JPH05308189A - Through-hole plated circuit board and its manufacture - Google Patents

Through-hole plated circuit board and its manufacture

Info

Publication number
JPH05308189A
JPH05308189A JP13614092A JP13614092A JPH05308189A JP H05308189 A JPH05308189 A JP H05308189A JP 13614092 A JP13614092 A JP 13614092A JP 13614092 A JP13614092 A JP 13614092A JP H05308189 A JPH05308189 A JP H05308189A
Authority
JP
Japan
Prior art keywords
sulfide
hole
copper
layer
conductive metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13614092A
Other languages
Japanese (ja)
Inventor
Ryuichi Yamamoto
隆一 山本
Manabu Kazuhara
学 数原
Satoru Okubo
哲 大久保
Hiroshi Mizutsuki
洋 水月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elna Co Ltd
Original Assignee
Elna Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elna Co Ltd filed Critical Elna Co Ltd
Priority to JP13614092A priority Critical patent/JPH05308189A/en
Publication of JPH05308189A publication Critical patent/JPH05308189A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To realize resource saving, no environmental pollution and shortened process time by a method wherein a conductive metal sulfide-contained layer is formed at least on a holed face in a holed board, the sulfide-contained layer is used as a cathode, a metal layer is formed on the sulfide-contained layer by an electroplating method and the through hole is connected electrically. CONSTITUTION:A conductive metal sulfide-contained layer is formed on a double-sided board in which a hole has been made and which is composed of an insulating ceramic material or on a holed face in a multilayer board. The conductive metal sulfide-contained layer is used as a cathode; a metal layer composed of copper, nickel, gold, tin, lead or a lead-tin alloy is formed on the conductive metal sulfide-contained layer by an electroplating method; conductors are connected electrically via the through hole. The through hole can be formed at low costs in a simplified process.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電子機器に利用される
プリント配線板やセラミクス基板などの回路基板の改良
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in a circuit board such as a printed wiring board or a ceramics board used in electronic equipment.

【0002】[0002]

【従来の技術】絶縁板の両面に電気回路を形成し、スル
ーホールを介して導通させる両面プリント配線板、およ
び絶縁基板の表面だけでなく内部にも導体層を設け、各
導体層間をスルーホールで電気的に導通させる多層配線
板は、電子機器に最も広範囲に用いられている。これら
のスルーホールは、通常はスルーホールめっきによる接
続方法が採用されている
2. Description of the Related Art A double-sided printed wiring board in which an electric circuit is formed on both sides of an insulating plate to conduct electricity through the through holes, and a conductor layer is provided not only on the surface of the insulating substrate but also inside the through holes, and through holes are formed between the conductor layers. The multilayer wiring board that is electrically connected with is used most widely in electronic devices. These through holes are usually connected by through hole plating.

【0003】スルーホールめっきの方法としては、サブ
トラクティブ法、フルアディティブ法、パートリアディ
ティブ法などがある。即ち、無電解めっき法、または無
電解めっきと電気めっきからなる複合プロセスがあり、
形成回路のパターンの微細化度、スルーホール径、絶縁
体材質および製造コストの観点より適宜プロセスが選択
使用されている。
As a method of through-hole plating, there are a subtractive method, a full additive method, a part additive method and the like. That is, there is an electroless plating method, or a combined process consisting of electroless plating and electroplating,
The process is appropriately selected and used from the viewpoints of the degree of miniaturization of the pattern of the formed circuit, the through hole diameter, the insulating material, and the manufacturing cost.

【0004】一般には、ドリルにて穿孔した基板を無電
解めっきし、しかる後に電気めっきを行なうのが主流の
プロセスである。この方法についてもパターンの微細
度、スルーホール径、製造コストの観点より種々の方法
に細分化される。このスルーホール基板の製造プロセス
の代表例として、テンティング法、フォトED法および
パターンめっき法などを挙げることができる。
Generally, the mainstream process is to electrolessly plate a substrate perforated with a drill and then electroplating. This method is also subdivided into various methods in view of the fineness of the pattern, the diameter of the through hole, and the manufacturing cost. Typical examples of the manufacturing process of this through-hole substrate include a tenting method, a photo ED method, and a pattern plating method.

【0005】それぞれの方法を簡単に述べると、次のよ
うになる。先ず、テンティング法について述べる。両面
銅張積層板をドリルにて穿孔し、パネルメッキを行な
う。ドライフィルムを張り、画像処理をしてエッチング
レジストを形成する。エッチングを行ない、回路を形成
する。エッチングレジストを剥離し、ソルダーレジスト
などを形成すると、スルーホール基板を得る。
A brief description of each method is as follows. First, the tenting method will be described. A double-sided copper clad laminate is drilled and panel plated. A dry film is applied and image processing is performed to form an etching resist. Etching is performed to form a circuit. By removing the etching resist and forming a solder resist or the like, a through hole substrate is obtained.

