JPH05307012A - Airtight specimen holder for x-ray diffraction device - Google Patents

Airtight specimen holder for x-ray diffraction device

Info

Publication number
JPH05307012A
JPH05307012A JP4137628A JP13762892A JPH05307012A JP H05307012 A JPH05307012 A JP H05307012A JP 4137628 A JP4137628 A JP 4137628A JP 13762892 A JP13762892 A JP 13762892A JP H05307012 A JPH05307012 A JP H05307012A
Authority
JP
Japan
Prior art keywords
sample
airtight
holder
specimen
ray diffraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4137628A
Other languages
Japanese (ja)
Inventor
Hitoshi Okanda
等 大神田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Denki Co Ltd
Rigaku Corp
Original Assignee
Rigaku Denki Co Ltd
Rigaku Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rigaku Denki Co Ltd, Rigaku Corp filed Critical Rigaku Denki Co Ltd
Priority to JP4137628A priority Critical patent/JPH05307012A/en
Publication of JPH05307012A publication Critical patent/JPH05307012A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

PURPOSE:To hold a micro-specimen in the desired atmosphere at a specified position of an X-ray diffraction device where an airtight vessel for specimen can not be located on the device body being obstructed by a swinging mechanism. CONSTITUTION:A specimen encapsulating part 2 made of a transparent material is formed at a part of a holder body 1, and in a separately provided airtight vessel such as a glow box, a specimen S is inserted in this specimen encapsulating part 2, which is then shut by a shutting member 3. Thereby, the part 2 is held in atmosphere similar to the inside of the airtight vessel. Mounting on an X-ray diffraction device is conducted while the operator watches the specimen S in this part 2 with a microscope.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、移動自在な試料台を備
えたX線回折装置に使用する気密試料ホルダに関し、特
に微小の試料を試料台の揺動中心に配置する気密試料ホ
ルダに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtight sample holder used in an X-ray diffractometer equipped with a movable sample table, and more particularly to an airtight sample holder for arranging a minute sample at the swing center of the sample table.

【0002】[0002]

【従来の技術】X線の回折現象を利用して物質の結晶構
造等を分析するX線回折装置には、図3に示すように、
試料台10が支軸11を中心に揺動する構造のものがあ
る。同図に示すX線回折装置の概略構成を説明すると、
試料台10の先端に固定した試料に対し、X線管12か
ら発射したX線をコリメータ13を通して照射する。試
料に照射されたX線は、試料の結晶構造に応じて特定の
方向に回折するため、その回折X線を検出器14で検出
し、その検出角度と照射角度との関係にもとづいて試料
の結晶構造等を分析することができる。
2. Description of the Related Art As shown in FIG. 3, an X-ray diffractometer for analyzing the crystal structure of a substance by utilizing the X-ray diffraction phenomenon
There is a structure in which the sample table 10 swings around a support shaft 11. The schematic configuration of the X-ray diffractometer shown in FIG.
The sample fixed to the tip of the sample table 10 is irradiated with X-rays emitted from the X-ray tube 12 through the collimator 13. Since the X-rays irradiated on the sample are diffracted in a specific direction according to the crystal structure of the sample, the diffracted X-rays are detected by the detector 14, and the X-ray of the sample is detected based on the relationship between the detected angle and the irradiation angle. The crystal structure etc. can be analyzed.

【0003】試料台10は、試料に対するX線の照射角
度を調整するために、支軸11を中心に揺動するととも
に、支軸15を中心に回転自在、さらに支軸16を中心
としても揺動自在となっている。
The sample table 10 swings about a support shaft 11 in order to adjust the irradiation angle of X-rays on the sample, is rotatable about a support shaft 15, and also swings about a support shaft 16. It is free to move.

【0004】これら揺動及び回転の中心線は一点0で交
わり、その交点(以下、移動中心という)0にコリメー
タ13から照射されるX線の通路が交差している。試料
はこの移動中心0上に配置するが、一般にこのX線回折
装置の検査対象となる試料は微小な結晶材料であるた
め、肉眼での位置決めは困難である。そこで、同装置に
は試料位置決め用の顕微鏡17が設けてある。
These swing and rotation center lines intersect at one point 0, and the intersection (hereinafter referred to as the center of movement) 0 intersects the path of the X-rays emitted from the collimator 13. The sample is placed on the center of movement 0. However, since the sample to be inspected by this X-ray diffractometer is a microcrystalline material, it is difficult to position it with the naked eye. Therefore, the apparatus is provided with a microscope 17 for positioning the sample.

