JPH053214Y2 - - Google Patents

Info

Publication number
JPH053214Y2
JPH053214Y2 JP8587U JP8587U JPH053214Y2 JP H053214 Y2 JPH053214 Y2 JP H053214Y2 JP 8587 U JP8587 U JP 8587U JP 8587 U JP8587 U JP 8587U JP H053214 Y2 JPH053214 Y2 JP H053214Y2
Authority
JP
Japan
Prior art keywords
light
unit
optical
irradiated
optical unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8587U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63111931U (ru
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8587U priority Critical patent/JPH053214Y2/ja
Publication of JPS63111931U publication Critical patent/JPS63111931U/ja
Application granted granted Critical
Publication of JPH053214Y2 publication Critical patent/JPH053214Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Printing Methods (AREA)
  • Drying Of Solid Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Supply, Installation And Extraction Of Printed Sheets Or Plates (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP8587U 1987-01-06 1987-01-06 Expired - Lifetime JPH053214Y2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8587U JPH053214Y2 (ru) 1987-01-06 1987-01-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8587U JPH053214Y2 (ru) 1987-01-06 1987-01-06

Publications (2)

Publication Number Publication Date
JPS63111931U JPS63111931U (ru) 1988-07-19
JPH053214Y2 true JPH053214Y2 (ru) 1993-01-26

Family

ID=30776755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8587U Expired - Lifetime JPH053214Y2 (ru) 1987-01-06 1987-01-06

Country Status (1)

Country Link
JP (1) JPH053214Y2 (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2759890B2 (ja) * 1989-11-24 1998-05-28 ウシオ電機株式会社 露光装置
JP2795947B2 (ja) * 1990-01-17 1998-09-10 ウシオ電機株式会社 光学ユニット
JP4642543B2 (ja) * 2005-05-09 2011-03-02 東京エレクトロン株式会社 周縁露光装置、塗布、現像装置及び周縁露光方法

Also Published As

Publication number Publication date
JPS63111931U (ru) 1988-07-19

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