【0006】次に、フォトED法について述べる。両面
銅張積層板をドリルにて穿孔し、パネルメッキを行な
う。電着法を利用して両面および透孔内にレジストを形
成し、画像処理をしてエッチングレジストを形成する。
エッチングを行ない、回路を形成する。エッチングレジ
ストを剥離し、ソルダーレジストなどを形成すると、ス
ルーホール基板を得る。
Next, the photo ED method will be described. A double-sided copper clad laminate is drilled and panel plated. A resist is formed on both sides and the inside of the through holes by using an electrodeposition method, and an image processing is performed to form an etching resist.
Etching is performed to form a circuit. By removing the etching resist and forming a solder resist or the like, a through hole substrate is obtained.

【0007】さらに、パターンめっき法について述べ
る。両面銅張積層板をドリルにて穿孔し、パネルメッキ
を行なう。ドライフィルムを張り、画像処理をする。パ
ターンめっきし、次いでエッチングレジストめっきを行
なう。しかる後に、エッチングを行ない、回路を形成す
る。エッチングレジストを剥離し、ソルダーレジストな
どを形成すると、スルーホール基板を得る。
Further, the pattern plating method will be described. A double-sided copper clad laminate is drilled and panel plated. Apply a dry film and process the image. Pattern plating is performed, and then etching resist plating is performed. After that, etching is performed to form a circuit. By removing the etching resist and forming a solder resist or the like, a through hole substrate is obtained.

【0008】上述のいずれの方法もドリル穿孔後にパネ
ルめっき工程を有している。パネルめっきは、導体層間
をスルーホールめっきを行なうことにより電気的に接続
させるものであるが、この工程はスルーホール部への無
電解めっきに引続く電気めっき、またはアディティブ法
と称される無電解めっき厚付法などから構成される。
All of the above methods have a panel plating step after drilling. Panel plating is to make electrical connection by conducting through-hole plating between conductor layers. This process is performed by electroplating subsequent to electroless plating on through-holes, or electroless plating called an additive method. It consists of plating thickening method.

【発明が解決しようとする課題】[Problems to be Solved by the Invention]

【0009】無電解めっきは、EDTA、ビピリジル、
シアン化合物などのキレート試薬、パラジウム、錫、触
媒、ホルマリンなどの有害物、高価な資源などを用い、
かつ良質なめっき皮膜を得るために長い反応時間と多量
の水洗水を用いるなど、省資源、無公害、工程管理の簡
素化、工程数削減、工程時間短縮などの要求に対応し難
いという難点があった。
Electroless plating is performed with EDTA, bipyridyl,
Using chelating agents such as cyanide compounds, palladium, tin, catalysts, harmful substances such as formalin, expensive resources, etc.
In addition, it is difficult to meet demands such as resource saving, no pollution, simplification of process control, reduction of the number of processes, and shortening of process time by using long reaction time and a large amount of washing water to obtain a high quality plating film. there were.

【0010】[0010]

【課題を解決するための手段】本発明は、上記のような
課題を解決するためになされたもので、回路基板として
例えばスルーホールプリント配線板のスルーホールを通
して導体間を電気的に接続するための改良方法とこの改
良方法による新たなスルーホールプリント配線板を提供
する。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and is intended to electrically connect conductors through a through hole of a through hole printed wiring board as a circuit board. And a new through-hole printed wiring board by the improved method.

【0011】本発明は、穴あけされた基板の少なくとも
穴あけ面(透孔の内壁)に導電性金属硫化物含有層を設
け、しかる後に該硫化物含有層を陰極として該硫化物含
有層上に電気めっき法により金属層を設けることにより
電気的なスルーホール接続をすることを特徴とする。
According to the present invention, a conductive metal sulfide-containing layer is provided on at least a hole-punched surface (inner wall of a through hole) of a perforated substrate, and thereafter, the sulfide-containing layer is used as a cathode to form an electric field on the sulfide-containing layer. It is characterized in that a metal layer is provided by a plating method to electrically connect through holes.

【0012】基板としては、有機または無機の絶縁体や
それらの複合材料が用いられる。
As the substrate, an organic or inorganic insulator or a composite material thereof is used.

【0013】有機系の絶縁体では、エポキシ樹脂、フッ
素樹脂、ポリイミド樹脂、フェノール樹脂などが用いら
れる。無機系の絶縁体では、ガラス短繊維、ガラス織
布、セラミクスなどが用いられる。複合材料としてはガ
ラス・エポキシ基材、例えばFR−4、CEM−3ある
いはCEM−1が用いられる。
As the organic insulator, epoxy resin, fluorine resin, polyimide resin, phenol resin, etc. are used. Inorganic insulators include short glass fibers, woven glass cloth, and ceramics. A glass / epoxy base material such as FR-4, CEM-3 or CEM-1 is used as the composite material.

