JPH053232Y2 - - Google Patents
Info
- Publication number
- JPH053232Y2 JPH053232Y2 JP15805887U JP15805887U JPH053232Y2 JP H053232 Y2 JPH053232 Y2 JP H053232Y2 JP 15805887 U JP15805887 U JP 15805887U JP 15805887 U JP15805887 U JP 15805887U JP H053232 Y2 JPH053232 Y2 JP H053232Y2
- Authority
- JP
- Japan
- Prior art keywords
- discharge port
- base
- lid
- inner lid
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 13
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 12
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 6
- 229910017604 nitric acid Inorganic materials 0.000 description 6
- 239000002253 acid Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Nozzles (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Closures For Containers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15805887U JPH053232Y2 (en, 2012) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15805887U JPH053232Y2 (en, 2012) | 1987-10-15 | 1987-10-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0161948U JPH0161948U (en, 2012) | 1989-04-20 |
| JPH053232Y2 true JPH053232Y2 (en, 2012) | 1993-01-26 |
Family
ID=31438043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15805887U Expired - Lifetime JPH053232Y2 (en, 2012) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053232Y2 (en, 2012) |
-
1987
- 1987-10-15 JP JP15805887U patent/JPH053232Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0161948U (en, 2012) | 1989-04-20 |
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