【0005】[0005]

【発明が解決しようとする課題】従来、上述したX線回
折装置は、もっぱら大気中での物質の構造分析に用途が
限られていた。しかし、例えば検査対象となる試料が大
気中の酸素に反応して短時間のうちに酸化するおそれの
ある物質のような場合、かかる物質の常態での構造分析
は困難である。また逆に、各種雰囲気下における試料の
構造変化データを取得したい場合もあるが、上述したX
線回折装置では、試料周囲の雰囲気を任意に設定するこ
とができないため、このようなデータを得ることもでき
なかった。もっとも、試料台の揺動機構を有しない形式
のX線回折装置では、従来から試料台を密閉容器内に配
置し、その容器内を所望の雰囲気に設定することのでき
る構造のものは知られていた。しかし、図3に示したよ
うな試料台の揺動機構を有する形式のX線回折装置で
は、密閉容器の設置に揺動機構が障害となるため、密閉
容器による試料周辺の雰囲気設定構造は採用が困難であ
った。
Conventionally, the above-mentioned X-ray diffractometer was limited in its use to the structural analysis of substances in the atmosphere. However, for example, when the sample to be inspected is a substance that may react with oxygen in the atmosphere and is oxidized in a short time, it is difficult to analyze the structure of the substance in a normal state. On the contrary, there is a case where it is desired to acquire the structural change data of the sample under various atmospheres.
In the line diffractometer, it was not possible to obtain such data because the atmosphere around the sample could not be set arbitrarily. However, in the X-ray diffractometer of the type that does not have a swinging mechanism of the sample stage, there is conventionally known a structure in which the sample stage is arranged in a closed container and the inside of the container can be set to a desired atmosphere. Was there. However, in the X-ray diffractometer of the type having the swing mechanism of the sample stage as shown in FIG. 3, the swing mechanism interferes with the installation of the closed container, so the atmosphere setting structure around the sample by the closed container is adopted. Was difficult.

【0006】本発明はこのような従来の事情にもとづい
てなされたものであり、試料を任意の雰囲気下においた
状態で、移動自在な試料台を備えたX線回折装置による
分析を可能とする気密試料ホルダの提供を目的とする。
The present invention has been made based on such conventional circumstances, and enables analysis by an X-ray diffractometer equipped with a movable sample stage in a state where the sample is placed in an arbitrary atmosphere. It is intended to provide an airtight sample holder.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明は、X線回折装置における移動自在な試料台
に装着し、微小の試料を前記試料台の移動中心に配置す
る気密試料ホルダであって、前記試料台に装着可能なホ
ルダ本体と、このホルダ本体の一部に設けた透明材料か
らなる試料封入部と、この試料封入部を密閉する閉塞部
材とを備えた構成としてある。
In order to achieve the above object, the present invention provides an airtight sample which is mounted on a movable sample stage in an X-ray diffractometer and a minute sample is arranged at the center of movement of the sample stage. A holder, which is configured to include a holder main body that can be mounted on the sample base, a sample encapsulating portion made of a transparent material provided in a part of the holder main body, and a closing member that seals the sample encapsulating portion. ..

【0008】[0008]

【作用】上記構成の本発明によれば、あらかじめ所望の
雰囲気に設定したグローボックス等の密閉容器内で試料
を試料封入部に配置するとともに、閉塞部材によってこ
の試料封入部を密閉する。このようにして密閉された試
料封入部内は、密閉容器の内部雰囲気と同じ雰囲気にな
っている。そして、ホルダ本体を試料台に装着し、かつ
透明な試料封入部の周壁を透かして顕微鏡により試料を
見ながら、試料台の移動中心に試料を位置決めする。
According to the present invention having the above-described structure, the sample is placed in the sample enclosing portion in a closed container such as a glow box which is set to a desired atmosphere in advance, and the sample enclosing portion is closed by the closing member. The inside of the sample-sealed portion thus sealed is the same as the internal atmosphere of the sealed container. Then, the holder main body is mounted on the sample table, and the sample is positioned at the moving center of the sample table while observing the sample with a microscope through the peripheral wall of the transparent sample enclosing part.