【0014】基板材料の片面あるいは両面に10ないし
60μmの銅箔を張り、片面・両面銅張基板として、あ
るいはこれらを内層や外層に用い、プリプレグと組合せ
た多層板としたものが用いられる。
A single-sided or double-sided copper-clad substrate obtained by laminating a copper foil of 10 to 60 μm on one side or both sides of the substrate material, or a multilayer board in which these are used as an inner layer or an outer layer and combined with a prepreg is used.

【0015】両面銅張基板としては厚み0.3mmない
し1.6mmのリジット板や厚み0.3mm末満のいわ
ゆるフレキシブル両面基板が用いられる。
As the double-sided copper-clad substrate, a rigid plate having a thickness of 0.3 mm to 1.6 mm or a so-called flexible double-sided substrate having a thickness of 0.3 mm is used.

【0016】銅張基板にはドリルまたはパンチングによ
り通常、直径0.2mm〜1.2mmの表裏または内層
間の電気接続用スルーホールが設けられる。
The copper clad substrate is usually provided with through holes for electrical connection between the front and back or inner layers having a diameter of 0.2 mm to 1.2 mm by drilling or punching.

【0017】本発明ではスルーホールの少なくとも絶縁
材の上に導電性金属硫化物含有層を形成する。
In the present invention, the conductive metal sulfide-containing layer is formed on at least the insulating material of the through hole.

【0018】導電性金属硫化物については、その性質と
合成法について、本件特許発明者によるところの特開昭
62−143306号、特開昭61−215661号、
特開昭61−10008号、特開昭64−18915号
公報などに開示されている。
Regarding the conductive metal sulfide, its properties and synthesis method are disclosed in Japanese Patent Laid-Open Nos. 62-143306 and 61-215661 by the inventor of the present invention.
It is disclosed in JP-A-61-10008 and JP-A-64-18915.

【0019】本発明では導電性金属硫化物含有層をスル
ホール電気めっきのための下地電極に用いるので、金属
硫化物は導電性が高いことが必要である。即ち、金属硫
化物の電気伝導度は10-4Scm-1以上であり、好まし
くは10-2Scm-1以上のものが用いられる。電気伝導
度の高い硫化物を構成し得る金属としては、IUPAC
無機化学命名法改訂版(1989)による元素の周期表
における族番号4族から12族の元素が用いられる。
In the present invention, since the conductive metal sulfide-containing layer is used as the base electrode for through-hole electroplating, the metal sulfide needs to have high conductivity. That is, the electrical conductivity of the metal sulfide is 10 -4 Scm -1 or more, preferably 10 -2 Scm -1 or more. As a metal capable of forming a sulfide having high electric conductivity, IUPAC
Elements of Group Nos. 4 to 12 in the periodic table of elements according to the Inorganic Chemistry Nomenclature Revised (1989) are used.

【0020】これらのなかでも硫化銅、硫化ニッケル、
硫化鉄、硫化カドミウム、硫化コバルト、硫化クロムが
安価でかつ比較的に安全であり好ましい。硫化銅は電気
伝導度が高く、安価であるので特に好ましい。金属硫化
物は金属化合物とイオウ化合物とを反応させることによ
り得られる。金属化合物としては硫酸塩、硝酸塩、ハロ
ゲン化物、有機酸塩、有機金属化合物などが用いられ
る。特に、ハロゲン化物、硫酸塩、硝酸塩、酢酸塩が安
価でかつ公害対策上好ましい。
Among these, copper sulfide, nickel sulfide,
Iron sulfide, cadmium sulfide, cobalt sulfide, and chromium sulfide are preferable because they are inexpensive and relatively safe. Copper sulfide is particularly preferable because it has high electric conductivity and is inexpensive. The metal sulfide is obtained by reacting a metal compound with a sulfur compound. As the metal compound, sulfates, nitrates, halides, organic acid salts, organic metal compounds and the like are used. In particular, halides, sulfates, nitrates and acetates are inexpensive and preferable in terms of pollution control.

【0021】イオウ化合物としてはメルカプタン、硫化
水素、アルキルサルファイド、チオ硫酸塩、硫化ソー
ダ、硫化アンモニウム、チオ尿素などが例示される。
Examples of the sulfur compound include mercaptan, hydrogen sulfide, alkyl sulfide, thiosulfate, sodium sulfide, ammonium sulfide and thiourea.

【0022】反応系としては液相反応またはスラリー反
応硫化水素ガスなどを用いた気固反応が採用される。液
相としては、溶媒に水や金属化合物の溶解度が高い有機
溶媒、例えばアセトニトリル、ジメチルホルムアミド、
ジメチルホルスルホキシドなどが適宜選択される。特
に、水溶液または硫化水素ガスが安価でかつ公害対策上
好ましい。
As the reaction system, a liquid phase reaction or a gas-solid reaction using a slurry reaction hydrogen sulfide gas or the like is adopted. As the liquid phase, an organic solvent having a high solubility of water or a metal compound in the solvent, for example, acetonitrile, dimethylformamide,
Dimethylforsulfoxide or the like is appropriately selected. In particular, an aqueous solution or hydrogen sulfide gas is inexpensive and preferable in terms of pollution control.

