JPH05317774A - Nozzle for coating ag paste and its manufacture method - Google Patents
Nozzle for coating ag paste and its manufacture methodInfo
- Publication number
- JPH05317774A JPH05317774A JP15562092A JP15562092A JPH05317774A JP H05317774 A JPH05317774 A JP H05317774A JP 15562092 A JP15562092 A JP 15562092A JP 15562092 A JP15562092 A JP 15562092A JP H05317774 A JPH05317774 A JP H05317774A
- Authority
- JP
- Japan
- Prior art keywords
- paste
- discharge holes
- nozzle
- horizontally
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L2224/743—Apparatus for manufacturing layer connectors
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Die Bonding (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Nozzles (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＩＣリードフレーム上
にシリコンペレットを載せる前にＡｇペーストを吐出塗
布する為のノズル及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a nozzle for discharging and applying an Ag paste before placing a silicon pellet on an IC lead frame, and a manufacturing method thereof.
【０００２】[0002]
【従来の技術】従来のＡｇペースト塗布用ノズルは、図
６に示すステンレス鋼ボディ１に、図７に示すように一
定間隔に碁盤の目状に穴２を穿設し、然る後図８に示す
ように穴２にステンレス鋼パイプ３を挿入してなるもの
である。2. Description of the Related Art A conventional Ag paste coating nozzle is a stainless steel body 1 shown in FIG. 6 in which holes 2 are formed in a grid pattern at regular intervals as shown in FIG. The stainless steel pipe 3 is inserted into the hole 2 as shown in FIG.
【０００３】ところで、かかるＡｇペースト塗布用ノズ
ル４は、ステンレス鋼ボディ１の穴２に、ステンレス鋼
パイプ３を挿入する際、穴２の内径よりもステンレス鋼
パイプ３の外径を僅かに(0.005〜0.01mm）大きくして打
ち込む為、ステンレス鋼パイプ３の外径が細かったり、
肉厚が薄かったりすると、打ち込み時に曲がってしま
う。従って、ステンレス鋼パイプ３の外径を太く肉厚も
厚くしていたので、狭いピッチのステンレス鋼パイプ３
を有するＡｇペースト塗布用ノズル４を作ることができ
なかった。この為、ＩＣリードフレームにシリコンペレ
ットを載せる際に、ノズル４にてＩＣリードフレーム上
にＡｇペーストを吐出塗布すると、ステンレス鋼パイプ
３のピッチが広く、外径を大きくしている分内径が大き
いことから、Ａｇペーストの吐出量が多く、図９に示す
ように隣り同志の吐出されたＡｇペースト５に重なる部
分５ａが発生し、その表面が図10に示すように波状とな
り、均一な厚さの薄膜を形成できなかった。By the way, such an Ag paste coating nozzle 4 makes the outer diameter of the stainless steel pipe 3 slightly smaller than the inner diameter of the hole 2 (0.005) when the stainless steel pipe 3 is inserted into the hole 2 of the stainless steel body 1. ~ 0.01mm) Because it is driven in a large size, the outer diameter of the stainless steel pipe 3 is small,
If the wall is thin, it will bend when driving. Therefore, since the outer diameter of the stainless steel pipe 3 is large and the wall thickness is large, the stainless steel pipe 3 with a narrow pitch is used.
It was not possible to make the Ag paste coating nozzle 4 having the above. For this reason, when the silicon pellet is placed on the IC lead frame, if the Ag paste is discharged and applied onto the IC lead frame by the nozzle 4, the pitch of the stainless steel pipes 3 is wide and the inner diameter is large due to the large outer diameter. Therefore, the discharge amount of the Ag paste is large, and as shown in FIG. 9, a portion 5a overlapping the discharged Ag pastes 5 of adjacent ones is generated, and its surface becomes wavy as shown in FIG. 10 and has a uniform thickness. Could not be formed.
【０００４】[0004]
【発明が解決しようとする課題】そこで本発明は、ＩＣ
リードフレーム上にＡｇペーストを吐出塗布した際、均
一な厚さの薄膜を形成できるＡｇペースト塗布用ノズル
とその製造方法を提供しようとするものである。Therefore, the present invention is an IC
It is an object of the present invention to provide an Ag paste coating nozzle capable of forming a thin film having a uniform thickness when a Ag paste is discharged and coated on a lead frame, and a manufacturing method thereof.
【０００５】[0005]
【課題を解決するための手段】上記課題を解決するため
の本発明のＡｇペースト塗布用ノズルは、ステンレス鋼
材のボディに、細い吐出孔が一定間隔に縦、横に多数配
列穿設され、この多数の細い吐出孔の周囲が夫々角柱状
の突起に形成されてなるものである。かかるＡｇペース
ト塗布用ノズルを作る本発明の製造方法は、ステンレス
鋼材のボディに、多数の細い吐出孔を一定間隔に、縦、
横に配列穿設し、次にこの多数の細い吐出孔同志の間を
ワイヤーカット放電により縦、横にスリットを形成し、
吐出孔の周囲を角柱状に残して突起を形成することを特
徴とする。The Ag paste coating nozzle of the present invention for solving the above-mentioned problems has a large number of thin discharge holes vertically and horizontally arranged in a body of a stainless steel material at regular intervals. The periphery of a large number of thin discharge holes is formed by prism-shaped projections, respectively. The manufacturing method of the present invention for making such an Ag paste coating nozzle is such that a large number of thin discharge holes are formed in a stainless steel body at regular intervals in the vertical direction.
