JPH0536354U - Product defect inspection device - Google Patents

Product defect inspection device

Info

Publication number
JPH0536354U
JPH0536354U JP8653591U JP8653591U JPH0536354U JP H0536354 U JPH0536354 U JP H0536354U JP 8653591 U JP8653591 U JP 8653591U JP 8653591 U JP8653591 U JP 8653591U JP H0536354 U JPH0536354 U JP H0536354U
Authority
JP
Japan
Prior art keywords
light
optical waveguide
image
inspection
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8653591U
Other languages
Japanese (ja)
Inventor
佐藤稔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nok Corp
Original Assignee
Nok Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nok Corp filed Critical Nok Corp
Priority to JP8653591U priority Critical patent/JPH0536354U/en
Publication of JPH0536354U publication Critical patent/JPH0536354U/en
Pending legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

(57)【要約】 【目的】 検査精度を向上させることを目的とする。 【構成】 光が透過可能な層を有する被検査物2に光を
照射して、透過する光を画像部3で画像として取り込む
とともに、画像信号として出力し、該画像信号を処理し
て被検査物2の不良を検査する製品不良検査装置であっ
て、光源1にそれが照射する光を被検査物2に導く照射
光導波路4を設け、画像部3に、被検査物2からの透過
光を導く透過光導波路5を設け、光源1から出た光を前
記照射光導波路4を介して被検査物2に照射し、被検査
物2からの透過光を前記透過光導波路5を介して画像部
3に導く。
(57) [Summary] [Purpose] The purpose is to improve inspection accuracy. A structure is provided in which an object to be inspected 2 having a layer through which light can be transmitted is irradiated with light, the transmitted light is captured as an image in an image section 3 and is output as an image signal, and the image signal is processed to be inspected. A product defect inspection device for inspecting a defect of an object 2, wherein a light source 1 is provided with an irradiation optical waveguide 4 for guiding the light emitted by the light source 1 to the object to be inspected 2, and an image portion 3 is provided with transmitted light from the object to be inspected 2. Is provided, the light emitted from the light source 1 is irradiated onto the inspection object 2 through the irradiation optical waveguide 4, and the transmission light from the inspection object 2 is imaged through the transmission optical waveguide 5. Lead to Part 3.

Description

【考案の詳細な説明】[Detailed description of the device]

【0001】[0001]

【産業上の利用分野】[Industrial applications]

この考案は製品不良検査装置に関し、特に、不良判別を正確に行うことができ る製品不良検査装置に関するものである。 The present invention relates to a product defect inspection apparatus, and more particularly to a product defect inspection apparatus capable of accurately performing defect determination.

【0002】[0002]

【従来技術および解決しようとする課題】[Prior Art and Problems to be Solved]

従来、被検査物に不良が存在しているか否かを検査する製品不良検査装置とし ては、図4に示すような反射光を利用したものが知られている。 2. Description of the Related Art Conventionally, as a product defect inspection apparatus for inspecting whether or not there is a defect in an inspection object, one using reflected light as shown in FIG. 4 is known.

【0003】 この製品不良検査装置は、被検査物52の表面に光を照射する照明用の光源5 1と、前記被検査物52の表面で反射した光を受け取る画像部53と、この画像 部53に接続するパーソナルコンピュータ等の不良判定装置(図示しない)とか らなっている。This product defect inspection apparatus includes a light source 51 for illumination that irradiates the surface of the inspection object 52 with light, an image section 53 that receives the light reflected by the surface of the inspection object 52, and this image section. It comprises a defect determination device (not shown) such as a personal computer connected to 53.

【0004】 そして、上記のように構成された製品不良検査装置においては、被検査物52 に照明用の光源51より一様な光が照射され、被検査物52の表面で反射した光 を画像部53が受け取って、この画像部53の出力によって被検査物52の表面 状態を検出して被検査物52である製品の不良を検査している。In the product defect inspection device configured as described above, the object 52 to be inspected is irradiated with uniform light from the light source 51 for illumination, and the light reflected on the surface of the object 52 to be inspected is imaged. The unit 53 receives and detects the surface state of the inspected object 52 by the output of the image section 53 to inspect the product as the inspected object 52 for defects.