【0023】反応温度は−20℃ないし300℃であ
る。また、金属硫化物は一段で化学蒸着法(CVD)に
よって付着させることもできる。一般に、一段でCVD
法などの気相法で金属化合物を付けるより、液相法で先
ず金属化合物をプリント基板に付着せしめた後に、含イ
オウ化合物との反応により金属硫化物に転化させること
が安価であり好ましい。
The reaction temperature is -20 ° C to 300 ° C. The metal sulfide can also be deposited in a single step by chemical vapor deposition (CVD). Generally, CVD in one step
It is cheap and preferable to first attach the metal compound to the printed circuit board by the liquid phase method and then convert it to the metal sulfide by the reaction with the sulfur-containing compound, rather than attaching the metal compound by the gas phase method such as the method.

【0024】ドリルにて穴あけしたプリント基板を金属
化合物溶液に浸漬した後に、硫化水素ガスと反応させる
か、イオウ化合物溶液中に浸漬したり、イオウ化合物溶
液を噴霧したものを加熱して金属硫化物をスルーホール
内壁に析出させることができる。また、イオウ化合物溶
液にプリント基板を浸漬した後に乾燥させ、しかる後に
金属化合物溶液中に浸漬したり、金属化合物溶液を噴霧
したものを加熱して金属硫化物をスルーホール内壁に析
出させることもできる。さらには、プリント基板を金属
化合物とイオウ化合物を含む溶液中に浸漬して反応させ
ることにより金属硫化物をスルーホール内壁に析出させ
ることもできる。
A printed circuit board perforated with a drill is immersed in a metal compound solution and then reacted with hydrogen sulfide gas, immersed in a sulfur compound solution, or heated with a sprayed sulfur compound solution to produce a metal sulfide. Can be deposited on the inner wall of the through hole. It is also possible to immerse the printed circuit board in the sulfur compound solution and then dry it, and then immerse it in the metal compound solution, or heat the sprayed metal compound solution to deposit the metal sulfide on the inner wall of the through hole. .. Furthermore, the metal sulfide can be deposited on the inner wall of the through hole by immersing the printed circuit board in a solution containing a metal compound and a sulfur compound to cause a reaction.

【0025】本発明における金属化合物とイオウ化合物
の反応条件については特に制限はないが、金属化合物と
イオウ化合物のモル比は1:0.001ないし1:10
00の範囲にあるのが望ましい。特に、プリント基板を
金属化合物とイオウ化合物を含む溶液中に浸漬して反応
させることにより金属硫化物をスルーホールの内壁に析
出させる場合には金属化合物とイオウ化合物のモル比を
1:0.01ないし1:100の範囲にするのが望まし
く、特に好ましくは1:0.1ないし1:10の範囲に
するのが望ましい。
The reaction conditions of the metal compound and the sulfur compound in the present invention are not particularly limited, but the molar ratio of the metal compound and the sulfur compound is 1: 0.001 to 1:10.
The range of 00 is desirable. In particular, when metal sulfide is deposited on the inner wall of the through hole by immersing the printed circuit board in a solution containing a metal compound and a sulfur compound and reacting the solution, the molar ratio of the metal compound and the sulfur compound is 1: 0.01. It is preferably in the range of 1: 100 to 1: 100, particularly preferably in the range of 1: 0.1 to 1:10.

【0026】また、前述の特開昭62−143306
号、特開昭61−215661号、特開昭61−100
08号、特開昭64−18915号、さらには特開昭6
1−91005号公報にあるように、金属硫化物をコロ
イド状に含む分散液(さらに高分子化合物を溶解させた
分散液をも含む)をスル−ホ−ルの内壁に塗布し、分散
媒を除くことによりスル−ホ−ル内壁に金属硫化物層を
形成させてもよい。
Further, the above-mentioned JP-A-62-143306.
No. 61-215661 and 61-100.
08, JP-A No. 64-18915, and further JP-A No. 6-18
As described in JP-A No. 1-91005, a dispersion containing colloidal metal sulfide (including a dispersion in which a polymer compound is dissolved) is applied to the inner wall of a through-hole to form a dispersion medium. By removing it, a metal sulfide layer may be formed on the inner wall of the through hole.

