JPH0535985B2 - - Google Patents
Info
- Publication number
- JPH0535985B2 JPH0535985B2 JP25730686A JP25730686A JPH0535985B2 JP H0535985 B2 JPH0535985 B2 JP H0535985B2 JP 25730686 A JP25730686 A JP 25730686A JP 25730686 A JP25730686 A JP 25730686A JP H0535985 B2 JPH0535985 B2 JP H0535985B2
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- sample
- side edge
- scattered light
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 44
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 239000013307 optical fiber Substances 0.000 claims description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 3
- 239000000047 product Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 10
- 235000019504 cigarettes Nutrition 0.000 description 5
- 230000007547 defect Effects 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 238000011179 visual inspection Methods 0.000 description 3
- 241000208125 Nicotiana Species 0.000 description 2
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000005802 health problem Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25730686A JPS63111447A (ja) | 1986-10-28 | 1986-10-28 | 突起物検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25730686A JPS63111447A (ja) | 1986-10-28 | 1986-10-28 | 突起物検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111447A JPS63111447A (ja) | 1988-05-16 |
| JPH0535985B2 true JPH0535985B2 (enrdf_load_stackoverflow) | 1993-05-27 |
Family
ID=17304525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25730686A Granted JPS63111447A (ja) | 1986-10-28 | 1986-10-28 | 突起物検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63111447A (enrdf_load_stackoverflow) |
-
1986
- 1986-10-28 JP JP25730686A patent/JPS63111447A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63111447A (ja) | 1988-05-16 |
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