JPH0535319Y2 - - Google Patents
Info
- Publication number
- JPH0535319Y2 JPH0535319Y2 JP11943086U JP11943086U JPH0535319Y2 JP H0535319 Y2 JPH0535319 Y2 JP H0535319Y2 JP 11943086 U JP11943086 U JP 11943086U JP 11943086 U JP11943086 U JP 11943086U JP H0535319 Y2 JPH0535319 Y2 JP H0535319Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- saucer
- frame
- counter
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 18
- 239000002245 particle Substances 0.000 claims description 14
- 238000012360 testing method Methods 0.000 description 18
- 239000000523 sample Substances 0.000 description 11
- 239000002184 metal Substances 0.000 description 6
- 238000007664 blowing Methods 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11943086U JPH0535319Y2 (enrdf_load_stackoverflow) | 1986-08-05 | 1986-08-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11943086U JPH0535319Y2 (enrdf_load_stackoverflow) | 1986-08-05 | 1986-08-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6327855U JPS6327855U (enrdf_load_stackoverflow) | 1988-02-24 |
| JPH0535319Y2 true JPH0535319Y2 (enrdf_load_stackoverflow) | 1993-09-08 |
Family
ID=31006797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11943086U Expired - Lifetime JPH0535319Y2 (enrdf_load_stackoverflow) | 1986-08-05 | 1986-08-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0535319Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7363666B2 (ja) * | 2020-05-12 | 2023-10-18 | 株式会社ダイフク | 計測装置 |
-
1986
- 1986-08-05 JP JP11943086U patent/JPH0535319Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6327855U (enrdf_load_stackoverflow) | 1988-02-24 |
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