JPH05325777A - Ferroelectric cold cathode - Google Patents
Ferroelectric cold cathodeInfo
- Publication number
- JPH05325777A JPH05325777A JP13322892A JP13322892A JPH05325777A JP H05325777 A JPH05325777 A JP H05325777A JP 13322892 A JP13322892 A JP 13322892A JP 13322892 A JP13322892 A JP 13322892A JP H05325777 A JPH05325777 A JP H05325777A
- Authority
- JP
- Japan
- Prior art keywords
- ferroelectric
- electrode
- cold cathode
- electrons
- substance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/306—Ferroelectric cathodes
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は電子ビームを放出する強
誘電体冷陰極に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ferroelectric cold cathode which emits an electron beam.
【０００２】[0002]
【従来の技術】図４は従来の電子ビームを放出する強誘
電体冷陰極であり、例えばＨ．Ｇｕｎｄｅｌ等によって
報告されたものである。（ジャーナル オブ アプライ
ド フィジックス ６９（２），Ｐｐ９７５’９１）４
１は第１の電極、４２は強誘電体、４３は第２の櫛形電
極である。2. Description of the Related Art FIG. 4 shows a conventional ferroelectric cold cathode which emits an electron beam. It was reported by Gundel et al. (Journal of Applied Physics 69 (2), Pp975'91) 4
Reference numeral 1 is a first electrode, 42 is a ferroelectric substance, and 43 is a second comb-shaped electrode.
【０００３】以上のように構成された従来の強誘電体冷
陰極に於いて、第１の電極４１と第２の櫛形電極４３の
間に交番電界を印加すると強誘電体４２内部に印加され
た電界を打ち消すような向きに分極が生じ、この分極が
印加交番電界の変化に伴って反転する際に第２の櫛形電
極４３の近傍に存在する電子をクーロン力により弾き飛
ばし電子放出を行う。In the conventional ferroelectric cold cathode constructed as described above, when an alternating electric field is applied between the first electrode 41 and the second comb-shaped electrode 43, it is applied inside the ferroelectric substance 42. Polarization occurs in such a direction as to cancel the electric field, and when this polarization is reversed with a change in the applied alternating electric field, the electrons existing in the vicinity of the second comb-shaped electrode 43 are repelled by the Coulomb force to emit electrons.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら上記のよ
うな構成では、第２の櫛形電極４３の近傍に存在する電
子の供給減は、周囲の電離したガスや第２の櫛形電極４
３から浸みだした電子と考えられているが、不明確であ
り制御も難しいので電子放出特性の安定した実用的な電
子放出源としては使えないという問題点を有していた。
更に、飛び出した電子の一部は第２の櫛形電極４３に吸
収されてしまい電子放出の効率が落ちるという問題点も
有していた。However, in the above-mentioned configuration, the supply of electrons existing in the vicinity of the second comb-shaped electrode 43 is reduced by the ionized gas in the surroundings and the second comb-shaped electrode 4.
It is considered that the electrons ooze out from No. 3, but since it is unclear and difficult to control, it has a problem that it cannot be used as a practical electron emission source with stable electron emission characteristics.
Further, there is a problem that some of the ejected electrons are absorbed by the second comb-shaped electrode 43 and the efficiency of electron emission is reduced.
【０００５】本発明はかかる点に鑑み、実用的な電子放
出源としての強誘電体冷陰極を提供することを目的とす
る。In view of the above points, the present invention has an object to provide a ferroelectric cold cathode as a practical electron emission source.
【０００６】[0006]
【課題を解決するための手段】本発明の第１の発明は、
強誘電体と前記強誘電体の一方の面に形成された第１の
電極と前記強誘電体の他方の面に形成された第２の電極
とからなる強誘電体冷陰極に於いて前記強誘電体の表面
層近傍の抵抗率を制御する手段とからなるものである。The first invention of the present invention is as follows:
A ferroelectric cold cathode comprising a ferroelectric and a first electrode formed on one surface of the ferroelectric and a second electrode formed on the other surface of the ferroelectric. And means for controlling the resistivity near the surface layer of the dielectric.
