JPH053107B2 - - Google Patents

Info

Publication number
JPH053107B2
JPH053107B2 JP62173897A JP17389787A JPH053107B2 JP H053107 B2 JPH053107 B2 JP H053107B2 JP 62173897 A JP62173897 A JP 62173897A JP 17389787 A JP17389787 A JP 17389787A JP H053107 B2 JPH053107 B2 JP H053107B2
Authority
JP
Japan
Prior art keywords
workpiece
work holder
ion implantation
work
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62173897A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6419668A (en
Inventor
Taizo Hoshino
Aiji Shiro
Yukio Nakamori
Juzo Sakurada
Motoyoshi Furusawa
Kazuhiro Kashimoto
Takenobu Fuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Ulvac Inc
Original Assignee
Nippon Steel Corp
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, Nihon Shinku Gijutsu KK filed Critical Nippon Steel Corp
Priority to JP62173897A priority Critical patent/JPS6419668A/ja
Publication of JPS6419668A publication Critical patent/JPS6419668A/ja
Publication of JPH053107B2 publication Critical patent/JPH053107B2/ja
Granted legal-status Critical Current

Links

JP62173897A 1987-07-14 1987-07-14 Ion implanter Granted JPS6419668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62173897A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62173897A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Publications (2)

Publication Number Publication Date
JPS6419668A JPS6419668A (en) 1989-01-23
JPH053107B2 true JPH053107B2 (show.php) 1993-01-14

Family

ID=15969114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62173897A Granted JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Country Status (1)

Country Link
JP (1) JPS6419668A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999015885A1 (fr) * 1997-09-19 1999-04-01 Japan Science And Technology Corporation Instrument de mesure xafs a vide pousse

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02258689A (ja) * 1989-03-31 1990-10-19 Canon Inc 結晶質薄膜の形成方法
DE102014110724B4 (de) * 2014-07-29 2016-09-01 European Molecular Biology Laboratory Manipulationsbehälter für die Kryo-Mikroskopie

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999015885A1 (fr) * 1997-09-19 1999-04-01 Japan Science And Technology Corporation Instrument de mesure xafs a vide pousse

Also Published As

Publication number Publication date
JPS6419668A (en) 1989-01-23

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