JPH05330845A - Production of optical fiber preform - Google Patents

Production of optical fiber preform

Info

Publication number
JPH05330845A
JPH05330845A JP14225792A JP14225792A JPH05330845A JP H05330845 A JPH05330845 A JP H05330845A JP 14225792 A JP14225792 A JP 14225792A JP 14225792 A JP14225792 A JP 14225792A JP H05330845 A JPH05330845 A JP H05330845A
Authority
JP
Japan
Prior art keywords
glass
pipe
dopant
optical fiber
porous glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14225792A
Other languages
Japanese (ja)
Other versions
JP3449488B2 (en
Inventor
Akira Urano
章 浦野
Hiroo Kanamori
弘雄 金森
Shinji Ishikawa
真二 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP14225792A priority Critical patent/JP3449488B2/en
Publication of JPH05330845A publication Critical patent/JPH05330845A/en
Application granted granted Critical
Publication of JP3449488B2 publication Critical patent/JP3449488B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

PURPOSE:To increase the refractive index by placing a porous glass body contg. SiO2 in the atmosphere contg. O2 and a metal halide, diffusing the formed oxide of a dopant in the glass body and then vitrifying the glass body. CONSTITUTION:Gaseous O2 and a metal halide such as GeCl4 forming a dopant to increase the refractive index by the reaction with O2 are introduced in a specified ratio into a quartz-glass reaction vessel 3 arranged in a sintering furnace 5. The vessel 3 is heated by a heat source 4, hence a porous glass body 2 held in the vessel 3 by a supporting rod 1 is heated, and the dopant is uniformly diffused in the porous glass body 2. The vessel 3 is then filled with a gaseous He atmosphere, the porous glass body is heated to a specified temp. and vitrified, and an optical fiber preform is obtained.

Description

【発明の詳細な説明】Detailed Description of the Invention

【０００１】[0001]

【産業上の利用分野】本発明は、コア用石英ガラスに多
量のドーパントを添加する光ファイバ用母材の製造方法
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing an optical fiber preform by adding a large amount of dopant to silica glass for core.

【０００２】[0002]

【従来の技術】従来、光ファイバを製造する方法のう
ち、ＶＡＤ法、ＯＶＰＯ法は生産性、品質の点で優れて
おり注目されている。これらの方法は、まず火炎加水分
解反応により、石英ガラス微粒子を生成し、回転する出
発材上に順次堆積し、棒状の多孔質体を作る。次いで、
この多孔質体を所定の雰囲気中で加熱処理し、脱水・溶
融ガラス化し、光ファイバ用母材を作成し、この母材を
線引して光ファイバを得る方法である。2. Description of the Related Art Conventionally, of the methods for manufacturing an optical fiber, the VAD method and the OVPO method have been attracting attention because of their excellent productivity and quality. In these methods, first, silica glass fine particles are generated by a flame hydrolysis reaction and sequentially deposited on a rotating starting material to form a rod-shaped porous body. Then
This is a method in which the porous body is heat-treated in a predetermined atmosphere, dehydrated and molten into glass to prepare a preform for an optical fiber, and the preform is drawn to obtain an optical fiber.

【０００３】光ファイバは、主として光の伝搬するコア
部と、その周囲のクラッド部から構成され、コア部の屈
折率をｎ1、クラッド部の屈折率をｎ2とすると開口数
（Ｎ．Ａ．）は数１で定義される。石英をベースとする
光ファイバでは、（１）コアに屈折率を上げる添加剤を
添加する方法、（２）クラッドに屈折率を下げる添加剤
を添加する方法、（３）両者を併用する方法がある。こ
こでよく用いられる屈折率を上げる添加剤としてはＧｅ
Ｏ2，Ｐ2Ｏ5，Ａｌ2Ｏ3，ＴｉＯ2があり、屈折率を下げ
る添加剤としてはＢ2Ｏ3，Ｆ等がある。An optical fiber is mainly composed of a core portion through which light propagates and a clad portion around the core portion. When the refractive index of the core portion is n 1 and the refractive index of the clad portion is n 2 , the numerical aperture (N.A. .) Is defined by Equation 1. In a quartz-based optical fiber, there are (1) a method of adding an additive for increasing the refractive index to the core, (2) a method of adding an additive for decreasing the refractive index to the cladding, and (3) a method of using both of them together. is there. Ge is often used as an additive for increasing the refractive index.
There are O 2 , P 2 O 5 , Al 2 O 3 and TiO 2 , and additives such as B 2 O 3 and F that lower the refractive index.

