JPH0533371B2 - - Google Patents
Info
- Publication number
- JPH0533371B2 JPH0533371B2 JP59057582A JP5758284A JPH0533371B2 JP H0533371 B2 JPH0533371 B2 JP H0533371B2 JP 59057582 A JP59057582 A JP 59057582A JP 5758284 A JP5758284 A JP 5758284A JP H0533371 B2 JPH0533371 B2 JP H0533371B2
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- mirror
- concave mirror
- convex mirror
- optical axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 63
- 230000004075 alteration Effects 0.000 claims description 21
- 235000012431 wafers Nutrition 0.000 description 24
- 238000010586 diagram Methods 0.000 description 20
- 201000009310 astigmatism Diseases 0.000 description 15
- 238000005286 illumination Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 206010010071 Coma Diseases 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/02—Catoptric systems, e.g. image erecting and reversing system
- G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
- G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
- G02B17/0615—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in wich all of the mirrors share a common axis of rotational symmetry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59057582A JPS60201315A (ja) | 1984-03-26 | 1984-03-26 | 反射光学系 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59057582A JPS60201315A (ja) | 1984-03-26 | 1984-03-26 | 反射光学系 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60201315A JPS60201315A (ja) | 1985-10-11 |
| JPH0533371B2 true JPH0533371B2 (de) | 1993-05-19 |
Family
ID=13059844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59057582A Granted JPS60201315A (ja) | 1984-03-26 | 1984-03-26 | 反射光学系 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60201315A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2603225B2 (ja) * | 1986-07-11 | 1997-04-23 | キヤノン株式会社 | Ｘ線投影露光装置及び半導体製造方法 |
| JP2673517B2 (ja) * | 1987-06-15 | 1997-11-05 | キヤノン株式会社 | 露光装置 |
| JP2628164B2 (ja) * | 1987-06-15 | 1997-07-09 | キヤノン株式会社 | 露光装置 |
| KR950010029B1 (ko) * | 1989-11-30 | 1995-09-06 | 휴우즈 에어크라프트 캄파니 | 차량 계기 장치용 이중-미러 허상 디스플레이 |
| JPH07147229A (ja) * | 1994-08-04 | 1995-06-06 | Canon Inc | Ｘ線投影露光装置 |
| JPH07147230A (ja) * | 1994-08-04 | 1995-06-06 | Canon Inc | 縮小投影露光装置および半導体製造方法 |
-
1984
- 1984-03-26 JP JP59057582A patent/JPS60201315A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60201315A (ja) | 1985-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |