JPH05302621A - Protection bearing for magnetic bearing device - Google Patents

Protection bearing for magnetic bearing device

Info

Publication number
JPH05302621A
JPH05302621A JP4108054A JP10805492A JPH05302621A JP H05302621 A JPH05302621 A JP H05302621A JP 4108054 A JP4108054 A JP 4108054A JP 10805492 A JP10805492 A JP 10805492A JP H05302621 A JPH05302621 A JP H05302621A
Authority
JP
Japan
Prior art keywords
balls
rotor
bearing
orbits
orbit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4108054A
Other languages
Japanese (ja)
Other versions
JP3167047B2 (en
Inventor
Arihiro Fujiwara
有宏 藤原
Yoshihisa Kawakami
善久 川上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koyo Seiko Co Ltd
Original Assignee
Koyo Seiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Seiko Co Ltd filed Critical Koyo Seiko Co Ltd
Priority to JP10805492A priority Critical patent/JP3167047B2/en
Publication of JPH05302621A publication Critical patent/JPH05302621A/en
Application granted granted Critical
Publication of JP3167047B2 publication Critical patent/JP3167047B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00Engines or pumps
    • F16C2360/44Centrifugal pumps
    • F16C2360/45Turbo-molecular pumps

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Rolling Contact Bearings (AREA)

Abstract

PURPOSE:To remarkably improve the durability by applying pre-load to balls at a plurality of positions in an orbit direction, thereby generating autorotation on the balls with certainty and further causing revolution of the balls on the orbits. CONSTITUTION:A full type ball bearing is provided on a magnetic bearing device wherein a rotor 1 is supported in a non-contact condition to a fixed shaft 2, receiving the rotor 1 when the rotor is stopped. An orbit 4a of an outer ring 4 fixed to the side of the fixed shaft 2 has a distorsion 4b where curvature is changed in respect to a true circle P. In the distorsion 4b, pre-load is applied between balls 4 and orbits 3a, 4a. An orbit 3a of an inner ring 3 is a true circle. Frictional force is generated between the balls which pass portions receiving the pre-load and the orbits due to a contact pressure. Autorotation is forcibly generated on the pre-loaded balls 5 which accordingly roll on the orbits. The balls 5 are liable to perform normal rolling movement at the time of touch down.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、ターボ分子ポンプ等
の高速回転する回転部分を非接触状態に支持する磁気軸
受装置に装着され、上記回転部分を、いわゆるタッチダ
ウンさせるための、磁気軸受装置用保護軸受に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic bearing device mounted on a magnetic bearing device for supporting a rotating part rotating at a high speed such as a turbo molecular pump in a non-contact state and for so-called touching down the rotating part. Protective bearings for automobiles.

【0002】[0002]

【従来の技術】磁気軸受装置は、例えば、固定軸に固定
されたラジアル磁気軸受およびアキシャル磁気軸受によ
って、当該固定軸に対して30000〜40000rp
m程度の高速で回転されるロータを、非接触状態に支持
するものである。このロータの回転が停止される場合
に、高速回転しているロータが上記の磁気軸受と接触す
ると、当該磁気軸受を損傷させてしまう。したがって、
これを回避するために、固定軸には、ロータをいわゆる
タッチダウンさせるための保護軸受が設けられている。
タッチダウンとは、ロータが保護軸受に受けられて停止
する動作をいう。
2. Description of the Related Art A magnetic bearing device is, for example, a radial magnetic bearing and an axial magnetic bearing which are fixed to a fixed shaft, so that 30,000 to 40,000 rp is applied to the fixed shaft.
The rotor, which is rotated at a high speed of about m, is supported in a non-contact state. If the rotor rotating at a high speed comes into contact with the magnetic bearing when the rotation of the rotor is stopped, the magnetic bearing is damaged. Therefore,
In order to avoid this, the fixed shaft is provided with a protective bearing for so-called touchdown of the rotor.
Touchdown is an operation in which the rotor is stopped by being received by the protective bearing.