【0027】金属硫化物をプリント基板の透孔部分に強
固に付着させるためには、穴あけした基板を必要に応じ
て脱脂クリーニング、ソフトエッチング、酸化処理など
の前処理を行なう。脱脂クリーニングとしては、バフ研
磨などの機械的方法または界面活性剤水溶液リンス後に
ジェット水洗を行なうことなどが例示される。また、ソ
フトエッチングとしては、基材がガラス・エポキシの場
合は、希水酸化ナトリウム水溶液、希水酸化カリウム水
溶液、炭酸ソーダ水溶液などが用いられ、基材がポリテ
トラフルオロエチレンの場合はナトリウム−ナフタレン
系有機溶液が用いられる。基材がセラミクスの場合もア
ルカリや酸などを選択する。酸化処理としては、過マン
ガン酸カリと苛性アルカリ混合水溶液が例示される。
In order to firmly attach the metal sulfide to the through-hole portion of the printed board, the perforated board is subjected to pretreatments such as degreasing cleaning, soft etching and oxidation treatment, if necessary. Examples of the degreasing cleaning include mechanical methods such as buffing, and washing with a jet water after rinsing the aqueous surfactant solution. As the soft etching, dilute sodium hydroxide aqueous solution, dilute potassium hydroxide aqueous solution, sodium carbonate aqueous solution or the like is used when the substrate is glass / epoxy, and sodium-naphthalene is used when the substrate is polytetrafluoroethylene. A system organic solution is used. Even when the base material is ceramics, alkali or acid is selected. An example of the oxidation treatment is an aqueous mixed solution of potassium permanganate and caustic alkali.

【0028】また、プリント基板の透孔部分への金属硫
化物の付着を促進するために、少なくとも透孔部分を予
めヨウ素、ポリエチレンイミンまたはポリビニルアルコ
−ルなどのカップリング剤にて前処理を行なうのが好ま
しい。この前処理方法としては、上記のカップリング剤
0.005〜1mol/l(リットル)、好ましくは
0.01〜0.5mol/lの溶液にプリント基板を約
10分間浸漬した後に、水洗するのが望ましい。
Further, in order to promote the adhesion of the metal sulfide to the through holes of the printed circuit board, at least the through holes are pretreated with a coupling agent such as iodine, polyethyleneimine or polyvinyl alcohol in advance. Is preferred. As the pretreatment method, the printed board is immersed in a solution of the coupling agent 0.005 to 1 mol / l (liter), preferably 0.01 to 0.5 mol / l for about 10 minutes and then washed with water. Is desirable.

【0029】導電性金属硫化物を形成した後、その上に
電気めっき法により金属層を設ける。金属層としては公
知の金属が用いられるが、特に銅、ニッケル、金、錫、
鉛/錫合金のいずれかをコスト面、ファイン化度および
信頼性の見地より、基板の用途、パターン形成法に従っ
て選択するのか好ましい。
After forming the conductive metal sulfide, a metal layer is provided thereon by electroplating. A known metal is used as the metal layer, but in particular, copper, nickel, gold, tin,
From the viewpoints of cost, fineness and reliability, it is preferable to select one of the lead / tin alloys according to the application of the substrate and the pattern forming method.

【0030】汎用のプリント回路基板としては、銅めっ
き、鉛/錫はんだめっきが特に好ましい。
As a general-purpose printed circuit board, copper plating and lead / tin solder plating are particularly preferable.

【0031】金属電気めっきには公知の方法が容易に適
用できる。めっきの厚みは通電量で制御するが、0.1
μmから70μmであり、通常5〜40μmが好適であ
る。例えば、銅めっき液としては硫酸銅硫酸水溶液に適
量の光沢剤と塩素イオンを添加した硫酸銅めっき液もし
くはピロリン酸銅ーピロリン酸カリーアンモニア水溶液
に適量の光沢剤を添加したピロリン酸銅めっき溶が用い
られる。被めっき基板の陰極電流密度は1〜10A/d
2 ,温度は20〜60℃で攪拌下銅陽極を用いて電気
銅めっきが行なわれる。めっきの品質あるいは公害対策
上、硫酸銅めっきが好ましい。
Known methods can be easily applied to the metal electroplating. The thickness of the plating is controlled by the amount of electricity, but 0.1
The thickness is from 70 μm to 70 μm, and normally 5 to 40 μm is suitable. For example, as the copper plating solution, a copper sulfate plating solution obtained by adding an appropriate amount of a brightening agent and chlorine ions to a copper sulfate sulfuric acid aqueous solution or a copper pyrophosphate plating solution obtained by adding an appropriate amount of a brightening agent to an aqueous solution of copper pyrophosphate-ammonia pyrophosphate is used. Be done. The cathode current density of the plated substrate is 1 to 10 A / d
Electrolytic copper plating is carried out using a copper anode with stirring at m 2 and temperature of 20 to 60 ° C. Copper sulfate plating is preferable in terms of plating quality or pollution control.

【0032】はんだめっきの場合には、ホウフッ化第1
錫とホウフッ化鉛とホウフッ化水素酸水溶液がめっき浴
として用いられる。
In the case of solder plating, borofluoride first
An aqueous solution of tin, lead borofluoride, and hydrofluoroboric acid is used as a plating bath.