【0009】[0009]

【実施例】以下、本発明の一実施例について図面を参照
して説明する。図1は、本発明の実施例に係る気密試料
ホルダを、X線回折装置における試料台に装着した状態
を示す断面正面図である。また、図2(a),(b)
は、同気密試料ホルダを構成する各部材を示す断面正面
図である。なお、本実施例は、図3に示したX線回折装
置における試料台10に装着する気密試料ホルダとして
好適な実施例を示している。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a sectional front view showing a state in which an airtight sample holder according to an example of the present invention is mounted on a sample stage in an X-ray diffraction apparatus. In addition, FIGS.
[Fig. 3] is a sectional front view showing each member constituting the airtight sample holder. The present example shows a preferred example as an airtight sample holder to be mounted on the sample stage 10 in the X-ray diffraction apparatus shown in FIG.

【0010】これらの図に示すように、本実施例の気密
試料ホルダは、主として、ホルダ本体1、試料封入部
2、及び閉塞部材3で構成されている。ホルダ本体1
は、ステンレス鋼等の金属材料からなり、基部周壁1a
が試料台10のホルダ取付部10a に嵌入できる寸法に加
工してある。また、ホルダ本体1は、閉塞部材3が嵌め
込まれる中空部1bを有し、その中空部1bの内壁には
一定長さにわたり雌ねじ部1cが形成されている。ホル
ダ本体1の先端中央部には、試料封入部2を接合するた
めの透孔1dが形成してある。
As shown in these figures, the airtight sample holder of this embodiment is mainly composed of a holder body 1, a sample enclosing portion 2 and a closing member 3. Holder body 1
Is made of a metal material such as stainless steel and has a base peripheral wall 1a.
Is processed to a size that can be fitted into the holder mounting portion 10a of the sample table 10. Further, the holder body 1 has a hollow portion 1b into which the closing member 3 is fitted, and an internal thread portion 1c is formed on the inner wall of the hollow portion 1b over a certain length. At the center of the tip of the holder body 1, a through hole 1d for joining the sample enclosure 2 is formed.

【0011】試料封入部2は、先端が閉塞した筒状に形
成され、基端部をホルダ本体1の透孔1dに嵌め込み、
接着剤等で固着してある。したがって、試料封入部2の
基端開口部は、ホルダ本体1の中空部1bと連通してい
る。この試料封入部2は、ガラス,石英ガラス,プラス
チック等の透明材料で形成してあり、内部に封入される
試料を外部顕微鏡によって観察できるようになってい
る。また、周壁の厚さはX線の吸収を少なくするため、
可能な限り薄肉(例えば、0.01mm程度)に形成し
てある。
The sample enclosing portion 2 is formed in a cylindrical shape with the tip closed, and the base end is fitted into the through hole 1d of the holder body 1,
It is fixed with an adhesive or the like. Therefore, the base end opening of the sample enclosure 2 communicates with the hollow portion 1b of the holder body 1. The sample enclosing section 2 is formed of a transparent material such as glass, quartz glass, or plastic so that the sample enclosed inside can be observed by an external microscope. Also, the thickness of the peripheral wall reduces absorption of X-rays,
It is formed as thin as possible (for example, about 0.01 mm).

【0012】閉塞部材3は、ホルダ本体1と同様、ステ
ンレス鋼等の金属材料からなり、周壁3aが、ホルダ本
体1の中空部1bに嵌入できる寸法に加工されている。
周壁3aの基部には、ホルダ本体1の雌ねじ部1cに螺
合する雄ねじ部3bが形成してあり、さらに、完全な密
閉状態を実現するため、0リング4が基端に装着してあ
る。また、閉塞部材3の先端中央部には、試料を保持す
るとともに、試料封入部2内へ試料を配置するための試
料保持部材5が設けてある。この試料保持部材5は、細
径のガラス棒等からなり、基端が閉塞部材3の先端中央
部に植め込まれている。そして、先端に試料Sを保持す
ることができる。
Similar to the holder body 1, the closing member 3 is made of a metal material such as stainless steel, and the peripheral wall 3a is processed to a size that allows it to be fitted into the hollow portion 1b of the holder body 1.
A male screw portion 3b screwed into the female screw portion 1c of the holder body 1 is formed at the base portion of the peripheral wall 3a, and further, an O-ring 4 is attached to the base end in order to realize a completely sealed state. Further, a sample holding member 5 for holding the sample and disposing the sample in the sample enclosing section 2 is provided at the center of the tip of the closing member 3. The sample holding member 5 is made of a thin glass rod or the like, and its base end is embedded in the central portion of the tip of the closing member 3. Then, the sample S can be held at the tip.

