JPH05303015A - Color filter - Google Patents

Color filter

Info

Publication number
JPH05303015A
JPH05303015A JP10971392A JP10971392A JPH05303015A JP H05303015 A JPH05303015 A JP H05303015A JP 10971392 A JP10971392 A JP 10971392A JP 10971392 A JP10971392 A JP 10971392A JP H05303015 A JPH05303015 A JP H05303015A
Authority
JP
Japan
Prior art keywords
light
shielding film
transparent substrate
picture elements
color filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10971392A
Other languages
Japanese (ja)
Other versions
JP3199441B2 (en
Inventor
Takashi Minami
孝志 南
Toshiro Motomura
敏郎 本村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP10971392A priority Critical patent/JP3199441B2/en
Publication of JPH05303015A publication Critical patent/JPH05303015A/en
Application granted granted Critical
Publication of JP3199441B2 publication Critical patent/JP3199441B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To decrease deposition of particles on a light-shielding film due to electrostatic charges and to improve production yield by forming the light- shielding film to be extended to a nondisplay area on a transparent substrate. CONSTITUTION:The light-shielding film 10 consisting of metal chromium or the like is formed in a display area 9 of a transparent substrate 8 by vacuum vapor deposition or sputtering. The light-shielding film 10 is formed in grid shape so that each grid section corresponds to a picture element. During the light-shielding film 10 is formed by vacuum vapor depostion, sputtering, etc., a conductive film 12 is simultaneously formed in a manner that the light- shielding film 10 is extended to the nondisplay area 11. Therefore, the conductive film 12 is electrically connected to the light-shielding film 10. Then, for example, a photosensitive resin having dispersion of red pigment is applied on the whole surface of the substrate by printing or spin coating and exposed through a mask to form red picture elements 15. This process is repeated for green and blue picture elements to form green picture elements 16 and blue picture elements 17.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はカラー液晶表示装置等に
用いられるカラーフィルターに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter used in a color liquid crystal display device or the like.

【0002】[0002]

【従来の技術】カラーフィルターを採用したカラー液晶
表示装置が提案されているが、このカラー液晶表示装置
は、赤、緑、青等の顔料を含有する感光性着色樹脂を透
明基板上に塗布し、フォトリソグラフィー技術で微細な
カラーフィルターを格子状に形成するという技術により
製造され、この技術は通常「顔料分散法」と呼ばれる。
2. Description of the Related Art A color liquid crystal display device using a color filter has been proposed. In this color liquid crystal display device, a photosensitive coloring resin containing pigments such as red, green and blue is applied on a transparent substrate. It is manufactured by a technique of forming fine color filters in a lattice shape by a photolithography technique, and this technique is usually called a "pigment dispersion method".

【0003】このカラー液晶表示装置に係るカラーフィ
ルターを図7〜図10により説明する。
A color filter relating to this color liquid crystal display device will be described with reference to FIGS.

【0004】図7において、1はガラス等の透明基板で
あり、この透明基板1の上に真空蒸着やスパッタリング
等で金属クロム等の遮光膜2を形成する。この遮光膜2
は格子状に形成し、その各格子が個々の画素に相当す
る。
In FIG. 7, reference numeral 1 is a transparent substrate made of glass or the like, and a light shielding film 2 made of metallic chromium or the like is formed on the transparent substrate 1 by vacuum deposition or sputtering. This light-shielding film 2
Are formed in a grid shape, and each grid corresponds to an individual pixel.

【0005】次いで図8に示すように例えば赤の顔料を
分散させた感光性樹脂3を印刷やスピンコートで全面に
塗布し、マスク4を介して露光すると、図9のように赤
の画素5が形成される。
Next, as shown in FIG. 8, for example, a photosensitive resin 3 in which a red pigment is dispersed is applied to the entire surface by printing or spin coating, and exposed through a mask 4. Then, as shown in FIG. Is formed.

【0006】更に、この工程を緑、青という他の画素に
ついても、それぞれ繰り返し行うと図10に示すように
緑の画素6と青の画素7ができる。
Further, by repeating this process for other pixels of green and blue, respectively, a green pixel 6 and a blue pixel 7 are formed as shown in FIG.