【0033】本発明によるスルーホールめっきプリント
回路板の製造プロセスとしてはドリルにて穿孔した銅張
基板全体に金属硫化物を付着せしめた後に電気銅めっき
を行なうことが一つの実施態様であるが、ドリルにて穿
孔した部分以外に有機レジスト膜を付着せしめてドリル
穿孔部に選択的に金属硫化物を付着せしめ、かつ選択的
にスールホール部に電気めっきを施しても良い。
In the manufacturing process of the through-hole plated printed circuit board according to the present invention, one embodiment is to perform electrolytic copper plating after depositing a metal sulfide on the entire copper clad board drilled with a drill. An organic resist film may be attached to a portion other than the portion drilled by a drill to selectively attach a metal sulfide to the drilled portion, and electroplating may be selectively applied to the hole portion.

【0034】かくして得られた金属硫化物上に電気めっ
きを行なって得られたスルーホールめっき基板は引続い
て画像形成工程に送られ、例えばフォトED法によるレ
ジスト、テンティング法によるドライフィルムレジスト
またはパターンめっき法によるドライフィルムレジスト
などが形成された後に金属エッチングまたはパターンめ
っきに引続く金属エッチングにより、それぞれフォトE
D法によるスルホールめっき基板、テンティングによる
法スルホールめっき基板、パターンめっき法によるスル
ホールめっき基板が得られる。これらのなかでも、近年
工業化された、フォトED法が特に安価でかつファイン
化対応の見地より好ましい。
The through-hole plated substrate obtained by electroplating the metal sulfide thus obtained is then sent to the image forming step, for example, a resist by the photo ED method, a dry film resist by the tenting method or After the dry film resist or the like is formed by the pattern plating method, the photo E is formed by the metal etching or the metal etching subsequent to the pattern plating.
A through hole plated substrate by the D method, a through hole plated substrate by tenting, and a through hole plated substrate by the pattern plating method are obtained. Among these, the photo-ED method, which has been industrialized in recent years, is particularly preferable from the viewpoint of inexpensiveness and fineness.

【0035】[0035]

【実施例】【Example】

【0036】〈実施例1〉両面に35μmの銅箔を有す
るガラス・エポキシ両面基板(厚さ1.6mm、FR−
4)にドリル穿孔により直径0.8mmの透孔を設けた
基板を試験片に用いた。この基板をバフ研磨し、水洗後
4%水酸化ナトリウム水溶液で脱脂洗浄し、水洗した。
Example 1 A glass / epoxy double-sided board (thickness: 1.6 mm, FR-
A substrate provided with a through hole having a diameter of 0.8 mm by drilling in 4) was used as a test piece. This substrate was buffed, washed with water, degreased with a 4% aqueous sodium hydroxide solution, and washed with water.

【0037】次いで、0.1mol/l硫酸銅水溶液中
25℃に5分間浸漬した。基板より余剰の液を除去し
た。しかる後に、0.5%硫化アンモニウム水溶液に浸
漬した。透孔部内壁と銅表面は黒色ないし黒褐色に変色
した。この基板を水洗してから乾燥した。この操作を3
回繰返した。
Then, it was immersed in a 0.1 mol / l copper sulfate aqueous solution at 25 ° C. for 5 minutes. Excess liquid was removed from the substrate. Then, it was immersed in a 0.5% ammonium sulfide aqueous solution. The inner wall of the through hole and the copper surface turned black or blackish brown. This substrate was washed with water and then dried. Do this operation 3
Repeated times.

【0038】銅化合物と硫化アンモニウムの反応および
硫酸銅などの銅化合物とチオ硫酸ナトリウムの加温下の
反応において、黒色の導電性硫化銅が生成することは良
く知られている。また、これらの硫化銅の生成反応を高
分子材料やガラス共存下に行なわせることにより高分子
材料表面やガラス表面層に条件により形成させることが
できることは、例えば特開昭62−143306号、特
開昭61−215661号、特開昭61−10008
号、特開昭64−18915号、特開昭61−4281
3号公報、Chem,Ind,(London)198
6年531頁などで良く知られているので、この黒色な
いし黒褐色物質は硫化銅であると考えられる。事実、こ
の黒褐色物質の透孔の内壁への沈積により基板の両面間
に導通が得られた。
It is well known that black conductive copper sulfide is produced in the reaction of a copper compound with ammonium sulfide and the reaction of a copper compound such as copper sulfate with sodium thiosulfate under heating. Further, the fact that the formation reaction of these copper sulfides is carried out in the presence of a polymer material or glass can form the surface of the polymer material or the surface layer of the glass under certain conditions, for example, as disclosed in JP-A-62-143306. JP-A-61-215661, JP-A-61-10008
JP-A-64-18915, JP-A-61-4281
No. 3, Chem, Ind, (London) 198.
This black or blackish brown substance is considered to be copper sulfide because it is well known in 653, page 531. In fact, the deposition of this black-brown material on the inner walls of the through holes provided conduction between both sides of the substrate.