【0005】 また、この被検査物52が光が透過可能な層を有する被検査物、例えば図5に 示すような光が透過可能な樹脂層52bがゴム材52aと積層した被検査物52 である場合においては、光が透過可能な樹脂層52bとゴム材52aとの境界を 検査面59として画像部53の画像信号出力によって被検査物52である製品の 不良検査を行うこととなる。In addition, the inspection object 52 is an inspection object having a layer through which light can pass, for example, an inspection object 52 in which a resin layer 52b through which light can pass is laminated with a rubber material 52a as shown in FIG. In some cases, the boundary between the resin layer 52b that allows light to pass through and the rubber material 52a is used as the inspection surface 59, and the defect detection of the product as the inspection object 52 is performed by the image signal output of the image section 53.

【0006】 しかしながら、従来の製品不良検査装置においては、画像部53の画像信号の 出力は材質の違いを表すものではなく、表面の凹凸を表す出力となっているため 、表面の凹凸が同じ場合は画像部53の画像信号の出力に変化がなく、検査面5 9における光が透過可能な樹脂層52bとゴム材52aとの境界を判別すること ができず、被検査物52である製品の不良を検出することができないという問題 点を有していた。However, in the conventional product defect inspection apparatus, the output of the image signal of the image section 53 does not indicate the difference in the material but the output indicating the unevenness of the surface. Therefore, when the unevenness of the surface is the same. Does not change the output of the image signal of the image part 53, and cannot distinguish the boundary between the resin layer 52b and the rubber material 52a which can transmit light on the inspection surface 59. It had a problem that it could not detect defects.

【0007】 この考案は、上記のような従来のもののもつ問題点を解決したものであって、 検査面の凹凸に関係なく、光が透過可能な層を有する被検査物の不良を検出する ことができる製品不良検査装置を提供することを目的とするものである。This invention solves the above-mentioned problems of the conventional ones, and detects a defect of an object to be inspected having a layer through which light can be transmitted, regardless of the unevenness of the inspection surface. It is an object of the present invention to provide a product defect inspection device capable of performing the above.

【0008】[0008]

【課題を解決するための手段】[Means for Solving the Problems]

上記の目的を達成するために、この考案は光が透過可能な層を有する被検査物 に光を照射して、透過する光を画像部で画像として取り込むとともに、画像信号 として出力し、この画像信号を処理して被検査物の不良を検査する製品不良検査 装置であって、光源に、それが照射する光を被検査物に導く照射光導波路を設け 、画像部に、被検査物からの透過光を導く透過光導波路を設け、光源から出た光 を前記照射光導波路を介して被検査物に照射し、被検査物からの透過光を前記透 過光導波路を介して画像部に導くという手段を採用したものである。 In order to achieve the above object, the present invention irradiates an object to be inspected having a layer through which light can be transmitted, captures the transmitted light as an image in an image section, and outputs it as an image signal. A product defect inspection device that processes signals to inspect for defects in an inspected object, wherein a light source is provided with an irradiation optical waveguide that guides the light emitted by the light source to the inspected object, and the image part A transmission light guide that guides the transmitted light is provided, and the light emitted from the light source is applied to the inspection object through the irradiation light waveguide, and the transmission light from the inspection object is guided to the image portion through the transmission light waveguide. This means is adopted.

【0009】[0009]

【作用】[Action]

この考案は上記の手段を採用したことにより、光源より照射光導波路を介して 被検査物の検査面に光を照射すると、この光は透過性を有しない層では吸収また は反射され、透過性を有する層では透過する。 そして、透過性を有する層を透過してきた光は、前記照射光導波路と所定の間 隔おいて位置する透過光導波路を介して画像部で受け取られ、画像部で画像信号 に変換される。 この画像信号を逐次に基準信号と比較することにより被検査物の不良を検査す ることができる。 This device adopts the above-mentioned means, and when light is irradiated from the light source to the inspection surface of the inspection object through the irradiation optical waveguide, this light is absorbed or reflected by the non-transmissive layer and transmitted. Is transmitted in the layer having. Then, the light transmitted through the transparent layer is received by the image section through the transmission optical waveguide located at a predetermined distance from the irradiation optical waveguide, and converted into an image signal by the image section. By successively comparing this image signal with the reference signal, it is possible to inspect the object to be inspected for defects.