【０００７】また、本発明の第２の発明は、強誘電体と
前記強誘電体の一方の面に形成された第１の電極と前記
強誘電体の他方の面に形成された第２の電極とからなる
強誘電体冷陰極に於いて前記第１の電極と前記第２の電
極との間欠的に前記強誘電体の絶縁破壊電圧以上の電圧
を印加する事を特徴とする強誘電体冷陰極である。A second aspect of the present invention is a ferroelectric and a first electrode formed on one surface of the ferroelectric and a second electrode formed on the other surface of the ferroelectric. In a ferroelectric cold cathode including an electrode, a voltage higher than a dielectric breakdown voltage of the ferroelectric is applied intermittently between the first electrode and the second electrode. It is a cold cathode.
【０００８】また、本発明の第３の発明は、強誘電体と
前記強誘電体の一方の面に形成された第１の電極と前記
強誘電体の他方の面に形成された第２の電極とからなる
強誘電体冷陰極に於いて前記第２の電極を分割し、分割
した電極間に電位差を与えることを特徴とする強誘電体
冷陰極である。A third aspect of the present invention is a ferroelectric and a first electrode formed on one surface of the ferroelectric, and a second electrode formed on the other surface of the ferroelectric. A ferroelectric cold cathode comprising an electrode and a ferroelectric cold cathode, wherein the second electrode is divided and a potential difference is applied between the divided electrodes.
【０００９】また、本発明の第４の発明は、強誘電体と
前記強誘電体の一方の面に形成された第１の電極と前記
強誘電体の他方の面に形成された第２の電極とからなる
強誘電体冷陰極に於いて前記第２の電極上に形成された
絶縁膜と前記絶縁膜上に形成され、前記第２の電極の電
位よりも低い電位である第３の電極とからなるものであ
る。A fourth aspect of the present invention is the ferroelectric material, the first electrode formed on one surface of the ferroelectric material, and the second electrode formed on the other surface of the ferroelectric material. In a ferroelectric cold cathode including an electrode, an insulating film formed on the second electrode and a third electrode formed on the insulating film and having a potential lower than that of the second electrode. It consists of and.
【００１０】[0010]
【作用】本発明の第１の作用は強誘電体表面層近傍の抵
抗率を制御することにより、電極から強誘電体への電子
供給量を制御すると共に、電極の極性が反転したときに
浸みだした電子が電極に戻る時間を分極反転の時間より
も長くすることにより安定な電子放出を行う。The first function of the present invention is to control the resistivity in the vicinity of the ferroelectric surface layer, thereby controlling the amount of electrons supplied from the electrode to the ferroelectric, and at the same time when the polarity of the electrode is reversed. Stable electron emission is achieved by making the time for the emitted electrons to return to the electrode longer than the time for polarization reversal.
【００１１】本発明の第２の作用は電極間に間欠的に強
誘電体の絶縁破壊電圧以上の電圧を印加することによ
り、強誘電体中に電流を流し印加電圧が絶縁破壊電圧よ
りも低くなったときに強誘電体内に残った電子を電子供
給源として利用するものである。The second function of the present invention is to intermittently apply a voltage between the electrodes which is equal to or higher than the dielectric breakdown voltage of the ferroelectric substance, thereby causing a current to flow in the ferroelectric substance and the applied voltage being lower than the dielectric breakdown voltage. When this happens, the electrons remaining in the ferroelectric body are used as an electron supply source.
【００１２】本発明の第３の作用は強誘電体の一方の面
に設けられた電極を分割し電極間に電位差を与えること
により強誘電体表面上で沿面放電を生じさせ電圧が低く
なったときに表面に残った電子を電子供給源として利用
するものである。The third function of the present invention is to divide the electrodes provided on one surface of the ferroelectric substance and to give a potential difference between the electrodes, thereby causing a creeping discharge on the surface of the ferroelectric substance and lowering the voltage. Sometimes, the electrons remaining on the surface are used as an electron supply source.