【０００４】[0004]

【数１】 [Equation 1]

【０００５】このうちＧｅＯ2は原料が安価で、比較的
蒸気圧が高く取扱いが容易であること、小量の添加で屈
折率を効果的に上げることができ、最もよく使用される
添加剤である。ところで、ＧｅＯ2を石英ガラス中に添
加する代表的方法としては、火炎加水分解反応でＳｉＯ
2を合成する際に、原料ガス中にＧｅＣｌ4を混合するこ
とによってＧｅＯ2の添加された多孔質ガラス体を合成
し、これを透明ガラス化する方法である。Of these, GeO 2 is the most commonly used additive because it is a cheap raw material, has a relatively high vapor pressure and is easy to handle, and can add a small amount to effectively increase the refractive index. is there. By the way, as a typical method of adding GeO 2 into quartz glass, SiO 2 is used in a flame hydrolysis reaction.
This is a method of synthesizing 2 and synthesizing a porous glass body to which GeO 2 is added by mixing GeCl 4 into a raw material gas and making it a transparent vitrification.

【０００６】[0006]

【発明が解決しようとする課題】上述の従来方法では、
ＧｅＯ2を多く添加するために原料ガス中のＧｅＣｌ4の
分圧を高くするが、やがて飽和し、純粋石英ガラスに対
する屈折率差で高々２％であり、それ以上添加する必要
があっても困難であった。SUMMARY OF THE INVENTION In the above conventional method,
Although the partial pressure of GeCl 4 in the raw material gas is increased in order to add a large amount of GeO 2 , it eventually becomes saturated, and the difference in refractive index with respect to pure silica glass is at most 2%. It is difficult to add more than that. Met.

【０００７】[0007]

【課題を解決するための手段】本発明は、上述の問題点
を解消するための光ファイバ用母材の製造方法に関する
ものであり、その特徴とするところは、ＳｉＯ2を主成
物とする多孔質ガラス体を形成し、該多孔質ガラス体を
少なくともＯ2及びこれと熱反応してガラスの屈折率を
高めるドーパントの酸化物を生成する金属ハロゲン化物
とを含む雰囲気におき、生成したドーパントの酸化物を
前記多孔質ガラス体の内部に拡散せしめ、しかる後、該
多孔質ガラス体を透明ガラス化する方法である。SUMMARY OF THE INVENTION The present invention relates to a method for manufacturing an optical fiber preform for solving the above-mentioned problems, which is characterized in that SiO 2 is a main product. A porous glass body is formed, and the porous glass body is placed in an atmosphere containing at least O 2 and a metal halide that thermally reacts with O 2 to form an oxide of the dopant that increases the refractive index of the glass, and the formed dopant is formed. Is diffused inside the porous glass body, and then the porous glass body is made into a transparent glass.

【０００８】また、より効果的には、少なくともＯ2及
びこれと熱反応してガラスの屈折率を高めるドーパント
の酸化物を生成する金属ハロゲン化物とを含む雰囲気で
多孔質ガラス体を透明ガラス化することが好ましい。Further, more effectively, the porous glass body is made into a transparent vitrification in an atmosphere containing at least O 2 and a metal halide which reacts with O 2 and heat to generate an oxide of a dopant for increasing the refractive index of glass. Preferably.

