JPH05315672A - Frame of laser oscillator - Google Patents

Abstract

PURPOSE:To obtain a frame of a laser oscillator difficult to be affected by vibration, by installing a set of holding mounts for supporting a center and both ends of a discharge tube and a base fixed on these holding mounts and connected through the holding mounts of both ends and a viscous fluid. CONSTITUTION:A holding mount 15 is installed in the center of holding mounts 12 and 13, and is fixed on a base 10. Oil 17 used as a viscous fluid is supplied into a groove 16 formed on both ends of the base 10. Also, one end of a piston 18 is fixed on the holding mounts 12 and 13, and the other end is dipped into oil 17. When a vibration is applied to the base 10, the vibration is transmitted to a discharge tube 4 through the holding mount 15 installed in the center and simultaneously transmitted to the holding mounts 12 and 13 of both ends through a rod 14. Thus, the vibration of the bottom of the piston 18 is attenuated due to a fluid resistance of oil 17, and the vibration of the holding mounts 12, 13 and 15 is attenuated, and thereby a bend of optical axis of the discharge tube 4 and a reflecting and output mirror 6 is reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a frame of a laser oscillator, and more particularly to a frame of a laser oscillator which is less susceptible to mechanical vibration.

[0002]

2. Description of the Related Art In a carbon dioxide laser oscillator, as shown in FIG. 2, a reflecting mirror 5 is arranged at one end and an output mirror 6 is arranged at the other end of a discharge tube 4 in which an anode 2 and a cathode 3 connected to a power source 1 are enclosed. It has been configured. A laser gas mixed with carbon dioxide gas, nitrogen gas, helium gas and the like is supplied into the discharge tube 4 by the circulation device 7. A cooler 9 connected to a cooling water supply device 8 is wound around the discharge tube 4.

A frame for supporting such a laser oscillator has a structure in which a pair of holding mounts 12, 13 supported by steel balls 11 on a base 10 are connected by a plurality of rods 14 arranged in parallel. Is becoming Then, the holding mount 12 holds one end of the reflecting mirror 5 and the discharge tube 4, and the holding mount 13 holds the other end of the output mirror 6 and the discharge tube 4.

[0004]

In such a frame structure, since the discharge tube 4 is supported only by its both ends, when the base 1 is vibrated, the vibration causes the central portion of the discharge tube 4 to move. It vibrates greatly and discharge tube 4 and reflector 5
Also, the optical axis of the output mirror 6 is curved, and the amplification action inside the discharge tube 4 becomes unstable. In addition, no consideration was given to vibration resistance such as variation in the emitting direction of the laser beam.

In view of the above circumstances, an object of the present invention is to provide a frame of a laser oscillator that is less susceptible to vibration.

[0006]

In order to achieve the above object, in the present invention, a pair of holding mounts for supporting the central portion and both end portions of the discharge tube, and a pair of holding mounts fixed to these holding mounts and holding both ends thereof are provided. A mount and a base connected via a viscous fluid were provided.

[0007]

When the base is vibrated, the vibration is transmitted to the discharge tube via the holding mount in the center and vibrates the discharge tube. At this time, the vibration to the holding mount that holds both ends of the discharge tube is transmitted from the base through the viscous fluid, so that the vibration is damped and can be made smaller than the amplitude of the central part of the discharge tube.

Therefore, the curvature of the optical axes of the discharge tube, the reflecting mirror and the output mirror can be reduced to stabilize the amplifying action. In addition, the vibration resistance of the laser oscillator can be improved, for example, the change in the emitting direction of the laser beam can be reduced.

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG. In the figure, the same parts as those in FIG. 2 are shown with the same reference numerals.

Reference numeral 15 is a holding mount, which is a holding mount 1.
The base 10 is arranged so as to be located in the center of 2, 13
It is fixed to. Reference numeral 16 denotes a groove, which is formed at both ends of the base 10 so as to face the lower end surfaces of the holding mounts 12 and 13, respectively. Reference numeral 17 denotes oil as a viscous fluid, which is supplied into the groove 16. Reference numeral 18 denotes a piston, one end of which is fixed to the holding mounts 12 and 13 and the other end of which is immersed in the oil 17.

With such a structure, when vibration is applied to the base 10, the vibration is transmitted to the discharge tube 4 through the central holding mount 15 and, at the same time, the rod 1
4 is transmitted to the holding mounts 12 and 13 at both ends. Then, the discharge tube 4, the reflecting mirror 5, and the output mirror 6 are vibrated.

At this time, the holding mounts 12, 13 at both ends
Since the lower end portion of the piston 18 fixed to is immersed in the oil 17, the vibration of the piston 18 is damped by the flow resistance of the oil 17, and the vibrations of the holding mounts 12 and 13 are damped. Therefore, the vibrations of the holding mounts 12 and 13 are smaller than the vibrations transmitted from the holding mount 15, and the curvature of the optical axes of the discharge tube 4, the reflecting mirror 5 and the output mirror 6 can be reduced.

Therefore, the amplification effect in the discharge tube is stabilized, and the change in the emitting direction of the laser beam is reduced,
Vibration resistance can be improved.

[0014]

As described above, according to the present invention, a set of holding mounts for supporting the central portion and both end portions of the discharge tube, a plurality of rods integrally connecting these holding mounts, and a central portion of the rod. Since the holding mount is fixed and the holding mounts at both ends are connected to the base via the viscous fluid, the vibration resistance of the laser oscillator can be significantly improved.

[Brief description of drawings]

FIG. 1 is a side sectional view showing an example of a frame of a laser oscillator according to the present invention.

FIG. 2 is a side sectional view of a frame of a conventional laser oscillator.

[Explanation of reference numerals] 4 discharge tubes 12, 13, 15 holding mount 14 rod 16 groove 17 oil 18 piston

Claims (1)

[Claims] 1. A set of holding mounts for supporting the central portion and both end portions of the discharge tube, a plurality of rods integrally connecting these holding mounts, and fixed to the central holding mount,
A frame of a laser oscillator, comprising a holding mount at both ends and a base connected via a viscous fluid.