【0013】次に、上述した構成の気密試料ホルダの使
用方法を説明する。まず、グローボックス等の気密容器
を別途用意し、あらかじめその気密容器内を所望の雰囲
気に設定しておく。試料保持部材5の先端には、分析す
べき物質の試料Sを固定し、また、閉塞部材3の周壁に
は、密閉性を高めるためにグリースを塗布しておく。な
お、これら試料の固定やグリースの塗布作業も、必要に
応じ気密容器内で行なってもよい。
Next, a method of using the airtight sample holder having the above structure will be described. First, an airtight container such as a glow box is separately prepared, and the inside of the airtight container is set to a desired atmosphere in advance. The sample S of the substance to be analyzed is fixed to the tip of the sample holding member 5, and grease is applied to the peripheral wall of the closing member 3 in order to enhance the hermeticity. Note that the work of fixing these samples and applying grease may be performed in an airtight container if necessary.

【0014】次いで、気密試料ホルダの各構成部材を気
密容器内に搬入する。気密容器内において、試料保持部
材5の先端をホルダ本体1の中空部1bに挿入し、続い
て同中空部1bに閉塞部材3の周壁3aを嵌め込み、さ
らに雌雄のねじ部1c,3bを螺合する。この作業によ
り、試料保持部材5の先端に固定した試料Sは試料封入
部2内に配置される。また、試料封入部2内は、気密容
器の内部と同じ雰囲気に保たれ、閉塞部材3によって密
閉状態となる。
Next, each component of the airtight sample holder is carried into the airtight container. In the airtight container, the tip of the sample holding member 5 is inserted into the hollow portion 1b of the holder body 1, the peripheral wall 3a of the closing member 3 is then fitted into the hollow portion 1b, and the male and female screw portions 1c and 3b are screwed together. To do. By this operation, the sample S fixed to the tip of the sample holding member 5 is placed in the sample enclosing section 2. Further, the inside of the sample enclosing unit 2 is kept in the same atmosphere as the inside of the airtight container, and is closed by the closing member 3.

【0015】上述の作業が終了した後、気密試料ホルダ
を気密容器から取り出し、X線回折装置における試料台
10のホルダ取付部10a に、ホルダ本体1の基部周壁1
aを嵌め込む。さらに、顕微鏡17を利用して試料封入
部2内の試料Sを移動中心0に位置決めする。
After the above-mentioned work is completed, the airtight sample holder is taken out of the airtight container, and the holder mounting portion 10a of the sample table 10 in the X-ray diffraction apparatus is attached to the base peripheral wall 1 of the holder body 1.
Insert a. Further, the sample S in the sample enclosure 2 is positioned at the center of movement 0 using the microscope 17.

【0016】このようにしてX線回折装置に装着された
気密試料ホルダは、所望の雰囲気に保たれた試料封入部
2内で試料Sを保持する。したがって、例えば酸化しや
すい試料の場合には、脱酸素状態の雰囲気に試料封入部
2内を設定することにより、常態のままの試料を分析す
ることができる。また、各種雰囲気下における試料の構
造変化データも容易に得ることができる。さらに、試料
封入部2内は密閉状態のため、湿気の防止にも効果があ
り、加えて試料の周囲への飛散を防止する効果もある。
The airtight sample holder mounted on the X-ray diffractometer in this manner holds the sample S in the sample enclosure 2 which is kept in a desired atmosphere. Therefore, for example, in the case of a sample that easily oxidizes, the sample in the normal state can be analyzed by setting the inside of the sample enclosure 2 in a deoxidized atmosphere. In addition, structural change data of the sample under various atmospheres can be easily obtained. Further, since the inside of the sample enclosing section 2 is hermetically closed, it is effective in preventing moisture, and in addition, it is effective in preventing scattering of the sample to the surroundings.

