JPH05313353A - Mask film inspecting device - Google Patents

Abstract

PURPOSE:To reduce the size and cost of the inspecting device at the time of integrally constituting a defect inspecting section and defect display section for a mask film as the inspecting device. CONSTITUTION:This inspecting device has an inspection table 4 which is mounted with the mask film MF to be inspected and is moved in one direction, the defect inspecting section 6 which is moved in the direction orthogonal with the moving direction of this inspection table and detects the pattern defect of the mask film MF and the defect display section 7 which is moved in the direction parallel with the defect inspecting section 6 and displays the defect at the detected defect point (a label sticking section for sticking the label indicting the defect to the mask film MF). As a result, the driving mechanisms for the defect inspecting section 6 and the defect display section 7 in one direction are commonly used and the mechanisms are simplified.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus for inspecting a pattern defect of a mask film having a required pattern formed on a transparent film and displaying the defective portion on the film.

[0002]

2. Description of the Related Art Recently, an image reading camera reads an image of a pattern as an apparatus for inspecting a pattern defect of a mask film used when a printed wiring board is formed by a photo-etching method, and image data obtained from the image is read. There has been proposed a device for automatically processing pattern defects by automatically detecting pattern defects. Further, in order to easily correct the detected defect, a device has been proposed in which, for example, a label or the like is attached to the detected defective portion of the mask film to display the defective portion.

Conventionally, as the above-mentioned inspection device, in order to inspect the mask film efficiently, the film to be inspected is placed on a reciprocating inspection table, and the inspection table is moved in one direction, while an image for reading a pattern is read. There is a configuration in which an inspection is performed while moving the reading camera in a direction orthogonal to the reading camera. Further, as a device for attaching a label to a defective portion of a mask film, conventionally, the mask film is placed on a fixed table, and the label is applied by a movable arm that is moved in the X-axis and Y-axis directions with respect to the fixed table. There are some that are designed to be pasted in places.

[0004]

However, in such an inspection apparatus, since the mask film defect inspection apparatus and the label sticking apparatus are each constituted by an independent mechanism, they are integrated into an inspection apparatus. in case of,
There is a problem that the device becomes large. Further, since it is necessary to provide a moving mechanism in the XY directions for each of the defect inspection and the label sticking, it is necessary to dispose a similar mechanism in the inspection device in a duplicated manner, and in order to reduce the cost of the device. It is an obstacle. An object of the present invention is to provide a mask film inspecting apparatus which has a common mechanism for defect inspection and defect display of a mask film, which enables downsizing and cost reduction.

[0005]

SUMMARY OF THE INVENTION According to the present invention, a mask film to be inspected is mounted and is moved in one direction, and a pattern of the mask film is moved in a direction orthogonal to the moving direction of the inspection table. A defect inspection unit that detects a defect and a defect display unit that moves in a direction parallel to the defect inspection unit and displays a defect at the detected defect portion are provided. For example, the defect display unit is configured as a label sticking unit that sticks a label for displaying a defect on a portion of the mask film corresponding to the defect.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a front configuration diagram of an embodiment of a mask film inspection apparatus of the present invention, and FIG. 2 is a plan configuration diagram thereof.
It should be noted that FIG. 2 is illustrated with a part omitted for the sake of easy understanding of the configuration. First, the schematic configuration of the mask film inspection apparatus will be described. A film supply cassette 2A is arranged on one end side in the longitudinal direction on a base plate 1 whose plane shape is a rectangle long in one direction, and a plurality of mask film MF to be inspected are stacked and stored. Further, a film storage cassette 2B is arranged on the other end side, and the inspected mask films MF are stacked and stored. A pair of rail-shaped inspection table guides 3 are extended between the cassettes along the longitudinal direction, and the inspection table 4 is reciprocated along the guides 3.

A film mounting portion 5A for mounting the mask film MF to be inspected on the inspection table 4 is provided on the upper side of the flume supply cassette 2A, and conversely, an upper side of the film storage cassette 2B is inspected. A film loading section 5B for loading the mask film MF from the inspection table 4 is provided. Further, each of the cassettes 2A, 2
At an intermediate position of B, a defect inspection section 6 for inspecting a defect by reading a pattern image of a mask film to be inspected mounted on the inspection table 4, and a defect portion at a defect position on the inspected mask film are displayed. As a defect display unit for the label attaching unit 7 for attaching a label for displaying a defect
Are provided respectively.

