JPH05341487A - Defect inspecting and correcting device for mask film - Google Patents

Abstract

PURPOSE:To obtain the mask film inspecting and correcting device which projects and displays a defect of a pattern formed on a mask film to the mask film, and can execute exactly and easily a correction work of this defect. CONSTITUTION:The device is provided with a means (inspecting machine) A for detecting a defect of a pattern formed on a mask film MF, and making a bar-code label in which defect information is recorded, and a means (correcting machine) B for projecting and displaying a defect position of the mask film, based on the defect information recorded in the made bar-code label. In the correcting machine B, the defect information recorded in the bar- code label is read by a bar-code reader 600, and based thereon, a liquid crystal driving part 700 drives a liquid crystal and forms a defect display mar as a mattern, and this pattern is projected on the mask film by a projection optical system 200, by which the defect can be found out easily.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for inspecting a pattern defect of a mask film having a required pattern formed on a transparent film, and more particularly, a defect portion of the mask film is projected and displayed to easily correct the defect. The present invention relates to a mask film defect inspection and repair device that enables the above.

[0002]

2. Description of the Related Art In recent years, as a pattern defect inspection of a mask film used for forming a printed wiring board used in electronic equipment by a photo-etching method, image data of a pattern is read by an image reading camera, and this image data is read. A method of automatically detecting a pattern defect by processing with a required algorithm has been proposed. In such an inspection method, since it is possible to obtain information such as the coordinate position of the defect on the mask film and the defect type as the defect data of the mask film, based on this defect information, it is possible to determine the size of a sheet of paper of about the same size as the mask film. It is possible to draw a dot or the like on the corresponding defective portion and display the defective portion. Then, when the defect of the mask film is corrected, the corresponding mask film is overlaid on the paper on which the defective portion is displayed, and the defective portion on the mask film is found based on the drawing point seen through the mask film. , I am working on the correction.

[0003]

However, in such a repair work, the correct defect position cannot be displayed unless the paper and the mask film are accurately aligned, so the work for aligning the two is corrected. There is a problem that it is necessary as a pre-process of the work and the correction work is troublesome. Further, a sheet of the same size is required corresponding to the mask film, and since this sheet becomes unnecessary after the defect is corrected, there is a problem that it is wasteful in terms of resource saving and economical. .. SUMMARY OF THE INVENTION It is an object of the present invention to provide a mask film defect inspection and correction device that enables accurate and easy pattern defect correction work and that does not require a sheet for displaying the defect portion. ..

[0004]

SUMMARY OF THE INVENTION The present invention is a means for detecting a defect in a pattern formed on a mask film and producing a bar code label recording defect information, and a means for producing a bar code label recorded on the produced bar code. Projection display means for projecting and displaying the defect position of the mask film based on the defect information. The means for projecting and displaying the defect position includes means for reading the defect information recorded on the barcode label, means for pattern-forming a defect display mark on the liquid crystal based on the read defect information, and the defect display mark displayed on the liquid crystal. And a projection optical system for projecting and displaying. Further, the inspection means includes means for attaching the created barcode label to a part of the mask film.

[0005]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a view showing a mask film defect inspection and correction device of the present invention, which is composed of an inspection machine A shown in FIG. 1A and a correction machine B shown in FIG. The inspection machine A is for detecting a pattern defect of the mask film, and the repair machine B is for displaying the detected pattern defect on the mask film and performing a repair work for the defect.

FIG. 2 is a front view of an embodiment of the inspection machine, and FIG. 3 is a plan view of the same. It should be noted that FIG. 3 is illustrated with a part thereof omitted for the sake of easy understanding of the configuration. In these figures, a rectangular plate-shaped film supply cassette 2A is arranged on one end side in the longitudinal direction on a base plate 1 whose plane shape is long in one direction, and is partitioned by a size setting stopper 21. A plurality of mask films to be inspected MF are stacked and stored in the area. Further, a film storage cassette 2B having the same structure is arranged on the other end side, and the inspected mask films MF are stacked and stored. A pair of rail-shaped inspection table guides 3 are extended between the cassettes along the longitudinal direction, and the inspection table 4 is reciprocated along the guides 3.