【0010】[0010]

【実施例】【Example】

以下、図面に示すこの考案の実施例について説明する。 図1〜図3にはこの考案による製品不良検査装置の実施例が示されていて、図 1には製品不良検査装置の全体図が示されている。 An embodiment of the present invention shown in the drawings will be described below. 1 to 3 show an embodiment of a product defect inspection apparatus according to the present invention, and FIG. 1 shows an overall view of the product defect inspection apparatus.

【0011】 この製品不良検査装置は、光源1と、この光源1からの光を平行光線として被 検査物2に照射する照射光導波路4と、光を画像として検出するとともに、画像 信号として出力する画像部3と、被検査物2を透過してきた光を前記画像部3に 導く透過光導波路5とを具えている。This product defect inspection apparatus detects a light source 1, an irradiation optical waveguide 4 that irradiates the inspection object 2 with light from the light source 1 as parallel rays, and detects the light as an image and outputs it as an image signal. The image section 3 and the transmission optical waveguide 5 for guiding the light transmitted through the inspection object 2 to the image section 3 are provided.

【0012】 そして、前記照射光導波路4は、光源1に連結された照射用光ファイバ4aと 、この照射用光ファイバ4aは途中で二股に分かれ、それぞれの先端部に設けら れたライトガイド4b、4bとからなっている。The irradiation optical waveguide 4 includes an irradiation optical fiber 4a connected to the light source 1, and the irradiation optical fiber 4a is bifurcated on the way, and a light guide 4b is provided at each tip. And 4b.

【0013】 また、前記透過光導波路5は、先端部分が小径となった筒状をなすとともに、 散乱光の遮光板の役目を果たしている。Further, the transmission optical waveguide 5 has a tubular shape with a small diameter at its tip portion and serves as a light shielding plate for scattered light.

【0014】 さらに、前記画像部3は、パーソナルコンピュータ等からなる不良判定装置7 と周辺機器6を介して接続されている。 この不良判定装置7では前記画像部3から送られてきた画像信号と不良判定装 置7に保存されている基準信号との対比によって不良判定を行うようになってい る。Further, the image section 3 is connected to a defect determination device 7 including a personal computer or the like via a peripheral device 6. The defect determination device 7 is configured to perform defect determination by comparing the image signal sent from the image section 3 with the reference signal stored in the defect determination device 7.

【0015】 そして、この実施例における被検査物2は、アキュムレータに用いられるブラ ダであって、このブラダは、中央部が盛り上がった椀状で、ゴム材2aとゴム材 2aとの間に光が透過可能な層である樹脂層2bが形成された積層構造となって いる。 また、この被検査物2は、回転治具8のテーブル8a上に設置され、回転可能 となっている。The object 2 to be inspected in this embodiment is a bladder used for an accumulator, and the bladder has a bowl shape with a raised central portion, and is provided between the rubber material 2a and the rubber material 2a. Has a laminated structure in which a resin layer 2b, which is a permeable layer, is formed. The inspection object 2 is installed on the table 8a of the rotating jig 8 and is rotatable.

【0016】 そして、図2に示すように、透過光導波路5の先端部を被検査物2であるブラ ダの周縁部の検査面9の樹脂層2bに対向させる。 また、照射光導波路4の先端部に設けられたライトガイド4bを前記透過光導 波路5の先端部を挟んでそれぞれ10mm程離してブラダの検査面9の樹脂層2 bに対向させる。Then, as shown in FIG. 2, the tip of the transmission optical waveguide 5 is made to face the resin layer 2b on the inspection surface 9 at the peripheral portion of the bladder which is the inspection object 2. The light guide 4b provided at the tip of the irradiation optical waveguide 4 is opposed to the resin layer 2b of the inspection surface 9 of the bladder with a distance of 10 mm between the light guide 4b and the tip of the transmission optical waveguide 5.

【0017】 つぎに、上記のように構成された製品不良検査装置の作用について以下に説明 する。 まず、光源1を作動させて照射用光ファイバ4aを介してライトガイド4bか ら被検査物2の検査面9に光を照射する。Next, the operation of the product defect inspection device configured as described above will be described below. First, the light source 1 is operated to irradiate the inspection surface 9 of the inspection object 2 with light from the light guide 4b through the irradiation optical fiber 4a.