【0007】[0007]

【発明が解決しようとする問題点】しかしながら、上記
提案のカラーフィルターの場合、透明基板1に遮光膜2
を格子状に形成すると、その形成前に比べて透明基板1
が例えば100V〜200Vにまで帯電することが判明
した。
However, in the case of the color filter proposed above, the light shielding film 2 is formed on the transparent substrate 1.
When the matrix is formed, the transparent substrate 1
Was found to be charged to 100 V to 200 V, for example.

【0008】このような透明基板1の帯電については、
透明基板1のスプレーによる純水洗浄の際、その洗浄の
後の乾燥のために、ドライエアーでその水滴を吹き飛ば
す工程が入り、この乾燥工程で静電気が発生することが
考えられる。
Regarding the charging of such a transparent substrate 1,
When the transparent substrate 1 is washed with pure water by spraying, a step of blowing off the water droplets with dry air is included for drying after the washing, and it is considered that static electricity is generated in this drying step.

【0009】従って、このような静電気により種々のパ
ーテクルが遮光膜2に付着することが判った。このパー
テクルは例えばクリーンルーム内にあるダストであり、
有機系のダストとしては、人体より発する皮脂や衣類、
その工程上使用されている樹脂等があり、無機系のダス
トには外部から入り込む珪酸塩、炭酸塩、各種酸化物、
金属粉等がある。そして、このようにパーテクルが遮光
膜2に付着し、そのパーテクルが寸法的に大きい場合、
その後に感光性樹脂3を塗布し、各画素5、6、7を形
成しても、各画素領域にパーテクルが混入することによ
り、そのカラーフィルターが有する色純度や明るさ等の
特性が低下するという問題点がある。
Therefore, it was found that various particles adhere to the light-shielding film 2 due to such static electricity. This particle is dust in a clean room,
Organic dust includes sebum and clothing from the human body,
There are resins, etc. used in the process, and silicates, carbonates, various oxides that enter from the outside into the inorganic dust,
There is metal powder, etc. Then, when the particles adhere to the light-shielding film 2 in this way and the particles are large in size,
Even if the photosensitive resin 3 is subsequently applied to form the pixels 5, 6 and 7, the characteristics such as color purity and brightness of the color filter are deteriorated due to the inclusion of particles in each pixel area. There is a problem.

【0010】[0010]

【問題点を解決するための手段】本発明のカラーフィル
ターは、透明基板上に所定のパターンで形成された遮光
膜の非成膜領域に感光性着色樹脂のカラーフィルターを
被着させて表示領域を形成するとともに、上記透明基板
上の非表示領域に上記遮光膜を延在させたことを特徴と
する。
In the color filter of the present invention, a color filter of a photosensitive coloring resin is adhered to a non-film-forming region of a light-shielding film formed in a predetermined pattern on a transparent substrate to form a display region. And the light-shielding film is extended in the non-display area on the transparent substrate.

【0011】[0011]

【作用】上記構成のカラーフィルターであれば、透明基
板上の非表示領域に遮光膜を延在させており、これによ
って表示領域の静電気に伴う帯電量が減少し、その結
果、静電気によるパーテクルの遮光膜に対する付着が低
減でき、製造歩留まりが高くなる。
In the color filter having the above structure, the light-shielding film is extended in the non-display area on the transparent substrate, which reduces the amount of charge due to static electricity in the display area. Adhesion to the light-shielding film can be reduced and the manufacturing yield can be increased.

【0012】[0012]

【実施例】以下、本発明の実施例を述べる。EXAMPLES Examples of the present invention will be described below.

【0013】図1は、ガラス等の透明基板8の平面図で
あり、図2は図1中のX−X線による断面図である。こ
の透明基板8は充分に洗浄するとともに表面に析出した
アルカリ成分や油分等を除去して用いる。この透明基板
8の表示領域9には真空蒸着やスパッタリング等で金属
クロム等の遮光膜10を形成する。この遮光膜10は格
子状に形成し、その各格子が個々の画素に相当し、この
遮光膜10の線幅は例えば、3〜20μm、厚さは0.
1〜0.3μmである。そして、この遮光膜10を真空
蒸着やスパッタリング等で形成する際に、それと同時
に、非表示領域11に遮光膜10が延在するように導電
膜12を形成する。従って、この導電膜12は遮光膜1
0と電気的に導通している。
FIG. 1 is a plan view of a transparent substrate 8 such as glass, and FIG. 2 is a sectional view taken along line XX in FIG. The transparent substrate 8 is used after being thoroughly washed and removing the alkaline components and oils deposited on the surface. In the display area 9 of the transparent substrate 8, a light-shielding film 10 made of metallic chromium or the like is formed by vacuum vapor deposition, sputtering or the like. The light-shielding film 10 is formed in a lattice shape, and each lattice corresponds to an individual pixel. The line-width of the light-shielding film 10 is, for example, 3 to 20 μm, and the thickness is 0.
It is 1 to 0.3 μm. Then, when the light shielding film 10 is formed by vacuum vapor deposition, sputtering, or the like, at the same time, the conductive film 12 is formed so that the light shielding film 10 extends in the non-display area 11. Therefore, the conductive film 12 is the light-shielding film 1.
It is electrically connected to 0.