【００１３】本発明の第４の作用は強誘電体から飛び出
した電子よりも電極の電位を低くすることにより電子が
電極に吸収されることを防止するものである。The fourth action of the present invention is to prevent the electrons from being absorbed by the electrodes by lowering the potential of the electrodes lower than the electrons jumping out from the ferroelectric substance.
【００１４】[0014]
【実施例】 （実施例１）図１は本発明の第１の実施例に於ける強誘
電体冷陰極の構成図を示すものである。１は第１の電極
であり例えば強誘電体２にスパッタ等により成膜されて
いる。２は強誘電体であり例えばＰＺＴ（Ｐｂ（Ｚｒ，
Ｔｉ）Ｏ3、ＰＬＺＴ（ （Ｐｂ，Ｌａ）（Ｚｒ，Ｔｉ）
Ｏ3）ＢａｔＩＯ3等である。強誘電体２内部には不純物
（例えばＳｂ，Ｍｏ，Ｔａ，Ｎｂ，Ｖ，Ｗ等）を導入し
たり、結晶成長中の温度や圧力等の条件を変えることに
より、結晶欠陥が生じている。３は第２の電極であり、
櫛形構造になっており、接地されている。４は絶縁膜で
あり酸化シリコン等の膜である。５は絶縁膜４上に設け
られた第３の電極であり、接地電位よりも低い電位にな
っている。EXAMPLE 1 FIG. 1 is a block diagram of a ferroelectric cold cathode according to a first example of the present invention. Reference numeral 1 denotes a first electrode, which is formed on the ferroelectric 2 by sputtering or the like. 2 is a ferroelectric substance, for example, PZT (Pb (Zr,
Ti) O 3 , PLZT ((Pb, La) (Zr, Ti)
O 3 ) BatIO 3 and the like. Crystal defects are generated by introducing impurities (for example, Sb, Mo, Ta, Nb, V, W, etc.) into the ferroelectric substance 2 or changing conditions such as temperature and pressure during crystal growth. 3 is a second electrode,
It has a comb structure and is grounded. An insulating film 4 is a film of silicon oxide or the like. Reference numeral 5 denotes a third electrode provided on the insulating film 4, which has a potential lower than the ground potential.
【００１５】以上のように構成された第１の実施例の強
誘電体冷陰極について、以下その動作を説明する。第１
の電極１に交番電界を印加する第１の電極１が正極性に
なった時に第２の電極３から強誘電体２の結晶欠陥を通
じて電子が強誘電体２の表面に供給される。供給された
電子は強誘電体２の分極により、表面近傍にトラップさ
れる。次に第１の電極１が負極性になるとトラップされ
ていた電子は第２の電極３に戻ろうとするが電子の移動
よりも速く強誘電体２の分極が反転し表面近傍にトラッ
プされていた電子がクーロン力により弾き飛ばされ、電
子放出が行われる。第２の電極３は絶縁膜４に覆われて
おり、絶縁膜４上には接地電位よりも低い電位を持つ第
３の電極５があるので放出電子は第２の電極３および第
３の電極５に吸収されることなく飛び出すことになるの
で電流量を多くすることができる。交番電界が正負反転
する毎に上記のサイクルが行われ、安定した電子放出が
行われることになる。The operation of the ferroelectric cold cathode of the first embodiment constructed as above will be described below. First
Electrons are supplied from the second electrode 3 to the surface of the ferroelectric body 2 through the crystal defects of the ferroelectric body 2 when the first electrode 1 that applies an alternating electric field to the electrode 1 has a positive polarity. The supplied electrons are trapped near the surface due to the polarization of the ferroelectric 2. Next, when the first electrode 1 has a negative polarity, the trapped electrons try to return to the second electrode 3, but the polarization of the ferroelectric substance 2 reverses faster than the movement of the electrons and is trapped near the surface. The electrons are repelled by the Coulomb force, and the electrons are emitted. Since the second electrode 3 is covered with the insulating film 4 and the third electrode 5 having a potential lower than the ground potential is present on the insulating film 4, emitted electrons are emitted from the second electrode 3 and the third electrode. Since the current flows out without being absorbed by 5, the current amount can be increased. Each time the alternating electric field is inverted, the above cycle is performed, and stable electron emission is performed.