【0018】 この時、図3に示すように、破線の楕円形で示した部分に照射した光は、鎖線 のように樹脂層2bを透過し、ゴム材2aに照射した光は、ゴム材2aが光の透 過性を有さないため、ゴム材2aに吸収されるか又はゴム材2aの表面で反射す る。 そして、樹脂層2bを透過してきた光は、図3の破線の円形で示した部分に位 置する透過光導波路5を介して画像部3で受け取られ、画像部3で画像信号に変 換されて周辺機器6を介して不良判定装置7に送られる。At this time, as shown in FIG. 3, the light radiated to the part indicated by the broken line ellipse passes through the resin layer 2b like the chain line, and the light radiated to the rubber material 2a is changed to the rubber material 2a. Is not transparent to light, it is absorbed by the rubber material 2a or is reflected by the surface of the rubber material 2a. Then, the light transmitted through the resin layer 2b is received by the image section 3 through the transmission optical waveguide 5 located in the portion indicated by the broken line circle in FIG. 3, and converted into an image signal by the image section 3. And is sent to the defect determination device 7 via the peripheral device 6.

【0019】 この不良判定装置7では前記画像信号と基準信号との対比によって不良判定を 行ない、製品の不良を検査する。The defect determination device 7 determines a defect by comparing the image signal with the reference signal, and inspects the product for defects.

【0020】 また、前記回転治具8を回転して被検査物2であるブラダを回転させ、検査面 9の前記樹脂層2bに沿って照射光導波路4のライトガイド4bと透過光導波路 5の先端部とを移動させる。 そして、前記画像信号を逐次に基準信号と比較することにより被検査物2であ るブラダの不良を効率よく検査することができる。Further, the rotating jig 8 is rotated to rotate the bladder, which is the inspection object 2, and the light guide 4 b of the irradiation optical waveguide 4 and the transmission optical waveguide 5 are arranged along the resin layer 2 b of the inspection surface 9. Move the tip and. Then, by sequentially comparing the image signal with the reference signal, it is possible to efficiently inspect the defect of the bladder as the inspection object 2.

【0021】 また、樹脂層2bを透過してくる光を検出して製品の不良を検査する構成とし 、また、照射光導波路4と透過光導波路5とを所定の距離だけ離して検査面9に 配置したことにより、光の透過率と吸収率との差が画像信号の出力の差として表 れ、ゴム材2aと樹脂層2bとのコントラストが明確となり、材質の差を画像と して取り込んで判別することができるようになったため、製品の不良判定の精度 が向上する。 すなわち、樹脂層2bは画像信号の出力が大きくなり、ゴム材2aの部分は画 像信号の出力が小さくなる。Further, the configuration is such that the light transmitted through the resin layer 2b is detected to inspect the product for defects, and the irradiation optical waveguide 4 and the transmission optical waveguide 5 are separated from each other by a predetermined distance so that the inspection surface 9 is covered. By arranging them, the difference between the light transmittance and the absorptance appears as the difference in the output of the image signal, the contrast between the rubber material 2a and the resin layer 2b becomes clear, and the difference between the materials is captured as an image. Since it is possible to make a distinction, the accuracy of the product defect judgment is improved. That is, the resin layer 2b outputs a large image signal, and the rubber material 2a outputs a small image signal.

【0022】 さらに、被検査物2と光源1との間に照射光導波路4を設けたことにより、光 源1からの光漏れがなくなり、検査面9の目的箇所に正確に光を照射することが できるとともに、従来と同様の光源を用いてもその強度は従来と比較して強くな り、また、画像部3と被検査物2との間に透過光導波路5を設けたことにより、 透過してくる光を直接画像部3に伝達できるので、乱反射や散乱光による影響が なくなり、検査面9の凹凸に関係なく正確に製品の不良を検査することができる 。Further, since the irradiation optical waveguide 4 is provided between the inspection object 2 and the light source 1, the light leakage from the light source 1 is eliminated, and the light is accurately applied to the target portion of the inspection surface 9. In addition, even if the same light source as the conventional one is used, its intensity becomes stronger than the conventional one. In addition, since the transmission optical waveguide 5 is provided between the image part 3 and the inspection object 2, Since the incoming light can be directly transmitted to the image section 3, the influence of irregular reflection or scattered light is eliminated, and the defect of the product can be accurately inspected regardless of the unevenness of the inspection surface 9.