Next, details of the above-mentioned respective parts will be described. [Film Supply Cassette, Film Storage Cassette] The film supply cassette 2A is formed in a rectangular shallow dish shape, and has a size setting stopper whose inner bottom is positionally adjustable in the length direction and the width direction orthogonal thereto. 21 is provided, the position of which is changed according to the mask film to be inspected, and the film MF to be inspected is placed in a rectangular space defined between the film supply cassette 2A and the side surface thereof. Also, a plurality of size detection sensors 22 composed of limit switches and the like are provided below the film supply cassette 2A.
By activating the size detection sensor 22 at the position where the size setting stopper 21 is moved,
The size of the mask film MF to be inspected can be automatically detected.

The film storage cassette 2B also has the same structure as the film supply cassette 2A, and the corresponding parts are designated by the same reference numerals. These film supply and storage cassettes 2A and 2B can be attached to and detached from the base plate 1, respectively.

[Inspection Table] The inspection table 4 is formed of a light-transmissive plate material and a frame material, and both sides thereof are supported by the inspection table guides 3 extending on both sides of the base plate 1 in the width direction. A screw bolt 31 is extendedly arranged on one guide over the entire length of the base plate, and a female screw portion (not shown) fixedly provided on the inspection table 4 is screwed onto the screw bolt 31. The screw bolt 31 is axially driven by a drive motor 32 provided at one end of the base plate, and reciprocally moves the inspection table 4 along the guide 3 by a screw mechanism screwed into the female screw portion when the shaft is rotated. .. or,
At both ends of the guide 3, a table starting point sensor 33 including a limit switch and a photo interrupter is provided.
And a table end point sensor 34 are provided and are operated when the inspection cable 4 is moved to detect the position of the inspection table. A plurality of film suction holes 41 are formed side by side on the surface of one end edge of the inspection table 4, and one end edge of the mounted mask film MF is vacuum-sucked and fixed on the inspection table.

[Film Mounting Section, Film Unloading Section] The film mounting section 5A has a frame 51 standing on the base plate 1 on the upper side of the film supply cassette 2A, and is supported by the frame 51 to move up and down. It has a film lifting arm 52 to be moved. The film elevating arm 52 is guided by two vertically extending guides 53 at a diagonal position on the plane, and a part of the film elevating arm 52 is screwed to a vertically extending screw bolt 54 at another diagonal position. It Then, by driving the film lifting motor 55 connected to the screw bolt 54 to rotate the screw bolt 54, the film lifting arm 52 is moved up and down by the screw mechanism. The upper and lower limit positions of the elevating arm 52 are detected by an arm upper limit sensor 56 and an arm lower limit sensor 57, which are limit switches and photointerrupters supported by a frame.
A plurality of suction nozzles 58 are provided on the lower surface of the film elevating arm 52 so that the mask film can be vacuum adsorbed and moved up and down together with the film elevating arm 52.

A film pressing portion 8 is provided on one side of the center of the frame body 51. The film pressing portion 8 includes a pair of brackets 81 facing the frame body 51 in the width direction.
And a film pressing roller 8 between these brackets.
2 are arranged. The film pressing roller 82 is supported by a movable arm 83 so as to be vertically swingable with respect to the bracket 81, and the film pressing roller 82 is lowered by a spring 84 mounted between the movable arm 83 and the bracket 81. It is biased so that it contacts the direction, that is, the inspection table surface. Also, the film loading section 5B has the same structure as the film mounting section 5A, and corresponding parts are designated by the same reference numerals. However, the film retainer is not provided.

[Defect Inspecting Section] The defect inspecting section 6 for inspecting defects in the mask film is a fluorescent lamp or the like extending in the width direction at a position below the inspection table 4 at an intermediate position in the longitudinal direction of the base plate 1. Of the mask film on the inspection table 4 is transmitted and illuminated. On the upper side of the inspection table 4 facing the illumination light source 61, as shown in FIG.
Has extended support. In this camera conveyance guide 62,
An image reading camera 63 composed of a CCD line sensor with the imaging lens facing downward is supported so as to be movable along the camera conveyance guide 62.

