JPH0534515A - Polishing and correcting device for fine pattern and frame body for fixing circuit board - Google Patents

Abstract

PURPOSE:To decrease the driving power for polishing for the purpose of smoothing and to provide the compact device as well as to smooth the normal pattern regions of a substrate for color filters, etc., by smoothing only the defective points,of the projecting parts and build-up parts partially generated in the fine pattern forming regions of the substrate by a polishing system. CONSTITUTION:This polishing and correcting device for fine patterns and frame body for fixing the substrate have a horizontal imposing plate 2 which can be imposed and fixed with the substrate (a), an illuminating light source section which is mounted to a moving frame 3 movable in X-Y directions on the imposing plate, and a rotary polishing material 14 which is mounted with a prime moving shaft 8 slidable and movable in a vertical direction. The substrate (a) is fixed onto the imposing plate 2 by the frame body 10 for both-side attraction and the correcting points of the fine patterns formed on the surface of the substrate (a) imposed and fixed onto the imposing plate 2 are polished and corrected by the polishing material 14.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to an image pattern forming body such as a glass plate, a resin plate, a resin film or the like, a fine image, a color filter having a fine pattern, and the like. The present invention relates to a device for partially polishing and correcting a fine image and a fine pattern.

[0002]

2. Description of the Related Art Conventionally, when foreign substances are mixed in a liquid material such as an emulsion type coloring agent or a photoresist for pattern formation, which is used for forming a fine colored pattern on a glass substrate such as a color filter, it is completed. On the surface of the color filter, foreign matters remain as protrusions or ridges are generated due to uneven application of the liquid material.The liquid crystal is placed in the relative interval by directly facing it to the opposing electrode substrate. In the case of encapsulating the liquid crystal display, the intervals between the counter electrodes at the locations where the foreign matter is generated are uneven, short-circuits occur between the counter electrodes, gap unevenness between the display cells, and liquid crystal alignment defects are likely to occur.

Therefore, conventionally, in order to remove the protrusions and ridges caused by the inclusion of foreign matter and coating unevenness, the entire surface of the color filter is pressed and smoothed, or the entire surface is polished and smoothed. However, in this method, since the entire surface of the pattern applied to the substrate is processed, a large amount of driving force and equipment are required for the entire surface pressing, smoothing for the entire surface polishing, and the filter surface and the pressing surface are kept parallel. Is difficult, and when polishing the entire surface of the pattern,
There is a problem that the pattern area other than the protrusion and the ridge is easily scratched.

[0004]

An object of the present invention is to smooth a polishing driving force for smoothing only defective portions of protrusions and ridges partially generated in a fine pattern region such as a color filter by a polishing method. The purpose is to gradually reduce the size of the device and to smooth the normal pattern area so as not to damage it.

[0005]

According to a first aspect of the present invention, a horizontal mounting plate on which a substrate can be mounted and fixed, and an illumination light source unit mounted on a movable support frame movable on the mounting plate in the XY directions. And a rotary abrasive attached to the tip of the source shaft that is slidably movable in the vertical direction. The abrasive is used to correct the fine pattern on the surface of the substrate mounted and fixed on the mounting plate. It is a fine pattern polishing / correcting device characterized by being capable of polishing / correcting by.

A second aspect of the present invention is a quadrangular shape,
A frame body having an appropriate shape such as a circular shape, in which an appropriate number of vacuum suction holes are provided on the lower surface and the upper surface of the frame body or the inner peripheral surface of the frame body, and the lower surface of the frame body contacts the substrate mounting plate. Let me put it,
After placing the substrate on the upper surface of the frame body facing the lower surface of the frame body so as to cover the frame body, vacuum suction is performed on the lower surface and the upper surface of the frame body, or the inside of the frame body is vacuum-sucked, and the mounting plate is placed. A substrate fixing frame body having a substrate fixed thereon.

[0007]

According to the first invention device of the present invention, only the projections and raised portions generated in the fine pattern due to the inclusion of foreign matter in the pattern forming liquid material, the improper application of the material, etc. It can be smoothed by polishing with a polishing material attached to the tip of a small-diameter drive rotating shaft of a dynamic motor, and can be smoothed without damaging a normal portion of a fine pattern.

Further, the abrasive for polishing can be freely moved in the XY directions (longitudinal and lateral directions) on the substrate mounted and fixed on the horizontal mounting plate by the manual operation handle. The abrasive can be easily positioned directly above the pattern portion where the protrusion is generated, and after positioning, the source motor is started and rotated to rotate the abrasive attached to the tip of the motor drive shaft. By pushing down the operation handle against the biasing force of the spring loaded in the handle, the bracket for attaching and supporting the source motor is vertically lowered, and the rotating abrasive is brought into contact with the projection portion directly below. It can be polished.

Further, when it is desired to interrupt or end the polishing, by loosening the pushing down force to the operation handle, the bracket of the source motor is raised by the restoring force of the spring to return the polishing material upward, It can be detached from the protruding portion.