【００１６】以上のように第１の実施例によれば、結晶
欠陥を導入した強誘電体を用いることにより安定した電
子放出源としての強誘電体冷陰極を得ることができる。
更に第３の電極を接地電位よりも負電位にすることによ
り、放出する電流量を多くすることができる。なお、上
記実施例に於いて強誘電体に結晶欠陥を導入して表面層
の抵抗率を制御する代わりに強誘電体２の表面にセシウ
ム等の仕事関数の低い物質を島状に成膜することによ
り、強誘電体表面層の抵抗率を制御すると共に、電子放
出量を多くする事ができる。As described above, according to the first embodiment, it is possible to obtain a stable ferroelectric cold cathode as an electron emission source by using a ferroelectric having crystal defects introduced therein.
Further, by setting the third electrode to a negative potential rather than the ground potential, the amount of current emitted can be increased. In the above embodiment, a substance having a low work function such as cesium is formed like an island on the surface of the ferroelectric body 2 instead of introducing crystal defects into the ferroelectric body to control the resistivity of the surface layer. As a result, the resistivity of the ferroelectric surface layer can be controlled and the electron emission amount can be increased.
【００１７】（実施例２）図２は本発明の第２の実施例
に於ける強誘電体冷陰極の構成を示す図である。２１は
第１の電極であり、２２は強誘電体であり実施例１に述
べたものと同様の材料からなる。２３は第２の電極であ
り、１μｍラインアンドスペースの櫛形電極構造になっ
ている。上記のように構成された強誘電体冷陰極につい
て、以下その動作を説明する。まず、第１の電極２１と
第２の電極２３の間に強誘電体２２の絶縁破壊電圧以上
の電圧、即ち電界強度にして１０ＭＶ／cm程度を印加す
ると強誘電体２２中を電流が流れる。次に電圧を下げて
いくと強誘電体２２は再び絶縁物となり、この時、強誘
電体２２内部に存在する電子はトラップされる。次に第
１の電極２１と第２の電極２３間に交番電界を印加する
と強誘電体内部にトラップされていた余剰電子は強誘電
体２２の分極の効果により放出される。以上のように第
１の電極２１と第２の電極２３間に交番電界に加えて間
欠的に絶縁破壊電圧以上の電圧を印加する事により、効
果的に強誘電体２２に電子を供給することができる。(Embodiment 2) FIG. 2 is a diagram showing the structure of a ferroelectric cold cathode according to a second embodiment of the present invention. Reference numeral 21 is a first electrode, 22 is a ferroelectric, which is made of the same material as that described in the first embodiment. The second electrode 23 has a comb-shaped electrode structure of 1 μm line and space. The operation of the ferroelectric cold cathode having the above structure will be described below. First, when a voltage equal to or higher than the dielectric breakdown voltage of the ferroelectric body 22, that is, an electric field strength of about 10 MV / cm is applied between the first electrode 21 and the second electrode 23, a current flows in the ferroelectric body 22. Next, when the voltage is lowered, the ferroelectric substance 22 becomes an insulator again, and at this time, the electrons existing inside the ferroelectric substance 22 are trapped. Next, when an alternating electric field is applied between the first electrode 21 and the second electrode 23, the surplus electrons trapped inside the ferroelectric substance are emitted due to the polarization effect of the ferroelectric substance 22. As described above, in addition to the alternating electric field between the first electrode 21 and the second electrode 23, by intermittently applying a voltage equal to or higher than the dielectric breakdown voltage, electrons are effectively supplied to the ferroelectric substance 22. You can
【００１８】（実施例３）以下本発明の第３の実施例に
ついて図面を参照しながら、説明する。(Embodiment 3) A third embodiment of the present invention will be described below with reference to the drawings.
【００１９】図３に於いて３１は第１の電極であり、３
２は強誘電体であり実施例１に述べたものと同様の材料
からなる。３３ａ，３３ｂは第２の電極であり、電極３
３ｂは接地されている。In FIG. 3, 31 is a first electrode, 3
Reference numeral 2 denotes a ferroelectric substance, which is made of the same material as that described in the first embodiment. 33a and 33b are the second electrodes, and the electrodes 3
3b is grounded.