【０００９】他の実現手段としては、ガラスパイプの外
周に該パイプの軸に沿って移動する熱源を配設し、該パ
イプ内に少なくとも気相状のガラス原料とＯ2ガスとを
送り込み、これと前記熱源によって反応し生成したＳｉ
Ｏ2を前記パイプの内側表面に多孔質ガラスの状態で堆
積し、次いで、少なくともＯ2及びこれと反応してガラ
スの屈折率を高めるドーパントの酸化物を生成する金属
ハロゲン化物とを前記パイプ内に送り込み、前記熱源に
よって反応して生成したドーパントの酸化物を前記多孔
質ガラスの中に拡散させ、しかる後、該多孔質ガラスを
透明ガラス化し、該パイプを中実化する方法であり、As another means for realizing the above, a heat source that moves along the axis of the glass pipe is provided on the outer periphery of the glass pipe, and at least a gaseous glass raw material and O 2 gas are fed into the pipe, Generated by the reaction with the heat source
O 2 is deposited on the inner surface of the pipe in the form of a porous glass, and then at least O 2 and a metal halide which reacts therewith to form an oxide of the dopant which enhances the refractive index of the glass are introduced into the pipe. In the method, the oxide of the dopant produced by the reaction by the heat source is diffused into the porous glass, and then the transparent glass is made into a transparent glass, and the pipe is solidified.

【００１０】ガラスパイプ内に少なくともＯ2及びこれ
と反応してガラスの屈折率を高めるドーパントの酸化物
を生成する金属ハロゲン化物を送り込みながら多孔質ガ
ラスを透明ガラス化することが好ましい。上記の金属ハ
ロゲン化物としてはＧｅＣｌ4が最も適切な原料であ
る。It is preferable that the porous glass is made into a transparent vitrification while at least feeding O 2 and a metal halide which reacts with O 2 to form an oxide of a dopant for increasing the refractive index of the glass into the glass pipe. GeCl 4 is the most suitable raw material for the above metal halide.

【００１１】[0011]

【作用】気相反応によりＧｅＯ2をドープした石英ガラ
スを合成する場合は、まず、ＳｉＣｌ4が酸化反応によ
ってＳｉＯ2の粒子を生成し、次いで、この粒子の周辺
にＧｅＯ2が析出・固溶して形成される。この反応にお
いて、ＧｅＯ2は核形成能力が低く、単独でＧｅＯ2の粒
子が堆積することは難しい。従って、ＳｉＯ2粒子の生
成温度以下ではＧｅＯ2のみの粒子体が形成されない。In the case of synthesizing GeO 2 -doped quartz glass by the vapor phase reaction, first, SiCl 4 produces SiO 2 particles by the oxidation reaction, and then GeO 2 is precipitated and solid-solved around the particles. Formed. In this reaction, GeO 2 has a low nucleation ability, and it is difficult for GeO 2 particles to deposit alone. Therefore, the particles of only GeO 2 are not formed below the generation temperature of SiO 2 particles.

【００１２】一方、ＳｉＯ2が生成する温度領域ではＧ
ｅＯ2の蒸気圧が高いために揮散し、原料ガス中のＧｅ
Ｃｌ4の分圧を高くしても添加できる量には限界があ
る。これに対して、本発明は既に別工程で形成した多孔
質ガラス体をＯ2およびＧｅＣｌ4の雰囲気中に導入し、
これを加熱する方法であるからＳｉＯ2の生成温度とは
独立にＧｅＯ2を生成することができ、これが多孔質ガ
ラスの表面粒子に固溶し、徐々に内部へ拡散するのであ
る。On the other hand, in the temperature range where SiO 2 is produced, G
Since the vapor pressure of eO 2 is high, it vaporizes and Ge in the source gas
There is a limit to the amount that can be added even if the partial pressure of Cl 4 is increased. In contrast, the present invention introduces the porous glass body already formed in another step into the atmosphere of O 2 and GeCl 4 ,
Since this is a method of heating this, GeO 2 can be generated independently of the generation temperature of SiO 2 , and this forms a solid solution with the surface particles of the porous glass and gradually diffuses inside.