【0014】次いで図3に示すように例えば赤の顔料を
分散させた感光性樹脂13を印刷やスピンコートで全面
に塗布し、マスク14を介して露光すると、図4のよう
に赤の画素15が形成される。
Next, as shown in FIG. 3, a photosensitive resin 13 in which, for example, a red pigment is dispersed is applied to the entire surface by printing or spin coating, and exposed through a mask 14. As shown in FIG. Is formed.

【0015】そして、この工程を緑、青という他の画素
についても、それぞれ繰り返し行うと、図5に示すよう
に緑の画素16と青の画素17ができる。
By repeating this process for other pixels of green and blue, respectively, a green pixel 16 and a blue pixel 17 are formed as shown in FIG.

【0016】然る後に図6に示すようにエポシキ樹脂や
アクリル樹脂等の透明樹脂を被覆してオーバーコート層
18を形成し、各画素15、16、17の表面を平滑化
する。そして、真空蒸着やスパッタリング等でインジウ
ム・スズ酸化物等からなる透明電極19をオーバーコー
ト層18の上に形成し、これにより、液晶層(図示せ
ず)を制御して各画素15、16、17に対応する表示
を行う。
Thereafter, as shown in FIG. 6, an overcoat layer 18 is formed by coating a transparent resin such as epoxy resin or acrylic resin, and the surface of each pixel 15, 16, 17 is smoothed. Then, a transparent electrode 19 made of indium tin oxide or the like is formed on the overcoat layer 18 by vacuum vapor deposition, sputtering, or the like, whereby a liquid crystal layer (not shown) is controlled and each pixel 15, 16, The display corresponding to 17 is performed.

【0017】かくして上記構成のカラーフィルターであ
れば、遮光膜10と電気的に導通している導電膜12を
形成しているので、表示領域の静電気に伴う帯電量が減
少し、その結果、静電気によるパーテクルの導電膜12
に対する付着が低減でき、製造歩留まりが高くなる。
Thus, in the color filter having the above structure, since the conductive film 12 that is electrically connected to the light shielding film 10 is formed, the charge amount due to the static electricity in the display area is reduced, and as a result, the static electricity is reduced. Conductive film 12 of particles
Can be reduced and the manufacturing yield can be increased.

【0018】また、この発明の場合には上記導電膜12
をアースすると、表示領域が帯電しなくなり、パーテク
ルの付着が生じなくなり、一層有利である。
In the case of the present invention, the conductive film 12 is used.
It is more advantageous to ground the display area because the display area is not charged and particles do not adhere.

【0019】尚、本発明は上記実施例に限られず、本発
明の要旨を逸脱しない範囲内で種々の変更、改良等は何
ら差し支えない。例えば、この実施例では顔料分散法の
場合であるが、その他に染色法、印刷法等であっても同
様である。
The present invention is not limited to the above embodiments, and various modifications and improvements can be made without departing from the scope of the present invention. For example, although the pigment dispersion method is used in this embodiment, the same applies to other dyeing methods, printing methods and the like.

【0020】また、透明基板上の非表示領域に遮光膜を
延在させてできる導電膜は、その非表示領域全体であっ
てもよく、或いは所要により種々のパターンが形成でき
る。
Further, the conductive film formed by extending the light-shielding film on the non-display area on the transparent substrate may be the entire non-display area, or various patterns can be formed if necessary.

