JPH05295587A - Production of shadow mask - Google Patents

Production of shadow mask

Info

Publication number
JPH05295587A
JPH05295587A JP12290892A JP12290892A JPH05295587A JP H05295587 A JPH05295587 A JP H05295587A JP 12290892 A JP12290892 A JP 12290892A JP 12290892 A JP12290892 A JP 12290892A JP H05295587 A JPH05295587 A JP H05295587A
Authority
JP
Japan
Prior art keywords
shadow mask
conductor
shadow
plating
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12290892A
Other languages
Japanese (ja)
Inventor
Shuichi Ogasawara
小笠原修一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal Mining Co Ltd
Original Assignee
Sumitomo Metal Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Mining Co Ltd filed Critical Sumitomo Metal Mining Co Ltd
Priority to JP12290892A priority Critical patent/JPH05295587A/en
Publication of JPH05295587A publication Critical patent/JPH05295587A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a method for continuously producing a shadow mask without deforing the mask. CONSTITUTION:The patterns of shadow masks are formed so that shadow masks are formed on the surface of a conductor in a noncontact state with each other, the conductor is electrplated to a desired thickness to obtain a plating film, the film and the conductor are peeled off, and the obtained film is used as a shadow mask. As a result, a shadow mask is continuously obtained without being deformed which has not ever been attained, and the production cost is drastically reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、シャドウマスク型カラ
ー受像菅に組込まれるシャドウマスクの製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a shadow mask incorporated in a shadow mask type color image receiving tube.

【0002】[0002]

【従来の技術】シャドウマスク型カラー受像菅に組込ま
れるシャドウマスクには、電子ビーム通過孔が円形のも
のや矩形のものがある。そして、これらの孔のピッチは
一般家庭用カラーテレビ用シャドウマスクにあっては 6
00 〜 700 μm、高品位テレビ用シャドウマスクにあっ
ては 300 μm以下である。
2. Description of the Related Art Some shadow masks incorporated in a shadow mask type color image receiving tube have a circular or rectangular electron beam passage hole. And the pitch of these holes is 6 in the shadow mask for general home color TV.
00 to 700 μm, 300 μm or less for high-definition television shadow masks.

【0003】このようなシャドウマスクは厚さ 100 〜
200 μm程度の軟鋼板を所定の大きさに切断し、得た軟
鋼板の両面にフォトレジストを塗布し、乾燥し、所望の
形状のマスクを密接し、露光し、現像し、乾燥し、次い
で塩化第 2 鉄水溶液等によって軟鋼板をエッチング処
理し、レジスト層を剥離することによって得られてい
る。その後、必要に応じてシャドウマスク表面に照射し
た電子ビームの乱反射を防止するために、又、受像菅使
用時のシャドウマスクの温度上昇を最小限に止めるため
にシャドウマスク表面に四三酸化鉄の被覆を形成する。
Such a shadow mask has a thickness of 100 to
A mild steel plate of about 200 μm is cut into a predetermined size, a photoresist is applied to both surfaces of the obtained mild steel plate, and dried, a mask having a desired shape is brought into close contact, exposed, developed, dried, and then It is obtained by etching a mild steel sheet with an aqueous ferric chloride solution or the like and peeling off the resist layer. After that, in order to prevent irregular reflection of the electron beam irradiated on the shadow mask surface as necessary, and to minimize the temperature rise of the shadow mask when using the image receiving tube, the surface of the shadow mask is covered with iron tetroxide. Form a coating.

【0004】上記エッチング法により得られたシャドウ
マスクは既に一般家庭用カラーテレビに使用され、実用
化されている。しかしながら、上記製造方法はバッチ処
理であり、生産性に欠けるという問題がある。この問題
点を解消すべく長尺の軟鋼板を用いてレジスト層の剥離
までを連続化し、その後プレス等により個々に分断する
方法が検討されているものの、この方法では、プレス等
による分断時にシャドウマスクが変形するという別の問
題が生じる。
The shadow mask obtained by the above-mentioned etching method has already been used in a general domestic color television and put into practical use. However, the above-mentioned manufacturing method is a batch process, and there is a problem that productivity is lacking. In order to solve this problem, continuous striping of the resist layer using a long mild steel plate, and then a method of individually cutting by a press or the like has been studied, but in this method, shadowing is performed at the time of cutting by a press or the like. Another problem arises that the mask is deformed.

【0005】[0005]

【発明が解決しようとする課題】本発明は、シャドウマ
スクを連続的にかつ変形させることなく製造する方法の
提供を目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a shadow mask continuously and without deformation.