The inspection table 4 is a light-transmissive plate member 42.
Both sides are supported by the inspection table guide 3 which is formed of the frame member 43 and extends on both sides of the base plate 1 in the width direction. A screw bolt 31 is extendedly arranged on one guide over the entire length of the base plate, and a female screw portion (not shown) fixedly provided on the inspection table 4 is screwed onto the screw bolt 31. This screw bolt 31 is axially driven by a drive motor 32 provided at one end of the base plate, and when the axial rotation is driven, the inspection table 4 is reciprocally moved along the guide 3 by the screw mechanism screwed into the female screw portion. Let In addition, a plurality of film suction holes 41 are formed side by side on the surface of one end of the inspection table 4, and one edge of the mask film MF to be mounted is vacuum-sucked on the inspection table as described later in detail. Can be fixed to.

A film mounting portion 5A for mounting the inspected mask film MF on the inspection table 4 is provided above the film supply cassette 2A, and an inspected mask film is provided above the film storage cassette 2B. A film loading section 5B for loading the MF from the inspection table 4 is provided. The film mounting portion 5A is provided with a film elevating arm 52 that is vertically moved with respect to the fixed frame body 51 by a film elevating motor 53.
The mask film MF to be inspected is vacuum-sucked by the suction nozzle 54 provided in 2, and is mounted on the inspection table 4 from the film supply cassette 2A. Also, the film loading section 5
B has the same structure, and the inspected mask film on the inspection table 4 is mounted on the film storage cassette 2B.

A film pressing portion 8 is provided on one side of the frame 51 of the film mounting portion 5A. The film pressing portion 8 is provided with a film pressing roller 82 between a pair of brackets 81 opposed to each other in the width direction from the frame 51, and the film pressing roller 82 is pressed against the surface of the inspection table 4 by a spring 83. I am energetic.

A defect inspection section 6 is provided between the film mounting section 5A and the film lowering section 5B for inspecting a defect by reading an image of the pattern of the mask film MF mounted on the inspection table 4. The defect inspection unit 6 as the image reading unit is provided at a position below the inspection table 4 at an intermediate position in the longitudinal direction of the base plate 1.
An illumination light source 61 such as a fluorescent lamp extending in the width direction is provided, and the illumination light source 61 illuminates the mask film on the inspection table 4 through transmission. On the upper side of the inspection table facing the illumination light source 61, a camera conveyance guide 62 is extended in the width direction so as to straddle the guides 3, and an image reading camera 63 composed of a CCD line sensor is supported. There is.
The image reading camera 63 is reciprocated along the camera conveyance guide by driving the camera conveyance motor 64.

A label sticking portion 7 for sticking a bar code label to the inspected mask film is provided at a position adjacent to the defect inspection portion 6. In the label sticking section 7, a label transport guide 71 is extended in parallel with the camera transport guide 62, and a label transport device 72 having a label suction nozzle is supported. Then, the label transport motor 74 is driven to reciprocate the label transport device 72 along the label transport guide, and the barcode label BL vacuum-sucked by the label suction nozzle 73 can be attached to a predetermined position of the mask film MF. it can.

The bar code label BL is formed by a bar code printer 9 provided on one side of the label carrying guide 71. The barcode printer 9 prints a barcode label BL in which information such as the position and type of the defect detected by the defect inspection unit 6 is stored by magnetic means. A double-sided tape is attached to a part of the printed barcode label BL, and the barcode label BL is attached to one side of the mask film MF by the double-sided tape. Further, 100 is a vacuum pump, and the film suction hole 41, the suction nozzle 54, the label suction nozzle 73, etc. are selectively or simultaneously brought into a vacuum state by the switching operation of the switching valve 101, and the mask film and the barcode label are vacuum-sucked. Let