The holes are arranged side by side, and then slits are formed vertically and horizontally by wire cut discharge between the many thin discharge holes.
It is characterized in that the projection is formed while leaving the periphery of the discharge hole in a prismatic shape.
【０００６】[0006]
【作用】上記構造の本発明のＡｇペースト塗布用ノズル
は、細い吐出孔が各々独立して角柱状の突起となって密
集配列されているので、ＩＣリードフレーム上にＡｇペ
ーストを吐出した際、各吐出孔から吐出されたＡｇペー
スト量が少なく、従ってＩＣリードフレーム上のＡｇペ
ーストは平坦になり、むらが無くなって、均一な厚さの
薄膜が形成される。また上記のＡｇペースト塗布用ノズ
ルの製造方法によれば、均一な厚さの薄膜を形成できる
優れたＡｇペースト塗布用ノズルを容易に且つ精度良く
製造できる。In the Ag paste coating nozzle of the present invention having the above-described structure, since the thin discharge holes are independently arranged densely as prismatic projections, when the Ag paste is discharged onto the IC lead frame, The amount of Ag paste ejected from each ejection hole is small, so that the Ag paste on the IC lead frame becomes flat and uniform, and a thin film having a uniform thickness is formed. Further, according to the above method for manufacturing the Ag paste coating nozzle, an excellent Ag paste coating nozzle capable of forming a thin film having a uniform thickness can be manufactured easily and accurately.
【０００７】[0007]
【実施例】本発明のＡｇペースト塗布用ノズル及びその
製造方法の一実施例を図によって説明する。図１に示す
直径25mm、高さ10mmのステンレス鋼ボディ１の先端面に
突設した高さ５mm、一辺10mmの角形の突起６の全面に、
図２に示すように 0.6mmピッチに縦、横に内径 0.3mmの
吐出孔７を 266本配列穿設し、次にこの多数の細い吐出
孔７同志の間をワイヤーカット放電により図３に示すよ
うに縦、横に幅 0.1mmのスリット８を形成し、吐出孔７
の周囲を図４に示すように一辺 0.5mmの角形で高さ５mm
の角柱状突起９となした。前記の角形の突起６は丸形の
場合もある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the Ag paste coating nozzle and manufacturing method of the present invention will be described with reference to the drawings. As shown in FIG. 1, on the entire surface of a square projection 6 having a height of 5 mm and a side of 10 mm protruding from the tip surface of a stainless steel body 1 having a diameter of 25 mm and a height of 10 mm,
As shown in FIG. 2, 266 discharge holes 7 having an inner diameter of 0.3 mm are arranged vertically and horizontally at a pitch of 0.6 mm. Next, as shown in FIG. Slits 8 with a width of 0.1 mm are formed vertically and horizontally, and the discharge holes 7
As shown in Fig. 4, the surrounding area is a square with a side of 0.5 mm and a height of 5 mm.
The prismatic protrusions 9 are formed. The rectangular protrusion 6 may be round.
【０００８】このようにして製造したＡｇペースト塗布
用ノズル10は、細い吐出孔７が各々独立して角柱状突起
９をなして密集配設されているので、図５に示すように
ＩＣリードフレーム11上にＡｇペースト12を吐出した
際、各吐出孔７から吐出されたＡｇペースト量が少な
く、従ってＩＣリードフレーム11上のＡｇペースト12は
平坦になり、むらが無くなって、均一な厚さの薄膜が形
成される。In the Ag paste coating nozzle 10 manufactured in this manner, the thin discharge holes 7 are individually arranged densely in the form of prismatic projections 9, so that as shown in FIG. When the Ag paste 12 is discharged onto the surface 11, the amount of the Ag paste discharged from each of the discharge holes 7 is small. Therefore, the Ag paste 12 on the IC lead frame 11 becomes flat, has no unevenness, and has a uniform thickness. A thin film is formed.
【０００９】[0009]
【発明の効果】以上の通り本発明のＡｇペースト塗布用
ノズルによれば、ＩＣリードフレーム上にＡｇペースト
を吐出した際、多数の角柱状突起の細い吐出孔から吐出
されたＡｇペースト量が少なく、従ってＡｇペーストは
平坦になり、むらが無くなって、均一な厚さの薄膜が形
成される。また、本発明のＡｇペースト塗布用ノズルの
製造方法によれば、上記の優れた効果のあるＡｇペース
ト塗布用ノズルを容易に且つ精度良く製造できる。As described above, according to the Ag paste coating nozzle of the present invention, when the Ag paste is discharged onto the IC lead frame, the amount of the Ag paste discharged from the small discharge holes of the many prismatic projections is small. Therefore, the Ag paste becomes flat and uniform, and a thin film having a uniform thickness is formed. Further, according to the method for manufacturing the Ag paste coating nozzle of the present invention, the Ag paste coating nozzle having the above-mentioned excellent effects can be manufactured easily and accurately.