【0023】 なお、この実施例においては、照射光導波路4を二股とし、透過光導波路5を 挟んで検査面9に対向して位置させているが、これに限定されることなく、照射 光導波路4を一本として照射光導波路4の先端部と透過光導波路5の先端部とを 所定の間隔をおいて検査面9に対向させて位置させることもできる。 また、この実施例においては、光を透過可能な層を樹脂層2aとしたが、他に 透過性を有するゴム材等その材質には限定されない。 さらに、被検査物としては、上記実施例に示したブラダ以外の種々な物に適用 できるのは勿論である。In this embodiment, the irradiation optical waveguide 4 is bifurcated and is positioned so as to face the inspection surface 9 with the transmission optical waveguide 5 sandwiched therebetween. However, the present invention is not limited to this. It is also possible to position the irradiation optical waveguide 4 and the transmission optical waveguide 5 so as to be opposed to the inspection surface 9 with a predetermined interval, with the number 4 being one. In addition, in this embodiment, the resin layer 2a is used as the light permeable layer, but the material is not limited to the transparent material such as a rubber material. Further, it is needless to say that the object to be inspected can be applied to various objects other than the bladder shown in the above embodiment.

【0024】[0024]

【考案の効果】[Effect of the device]

この考案は前記のように構成したことにより、透過性のある層を透過してくる 光を検出するようにしたこと、また、照射光導波路と透過光導波路とを所定の間 隔だけ離して検査面に配置したことにより、光の透過率と吸収率との差が画像信 号の出力の差として表れ、透過性のある層とない層とのコントラストが明瞭とな り、材質の差を判別することができるようになったため、製品の不良判定の精度 が向上した。 また、被検査物と光源との間に照射光導波路を設けたことにより、光源からの 光漏れがなくなり、検査面の目的箇所に正確に光を照射することができるととも に、従来と同様の光源を用いてもその強度は従来と比較して強くなり、また、画 像部と被検査物との間に透過光導波路を設けたことにより、透過してくる光を直 接画像部に伝達できるので乱反射や散乱光による影響がなくなり、表面の凹凸に 影響されなくなったため、製品の不良を正確に判定することができるという優れ た効果を有するものである。 This invention is configured as described above to detect the light transmitted through the transparent layer, and the inspection is performed by separating the irradiation optical waveguide and the transmission optical waveguide by a predetermined distance. By arranging it on the surface, the difference between the light transmittance and the absorptance appears as the difference in the output of the image signal, the contrast between the transparent layer and the non-transparent layer becomes clear, and the difference in the material is discriminated. Since it has become possible to improve the accuracy of product defect judgment. In addition, by providing an irradiation optical waveguide between the object to be inspected and the light source, light leakage from the light source is eliminated, and it is possible to accurately irradiate the target portion of the inspection surface with light. The intensity of the light source is stronger than that of the conventional light source, and the transmission light guide is provided between the image part and the object to be inspected, so that the transmitted light is transmitted directly to the image part. Since it can be transmitted, it is not affected by diffused reflection or scattered light, and is not affected by surface irregularities, which has the excellent effect that product defects can be accurately judged.

【図面の簡単な説明】[Brief description of drawings]

【図1】この考案による製品不良検査装置の実施例を示
す全体図である。
FIG. 1 is an overall view showing an embodiment of a product defect inspection device according to the present invention.

【図2】被検査物の検査面に照射光導波路と透過光導波
路とを配設した状態を示す概略図である。
FIG. 2 is a schematic view showing a state in which an irradiation optical waveguide and a transmission optical waveguide are arranged on an inspection surface of an inspection object.

【図3】被検査物の検査面を示した拡大概略図である。FIG. 3 is an enlarged schematic view showing an inspection surface of an inspection object.

【図4】従来の製品不良検査装置を示す全体図である。FIG. 4 is an overall view showing a conventional product defect inspection apparatus.

【図5】被検査物の検査面を示した拡大概略断面図であ
る。
FIG. 5 is an enlarged schematic sectional view showing an inspection surface of an inspection object.