【0003】通常、保護軸受としては、負荷容量を増す
ために総玉軸受が用いられている。この総玉軸受の一方
の軌道輪は、固定軸に固定されている。ロータが正常に
回転している状態では、他方の軌道輪とロータとの間に
は、所定の隙間が設けられており、ロータが停止すると
きに、上記他方の軌道輪がロータと接触することによ
り、上記タッチダウンが行われる。このタッチダウンに
おいて、ロータが除々に減速されて、ロータが低速回転
となってから保護軸受と接触する場合には、保護軸受に
かかる負荷は比較的小さいが、停電等でロータが高速回
転のまま保護軸受と接触する場合には、保護軸受にかか
る負荷は、非常に大きなものとなる。
Generally, a full ball bearing is used as the protective bearing in order to increase the load capacity. One of the races of this full ball bearing is fixed to a fixed shaft. When the rotor is rotating normally, a predetermined gap is provided between the other bearing ring and the rotor, and when the rotor stops, the other bearing ring contacts the rotor. Thus, the touchdown is performed. In this touchdown, if the rotor gradually slows down and contacts the protective bearing after the rotor starts to rotate at low speed, the load on the protective bearing is relatively small, but the rotor remains at high speed due to a power failure or the like. When contacting the protective bearing, the load on the protective bearing becomes very large.

【0004】[0004]

【発明が解決しようとする課題】ところが、複数の玉の
うち、タッチダウン時に実際に負荷を受ける玉は限られ
ており、一部の玉しか自転しない。残りの玉は互いに自
転を規制しながら滑りを起こし、早期摩耗の発生や早期
に焼付き等を起こしてロックしてしまうことから、耐久
性の点で問題があった。
However, among a plurality of balls, the balls that are actually loaded at the time of touchdown are limited, and only some balls rotate. The remaining balls slide against each other while controlling their rotations, causing early wear and seizure at an early stage, which causes locking, which is problematic in terms of durability.

【0005】この発明は、上記の技術的課題を解決し、
タッチダウン時の玉の滑りを防止することができ、耐久
性に優れた磁気軸受装置用保護軸受を実現することを目
的とする。
The present invention solves the above technical problems,
It is an object of the present invention to realize a protective bearing for a magnetic bearing device, which can prevent balls from slipping during touchdown and has excellent durability.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
めの請求項1記載の磁気軸受装置用保護軸受は、固定部
分に対し回転部分を非接触状態に支持する磁気軸受装置
の、当該固定部分に設けられ、回転部分の停止時に回転
部分を受ける、深溝型の総玉軸受からなる磁気軸受装置
用保護軸受において、回転部分を受けるための軌道輪の
軌道が真円とされ、固定部分側に固定される軌道輪の軌
道の曲率が、軌道方向に沿う複数の位置において玉に対
して予圧を与えるように変化されていることを特徴とす
るものである。
According to a first aspect of the present invention, there is provided a protective bearing for a magnetic bearing device, comprising: a magnetic bearing device for supporting a rotating portion in a non-contact state with respect to a fixed portion; In a protective bearing for a magnetic bearing device, which is provided in a portion and receives a rotating portion when the rotating portion is stopped, a bearing ring for receiving the rotating portion is a perfect circle, and a fixed portion side The curvature of the orbit of the bearing ring fixed to is changed so as to apply a preload to the balls at a plurality of positions along the orbit direction.

【0007】[0007]

【作用】上記の構成によれば、複数位置の予圧が与えら
れた部分を通過する玉と各軌道との間には、接触圧力に
よる摩擦力が発生する。したがって、この予圧部分の玉
には、自転運動が強制的に加わるので、軌道上を転がる
ことになる。予圧部では次々と玉が通過するので、全て
の玉に自転運動が加わることになる。これにより、タッ
チダウン時に、玉を正常な転がり運動に近づけることが
できる。
According to the above construction, a frictional force due to the contact pressure is generated between the balls and the orbits which pass through the portions to which the preload is applied at a plurality of positions. Therefore, the balls in the preload portion are forcibly subjected to the rotation motion, and thus roll on the orbit. Balls pass one after another in the preload section, so that all balls are subjected to rotation motion. This allows the ball to approach normal rolling motion during touchdown.

【0008】[0008]

【実施例】以下実施例を示す添付図面によって詳細に説
明する。図1は、この発明の一実施例に係る保護軸受を
示している。同図を参照して、この保護軸受は総玉軸受
Aにより構成されており、回転部分としての軸からなる
ロータ1を所定の遊びを設けて挿入させており、ロータ
1の停止時にこれに接触される内輪3、固定部分として
の筒状の固定軸2に固定される外輪4、内外輪3,4の
軌道3a,4a間に介在された複数の玉5を備えてい
る。
Embodiments will be described in detail below with reference to the accompanying drawings showing embodiments. FIG. 1 shows a protective bearing according to an embodiment of the present invention. Referring to the figure, this protective bearing is composed of a full ball bearing A, and a rotor 1 consisting of a shaft as a rotating portion is inserted with a predetermined play, and the rotor 1 comes into contact with this when the rotor 1 is stopped. The inner ring 3 is provided with an inner ring 3, an outer ring 4 fixed to a cylindrical fixed shaft 2 as a fixed portion, and a plurality of balls 5 interposed between the tracks 3a, 4a of the inner and outer rings 3, 4.

【0009】ロータ1は、固定軸2に設けられた、図示
しないラジアル磁気軸受および一対のアキシャル磁気軸
受で非接触状態に支持され、例えば30000〜400
00rpm程度の高速で回転する。上記総玉軸受Aは、
ロータ1の両端部に配置されている。ロータ1が正常に
回転しているときには、内輪3とロータ1との間に、所
定の隙間が生じており、ロータ1が停止するときには、
ロータ1が内輪3に接触して総玉軸受5によって受けら
れ、ロータ1が磁気軸受に接触してこれらを損傷しない
ようになっている。
The rotor 1 is supported in a non-contact state by a radial magnetic bearing and a pair of axial magnetic bearings, which are provided on the fixed shaft 2, in a non-contact state, for example, from 30,000 to 400.
It rotates at a high speed of about 00 rpm. The full ball bearing A is
It is arranged at both ends of the rotor 1. When the rotor 1 is rotating normally, there is a predetermined gap between the inner ring 3 and the rotor 1, and when the rotor 1 is stopped,
The rotor 1 contacts the inner ring 3 and is received by the full ball bearing 5, so that the rotor 1 does not contact the magnetic bearings and damage them.

【0010】総玉軸受5の軌道輪は、例えばSUS44
0C材で、玉は窒化珪素などのセラミックス材あるいは
SUS440C材で形成されている。玉の表面には、銀
などのコーティング膜が好適に被覆される。内輪3の軌
道3aは、真円に設定されている。また、外輪4の軌道
4aは、ベースとなる真円に対して部分的に曲率が変化
された複数の歪み部4bを、軌道方向の等配に有してい
る。そして、これら歪み部4bを含んだ軌道4aの形状
が略三角形形状となるようにしてある(なお、図におい
ては、歪み形状の把握を容易にするため、歪みを拡大し
た状態で示してある)。各歪み部4bでは、当該歪み部
4bを通過する玉5に対して、各軌道3a,4aから予
圧を与え得るように、軌道4aを構成するベースの真円
に対して内方へ突出するように曲率が変化されている。
The bearing ring of the full ball bearing 5 is, for example, SUS44.
The 0C material and the balls are made of a ceramic material such as silicon nitride or a SUS440C material. The surface of the ball is preferably coated with a coating film of silver or the like. The track 3a of the inner ring 3 is set to be a perfect circle. Further, the track 4a of the outer ring 4 has a plurality of strained portions 4b whose curvatures are partially changed with respect to a perfect circle serving as a base, and are equidistantly arranged in the track direction. Then, the shape of the track 4a including these distorted portions 4b is set to be a substantially triangular shape (in the figure, the distortion is shown in an enlarged state for easy understanding of the distorted shape). .. In each strained portion 4b, the balls 5 passing through the strained portion 4b are projected inward with respect to the perfect circle of the base forming the raceway 4a so that preload can be applied from the respective raceways 3a, 4a. The curvature has changed.