Since the board fixing frame in the second invention apparatus of the present invention has vacuum suction holes on the upper surface and the lower surface of the frame, respectively, the board fixing frame is formed by the suction holes on the lower surface. It is possible to fix the substrate on the mounting plate by vacuum suction force, and at the same time, to suck and fix the substrate to be corrected by the suction hole on the upper surface of the frame.

[0011]

The present invention will be described in detail with reference to the embodiments shown in FIGS. As shown in FIG. 1, a first invention device of the present invention is a mounting plate 2 such as a translucent diffusion plate which is horizontally fixed to a frame 1 and on which a substrate a to be corrected having a fine pattern can be mounted and fixed. And a movable supporting frame 3 provided on the mounting plate 2 so as to be relatively movable in the XY directions, and an illumination light source provided on the upper side or the lower side of the mounting plate 2 so as to be relatively movable integrally with the supporting frame 3. A part 13, a vertical movable head 5 provided on the support frame 3 so as to be slidable in the Z direction perpendicular to the mounting plate 2, and the movable head 5 is moved in the XYZ directions. An operating handle 9 for rotating the movable head 5, a rotary bracket 6 provided on the movable head 5 so as to be rotatable in a plane perpendicular to the mounting plate 2, and attached to the rotary bracket 6 and at the tip of the source shaft. The source motor 7 having the abrasive 14 attached thereto is provided.

As shown in FIG. 1, a mounting plate 2 such as a light-transmitting diffuser plate is horizontally attached and fixed via support legs 1a provided upright on the apparatus body frame 1. On the lower side of the mounting plate 2, the upper surface of the sliding base 19 mounted and fixed to the frame 1 is horizontally
X-direction slide 18 that can move in any direction (vertical in the horizontal plane)
The slide table 18 is provided with a Y-direction slide table 17 which is movable in the Y-direction (horizontal direction in the horizontal plane) orthogonal to the X-direction.

2, a movable support frame 3 is provided integrally with the Y-direction sliding base 17 so as to rise outside the side edges of the mounting plate 2 and to extend parallel to the upper surface of the mounting plate 2 in the shape of an arm. .
A bracket 4 is attached to the tip of the movable support frame 3 above the mounting plate 2. A vertically movable head 5 is provided so as to be slidable in the vertical direction (Z direction) with respect to the bracket 4, and a rotary bracket 6 is provided so as to be rotatable in a vertical plane with respect to the head 5.

FIG. 3 is a front view for explaining the details of the bracket 4 and the vertically movable head 5. The vertically movable head 5 is slidably slidable with respect to the bracket 4.
The vertically movable head 5 has an elliptic cam 9a attached to a free rotating shaft 5a fitted in a circular fitting groove portion 4a of the bracket 4,
A manual operation handle 9 for rotating the cam 9a is attached to the cam 9a. As shown in FIG. 3, the rotating shaft 5a
Is equipped with a spring 5b for applying an urging force in a state in which the outer end portion side of the operation handle 9 is always flipped up.

FIG. 4, for the vertically movable head 5,
A height adjusting bracket 5a whose height (position) can be adjusted in the vertical direction along a sliding guide 5b provided on the head 5 is provided. The bracket 5a meshes a rack gear 5e engraved on one side of the vertical slide surface thereof with a pinion gear 5d pivotally supported by the head 5 on its side, and connects the pinion gear 5d integrally or in conjunction therewith. By rotating the manual dial 5f shown in FIG.
The height from 2 is adjusted appropriately. A rotary bracket 6 for supporting a source motor such as a micromotor is pivotally supported on the front surface of the adjustment bracket 5a of the vertically movable head 5 via a rotary shaft 5c, and the shaft 5c fixes its rotation by a set screw 5g. . Then, a source motor 7 such as a micromotor is attached and fixed to the rotation bracket 6 for supporting the motor, and an abrasive material is attached to the tip of the rotation shaft 8 of the motor 7.
14 is attached.

The material of the abrasive 14 differs depending on the hardness of the organic pattern material such as a color filter to be pattern-corrected or the inorganic material-based coloring pattern composition material in the dry and solidified state. A material mainly composed of a polyamide or polyimide synthetic resin having a hardness equal to or slightly softer than the hardness is suitable, but a material harder than that can also be used.

The mounting posture of the rotary shaft 8 of the source motor 7 is usually set to be inclined or perpendicular to the mounting plate 2. In addition, as shown in FIG.
17 or the arm 15 is integrally attached to the arm 3, and the position adjusting shaft 16b of the bracket 16a for horizontally mounting the microscope 16 is fitted and fitted to the tip fitting portion 15a of the arm 15 and the fitting portion 15a. Tighten the shaft 16b with the setscrew 15b that is screwed to. As a result, the microscope bracket 16a can be appropriately positioned with respect to the tip of the arm 15 and can be moved horizontally on the mounting plate 2 together with the abrasive material 14.