【００１３】また、このようにドーパントを添加した多
孔質ガラス体を透明ガラス化するに際し、Ｏ2およびＧ
ｅＣｌ4を含む雰囲気に保持することにより多孔質ガラ
ス体中に含まれるＧｅＯ2の揮散を防ぐことができる。Further, when the porous glass body to which the dopant is added as described above is made into a transparent vitreous material, O 2 and G
By keeping the atmosphere containing eCl 4 , it is possible to prevent the evaporation of GeO 2 contained in the porous glass body.

【００１４】[0014]

【実施例】【Example】

（実施例１） 図１は本発明の一実施例に係わる光ファ
イバ用母材の製造方法の説明図であり、１は多孔質ガラ
ス体を保持する支持棒、２は光ファイバのコアを構成す
るための多孔質ガラス体、３は石英ガラスからなる反応
容器、４は熱源、５は焼結炉である。まず、反応容器３
の中にＧｅＣｌ4：５０ｃｃ／分、Ｏ2：５００ｃｃ／分
の割合で導入し、容器内の温度を熱源４により８００℃
に保持して多孔質ガラス体２を１Ｈｒ加熱処理した。次
いで容器内の雰囲気を１気圧のＨｅガスに保ち、１４０
０℃で３時間加熱して透明ガラス化した。このガラスを
分析したところ、ＧｅＯ2の濃度は５０重量％であり、
ほぼ均一に添加されていたが外周部にＧｅＯ2の少ない
部分があった。(Embodiment 1) FIG. 1 is an explanatory view of a method for manufacturing an optical fiber preform according to an embodiment of the present invention, in which 1 is a support rod for holding a porous glass body and 2 is a core of an optical fiber. For this purpose, 3 is a reaction vessel made of quartz glass, 4 is a heat source, and 5 is a sintering furnace. First, the reaction container 3
GeCl 4 : 50 cc / min, O 2 : 500 cc / min, and the temperature inside the container is 800 ° C. by the heat source 4.
The porous glass body 2 was heat-treated for 1 hour while being held at. Then, maintain the atmosphere in the container at 1 atmosphere of He gas,
It heated at 0 degreeC for 3 hours, and became transparent vitrification. When this glass was analyzed, the concentration of GeO 2 was 50% by weight,
Although it was added almost uniformly, there was a small amount of GeO 2 in the outer peripheral portion.

【００１５】（実施例２） 反応容器３の中にＧｅＣｌ
4：５０ｃｃ／分、Ｏ2：５００ｃｃ／分の割合で導入
し、容器内の温度を熱源４により８００℃に保持して多
孔質ガラス体２を１Ｈｒ加熱処理した。次いで容器内の
雰囲気は変えずに内部の温度を１４００℃に加熱して３
Ｈｒ保持したところ多孔質ガラス体は透明ガラス体とな
った。このガラスを分析したところ、ＧｅＯ2の濃度は
５０重量％であり、均一に添加されていた。Example 2 GeCl was placed in the reaction vessel 3.
It was introduced at a rate of 4:50 cc / min and O 2 : 500 cc / min, and the temperature inside the container was kept at 800 ° C. by the heat source 4 to heat-treat the porous glass body 2 for 1 hr. Next, heat the internal temperature to 1400 ° C without changing the atmosphere in the container and
When Hr was retained, the porous glass body became a transparent glass body. When this glass was analyzed, the concentration of GeO 2 was 50% by weight, and it was uniformly added.