On the other hand, as shown in the schematic internal structure of FIG. 4, the repair machine has a liquid crystal 203 in a part thereof, a light source 201 for illuminating the liquid crystal 203 from behind, a condenser lens 202, and It is composed of a projection lens 204 for enlarging and projecting the illuminated liquid crystal, two reflecting mirrors 205 and 206, and a semi-transmissive projection glass 207 on which a liquid crystal image is projected. The liquid crystal 203 is formed as a fine matrix pattern, for example, and is configured to display an arbitrary pattern by the liquid crystal driving unit 700. This liquid crystal drive unit 7
A barcode reader 600 is connected to 00, reads the defect information printed (recorded) on the barcode label BL, and drives the liquid crystal drive unit 700 based on the defect information. The projection lens 204 is composed of a zoom lens here, and is configured to project the pattern displayed on the liquid crystal 203 onto the surface of the projection glass 207 at an arbitrary magnification. The projection glass 207 is configured as a correction work table, and a mask film MF in which a pattern defect is detected can be placed on the surface of the projection glass 207, and the liquid crystal pattern projected on the projection glass 207 is transparent through the mask film MF. By using this pattern, it is possible to manually correct the detected pattern defect.

5 (a) and 5 (b) are block diagrams of the inspection machine and the correction machine, respectively. In the inspection machine A, the film supply cassette 2A, the film storage cassette 2B, the illumination light source 61 and the like are driven and controlled by the mechanism control unit 300. The output of the image reading camera 63 is processed by the image processing unit 400, and after the determination unit 500 determines a defect, the barcode printer 9 creates a barcode label BL based on the output. or,
In the correction machine B, a liquid crystal driving section 700 is connected to a bar code reader 600 for reading the bar code label BL, and the pattern formed on the liquid crystal by the liquid crystal driving section 700 is a mask on the projection glass 207 by the projection optical system 200. It is projected on the back surface of the film MF.

Next, the inspection process of the inspection machine having the above configuration,
The pattern correction work in the correction machine will be described with reference to the flowchart of FIG. First, in the inspection machine A, the film to be inspected MF is placed in the film supply cassette 2A in an overlapping manner, and when the inspection table 4 is moved to the film storage cassette 2B side, the film to be inspected is the film of the film mounting portion 5A. The lifting arm 52 is vacuum-adsorbed and lifted. Then, when the inspection table 4 is returned to the starting point position on the film supply cassette 2A, it is mounted on the inspection table 4.

The film to be inspected MF mounted on the inspection table 4 is fixed by vacuum adsorbing the tip end thereof to a film adsorption hole 41 provided at one end of the inspection table 4.
Further, the film holding portion 8 allows the rear end side to be in the inspection table 4
It is pressed and brought into close contact with the surface of. Then, the inspection table 4 starts to move intermittently. The illumination light source 61 is turned on in synchronization with the start of movement of the inspection table 4, and the illumination of the film to be inspected is started. At the same time, the camera conveyance motor 64 is driven to move the image reading camera 63 in the direction orthogonal to the moving direction of the inspection table 4. As a result, the image reading camera 63 scans with a required width dimension and reads the pattern of the film to be inspected as image data. After that, the inspection table 4 is intermittently moved for each width dimension read by the image reading camera 63, and the image reading camera 63 is repeatedly reciprocally moved correspondingly, whereby the pattern of the entire surface of the film MF to be inspected. Can be read as image data.

When the inspection table is moved to the end position and the inspection of the mask film is completed, the image reading camera 6
The image data read by 3 is processed by the image processing unit 400, and the defect is detected by the determination unit 500, and then the barcode label BL storing the defect information is printed by the barcode printer 9. The barcode label BL is vacuum-sucked by the label suction nozzle 73 of the label sticking unit 7, and then the label carrier 7
The mask film MF is conveyed by 2 to a predetermined position and is attached to that position. After that, the inspected film on the inspection table 4 (inspected film)
The MF is lifted above the inspection table 4 by the film elevating arm 52 of the film lowering section 5B. Then, when the inspection table 4 is returned to the starting point position to mount the next film to be inspected, the inspected film MF is stored in the film storage cassette 2B.