【0021】[0021]

【発明の効果】以上のように、本発明のカラーフィルタ
ーによれば、透明基板上に所定のパターンで形成された
遮光膜の非成膜領域に感光性着色樹脂のカラーフィルタ
ーを被着させて表示領域を形成するとともに、この透明
基板上の非表示領域に上記遮光膜を延在させたことによ
り、表示領域の静電気に伴う帯電量が減少し、その結
果、静電気によるパーテクルの遮光膜に対する付着が低
減でき、製造歩留まりが高くなる。
As described above, according to the color filter of the present invention, the color filter of the photosensitive coloring resin is applied to the non-film-forming region of the light-shielding film formed in a predetermined pattern on the transparent substrate. By forming the display area and extending the light-shielding film to the non-display area on this transparent substrate, the amount of charge due to static electricity in the display area is reduced, and as a result, the particles adhere to the light-shielding film due to static electricity. Can be reduced and the manufacturing yield can be increased.

【図面の簡単な説明】[Brief description of drawings]

【図1】実施例における透明基板の平面図である。FIG. 1 is a plan view of a transparent substrate in an example.

【図2】図1の透明基板のX−X線の線断面図である。FIG. 2 is a sectional view taken along line XX of the transparent substrate of FIG.

【図3】実施例におけるフォトレジスト形成基板の断面
図である。
FIG. 3 is a cross-sectional view of a photoresist-formed substrate in an example.

【図4】実施例における画素形成時の断面図である。FIG. 4 is a cross-sectional view at the time of forming pixels in the example.

【図5】実施例におけるカラーフィルター形成後の断面
図である。
FIG. 5 is a cross-sectional view after forming a color filter in an example.

【図6】実施例における液晶表示用カラーフィルターの
断面図である。
FIG. 6 is a cross-sectional view of a liquid crystal display color filter in an example.

【図7】遮光膜が形成された従来における透明基板の断
面図である。
FIG. 7 is a cross-sectional view of a conventional transparent substrate on which a light shielding film is formed.

【図8】従来例におけるフォトレジストの形成基板の断
面図である。
FIG. 8 is a cross-sectional view of a photoresist formation substrate in a conventional example.

【図9】従来例における画素形成時の断面図である。FIG. 9 is a cross-sectional view at the time of forming pixels in a conventional example.

【図10】従来例におけるカラーフィルター形成後の断
面図である。
FIG. 10 is a cross-sectional view after forming a color filter in a conventional example.

【符号の説明】[Explanation of symbols]

1、8 透明基板 2、10 遮光膜 3、13 感光性樹脂 4、14 マスク 5、6、7、15、16、17 画素 9 表示領域 11 非表示領域 12 導電膜 1, 8 Transparent substrate 2, 10 Light-shielding film 3, 13 Photosensitive resin 4, 14 Mask 5, 6, 7, 15, 16, 17 Pixel 9 Display area 11 Non-display area 12 Conductive film

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】透明基板上に所定のパターンで形成された
遮光膜の非成膜領域に感光性着色樹脂のカラーフィルタ
ーを被着させて表示領域を形成するとともに、上記透明
基板上の非表示領域に上記遮光膜を延在させたことを特
徴とするカラーフィルター。
1. A display area is formed by applying a color filter of a photosensitive coloring resin to a non-film-forming area of a light-shielding film formed in a predetermined pattern on a transparent substrate, and a non-display on the transparent substrate. A color filter comprising the light-shielding film extending in a region.
JP10971392A 1992-04-28 1992-04-28 Manufacturing method of color filter Expired - Fee Related JP3199441B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10971392A JP3199441B2 (en) 1992-04-28 1992-04-28 Manufacturing method of color filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10971392A JP3199441B2 (en) 1992-04-28 1992-04-28 Manufacturing method of color filter

Publications (2)

Publication Number Publication Date
JPH05303015A true JPH05303015A (en) 1993-11-16
JP3199441B2 JP3199441B2 (en) 2001-08-20

Family

ID=14517340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10971392A Expired - Fee Related JP3199441B2 (en) 1992-04-28 1992-04-28 Manufacturing method of color filter

Country Status (1)

Country Link
JP (1) JP3199441B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012088640A (en) * 2010-10-22 2012-05-10 Toppan Printing Co Ltd Color filter substrate for ips (in-plane switching) system, and liquid crystal display device employing ips system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1087793C (en) * 1999-08-25 2002-07-17 九采罗彩棉产业有限公司 Process for mixing natural colour cotton fibres uniformly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012088640A (en) * 2010-10-22 2012-05-10 Toppan Printing Co Ltd Color filter substrate for ips (in-plane switching) system, and liquid crystal display device employing ips system

Also Published As

Publication number Publication date
JP3199441B2 (en) 2001-08-20

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