【0011】歪み部4bは、少なくとも軸受の組み込み
状態で設けられれば良く、したがって、組み込み前の状
態で歪みを生じるような形状に研磨しておいても良い
し、組み込み状態で力により変形させて歪みを生じるよ
うにしても良い。なお、前者の場合には、力を負荷して
変形させた状態で研磨を行えば、力を解除した状態での
所望の歪み形状を得ることができる。また、熱処理によ
り変形させることも可能である。
The strained portion 4b has only to be provided at least in the assembled state of the bearing. Therefore, the strained portion 4b may be ground into a shape that causes distortion in the state before the assembly, or may be deformed by force in the assembled state. You may make it generate | occur | produce distortion. In the former case, if polishing is performed in a state in which a force is applied and deformed, a desired strained shape in a state in which the force is released can be obtained. Further, it can be deformed by heat treatment.

【0012】この実施例によれば、歪み部4bを通過す
る玉5に対して各軌道3a,4aから予圧が与えられ
て、当該玉5と各軌道3a,4aとの間には、大きな接
触圧力による大きな摩擦力が発生する。したがって、複
数の歪み部4bを通過する複数の玉5に確実に自転を起
こさせ、さらに、軌道上を公転させることができる。し
たがって、タッチダウン時に、玉5を正常な転がり運動
に近づけることができ、早期の焼付きやロック等を防止
して耐久性を大幅に向上させることができる。
According to this embodiment, the balls 5 passing through the strained portion 4b are preloaded from the orbits 3a and 4a, and a large contact is made between the balls 5 and the orbits 3a and 4a. A large frictional force is generated due to the pressure. Therefore, it is possible to reliably cause the plurality of balls 5 passing through the plurality of strained portions 4b to rotate, and to revolve on the track. Therefore, at the time of touchdown, the ball 5 can be brought close to a normal rolling motion, and it is possible to prevent the seizure and the lock at an early stage and significantly improve the durability.

【0013】なお、複数の歪み部4bの配置としては、
軌道4aを図2に示すような四角形形状等の他の多角形
形状に歪ませることができる。上記の図1や図2の場合
には、ベースとなる真円に対して断続的に曲率が変化さ
れるが、図3に示すように、軌道を、その曲率が当該軌
道の全周にわたって連続的に変化される楕円形状のもの
とすることもできる。
The arrangement of the plurality of strained portions 4b is as follows.
The track 4a can be distorted into other polygonal shapes such as the quadrangular shape shown in FIG. In the case of FIG. 1 and FIG. 2 described above, the curvature changes intermittently with respect to the true circle as the base, but as shown in FIG. 3, the trajectory is continuous over the entire circumference of the trajectory. It can also be an elliptical shape that is dynamically changed.

【0014】また、水平方向に沿って配置されたロータ
1のタッチダウンを受ける保護軸受の場合には、タッチ
ダウンの方向が鉛直方向下方となるので、この部分の玉
は、歪み部を設けなくても確実に自転される。したがっ
て、この場合には、鉛直方向下方の部分を除いて軌道方
向の等配に、歪み部を設ければ十分である。さらに、内
輪3が固定軸に固定され、筒状のロータが外輪4に接触
してタッチダウンされる場合には、内輪3の軌道の曲率
を所定に変化させれば良い。
Further, in the case of the protective bearing which receives the touchdown of the rotor 1 arranged along the horizontal direction, the touchdown direction is the vertical downward direction, so that the ball in this portion does not have a distorted portion. However, it is surely rotated. Therefore, in this case, it is sufficient to provide the distorted portions at equal intervals in the track direction except for the portion below the vertical direction. Further, when the inner ring 3 is fixed to the fixed shaft and the cylindrical rotor comes into contact with the outer ring 4 to be touched down, the curvature of the track of the inner ring 3 may be changed to a predetermined value.

【0015】その他、この発明は上記実施例に限定され
るものではなく、この発明の要旨を変更しない範囲で種
々の変更を施すことが可能である。
Besides, the present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the scope of the present invention.