【００１６】（実施例３） 図２は本発明の他の実施例
に係わる光ファイバ用母材の製造方法の説明図であり、
１１は石英ガラスからなるパイプ、１２はガラス旋盤の
回転支持機槽、１３は酸水素バーナーからなる熱源、１
４は多孔質ガラス層、１５は回転方向を示す。まず、パ
イプ１１の中にＯ2ガス：５００ｃｃ／分、ＳｉＣｌ4ガ
ス：１００ｃｃ／分の割合で導入し、パイプ１１を矢印
１５の方向に回転させながら熱源１３でパイプ内が１２
５０℃になるように加熱しながら軸方向に往復移動しＳ
ｉＯ2からなる多孔質ガラス層をパイプの内壁に形成し
た。(Embodiment 3) FIG. 2 is an explanatory view of a method for manufacturing an optical fiber preform according to another embodiment of the present invention.
Reference numeral 11 is a pipe made of quartz glass, 12 is a rotary support machine tank of a glass lathe, 13 is a heat source composed of an oxyhydrogen burner, and 1
Reference numeral 4 indicates a porous glass layer, and 15 indicates a rotation direction. First, O 2 gas: 500 cc / min and SiCl 4 gas: 100 cc / min were introduced into the pipe 11, and while the pipe 11 was rotated in the direction of the arrow 15, the heat source 13 caused the inside of the pipe to reach 12
While reciprocating in the axial direction while heating to 50 ° C, S
The porous glass layer consisting iO 2 was formed on the inner wall of the pipe.

【００１７】続いて、上記のパイプの中にＯ2ガス：５
００ｃｃ／分、ＧｅＣｌ4：５０ｃｃ／分の割合で導入
し、上記と同様にパイプ内が１０００℃になるように加
熱して、ＧｅＯ2を生成し、同時にＳｉＯ2の多孔質ガラ
ス層に固溶させ拡散させ多孔質ガラス層１４を形成し
た。次いで、パイプ内が１３００℃になるまで熱源１３
のみを調整して多孔質ガラスを透明ガラス化し、さらに
熱源１３を１６００℃に昇温して中実化した。このよう
にして得られた母材を線引してファイバを作成した。フ
ァイバのコアとクラッドの屈折率差は３％、波長１．３
μｍにおける伝送損失は０．６７ｄＢ／ｋｍであった。Subsequently, O 2 gas: 5 was introduced into the above pipe.
Introduced at a rate of 00 cc / min and GeCl 4 : 50 cc / min and heated to 1000 ° C. in the pipe in the same manner as above to generate GeO 2 and at the same time form a solid solution in the porous glass layer of SiO 2. And diffused to form a porous glass layer 14. Next, heat source 13 until the temperature inside the pipe reaches 1300 ° C
Only the glass was adjusted to make the porous glass transparent, and the heat source 13 was heated to 1600 ° C. to be solidified. The preform thus obtained was drawn to form a fiber. The refractive index difference between the core and the clad of the fiber is 3%, and the wavelength is 1.3.
The transmission loss at μm was 0.67 dB / km.

【００１８】（実施例４） まず、パイプ１１の中にＯ
2ガス：５００ｃｃ／分、ＳｉＣｌ4：１００ｃｃ／分、
ＧｅＣｌ4：３０ｃｃ／分の割合で導入し、パイプ内が
１１５０℃になるように前記同様に熱源１３によって加
熱して多孔質ガラス層をパイプの内壁に形成した。その
後の工程は実施例２と同様の条件によって光ファイバを
作成した。ファイバのコアとクラッドの屈折率差は３．
５％、波長１．３μｍにおける伝送損失は０．６９ｄＢ
／ｋｍであった。(Embodiment 4) First, in the pipe 11, O
2 gas: 500 cc / min, SiCl 4 : 100 cc / min,
GeCl 4 was introduced at a rate of 30 cc / min, and heated by the heat source 13 in the same manner as described above so that the temperature inside the pipe became 1150 ° C., thereby forming the porous glass layer on the inner wall of the pipe. In the subsequent steps, an optical fiber was created under the same conditions as in Example 2. The refractive index difference between the fiber core and the cladding is 3.
5%, transmission loss at wavelength 1.3 μm is 0.69 dB
It was / km.

