JPS58167091A - Gas laser device - Google Patents

Abstract

PURPOSE:To provide a titled device which eliminates the inclination of a block for turnback reflection mirrors owing to the own weight thereof by mounting the block to a horizontal frame of a supporting frame for a laser resonator in the opening part provided to said horizontal frame, and preventing the working line of the own weight of the block from deviating from the inside of the horizontal frame. CONSTITUTION:An opening part 15 mounted with a block 8 equipped with a pair of turnback reflection mirrors 6, 7 is provided to the horizontal frame 3B of a supporting farme 3 for a laser resonator 3. The block 8 is mounted to the frame 3B by means of fasteners 16A, 16B in the opening part 15 in such a way that the working line 17 of the own weight W of the block 8 does not deviate from the inside of the frame 3B. The generation of the moment around the mounting part between the block 8 and the frame 3B by the weight W thereof is obviated by such mounting construction. Since the block 8 is mounted to the frame 3B without inclination thereto, the light beam 13 of the mirrors 6, 7 is made coincident with the optical axis 14 of the resonator.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a gas radar system, and relates to a modification of the structure for attaching a folding reflector plotter constituting a radar resonator to a resonator support frame.

Generally, in a gas laser device, a laser beam is obtained by exciting a gaseous silica medium in a laser tube by a glow discharge. q
In #, the temperature of the device increases significantly due to glow discharge. For this reason, there is a method to reduce the thermal influence on the radar resonator by attaching a support frame for the reflecting mirror resonator that constitutes the laser resonance at, and mounting this support frame on the equipment stand so that it can expand and contract in the axial direction of the laser tube. I've been hired.

$1. A conventional high-output gas laser device will be described with reference to the following sections.

Figure 1s1 is a perspective view of an example of a conventional high-output gas laser device.The two ends of the four laser tubes (fJ Laser tubes) each containing a gaseous V-laser medium are not shown in the diagram. An i cathode and an anode I are arranged, and these laser tubes I are connected in the tube axis direction to form a laser tube connection body. A high voltage is applied from a DC high voltage power supply 2 to the cathode in each laser tube 1, and a glow discharge is generated in each V-ray tube.

On the other hand, a resonator support frame 3 is disposed approximately within the same thickness as the lathe tube connection body. Support frame 3ri A rectangular frame is formed by a vertical frame 3mm parallel to the laser tube axis and a horizontal bar 3B perpendicular thereto. -7j The output mirror 4 and the total reflection mirror 5 are attached to the O horizontal frame 3B, and the hollow st* block 8 (not shown) is attached to the O horizontal frame 38, and the folding reflector 6.1 is attached to the bottle. It will be done. These mirrors4. The laser resonator tm is dominated by s, . . . and 7. The raceway pipe connection body is connected to the horizontal frame 3BiC through a metal bellows or the like.
It has a structure that can absorb the axial hooking due to heat II//jjgk. Furthermore, together! ! ! The support frame 3 is attached to the apparatus pedestal 10 via a holder s9 so as to be extendable in the axial direction of the laser tube.

When a glow discharge occurs in each laser tube 1, the gaseous plasma is excited and a laser beam is generated.

This laser beam has an output of -4
, the folding reflector 7.6, and the total reflection mirror 5, the light is amplified while being reflected back and forth in a U-shape, and a part of it is transmitted through the output mirror 4 and exits the resonator as laser output light 11* be photographed.

By the way, the folding reflection block 8 attached to the horizontal frame 3BVCjlR of the resonator support frame 3 is bent at its mounting part by the block's own weight W, as shown in the -son view of the conventional high-output gas laser device shown in Fig. 112. moment) M in the direction of arrow 12 is generated. This moment causes the block 8 to tilt slightly Z'c, %A with respect to the horizontal frame 3B.
Therefore, the optical axis 13 of the folding mirror 6.7 and the optical axis 14 of the rt resonator
This results in a slight deviation of an angle f0 from the angle f0. Assuming that the tae is a small angle -=10°4 radian O deviation, and that both L' and f are 11110 and the total length is t6m, the optical axis of the V-the light will move approximately on the output mirror surface every time the light goes back and forth within the aS. This means that four temples will be moved.

As mentioned above, in the conventional method of attaching the block 8 to the support frame 3, a moment is generated at the attachment part 9 due to the block's own weight, so that the optical axis of the resonator (6, 70) is reflected back. There is a disadvantage that it may be misaligned. In a high-output laser device that requires a narrow optical axis that is direct to the bone, such a drawback is inevitable69 and causes the laser axis to stop working while the laser output is decreasing.

The purpose of the present invention is to eliminate the drawbacks of the conventional 01116 output gas laser device as described above, eliminate the deviation between the optical axis of the folded reflection due to the weight of the block for folded reflection and the original axis of the resonator, and produce a stable laser. The goal is to provide a gas laser facility capable of generating power.

That is, according to the present invention, an opening is provided in the horizontal frame of the resonator support frame O, and flocks for folded reflection are deposited on the horizontal frame in this opening, so that the line of action of the block's own weight is directed from inside the horizontal frame. 111B is formed as if it were removed. With this structure, the moment of rotation p of the block mounting portion due to the block itself ILrc is not generated, and the block stress is eliminated. Originally, it is possible to eliminate misalignment between the optical axis of the folding reflector and the optical axis of the resonator.

Hereinafter, the implementation of the present invention will be explained with reference to FIG. 3.4.5.

The horizontal frame 3BK of the resonator support frame 3 includes a pair of folding reflectors 6.
A block 8t equipped with a block 7 is provided, and a part 15t for attaching the castle is provided. At this mouth part 15 on the block 8, the stopper 1
6A, 16Bt- are inserted into the horizontal frame 3B. Here, the effect of the dead weight W of the block 8 [17] is stacked so that it is removed from the inside of the horizontal frame 3B.

With this mounting structure, a moment 114) is not generated in the block 8 due to the section 11W at the mounting portion with the horizontal frame 3B. Therefore, the block 8 can be mounted without tilting with respect to the horizontal frame 3B, so that it can be folded Reflector 6.7 light @13
It can be brought into line with the optical axis 14 of the one-loss device.

It should be noted that the race tube connection body is attached to the block 8 through a metal bellows 1st, and the axial force due to thermal expansion is increased.
*The structure is such that you can sleep on it.

That’s all IB! As mentioned in #, in the high-power gas laser device of the present invention, the folding reflector block is mounted without tilting with respect to the resonator support frame, so the optical axis of the folding reflector is aligned with the optical axis of the laser resonator. The next laser output light can be stably obtained without deviation.

[Brief explanation of the drawing]

miwA is a perspective view of an example of a conventional high-output gas laser device, and FIG. A positive view of the folding reflector block showing the real IIA true aSS, ll4rjA is how the block's own weight works t-1l! I-V @ m # of ms garden
Top view, 5th - is the combination t of ayp and v-v' with the connecting body
It is a summer-■' plan view of the irises sm.

Claims (1)

[Claims] 1. With the output value and reflector provided at both ends of the laser tube, and the thing supported by the T support frame, insert the reflector into the opening formed in the support frame on the reflector side, and partially remove the reflector. A gas laser device that is supported on a support frame.