【図１】本発明のＡｇペースト塗布用ノズルの製造方法
の一実施例の工程を示す図である。FIG. 1 is a diagram showing steps of an embodiment of a method for manufacturing an Ag paste coating nozzle of the present invention.
【図２】本発明のＡｇペースト塗布用ノズルの製造方法
の一実施例の工程を示す図である。FIG. 2 is a diagram showing steps of an embodiment of a method for manufacturing a nozzle for applying Ag paste of the present invention.
【図３】本発明のＡｇペースト塗布用ノズルの製造方法
の一実施例の工程を示す図である。FIG. 3 is a diagram showing steps of an embodiment of a method for manufacturing a nozzle for applying Ag paste of the present invention.
【図４】図３における吐出孔の要部拡大縦断面図であ
る。FIG. 4 is an enlarged vertical sectional view of a main part of a discharge hole in FIG.
【図５】本発明のＡｇペースト塗布用ノズルよりＡｇペ
ーストをＩＣリードフレーム上に吐出塗布して薄膜を形
成した状態を示す図である。FIG. 5 is a view showing a state in which a thin film is formed by discharging Ag paste onto an IC lead frame from a nozzle for applying Ag paste of the present invention.
【図６】従来のＡｇペースト塗布用ノズルの製造方法の
工程を示す図である。FIG. 6 is a diagram showing steps of a method for manufacturing a conventional Ag paste coating nozzle.
【図７】従来のＡｇペースト塗布用ノズルの製造方法の
工程を示す図である。FIG. 7 is a diagram showing a step of a method for manufacturing a conventional Ag paste coating nozzle.
【図８】従来のＡｇペースト塗布用ノズルの製造方法の
工程を示す図である。FIG. 8 is a diagram showing a step in a method for manufacturing a conventional Ag paste coating nozzle.
【図９】従来のＡｇペースト塗布用ノズルにより形成さ
れた薄膜の欠陥を示す要部平面図である。FIG. 9 is a plan view of relevant parts showing defects in a thin film formed by a conventional Ag paste coating nozzle.
【図10】図９のＡ−Ａ線側断面図である。10 is a sectional side view taken along the line AA of FIG. 9.
１ ステンレス鋼ボディ ７ 吐出孔 ８ スリット ９ 角柱状突起 10 Ａｇペースト塗布用ノズル 1 Stainless steel body 7 Discharge hole 8 Slit 9 Square columnar protrusion 10 Ag paste coating nozzle
Claims (2)
が一定間隔に縦、横に多数配列穿設され、この多数の細
い吐出孔の周囲が夫々角柱状の突起に形成されてなるＡ
ｇペースト塗布用ノズル。1. A body made of stainless steel is provided with a large number of thin discharge holes arranged vertically and horizontally at regular intervals, and the periphery of each of these thin discharge holes is formed as a prismatic projection.
Nozzle for paste application.
吐出孔を一定間隔に縦、横に配列穿設し、次にこの多数
の細い吐出孔同志の間をワイヤーカット放電により縦、
横にスリットを形成し、吐出孔の周囲を角柱状に残して
突起を形成することを特徴とするＡｇペースト塗布用ノ
ズルの製造方法。2. A body made of a stainless steel material is provided with a large number of thin discharge holes arranged vertically and horizontally at regular intervals, and then the plurality of thin discharge holes are vertically cut by wire cut discharge,
A method for manufacturing a Ag paste coating nozzle, characterized in that a slit is formed laterally, and a protrusion is formed while leaving the periphery of the discharge hole in a prismatic shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15562092A JPH05317774A (en) | 1992-05-22 | 1992-05-22 | Nozzle for coating ag paste and its manufacture method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15562092A JPH05317774A (en) | 1992-05-22 | 1992-05-22 | Nozzle for coating ag paste and its manufacture method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05317774A true JPH05317774A (en) | 1993-12-03 |
Family
ID=15609992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15562092A Pending JPH05317774A (en) | 1992-05-22 | 1992-05-22 | Nozzle for coating ag paste and its manufacture method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05317774A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4123120A1 (en) * | 1991-07-12 | 1993-01-21 | Abb Patent Gmbh | HV switch contact speed measuring appts. - has magnetic transmitter magnetising component, receiver detecting magnetised region and signal comparator deriving acceleration and hence speed |
| JP2005062886A (en) * | 2003-08-14 | 2005-03-10 | Fci | Ferrule assembly for optical fibers |
-
1992
- 1992-05-22 JP JP15562092A patent/JPH05317774A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4123120A1 (en) * | 1991-07-12 | 1993-01-21 | Abb Patent Gmbh | HV switch contact speed measuring appts. - has magnetic transmitter magnetising component, receiver detecting magnetised region and signal comparator deriving acceleration and hence speed |
| JP2005062886A (en) * | 2003-08-14 | 2005-03-10 | Fci | Ferrule assembly for optical fibers |
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