【００１９】（比較例） 石英パイプ１１の中にＯ2ガ
ス：５００ｃｃ／分、ＳｉＣｌ4：１００ｃｃ／分、Ｇ
ｅＣｌ4：３０ｃｃ／分の割合で導入し、パイプ内が１
２５０℃になるように前記同様に熱源１３によって加熱
して直接ガラス層をパイプの内壁に形成した。次いで、
原料ガスの供給を停止し、熱源１３を１６００℃に昇温
して上記のパイプを中実化し、これを線引きしてファイ
バを作成した。ファイバのコアとクラッドの屈折率差は
０．７％、波長１．３μｍにおける伝送損失は０．７３
ｄＢ／ｋｍであった。(Comparative Example) O 2 gas: 500 cc / min, SiCl 4 : 100 cc / min, G in the quartz pipe 11
eCl 4: introduced at a rate of 30cc / min, in the pipe 1
The glass layer was heated by the heat source 13 in the same manner as described above to 250 ° C. to directly form the glass layer on the inner wall of the pipe. Then
The supply of the raw material gas was stopped, the heat source 13 was heated to 1600 ° C. to solidify the pipe, and this was drawn to form a fiber. The refractive index difference between the core and the cladding of the fiber is 0.7%, and the transmission loss at the wavelength of 1.3 μm is 0.73.
It was dB / km.

【００２０】[0020]

【発明の効果】以上述べたように、本発明に係わる光フ
ァイバ用母材の製造方法によれば、一旦、多孔質ガラス
体を形成し、その後、酸素と反応して屈折率を高めるド
ーパントの酸化物を生成する金属ハロゲン化物を酸素と
共に供給した雰囲気でこれを加熱処理するので、ＳｉＯ
2粒子の生成温度に影響されることなく独立にドーパン
トを添加するのに最適な温度で効率よく、かつ、均一に
行うことができる。実施例ではドーピング物質として酸
化ゲルマニウムについて説明したが、その他酸化リン、
酸化チタン等に適用できる。As described above, according to the method for producing a base material for an optical fiber according to the present invention, a porous glass body is once formed, and thereafter, a dopant for increasing the refractive index by reacting with oxygen is formed. Since this is heat-treated in an atmosphere in which a metal halide that forms an oxide is supplied together with oxygen,
It is possible to carry out efficiently and uniformly at the optimum temperature for adding the dopant independently without being affected by the generation temperature of the two particles. Although germanium oxide was described as a doping substance in the examples, other phosphorus oxides,
It can be applied to titanium oxide and the like.

【図面の簡単な説明】[Brief description of drawings]

【図１】本発明の一実施例に係わる光ファイバ用母材の
製造方法の説明図である。FIG. 1 is an explanatory diagram of a method for manufacturing an optical fiber preform according to an embodiment of the present invention.

【図２】本発明の他の実施例に係わる光ファイバ用母材
の製造方法の説明図である。FIG. 2 is an explanatory diagram of a method for manufacturing an optical fiber preform according to another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

１：支持棒 ２：多孔質ガラス体 ３：反応容器 ４：熱源 ５：焼結炉 １１：ガラスパイプ １２：ガラス旋盤の回転支持機槽 １３：熱源 １４：多孔質ガラス層 １５：回転方向 １６：原料ガス等の導入方向 1: Support rod 2: Porous glass body 3: Reaction vessel 4: Heat source 5: Sintering furnace 11: Glass pipe 12: Rotating support tank of glass lathe 13: Heat source 14: Porous glass layer 15: Rotation direction 16: Direction of introduction of raw material gas, etc.

Claims (5)