Further, inside the camera conveyance guide 62, a screw bolt 67 axially rotated by a camera conveyance motor 64 is extended, and the image reading camera 63 is screwed onto the screw bolt 67, so that the camera conveyance motor 64.
Is reciprocated in a direction orthogonal to the moving direction of the inspection table 4 by the screw bolt 67 that is rotated by the drive of the. Further, a camera start point sensor 65 and a camera end point sensor 66, which are limit switches and photo interrupters, are provided at both end positions of the camera conveyance guide 62, and detect the start point and end point positions of the image reading camera 63. An image data processing circuit 300, which will be described later, is connected to the image reading camera 63, and the read pattern image data is processed by a required algorithm to detect a pattern defect.

[Labeling Section (Defect Display Section)] Label sticking section 7 provided at a position adjacent to the defect inspection section 6
As shown in FIG. 4, a label transport guide 71 is extendedly supported in parallel with the camera transport guide 62 so as to extend between the inspection table guides 3, and the label transport device 72 extends along the guide 71 and the base plate. It is supported so that it can move in the width direction. Further, in the label transport guide 71, screw bolts 74 axially rotated by the label transport motor 73 are extended in parallel to each other.
The screw 2 is screwed into the screw bolt 74, and is reciprocated in a direction orthogonal to the moving direction of the inspection table 4 by the axial rotation of the screw bolt 74, that is, in a direction parallel to the image reading camera 63. Further, a label transport start point sensor 75 and a label transport end point sensor 76, which are limit switches and photo interrupters, are provided at both end positions of the label transport guide 71, and detect the start point and end point positions of the label transport device 72.

Further, the label carrier 72 serves as a label suction head, and in this case, the suction nozzle 7 for performing vacuum suction.
7 is supported. The label suction nozzle 77 is configured as a pair of vacuum suction nozzles protruding from the lower surface of the housing of the label transporter 72, and the vacuum pump 10 described later is used.
Connected to 0. Then, the tip can be brought into contact with the surface of the label, and then the label can be vacuum-sucked by performing vacuuming with a vacuum pump.

Further, a label printer 9 is provided in a part of the inspection table guide near the starting point position of the label transport guide 71, and the position of the defective portion detected by the defect inspection section 6 is displayed. Print the label L. This printing can be arbitrarily set with an arrow or a triangular mark indicating a defect position, a defect type (name), a defect serial number, or the like. The printed label is formed, for example, as a sticker having a back surface coated with an adhesive, is conveyed by the label suction nozzle 77 of the label conveyor 72, and is affixed to a defective portion of the inspected mask film. Incidentally, 100 is a vacuum pump, and the film suction hole 41, the suction nozzle 58, the label suction nozzle 77 and the like are selectively or simultaneously brought into a vacuum state by the switching operation of the switching valve 101, and the mask film and the label are vacuum-sucked.

FIG. 5 is a block diagram of the above-mentioned respective parts. In particular, the image reading camera 63 is connected to the image processing circuit 300, the image processing part 301 performs image processing, and the judging part 302 judges a defect. It The determination result is input to the mechanism control unit 400, and the label printer 9 and the label sticking unit 7 are controlled by the output of the mechanism control unit 400. Incidentally, 201 is an operation panel, and 202 is a display unit.

Next, the film inspection and label attaching steps of the inspection apparatus having the above structure will be described with reference to the flow chart of FIG. The film to be inspected MF is stacked in the film supply cassette 2A, and when the inspection table 4 is moved to the film storage cassette 2B side, the film to be inspected is vacuum-adsorbed by the film elevating arm 52 of the film mounting portion 5A. Can be lifted. Then, when the inspection table 4 is returned to the starting point position on the film supply cassette 2A, it is mounted on the inspection table 4.

Next, the inspection table 4 is intermittently started to move toward the end point side, the illumination light source 61 is turned on to start the illumination of the film to be inspected, and at the same time, the camera conveyance motor 64 is driven to drive the image reading camera. 63 is moved in a direction orthogonal to the moving direction of the inspection table 4. As a result, the image reading camera 63 reads the pattern of the film to be inspected as image data with a required width dimension.
After that, the inspection table 4 is intermittently moved for each width dimension read by the image reading camera 63, and the image reading camera 63 is repeatedly reciprocally moved correspondingly,
The pattern on the entire surface of the film to be inspected MF can be read as image data.