【００２０】上記のように構成された強誘電体冷陰極に
ついて、以下その動作を説明する。まず、第１の電極３
１と第２の電極３３ａ間に電界を印加すると強誘電体３
２中に分極が生じるがこの時第２の電極３３ａと同３３
ｂ間には沿面放電が生じ強誘電体３２表面を電流が流れ
る。次に第２の電極３３ａの電位が接地電位に近づくと
沿面放電は消滅しこの際、強誘電体３２表面に電子がト
ラップされる。次に逆極性の電圧を第１の電極３１と第
２の電極３３ａの間に印加すると強誘電体３２内部の分
極が逆転し表面にトラップされていた電子はクーロン力
により弾き飛ばされ、電子放出が生じる。The operation of the ferroelectric cold cathode having the above structure will be described below. First, the first electrode 3
When an electric field is applied between the first and second electrodes 33a, the ferroelectric substance 3
2 is polarized, but at this time, it is the same as the second electrode 33a.
A creeping discharge occurs between b and a current flows on the surface of the ferroelectric 32. Next, when the potential of the second electrode 33a approaches the ground potential, the creeping discharge is extinguished, and at this time, electrons are trapped on the surface of the ferroelectric 32. Next, when a voltage of opposite polarity is applied between the first electrode 31 and the second electrode 33a, the polarization inside the ferroelectric substance 32 is reversed and the electrons trapped on the surface are repelled by the Coulomb force, and the electrons are emitted. Occurs.
【００２１】以上のように第２の電極を分割し双方の電
位を異ならせることにより、強誘電体表面に電子供給を
行い、安定した特性の強誘電体冷陰極を得ることができ
る。As described above, by dividing the second electrode and making both potentials different from each other, electrons can be supplied to the surface of the ferroelectric substance, and a ferroelectric cold cathode having stable characteristics can be obtained.
【００２２】[0022]
【発明の効果】以上のように本発明の第１の発明によれ
ば、表面層の抵抗率を制御した強誘電体を電極でサンド
イッチ構造にすることにより、安定した電子放出特性の
強誘電体冷陰極を得ることができる。As described above, according to the first aspect of the present invention, a ferroelectric substance having a stable electron emission characteristic is formed by forming a sandwich structure of electrodes with a ferroelectric substance whose surface layer has a controlled resistivity. A cold cathode can be obtained.
【００２３】また、本発明の第２の発明によれば、強誘
電体中にリーク電流を流して電子を供給することによ
り、安定した電子放出特性の強誘電体冷陰極を得ること
ができる。According to the second aspect of the present invention, a ferroelectric cold cathode having a stable electron emission characteristic can be obtained by supplying a current by flowing a leak current through the ferroelectric substance.
【００２４】また、本発明の第３の発明によれば、強誘
電体表面だけに沿面放電を生じさせるので、強誘電体に
ダメージを与えることなく電子を供給することができ
る。According to the third aspect of the present invention, since creeping discharge is generated only on the surface of the ferroelectric substance, electrons can be supplied without damaging the ferroelectric substance.
【００２５】また、本発明の第４の発明によれば、強誘
電体表面から放出された電子が電極に吸収されることな
く出てくるので、電流量を多く取れる。Further, according to the fourth aspect of the present invention, the electrons emitted from the surface of the ferroelectric substance come out without being absorbed by the electrode, so that a large amount of current can be obtained.
【図１】本発明の第１の実施例に於ける強誘電体冷陰極
の構成図FIG. 1 is a configuration diagram of a ferroelectric cold cathode according to a first embodiment of the present invention.
【図２】本発明の第２の実施例に於ける強誘電体冷陰極
の構成図FIG. 2 is a configuration diagram of a ferroelectric cold cathode according to a second embodiment of the present invention.
【図３】本発明の第３の実施例に於ける強誘電体冷陰極
の構成図FIG. 3 is a configuration diagram of a ferroelectric cold cathode according to a third embodiment of the present invention.