【特許請求の範囲】[Claims] 【請求項１】 ＳｉＯ2を主成物とする多孔質ガラス体
を形成し、該多孔質ガラス体を少なくともＯ2及びこれ
と熱反応してガラスの屈折率を高めるドーパントの酸化
物を生成する金属ハロゲン化物とを含む雰囲気におき、
生成したドーパントの酸化物を前記多孔質ガラス体の内
部に拡散せしめ、しかる後、該多孔質ガラス体を透明ガ
ラス化することを特徴とする光ファイバ用母材の製造方
法。1. A porous glass body mainly composed of SiO 2 is formed, and at least O 2 and the porous glass body are thermally reacted with the glass body to form an oxide of a dopant for increasing the refractive index of glass. Place in an atmosphere containing a metal halide,
A method for producing an optical fiber preform, characterized in that the produced oxide of a dopant is diffused into the inside of the porous glass body, and then the porous glass body is made into a transparent glass. 【請求項２】 少なくともＯ2及びこれと熱反応してガ
ラスの屈折率を高めるドーパントの酸化物を生成する金
属ハロゲン化物とを含む雰囲気で多孔質ガラス体を透明
ガラス化することを特徴とする請求項１記載の光ファイ
バ用母材の製造方法。2. A porous vitreous body is vitrified into a transparent glass in an atmosphere containing at least O 2 and a metal halide which is thermally reacted with the O 2 to produce an oxide of a dopant for increasing the refractive index of the glass. The method for producing a preform for an optical fiber according to claim 1. 【請求項３】 ガラスパイプの外周に該パイプの軸に沿
って移動する熱源を配設し、該パイプ内に少なくとも気
相状のガラス原料とＯ2ガスとを送り込み、これと前記
熱源によって反応し生成したＳｉＯ2を前記パイプの内
側表面に多孔質ガラスの状態で堆積し、次いで、少なく
ともＯ2及びこれと反応してガラスの屈折率を高めるド
ーパントの酸化物を生成する金属ハロゲン化物とを前記
パイプ内に送り込み、前記熱源によって反応して生成し
たドーパントの酸化物を前記多孔質ガラスの中に拡散さ
せ、しかる後、該多孔質ガラスを透明ガラス化し、該パ
イプを中実化することを特徴とする光ファイバ用母材の
製造方法。3. A heat source that moves along the axis of the glass pipe is provided on the outer circumference of the glass pipe, and at least a gaseous glass raw material and O 2 gas are fed into the pipe, and this and the heat source react with each other. The produced SiO 2 is deposited on the inner surface of the pipe in the form of a porous glass, and then at least O 2 and a metal halide which reacts therewith to produce an oxide of a dopant for increasing the refractive index of the glass are added. It is sent into the pipe, the oxide of the dopant generated by the reaction by the heat source is diffused into the porous glass, and then the porous glass is made into a transparent glass to solidify the pipe. A method for producing a base material for an optical fiber, which is characterized. 【請求項４】 ガラスパイプ内に少なくともＯ2及びこ
れと反応してガラスの屈折率を高めるドーパントの酸化
物を生成する金属ハロゲン化物を送り込みながら多孔質
ガラスを透明ガラス化することを特徴とする請求項３記
載の光ファイバ用母材の製造方法。4. The porous glass is made into a transparent glass while at least O 2 and a metal halide that reacts with O 2 to generate an oxide of a dopant that increases the refractive index of the glass are fed into the glass pipe. The method for manufacturing a base material for an optical fiber according to claim 3. 【請求項５】 金属ハロゲン化物がＧｅＣｌ4であるこ
とを特徴とする請求項１乃至４記載の光ファイバ用母材
の製造方法。5. The method for producing an optical fiber preform according to claim 1, wherein the metal halide is GeCl 4 .
JP14225792A 1992-06-03 1992-06-03 Manufacturing method of preform for optical fiber Expired - Lifetime JP3449488B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14225792A JP3449488B2 (en) 1992-06-03 1992-06-03 Manufacturing method of preform for optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14225792A JP3449488B2 (en) 1992-06-03 1992-06-03 Manufacturing method of preform for optical fiber

Publications (2)

Publication Number Publication Date
JPH05330845A true JPH05330845A (en) 1993-12-14
JP3449488B2 JP3449488B2 (en) 2003-09-22

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ID=15311122

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3449488B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6698249B1 (en) * 1998-10-21 2004-03-02 Sumitomo Electric Industries, Ltd. Porous glass base material production device and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6698249B1 (en) * 1998-10-21 2004-03-02 Sumitomo Electric Industries, Ltd. Porous glass base material production device and method

Also Published As

Publication number Publication date
JP3449488B2 (en) 2003-09-22

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