Next, the image data read by the image reading camera 63 is processed by the image data processing circuit 300. When a defect is detected, one sheet is printed for each defect detected by the label printer 9 under the control of the mechanism control unit 400. Is printed as a label L. This printed label L
Is vacuum-sucked by the label suction nozzle 77, and the mechanism controller 400 drives the label transport motor 73 based on the detected coordinate data of the defect, so that the label transporter 72 is moved to the required position in the width direction of the inspection table 4. Be moved. Then, when the label transporter 72 is moved onto the defective portion of the inspected film MF that is moved together with the inspection table 4, the label adsorbed by the label adsorption nozzle 77 is pressed against the inspected film MF surface, The label L is attached to the film surface by adhesive force.

After that, by repeating the above-mentioned operation, a plurality of defective portions of the film MF to be inspected are detected and the defective portions are detected after an extremely short time, as shown in FIG. The label L can be attached to, and the label is attached to all the defects of the film to be inspected while the inspection table 4 is moved to the end point position. When the inspection table 4 is moved to the end position, the inspected film under inspection (inspected film) MF on the inspection table 4 is lifted above the inspection table 4 by the film elevating arm 52 of the film lowering section 5B. Be done. Then, when the inspection table is returned to the starting point position to mount the next film to be inspected, the inspected film is stored in the film storage cassette 2B.

Labels L are attached to the inspected mask films MF thus inspected in correspondence with the defective portions as shown in FIG. When a pattern defect is to be corrected for the inspected film taken out from the film storage cassette, the pattern defect may be found with this label as a target and the defect may be corrected. This makes it easier to find the defective part,
Defect repair work can be performed accurately and quickly.

Therefore, in the inspection device of this embodiment,
Detection of defects in the defect inspection unit 6 with respect to the mask film MF which is moved in one direction by the inspection table 4,
The label L for displaying defects in the label attaching unit 7 can be attached in a synchronous manner. Therefore, of the XY drive mechanism that constitutes the defect inspection unit 6 and the XY drive mechanism that constitutes the label sticking unit 7, the drive mechanism in the direction in which the inspection table 4 moves can be shared by both units, and at least This commonized mechanism can be omitted. Further, by making the one-way drive mechanism common, it becomes easy to integrally configure the defect inspection unit 6 and the label sticking unit 7, and the inspection device in which these are integrally incorporated can be downsized. can do.

In the above embodiment, the inspection device of the type in which a label is attached to the defective portion of the inspected mask film to display the defect is shown. However, an apparatus for plotting a required mark on the defective portion of the mask film, Alternatively, for a variety of inspection devices having different defect display systems, such as an inspection device in which a transparent sheet is overlaid on a mask film and a window is opened by a cutter or the like at a portion corresponding to the defective portion of this transparent sheet. The present invention can be similarly applied.

[0026]

As described above, according to the present invention, the defect inspection section and the defect display section are provided in the direction orthogonal to the moving direction of the inspection table, and the defect inspection is performed on the mask film which is moved in one direction by the inspection table. Since the defect display and the defect display are performed synchronously, the defect inspection and defect display mechanisms can be made common, and the size and cost of the inspection device integrally including these mechanisms can be reduced. .

[Brief description of drawings]

FIG. 1 is a front configuration diagram of an embodiment of an inspection apparatus of the present invention.

FIG. 2 is a plan configuration diagram in which a part of the inspection device of FIG. 1 is omitted.

FIG. 3 is a schematic perspective view of a defect inspection unit.

FIG. 4 is a schematic perspective view of a label sticking portion.

5 is a block configuration diagram of the inspection device in FIG. 1. FIG.

FIG. 6 is a flowchart showing each operation of defect inspection and label attachment.

FIG. 7 is a schematic plan view showing operating states of a defect inspection unit and a label sticking unit.

FIG. 8 is a plan view of a mask film to which a label is attached.

[Explanation of symbols]

 2A film supply cassette 2B film storage cassette 4 inspection table 5A film loading section 5B film loading section 6 defect inspection section 7 label sticking section (defect display section) 9 label printer MF mask film L label

Claims (2)

[Claims] 1. An inspection table on which a mask film to be inspected is mounted and which is moved in one direction, and a defect inspection section which is moved in a direction orthogonal to the moving direction of the inspection table to detect pattern defects of the mask film. A mask film inspecting apparatus comprising: a defect display unit that displays a defect at a defect location detected by moving in a direction parallel to the defect inspection unit. 2. The mask film inspecting apparatus according to claim 1, wherein the defect display section is a label sticking section for sticking a label indicating a defect to a position corresponding to the defect of the mask film.