【符号の説明】[Explanation of symbols]

1、51……光源 2、52……被検査物 2a、52a……ゴム材 2b、52b……樹脂層 3、53……画像部 4……照射光導波路 4a……照射用光ファイバ 4b……ライトガイド 5……透過光導波路 6……周辺機器 7……不良判定装置 8……回転治具 8a……テーブル 9、59……検査面 1, 51 ... Light source 2, 52 ... Inspected object 2a, 52a ... Rubber material 2b, 52b ... Resin layer 3, 53 ... Image part 4 ... Irradiation optical waveguide 4a ... Irradiation optical fiber 4b ... … Light guide 5 …… Transmission optical waveguide 6 …… Peripheral equipment 7 …… Defectiveness judgment device 8 …… Rotating jig 8a …… Table 9, 59 …… Inspection surface

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 【請求項1】 光が透過可能な層(2b)を有する被検
査物(2)に光を照射して、透過する光を画像部(3)
で画像として取り込むとともに、画像信号として出力
し、該画像信号を処理して被検査物(2)の不良を検査
する製品不良検査装置であって、光源(1)に、それが
照射する光を被検査物(2)に導く照射光導波路(4)
を設け、画像部(3)に、被検査物(2)からの透過光
を導く透過光導波路(5)を設け、光源(1)から出た
光を前記照射光導波路(4)を介して被検査物(2)に
照射し、被検査物(2)からの透過光を前記透過光導波
路(5)を介して画像部(3)に導くことを特徴とする
製品不良検査装置。
1. An object to be inspected (2) having a layer (2b) through which light can be transmitted is irradiated with light and the transmitted light is transferred to the image part (3).
Is a product defect inspection apparatus that captures an image as an image and outputs it as an image signal, processes the image signal, and inspects the inspected object (2) for defects. Irradiation optical waveguide (4) leading to the inspection object (2)
And a transmission optical waveguide (5) for guiding the transmitted light from the inspection object (2) is provided in the image part (3), and the light emitted from the light source (1) is passed through the irradiation optical waveguide (4). A product defect inspection apparatus characterized by irradiating an inspection object (2) and guiding transmitted light from the inspection object (2) to an image section (3) through the transmission optical waveguide (5).
JP8653591U 1991-10-23 1991-10-23 Product defect inspection device Pending JPH0536354U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8653591U JPH0536354U (en) 1991-10-23 1991-10-23 Product defect inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8653591U JPH0536354U (en) 1991-10-23 1991-10-23 Product defect inspection device

Publications (1)

Publication Number Publication Date
JPH0536354U true JPH0536354U (en) 1993-05-18

Family

ID=13889696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8653591U Pending JPH0536354U (en) 1991-10-23 1991-10-23 Product defect inspection device

Country Status (1)

Country Link
JP (1) JPH0536354U (en)

Similar Documents

Publication Publication Date Title
JPS6453139A (en) Surface nature measuring apparatus and method
KR960014919A (en) Optical inspection method and optical inspection device
KR20040086764A (en) Method And Apparatus For Detecting Faults In Transparent Material
JP2006162891A5 (en)
US3814943A (en) Method of and apparatus for analysing patterns and inspecting objects
JP5090147B2 (en) Defect inspection method, defect inspection apparatus, and line-shaped light source device used therefor
JP4641143B2 (en) Surface inspection device
KR100876257B1 (en) Optical measuring method and device therefor
JP2008286791A (en) Surface defect inspection method and apparatus
JPH04321212A (en) Symbol/character identifying device for sample to be identified
JPH04506411A (en) Non-contact inspection method and device for planar and three-dimensional inspection materials
JPH04122839A (en) Inspecting method of surface
JP4630945B1 (en) Defect inspection equipment
JPS6129453B2 (en)
JPH0536354U (en) Product defect inspection device
JPH11304724A (en) Device and method for inspecting hole of light-transmission sheet
JP2004257776A (en) Inspection device for light transmission body
JPH0612253B2 (en) Inspection method of die for forming honeycomb
JPH11287764A (en) Defect-inspecting method
JPH10185828A (en) Method and device for inspecting defect of transparent flat body surface
JPH10185829A (en) Method and device for inspecting defect on surface of transparent flat body
JPH0228815B2 (en)
JPH11287640A (en) Method for detecting defect
JPH08285790A (en) Defect detection method for glass fiber sheet
KR101260960B1 (en) Device for inspecting section of substrate inspection method using the same