【図４】従来の強誘電体冷陰極の構成図FIG. 4 is a block diagram of a conventional ferroelectric cold cathode.
１ 第１の電極 ２ 強誘電体 ３ 第２の電極 ４ 絶縁膜 ５ 第３の電極 1 1st electrode 2 Ferroelectric substance 3 2nd electrode 4 Insulating film 5 3rd electrode
Claims (4)
成された第１の電極と前記強誘電体の他方の面に形成さ
れた第２の電極とからなる強誘電体冷陰極に於いて前記
強誘電体の表面層とその他の部分の抵抗率が異なってい
る強誘電体冷陰極。1. A ferroelectric cold cathode comprising a ferroelectric material and a first electrode formed on one surface of the ferroelectric material and a second electrode formed on the other surface of the ferroelectric material. A ferroelectric cold cathode in which the surface layer of the ferroelectric material and the other portions have different resistivities.
成された第１の電極と前記強誘電体の他方の面に形成さ
れた第２の電極とからなる強誘電体冷陰極に於いて前記
第１の電極と前記第２の電極間に間欠的に前記強誘電体
の絶縁破壊電圧以上の電圧を印加する事を特徴とする強
誘電体冷陰極。2. A ferroelectric cold cathode comprising a ferroelectric and a first electrode formed on one surface of the ferroelectric and a second electrode formed on the other surface of the ferroelectric. 2. A ferroelectric cold cathode, wherein a voltage not less than the dielectric breakdown voltage of the ferroelectric is intermittently applied between the first electrode and the second electrode.
成された第１の電極と前記強誘電体の他方の面に形成さ
れた第２の電極とからなる強誘電体冷陰極に於いて前記
第１の電極または第２の電極を分割し、分割した電極間
に電位差を与えることを特徴とする強誘電体冷陰極。3. A ferroelectric cold cathode comprising a ferroelectric material and a first electrode formed on one surface of the ferroelectric material and a second electrode formed on the other surface of the ferroelectric material. 2. A ferroelectric cold cathode, characterized in that the first electrode or the second electrode is divided, and a potential difference is applied between the divided electrodes.
成された第１の電極と前記強誘電体の他方の面に形成さ
れた第２の電極とからなる強誘電体冷陰極に於いて前記
第２の電極上に形成された絶縁膜と前記絶縁膜上に形成
された、前記第２の電極の電位よりも低い電位である第
３の電極とからなる強誘電体冷陰極。4. A ferroelectric cold cathode comprising a ferroelectric material and a first electrode formed on one surface of the ferroelectric material and a second electrode formed on the other surface of the ferroelectric material. A ferroelectric cold cathode comprising an insulating film formed on the second electrode and a third electrode formed on the insulating film and having a potential lower than the potential of the second electrode. ..
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13322892A JP3184296B2 (en) | 1992-05-26 | 1992-05-26 | Ferroelectric cold cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13322892A JP3184296B2 (en) | 1992-05-26 | 1992-05-26 | Ferroelectric cold cathode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05325777A true JPH05325777A (en) | 1993-12-10 |
| JP3184296B2 JP3184296B2 (en) | 2001-07-09 |
Family
ID=15099728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13322892A Expired - Fee Related JP3184296B2 (en) | 1992-05-26 | 1992-05-26 | Ferroelectric cold cathode |
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| Country | Link |
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| JP (1) | JP3184296B2 (en) |
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| FR2718567A1 (en) * | 1994-04-12 | 1995-10-13 | Riege Hans Karl Otto | Manufacture of thin layer powdered ferroelectric cathode |
| WO1997011476A1 (en) * | 1995-09-20 | 1997-03-27 | Komatsu Ltd. | Light emitting display element and a flat display |
| GB2308729A (en) * | 1995-12-29 | 1997-07-02 | Samsung Display Devices Co Ltd | Ferroelectric cathodes for crts |
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- 1992-05-26 JP JP13322892A patent/JP3184296B2/en not_active Expired - Fee Related
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