【0017】なお、本発明は上述した一実施例に限定さ
れるものではなく、要旨を変更しない範囲で種々の変形
または応用が可能である。例えば、本発明の気密試料ホ
ルダが適用できるX線回折装置としては、図3に示した
構造のものに限らず、試料台の移動機構を備え、かつ微
小の試料を検査対象とする種々のX線回折装置が該当す
ることは勿論である。また、ホルダ本体,試料封入部,
閉塞部材の形状,材料等についても、必要に応じて適宜
変更できることは言うまでもない。
The present invention is not limited to the above-described embodiment, and various modifications and applications are possible within the scope of the invention. For example, the X-ray diffractometer to which the airtight sample holder of the present invention can be applied is not limited to the structure shown in FIG. 3, but various X-ray diffractometers equipped with a sample stage moving mechanism and inspecting a minute sample. Of course, a line diffraction device is applicable. In addition, the holder body, sample enclosure,
It goes without saying that the shape, material, etc. of the closing member can be changed as needed.

【0018】[0018]

【発明の効果】以上説明したように、本発明の気密試料
ホルダによれば、移動自在な試料台を備え、かつ微小の
試料を分析するX線回折装置に装着することで、簡易な
構造で任意の雰囲気下における試料の構造分析が可能と
なる効果を有する。
As described above, according to the airtight sample holder of the present invention, it is possible to realize a simple structure by equipping the movable sample stage and mounting it on the X-ray diffraction device for analyzing a minute sample. This has the effect of enabling structural analysis of a sample under an arbitrary atmosphere.

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の実施例に係る気密試料ホルダを、X
線回折装置における試料台に装着した状態を示す断面正
面図である。
FIG. 1 illustrates an airtight sample holder according to an embodiment of the present invention,
It is a cross-sectional front view which shows the state mounted in the sample stand in a line diffraction apparatus.

【図2】 同図(a),(b)は、それぞれ気密試料ホ
ルダを構成する各部材を示す断面正面図である。
2 (a) and 2 (b) are cross-sectional front views showing respective members constituting the airtight sample holder.

【図3】 本発明の気密試料ホルダが装着されるX線回
折装置の構成例を示す斜視図である。
FIG. 3 is a perspective view showing a configuration example of an X-ray diffractometer to which the airtight sample holder of the present invention is attached.

【符号の説明】[Explanation of symbols]

1 ホルダ本体 2 試料封入部 3 閉塞部材 4 0リング 5 試料保持部材 10 試料台 12 X線管 13 コリメータ 14 検出器 17 顕微鏡 S 試料 1 Holder Main Body 2 Sample Encapsulation Part 3 Closing Member 4 0 Ring 5 Sample Holding Member 10 Sample Stand 12 X-ray Tube 13 Collimator 14 Detector 17 Microscope S Sample

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 X線回折装置における移動自在な試料台
に装着し、微小の試料を前記試料台の移動中心に配置す
る気密試料ホルダであって、 前記試料台に装着可能なホルダ本体と、 このホルダ本体の一部に設けた透明材料からなる試料封
入部と、 この試料封入部を密閉する閉塞部材と、 を備えたことを特徴とするX線回折装置用気密試料ホル
ダ。
1. An airtight sample holder, which is mounted on a movable sample stage in an X-ray diffraction apparatus, and places a minute sample at the center of movement of the sample stage, the holder body being mountable on the sample stage, An airtight sample holder for an X-ray diffractometer, comprising: a sample enclosing part made of a transparent material provided in a part of the holder body; and a closing member for sealing the sample enclosing part.
JP4137628A 1992-05-01 1992-05-01 Airtight specimen holder for x-ray diffraction device Pending JPH05307012A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4137628A JPH05307012A (en) 1992-05-01 1992-05-01 Airtight specimen holder for x-ray diffraction device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4137628A JPH05307012A (en) 1992-05-01 1992-05-01 Airtight specimen holder for x-ray diffraction device

Publications (1)

Publication Number Publication Date
JPH05307012A true JPH05307012A (en) 1993-11-19

Family

ID=15203108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4137628A Pending JPH05307012A (en) 1992-05-01 1992-05-01 Airtight specimen holder for x-ray diffraction device

Country Status (1)

Country Link
JP (1) JPH05307012A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015083270A1 (en) * 2013-12-05 2015-06-11 株式会社日立製作所 Sample holder and analytical vacuum device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015083270A1 (en) * 2013-12-05 2015-06-11 株式会社日立製作所 Sample holder and analytical vacuum device
JPWO2015083270A1 (en) * 2013-12-05 2017-03-16 株式会社日立製作所 Sample holder and vacuum analyzer

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