【0006】[0006]

【課題を解決するための手段】本発明者らは種々検討し
た結果、いわゆる電鋳法を用いることにより上記課題を
解決できることを見出し本発明に至った。即ち、上記課
題を解決する本発明の方法は、導体表面上に各々のシャ
ドウマスクが接触せずに形成されるような間隔で、レジ
ストを用いてシャドウマスクのパターンを形成し、次い
で所望の厚さになるまで電解めっきしてめっき膜を得、
次いで該めっき膜と導体とを剥離し、得ためっき膜をシ
ャドウマスクとするものであり、好ましくは上記導体が
長尺の導体であるものである。
As a result of various studies, the present inventors have found that the above problems can be solved by using a so-called electroforming method, and have completed the present invention. That is, the method of the present invention for solving the above-mentioned problem is to form a pattern of a shadow mask using a resist at intervals such that each shadow mask is formed without contact on the conductor surface, and then form a desired thickness. To obtain a plating film by electrolytic plating until
Then, the plated film and the conductor are separated, and the obtained plated film is used as a shadow mask, and the conductor is preferably a long conductor.

【0007】[0007]

【作用】本発明では、導体上に形成されたシャドウマス
クを剥離するため、導体としてはめっき金属層と強固に
密着するようなものは好ましくはない。しかし、表面に
不動態層を有するステンレス板やクロム酸等で不動態化
処理をしたアルミニウム合金板等の特殊な導体に限られ
るものではない。というのは、めっき条件を制御するこ
とにより導体と剥離しやすい金属層を得ることは可能で
あるからである。本発明の目的の一つである連続操業を
確保するために各工程をコンベア等を用いて結合し、連
続化すれば良いが、導体自体を長尺とすれば一層効果的
である。
In the present invention, since the shadow mask formed on the conductor is peeled off, it is not preferable that the conductor firmly adheres to the plated metal layer. However, the conductor is not limited to a special conductor such as a stainless plate having a passivation layer on the surface or an aluminum alloy plate passivated with chromic acid. This is because it is possible to obtain a metal layer that is easily separated from the conductor by controlling the plating conditions. In order to ensure continuous operation, which is one of the objects of the present invention, the steps may be combined using a conveyor or the like to be continuous, but it is more effective if the conductor itself is made long.

【0008】また、レジストはめっき時に変形、溶解や
導体からの剥離を起こさない限りにおいて選択は自由で
ある。シャドウマスクのパターンは、例えばレジストと
してフォトレジストを用い、露光し、現像することによ
り得てもよく、又例えばスクリーン印刷法によって得て
もよい。しかし、隣接するパターンが接触するようにし
てはならない。というのは、シャドウマスクを導体より
分離する場合に確実に個別に回収可能とするためであ
り、そうでない場合には、個別に回収するための切断工
程が必要となり、この切断工程でシャドウマスクに変形
が生ずるからである。
Further, the resist can be freely selected as long as it does not deform, dissolve, or peel off from the conductor during plating. The pattern of the shadow mask may be obtained by exposing and developing using a photoresist as a resist, for example, or may be obtained by a screen printing method, for example. However, the adjacent patterns must not touch. This is to ensure that the shadow mask can be individually recovered when it is separated from the conductor, and if it is not, a cutting process for individually collecting the shadow mask is required. This is because deformation occurs.

【0009】めっき層と導体とを剥離する方法は特に限
定されない。例えば、導体をわずかに反らせることによ
り剥離してもよく、剥離機等の治具を使用してもよい。
なお、本発明の方法は、エッチング法により製造するリ
ードフレームや1層TABといった電子部品の製造にも
適用可能である。
The method of separating the plating layer and the conductor is not particularly limited. For example, the conductor may be slightly bent to peel it off, or a jig such as a peeling machine may be used.
The method of the present invention can also be applied to the production of electronic parts such as lead frames and single-layer TAB produced by the etching method.

【0010】[0010]

