JPH0533915B2 - - Google Patents

Info

Publication number
JPH0533915B2
JPH0533915B2 JP62016512A JP1651287A JPH0533915B2 JP H0533915 B2 JPH0533915 B2 JP H0533915B2 JP 62016512 A JP62016512 A JP 62016512A JP 1651287 A JP1651287 A JP 1651287A JP H0533915 B2 JPH0533915 B2 JP H0533915B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62016512A
Other versions
JPS63183885A (en
Inventor
Koichi Togashi
Original Assignee
Nippon Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co filed Critical Nippon Electric Co
Priority to JP62016512A priority Critical patent/JPH0533915B2/ja
Publication of JPS63183885A publication Critical patent/JPS63183885A/en
Publication of JPH0533915B2 publication Critical patent/JPH0533915B2/ja
Anticipated expiration legal-status Critical
Application status is Expired - Lifetime legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41MPRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
    • B41M5/00Duplicating or marking methods; Sheet materials for use therein
    • B41M5/24Ablative recording, e.g. by burning marks; Spark recording
JP62016512A 1987-01-26 1987-01-26 Expired - Lifetime JPH0533915B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62016512A JPH0533915B2 (en) 1987-01-26 1987-01-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62016512A JPH0533915B2 (en) 1987-01-26 1987-01-26

Publications (2)

Publication Number Publication Date
JPS63183885A JPS63183885A (en) 1988-07-29
JPH0533915B2 true JPH0533915B2 (en) 1993-05-20

Family

ID=11918324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62016512A Expired - Lifetime JPH0533915B2 (en) 1987-01-26 1987-01-26

Country Status (1)

Country Link
JP (1) JPH0533915B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151389A (en) * 1990-09-10 1992-09-29 Rockwell International Corporation Method for dicing semiconductor substrates using an excimer laser beam
JPH1158043A (en) * 1997-07-31 1999-03-02 Lsi Logic Corp Laser marking method and its device
US6413839B1 (en) 1998-10-23 2002-07-02 Emcore Corporation Semiconductor device separation using a patterned laser projection
TWI248244B (en) 2003-02-19 2006-01-21 J P Sercel Associates Inc System and method for cutting using a variable astigmatic focal beam spot
JP4565994B2 (en) * 2004-12-28 2010-10-20 信越半導体株式会社 Manufacturing method of semiconductor wafer with laser mark, and semiconductor wafer
JP2008084918A (en) * 2006-09-26 2008-04-10 Casio Comput Co Ltd Method of forming mark of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6195990A (en) * 1984-10-18 1986-05-14 Fujitsu Ltd Marking method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6195990A (en) * 1984-10-18 1986-05-14 Fujitsu Ltd Marking method

Also Published As

Publication number Publication date
JPS63183885A (en) 1988-07-29

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