FIG. 5 is a side view of the apparatus of the present invention shown in FIG. 2 from the right side of the drawing. The tip of the abrasive material 14 attached to the tip of the rotary shaft 8 is placed and fixed on the placing plate 2. FIG. 7 is an explanatory view showing a state in which a polishing position in contact with the correction substrate a such as a color filter is set so as to match the optical axis of the microscope 16. In order to fix the substrate a on the mounting plate 2 of the device of the present invention, as shown in FIG.
For example, vacuum suction holes are provided on the upper surfaces of the four sides of the quadrangular frame body 10 and the lower surface in contact with the mounting plate 2.

FIG. 6A shows the fixing vacuum frame body.
FIG. 10 is a side view of 10, in which a plurality of vacuum suction holes 10a and 10b each having a slit shape, a pore shape, or a combination thereof are provided on the upper surface and the lower surface. An air flow passage 11 communicating with the suction holes 10a and 10b is provided inside the frame 10, and an air suction passage (for example, a hose) is connected to the flow passage 11 outside the frame 10 as appropriate. To do.

FIG. 6 (b) shows a vacuum suction frame 10 provided with suction holes 10c on the inner circumference thereof, and the suction inside the frame 10 closed by the mounting plate 2 and the substrate a is performed. Vacuum suction is performed through the hole 10c. Further, in the present invention, it is possible to use the vacuum frame body 10 in which suction holes are provided in the upper surface and the lower surface of the frame body 10 and in the inner periphery of the frame body 10, respectively.

As the mounting plate 2 in the apparatus of the present invention, a transparent or light diffusing glass plate or a resin plate can be used, or if necessary, an opaque mounting plate 2 can be used. When the opaque mounting plate 2 is used, the illumination light source 13
It is necessary to place it on the upper surface of the mounting plate 2.

[0022]

According to the present invention, the polishing material is positioned at a position where the substrate having the colored pattern fixed on the mounting plate needs to be polished and corrected, and if necessary, a magnifying optical instrument such as a microscope. Use the to magnify the fine protrusions or raised patterns on the part to be corrected, and rotate the abrasive to contact with the part to be corrected to partially polish or cut the colored pattern to correct it. be able to.

Further, unlike the conventional case, it is not necessary to polish the entire surface of the pattern even in the partial correction, and only the defective portion such as a protrusion or a raised portion is polished and corrected. The part is not damaged by polishing, and the correction device can be downsized.

Further, according to the frame for fixing a substrate of the present invention,
The substrate can be smoothly attracted and fixed onto the mounting plate. As described above, the present invention is effective in the correction work of the fine colored pattern and the fine metal film pattern by polishing and cutting.

[Brief description of drawings]

FIG. 1 is a side view of a first inventive device of the present invention.

FIG. 2 is an overall perspective view of the device of the present invention.

FIG. 3 is a side view illustrating an up-and-down mechanism of an abrasive in an embodiment of the first invention device of the present invention.

FIG. 4 is a side view for explaining a polishing material vertical positioning mechanism in one embodiment of the first invention device of the present invention.

FIG. 5 is a side view showing the relationship between the abrasive and the magnifying optical system in the device of the present invention.

FIG. 6 is an explanatory diagram of a vacuum suction frame body for fixing a substrate in the second invention device of the present invention.

[Explanation of symbols]

a ... Substrate 1 ... Device body frame 2 ... Support legs 3 ... X
-Y direction movable support frame 4 ... Bracket 4a ... Circular recess 5 ... Vertical movable head 5a ... Cam rotation shaft 5b ... Spring
5c… Motor mounting bracket rotating shaft 5d… Pinion gear 5e… Rack gear 5f… Adjusting dial 5g… Set screw 6… Motor mounting rotating bracket 7… Source motor 8… Motor drive rotating shaft 9… Manual device handle 9a… Circular cam 10… Vacuum fixing frame 11… Air flow path 12… Hose 13… Lighting means 14… Abrasive material
15… Microscope support bracket 16… Microscope

Claims (2)

[Claims] 1. A horizontal mounting plate on which a substrate can be mounted and fixed, an illumination light source unit mounted on a movable support frame movable on the mounting plate in the XY directions, and slidably movable in the vertical direction. A rotary abrasive material attached to the tip of the drive shaft is provided, and the correction points of the fine pattern applied to the substrate surface mounted and fixed on the mounting plate can be polished and corrected by the abrasive material. Polishing correction device for fine patterns. 2. A frame body having an appropriate shape such as a quadrangular shape and a circular shape, wherein an appropriate number of vacuum suction holes are provided on a lower surface and an upper surface of the frame body or an inner peripheral surface of the frame body, The lower surface is placed in contact with the substrate mounting plate, and the substrate is placed on the upper surface of the frame body facing the lower surface of the frame body so as to cover the frame body, and then vacuum suction is performed to suck the lower surface and the upper surface of the frame body, or A substrate fixing frame body, characterized in that the inside of the frame body is vacuum-sucked to fix the substrate on a mounting plate.