【0016】[0016]

【発明の効果】以上のように、この発明の磁気軸受装置
用保護軸受によれば、軌道方向の複数位置において玉に
対して予圧を与えることにより、玉を確実に自転させ、
さらに軌道上を公転させることができるので、タッチダ
ウン時に、玉を正常な転がり運動に近づけることがで
き、耐久性を大幅に向上させることができる。
As described above, according to the protective bearing for a magnetic bearing device of the present invention, by preloading the balls at a plurality of positions in the orbit direction, the balls can be surely rotated.
Further, since it can revolve on the orbit, at the time of touchdown, the ball can be brought close to a normal rolling motion, and durability can be greatly improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例としての保護軸受の模式的
断面図である。
FIG. 1 is a schematic sectional view of a protective bearing as an embodiment of the present invention.

【図2】この発明の他の実施例の保護軸受の軌道の模式
図である。
FIG. 2 is a schematic diagram of a track of a protective bearing according to another embodiment of the present invention.

【図3】この発明のさらに他の実施例の保護軸受の軌道
の模式図である。
FIG. 3 is a schematic view of a track of a protective bearing according to still another embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 ロータ(回転部分) 2 固定軸(固定部分) 3 内輪 3a 軌道 4 外輪 4a 軌道 5 玉 1 rotor (rotating part) 2 fixed shaft (fixed part) 3 inner ring 3a raceway 4 outer ring 4a raceway 5 balls

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】固定部分に対し回転部分を非接触状態に支
持する磁気軸受装置の、当該固定部分に設けられ、回転
部分の停止時に回転部分を受ける、深溝型の総玉軸受か
らなる磁気軸受装置用保護軸受において、 回転部分を受けるための軌道輪の軌道が真円とされ、 固定部分側に固定される軌道輪の軌道の曲率が、軌道方
向に沿う複数の位置において玉に対して予圧を与えるよ
うに変化されていることを特徴とする磁気軸受装置用保
護軸受。
1. A magnetic bearing comprising a deep groove type full ball bearing, which is provided in a fixed part of a magnetic bearing device for supporting a rotating part in a non-contact state with respect to a fixed part and receives the rotating part when the rotating part is stopped. In the protective bearing for equipment, the raceway of the raceway ring for receiving the rotating part is a perfect circle, and the curvature of the raceway of the raceway ring fixed to the fixed part side is preloaded against the ball at multiple positions along the raceway direction. A protective bearing for a magnetic bearing device, which is modified so as to provide
JP10805492A 1992-04-27 1992-04-27 Protective bearing for magnetic bearing device Expired - Fee Related JP3167047B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10805492A JP3167047B2 (en) 1992-04-27 1992-04-27 Protective bearing for magnetic bearing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10805492A JP3167047B2 (en) 1992-04-27 1992-04-27 Protective bearing for magnetic bearing device

Publications (2)

Publication Number Publication Date
JPH05302621A true JPH05302621A (en) 1993-11-16
JP3167047B2 JP3167047B2 (en) 2001-05-14

Family

ID=14474752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10805492A Expired - Fee Related JP3167047B2 (en) 1992-04-27 1992-04-27 Protective bearing for magnetic bearing device

Country Status (1)

Country Link
JP (1) JP3167047B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1241701A1 (en) * 2001-02-23 2002-09-18 Kabushiki Kaisha Toshiba Rotary anode type x-ray tube
CN102518666A (en) * 2011-12-31 2012-06-27 魏伯卿 Self-aligning permanent magnet magnetic bearing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101957213B1 (en) * 2017-02-24 2019-03-12 박경우 Functional insole using elastic force

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1241701A1 (en) * 2001-02-23 2002-09-18 Kabushiki Kaisha Toshiba Rotary anode type x-ray tube
US6751291B2 (en) 2001-02-23 2004-06-15 Kabushiki Kaisha Toshiba Rotary anode type X-ray tube
CN102518666A (en) * 2011-12-31 2012-06-27 魏伯卿 Self-aligning permanent magnet magnetic bearing

Also Published As

Publication number Publication date
JP3167047B2 (en) 2001-05-14

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