【実施例】以下、本発明の実施例について述べる (実施例1)レジスト層形成工程と、パターン形成工程
と、めっき工程とを結合した連続シャドウマスク製造装
置を用い、幅 1 m、長さ 200 mの長尺のステンレス板
の表面に東京応化工業製ネガ型フォトレジスト PMER HC
-600 を厚さ 45 μmに均一に塗布し、乾燥し、次いで幅
50 μm、長さ 574 mm のスリットが 200 μm間隔で296
8 本設けられた 37 インチシャドウマスクのパターンが
それぞれ 10 mmの間隔をおいて連続的に形成されるよ
うにマスクングを行い、1000 mJ/cm2 の強さの紫外線を
用いて露光し、次いで現像し、露出したステンレス表面
に以下に示す条件で電気鉄めっきを施し、厚さ 35 μm
のめっき膜を得、次いでステンレス板をわずかに反らせ
ることにより得られためっき膜を一枚づつ連続的に剥離
した。 (めっき液の組成) 塩化第一鉄 : 450 g/l 塩化カルシウム : 20 g/l (めっき条件) 温度 : 90 ゜C 陰極電流密度 : 5 A/dm2 陽極 : 白金 めっき時間 : 30 分 次に、得られためっき膜をフレームに張り付けた後、水
蒸気と一酸化炭素との混合雰囲気下で 450 ゜C、30 分間
加熱したところ、表面に四三酸化鉄被膜を有する厚さ 3
5 μmの良好なシャドウマスクを得ることができた。
EXAMPLES Examples of the present invention will be described below. (Example 1) A continuous shadow mask manufacturing apparatus in which a resist layer forming step, a pattern forming step, and a plating step are combined is used, and a width of 1 m and a length of 200 Negative photoresist PMER HC made by Tokyo Ohka Kogyo on the surface of a long stainless steel plate
-600 is evenly applied to a thickness of 45 μm, dried and then spread
296 50 μm, 574 mm long slits at 200 μm intervals
Masking was performed so that the patterns of eight 37-inch shadow masks were continuously formed at intervals of 10 mm, exposed with ultraviolet light having an intensity of 1000 mJ / cm 2 , and then developed. Then, the exposed stainless steel surface is plated with electric iron under the following conditions to a thickness of 35 μm.
Of the plating film, and then the stainless steel plate was slightly warped to continuously separate the plating films obtained one by one. (Composition of plating solution) Ferrous chloride: 450 g / l Calcium chloride: 20 g / l (Plating conditions) Temperature: 90 ° C Cathode current density: 5 A / dm 2 Anode: Platinum Plating time: 30 minutes After sticking the obtained plating film on the frame, it was heated in a mixed atmosphere of steam and carbon monoxide at 450 ° C for 30 minutes.
A good shadow mask of 5 μm could be obtained.

【0011】(比較例1)各シャドウマスクのパターン
が接触するようにした以外は実施例1と同様にして電気
めっき膜を得た。その後ステンレス板をわずかに反らせ
てめっき被膜をステンレス板よりはく離し、各シャドウ
マスクを分離するためにプレスによる打抜きを行ったと
ころシャドウマスクが変形し、電子ビームを正しく透過
できないものとなった。
(Comparative Example 1) An electroplated film was obtained in the same manner as in Example 1 except that the patterns of the shadow masks were brought into contact with each other. After that, the stainless steel plate was slightly warped to separate the plating film from the stainless steel plate, and punching was performed by a press to separate the shadow masks.

【0012】[0012]

【発明の効果】本発明の方法によれば、従来困難であっ
たシャドウマスクを連続的に、かつ変形させることなく
得ることが可能となり、製造コストを大幅に低下させる
ことが可能となる。
According to the method of the present invention, it is possible to continuously obtain a shadow mask, which has been difficult in the past, without deformation, and it is possible to greatly reduce the manufacturing cost.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 導体表面上に各々のシャドウマスクが
接触せずに形成されるような間隔で、レジストを用いて
シャドウマスクのパターンを形成し、次いで所望の厚さ
になるまで電解めっきしてめっき膜を得、次いで該めっ
き膜と導体とを剥離し、得ためっき膜をシャドウマスク
とすることを特徴とするシャドウマスクの製造方法。
1. A pattern of shadow masks is formed using a resist at intervals such that the shadow masks are formed on the conductor surface without contacting each other, and then electrolytic plating is performed until a desired thickness is obtained. A method for producing a shadow mask, comprising: obtaining a plating film, then separating the plating film from a conductor, and using the obtained plating film as a shadow mask.
【請求項2】 請求項1記載の方法において、用いる
導体が長尺であることを特徴とするシャドウマスクの製
造方法。
2. The method according to claim 1, wherein the conductor used is long.
JP12290892A 1992-04-17 1992-04-17 Production of shadow mask Pending JPH05295587A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12290892A JPH05295587A (en) 1992-04-17 1992-04-17 Production of shadow mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12290892A JPH05295587A (en) 1992-04-17 1992-04-17 Production of shadow mask

Publications (1)

Publication Number Publication Date
JPH05295587A true JPH05295587A (en) 1993-11-09

Family

ID=14847594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12290892A Pending JPH05295587A (en) 1992-04-17 1992-04-17 Production of shadow mask

Country Status (1)

Country Link
JP (1) JPH05295587A (en)

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