiment of the present invention.

FIG. 2 is a perspective view of a conventional quartz boat.

[Explanation of symbols]

 1 integrated quartz dummy 2 groove for product wafer installation

Claims (2)

[Scope of utility model registration request] 1. A boat for semiconductor production, wherein a dummy integrated with the boat is formed at an end of a row of grooves for installing product wafers. 2. The boat for semiconductor manufacturing according to claim 1, wherein the dummy is formed at both ends in the length direction of the boat and in the middle of the boat, and the dummy in the middle also serves as a reinforcing member of the boat.