【0039】この基板に電気銅めっきを行なった。めっ
き溶にはめっき用高純度硫酸銅(CuSO4.・5H2
O)30g/l、特級硫酸250g/l、塩素イオン2
5ppm、添加剤50ml/l(シプレー社、XP−8
802)からなる混合液を用いた。プリント基板を陰極
とし、陰極電流密度1.5A/dm2 ,温度25℃、攪
拌下30分間めっきを行なったところ、全ての透孔に銅
めっきが施された。引続き、めっきを行ない、透孔内に
30μmの厚さの銅めっきを行なった。透孔内の銅めっ
きは基板に強固に付着していた。
Copper electroplating was performed on this substrate. High-purity copper sulfate for plating in the plating soluble (CuSO 4. · 5H 2
O) 30 g / l, special grade sulfuric acid 250 g / l, chloride ion 2
5 ppm, additive 50 ml / l (Shipley Co., XP-8
A mixed solution of 802) was used. When the printed circuit board was used as a cathode and plating was performed for 30 minutes under stirring at a cathode current density of 1.5 A / dm 2 at a temperature of 25 ° C., all the through holes were copper-plated. Subsequently, plating was carried out, and copper plating with a thickness of 30 μm was carried out in the through holes. The copper plating in the through holes was firmly attached to the substrate.

【0040】〈実施例2〉金属硫化物形成の際の金属化
合物として硫酸銅の代わりに0.1mol/l塩化ニッ
ケルを用いたほかは実施例1と同様な方法でドリル穴あ
けした両面銅張積層板(厚さ1.6mm、FR−4)に
硫化ニッケルを析出させた。水洗後、実施例1と同じ方
法で電気めっきを行なった。通電開始30分後、全ての
透孔に銅めっきが施された。引き続き、めっきを行い、
透孔内に30μmの厚さの銅めっきを行なった。透孔内
の銅めっきは基板に強固に付着していた。
Example 2 Double-sided copper clad laminate drilled by the same method as in Example 1 except that 0.1 mol / l nickel chloride was used in place of copper sulfate as the metal compound for forming the metal sulfide. Nickel sulfide was deposited on a plate (thickness: 1.6 mm, FR-4). After washing with water, electroplating was performed in the same manner as in Example 1. After 30 minutes from the start of energization, copper plating was applied to all the through holes. Continue to plating,
Copper plating with a thickness of 30 μm was performed in the through holes. The copper plating in the through holes was firmly attached to the substrate.

【0041】〈実施例3〉実施例1と同様な方法でドリ
ル穴あけした両面銅張積層板(厚さ1.6mm、FR−
4)を、40℃以下にて混合した0.1mol/l硫酸
銅と0.1mol/lチオ硫酸ナトリウムの混合液に浸
漬後、加熱し、75〜85℃にて1時間黒色の硫化銅を
生成させた。その後に基板を取り出し、洗浄・乾燥後、
実施例1と同様の方法にて電気銅めっきを行なったとこ
ろ、すべての透孔の内面に銅めっきが施された。
Example 3 A double-sided copper clad laminate drilled by the same method as in Example 1 (thickness: 1.6 mm, FR-
4) was immersed in a mixed solution of 0.1 mol / l copper sulfate and 0.1 mol / l sodium thiosulfate mixed at 40 ° C. or lower and then heated, and black copper sulfide was added at 75 to 85 ° C. for 1 hour. Was generated. After that, the substrate is taken out, washed and dried,
When electrolytic copper plating was carried out in the same manner as in Example 1, the inner surfaces of all the through holes were copper plated.

【0042】〈実施例4〉実施例1と同様な方法でドリ
ル穴あけした両面銅張積層板(厚さ1.6mm、FR−
4)を、0.05mol/lヨウ素溶液に室温で5分間
浸漬し、前処理をした。洗浄・乾燥後、実施例1と同様
な方法にて硫化銅を透孔内面および銅箔表面に析出させ
た。透孔内部に硫化銅が均一に形成された。硫酸銅と硫
化アンモニウムの反応は4回行ない、その後に電気銅め
っきを行なったが、全ての透孔内面に銅めっきが施され
た。
<Embodiment 4> A double-sided copper clad laminate (thickness: 1.6 mm, FR-) drilled in the same manner as in Embodiment 1.
4) was pretreated by immersing it in a 0.05 mol / l iodine solution at room temperature for 5 minutes. After washing and drying, copper sulfide was deposited on the inner surface of the through holes and the surface of the copper foil in the same manner as in Example 1. Copper sulfide was uniformly formed inside the through holes. The reaction between copper sulfate and ammonium sulfide was carried out four times, and then electrolytic copper plating was performed, but copper plating was performed on all inner surfaces of the through holes.