The inspected mask film MF thus inspected is taken out from the film storage cassette 2B and placed at a predetermined position on the projection glass 207 of the correction machine B. Then, the operator peels off the barcode label BL attached to the mask film MF,
Attach it to the bar code reader 600. The barcode reader 600 reads the defect information recorded on the barcode label BL, and based on this defect information, the liquid crystal drive unit 7
00 drives the liquid crystal 203, and a defect display mark of the defect detected in the target mask film MF is displayed on the liquid crystal 203. Then, the liquid crystal 203 is illuminated by the turned-on light source 201, and as shown in FIG. 7, the defect display mark D displayed on the liquid crystal 203 by the projection optical system 200.
M is projected on the projection glass 207. At this time, if the magnification of the projection lens 204 is adjusted, a pattern image of the liquid crystal of the same size as the mask film MF is projected on the projection glass 207, so that the defect display mark DM is projected at the same size.

Thus, the defect display mark DM projected on the projection glass 207 can be observed through the mask film MF. Therefore, the repair operator can find the defective portion of the mask film while confirming the defect display mark DM and perform the required repair. Therefore, it is possible to facilitate the work of finding a defective portion and perform the defect correction work accurately and quickly. This eliminates the need for a sheet of the same size as the mask film for displaying a defective portion as in the conventional case, which is advantageous in terms of resource saving and economics.

Further, since the defect display mark is projected from the back surface side of the projection glass 207 on which the mask film is placed, that is, from the back surface side of the mask film MF, for example, the defect display mark is projected from the front surface side of the mask film. Compared with the case, the defect display mark projected is not obscured by the repair operator and becomes difficult to see, and the repair operation is not restricted. Here, for example, by blinking the defect display mark displayed on the liquid crystal, the defect position can be more easily confirmed. Further, in the repair machine B, the defect type, the defect number, etc. are displayed on the display 208 (see FIG. 1) based on the defect information read from the barcode label BL, so that the defect repair work can be further facilitated. It is possible to prevent the defect from being overlooked.

[0021]

As described above, the present invention detects defects in the film to be inspected, stores the detected defect information in the bar code label, and based on the defect information stored in the bar code label. Since the defect is projected and displayed, the defect of the mask film can be confirmed at a glance by the projection pattern, and the defect correction work of the mask film can be appropriately and quickly performed.
Further, since the display means forms the defect display mark on the liquid crystal based on the recorded defect information and projects the defect display mark on the mask film, it is possible to display an appropriate defect display for various kinds of defects. Can be done.

[Brief description of drawings]

FIG. 1 is an external perspective view of an inspection machine and a correction machine according to the present invention.

FIG. 2 is a front view showing the internal structure of the inspection machine.

FIG. 3 is a plan view of FIG.

FIG. 4 is a schematic configuration diagram showing an internal structure of a repair machine.

FIG. 5 is a block configuration diagram of an inspection machine and a correction machine.

FIG. 6 is a flowchart showing inspection and correction work.

FIG. 7 is a diagram showing a defect display mark projected on a projection glass.

[Explanation of Codes] A inspection machine B correction machine 4 inspection table 6 defect inspection section 7 barcode label attachment section 9 barcode printer MF mask film BL barcode label

Claims (3)

[Claims] 1. An inspection means for detecting a defect of a pattern formed on a mask film and producing a bar code label recording the defect information, and a mask based on the defect information recorded on the produced bar code label. A defect inspection and correction device for a mask film, comprising: projection display means for projecting and displaying a defect position of the film. 2. A means for projecting and displaying a defect position, means for reading defect information recorded on a bar code label, means for pattern forming a defect display mark on liquid crystal based on the read defect information, and means for displaying on the liquid crystal. The defect inspection and repair apparatus for a mask film according to claim 1, further comprising: a projection optical system for projecting and displaying the displayed defect display mark. 3. The mask film defect inspection and repair apparatus according to claim 1, wherein the inspection means comprises means for attaching the produced bar code label to a part of the mask film.