【0043】〈実施例5〉実施例4のヨウ素溶液に代え
て0.5%ポリエチレンイミンメタノ−ル溶液を用いて
前処理を行なったほかは実施例4と同様な方法で硫化銅
を透孔内面に形成した。電気銅めっき後も、全ての透孔
内面に銅めっきが施された。
<Example 5> Copper sulfide was permeated in the same manner as in Example 4 except that 0.5% polyethyleneimine methanol solution was used instead of the iodine solution of Example 4 for pretreatment. It was formed on the inner surface. Even after electrolytic copper plating, copper plating was performed on the inner surfaces of all the through holes.

【0044】[0044]

【発明の効果】本発明は、回路基板のスルーホールに導
電性金属硫化物含有層を形成し、その上に電気めっき法
により金属層を形成したものであるため、簡素化された
工程により安価にスルーホールを形成することができ
る。
According to the present invention, a conductive metal sulfide-containing layer is formed in a through hole of a circuit board, and a metal layer is formed on the conductive metal sulfide containing layer by an electroplating method. Through holes can be formed in the.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 水月 洋 神奈川県相模原市相生2丁目2番1号 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Mizutsuki 2-2-1 Aioi, Sagamihara City, Kanagawa Prefecture

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 絶縁性有機ポリマー、ガラス繊維および
/または絶縁性セラミクス材料などからなる両面基板ま
たは多層基板に透孔を有するプリント配線板の少なくと
も透孔部に導電性金属層を設けるにあたり、穿孔された
基板の少なくとも穿孔面に導電性金属硫化物含有層を設
ける工程と、導電性金属硫化物含有層を陰極として該硫
化物含有層上に電気めっき法により透孔内壁に金属層を
設ける工程とを有するスルーホールめっき回路基板の製
造方法。
1. A method for forming a conductive metal layer on at least a through hole portion of a printed wiring board having a through hole on a double-sided board or a multi-layer board made of an insulating organic polymer, glass fiber and / or an insulating ceramic material, etc. A conductive metal sulfide-containing layer on at least the perforated surface of the formed substrate, and a step of forming a metal layer on the inner wall of the through hole by electroplating on the sulfide-containing layer using the conductive metal sulfide-containing layer as a cathode. A method of manufacturing a through-hole plated circuit board having:
【請求項2】 導電性金属硫化物が硫化銅、硫化ニッケ
ル、硫化コバルト、硫化鉄から選ばれたものであること
を特徴とする請求項1記載のスルーホールめっき回路基
板の製造方法。
2. The method for manufacturing a through-hole plated circuit board according to claim 1, wherein the conductive metal sulfide is selected from copper sulfide, nickel sulfide, cobalt sulfide, and iron sulfide.
【請求項3】 金属層が銅、ニッケル、金、錫、鉛、鉛
/錫合金であることを特徴とする請求項1記載のスルー
ホールめっき回路基板の製造方法。
3. The method for manufacturing a through-hole plated circuit board according to claim 1, wherein the metal layer is copper, nickel, gold, tin, lead, or a lead / tin alloy.
【請求項4】 透孔部に導電性金属硫化物含有層を有す
ることを特徴とする両面または多層スルーホールめっき
回路基板。
4. A double-sided or multi-layer through-hole plated circuit board having a conductive metal sulfide-containing layer in the through hole.
【請求項5】 厚み0.1μmから50μmの導電性金
属硫化物含有層上に銅、ニッケル、錫、鉛/錫合金のい
ずれかよりなる金属めっき層を有することを特徴とする
請求項4記載の両面または多層スルーホールめっき回路
基板。
5. A metal plating layer made of any one of copper, nickel, tin, and lead / tin alloy is provided on the conductive metal sulfide-containing layer having a thickness of 0.1 μm to 50 μm. Double-sided or multilayer through-hole plated circuit board.
JP13614092A 1992-04-28 1992-04-28 Through-hole plated circuit board and its manufacture Pending JPH05308189A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13614092A JPH05308189A (en) 1992-04-28 1992-04-28 Through-hole plated circuit board and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13614092A JPH05308189A (en) 1992-04-28 1992-04-28 Through-hole plated circuit board and its manufacture

Publications (1)

Publication Number Publication Date
JPH05308189A true JPH05308189A (en) 1993-11-19

Family

ID=15168247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13614092A Pending JPH05308189A (en) 1992-04-28 1992-04-28 Through-hole plated circuit board and its manufacture

Country Status (1)

Country Link
JP (1) JPH05308189A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006249520A (en) * 2005-03-11 2006-09-21 Hitachi Chem Co Ltd Pretreatment liquid for electroless plating and electroless plating method using the same
JP2013149871A (en) * 2012-01-20 2013-08-01 Asahi Kasei E-Materials Corp Flexible wiring board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006249520A (en) * 2005-03-11 2006-09-21 Hitachi Chem Co Ltd Pretreatment liquid for electroless plating and electroless plating method using the same
JP2013149871A (en) * 2012-01-20 2013-08-01 Asahi Kasei E-Materials Corp Flexible wiring board

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