JPH05295514A - Thermal spraying method of metal - Google Patents

Abstract

PURPOSE:To form a metallic film at a high film forming speed on a base material surface by packing a molten metal into a light transparent pipe made of a light transparent member, irradiating the pipe with a laser beam from the outside to the inside of the pipe, ejecting the molten metal from the pipe and bringing the molten metal into collision against the surface of the base material. CONSTITUTION:SnPb eutectic solder is put into the light transparent pipe 1 (about 0.1mm inside diameter) consisting of quartz and is held at a molten state at about 200 deg.C with a heater 4. A pressure is kept applied on the pipe in the direction of the end face 1a of the pipe. This molten metal 2 is irradiated with a laser beam through the light transparent pipe 1 and the molten metal 2 is ejected from the end face 1a side of the pipe. The microregion on an Ag layer provided on a base material 5 is coated with the solder. The inside diameter of the light transparent pipe 1 and the power of the laser beam 3 are set, by that, the ejection rate of the molten metal 2 is freely controlled and the formation of the film to the microregion is facilitated.

Description

Detailed Description of the Invention

[0001]

FIELD OF THE INVENTION The present invention relates to a method for spraying metal.

[0002]

2. Description of the Related Art As a conventional technique, for example, in plasma spraying, a gas such as argon, nitrogen or hydrogen is made into plasma,
The heat and volume expansion cause the metal material to be melted and ejected to form a film on the surface of the base material. As a method for forming a film on a fine region, a plating method using a mask or a vapor deposition method is used.

[0003]

However, in the conventional plasma spraying, it is difficult in principle to reduce the size of the spray gun, and it is impossible to form a film in a fine region. Further, in the method of forming a film on a fine region by plating or vapor deposition using a mask, there are problems that the process is complicated, the degree of freedom of the film material and the film formation shape is low, and the film formation rate is slow.

The present invention has been made in view of the above circumstances, and it is a method of thermal spraying a metal capable of forming a film on a fine region, having flexibility in a film material and a film forming shape, and having a high film forming rate. The purpose is to provide.

[0005]

In order to solve the above-mentioned problems, the metal spraying method according to the present invention is to fill a transparent tube made of a transparent member with a molten metal, and to apply laser light from the outside to the inside of the transparent tube. It is characterized in that a metal film is formed on the surface of the base material by irradiating the surface of the light-transmitting tube and ejecting molten metal from the end surface of the light-transmitting tube to collide with the surface of the base material.

[0006]

[Function] The molten metal is filled in the light-transmitting tube, the laser light is irradiated from the outside to the inside of the light-transmitting tube, the molten metal is locally evaporated by the laser energy, and the light-transmitting tube is pressurized by the volume expansion at that time. Molten metal is ejected from the end face to perform thermal spraying.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. First, a first embodiment will be described with reference to FIGS. As shown in FIG. 2, for example, the inside of the light-transmitting tube 1 made of quartz (inner diameter approximately
SnPb eutectic solder in 0.1mm)
Keep at ℃ and put in molten state. At this time, pressure is applied in the direction of the arrow in the figure. As shown in FIG. 3, laser light 3, for example, pulse YAG laser (~ 5
(J / P) to irradiate the molten metal 2 with the end face 1 of the transparent tube.
Eject from the a side. As shown in FIG. 1, a part of the molten metal 2 that has been ejected can coat the solder on a minute region on the Ag layer provided on the base material. By setting the inner diameter of the light-transmitting tube 1 and the power of the laser light 3, it is possible to freely control the ejection amount of the molten metal 2 and to easily form a film on a fine region, and to form a fine electric circuit or the like. It is possible.

FIG. 4 shows a second embodiment of the present invention, in which a base material 5 is used.
By providing irregularities (for example, a surface roughness of about 1 to 5 μm) or holes on the surface of, the adhesion of the jetted molten metal 2 to the substrate 5 is improved.

FIG. 5 shows the third embodiment of the present invention, in which the base material 5 is used.
The surface of the substrate is irradiated with the laser beam 3 to cause the molten metal 2 to collide with the substrate 5 while melting or raising the temperature of the surface of the substrate 5. The metal film and the base material 5 are fused at the interface to improve the adhesiveness. Further, by adjusting the irradiation of the laser beam 3 and the jetting of the molten metal 2 with respect to time, it becomes possible to densify the metal film and alloy it with the base material 5.

FIG. 6 shows a fourth embodiment of the present invention, in which the base material 5 is used.
By applying ultrasonic vibration (for example, 10 to 100 KHz) to the surface of the base material 5, the jetted molten metal 2 easily wets the surface of the base material 5 and the adhesion is improved.

FIG. 7 shows a fifth embodiment of the present invention, in which electric contacts and bumps can be formed by ejecting the molten metal 2 a plurality of times to control the film thickness. Electrical contact: Ag on Cu alloy substrate
To spray. Bump: Spray Au or solder onto Si wafer.

FIG. 8 shows a sixth embodiment of the present invention, in which a plurality of light-transmitting tubes are provided and a plurality of molten metals 2 are jetted simultaneously or separately, so that a laminated film or a gradient composition film made of different materials, and It becomes possible to form an alloy film.

FIG. 9 shows a seventh embodiment of the present invention. In order to provide the molten metal 2 inside the light-transmitting tube 1, heat resistance higher than the melting and holding temperature of the metal is required. Further, in order to irradiate the molten metal 2 with the laser light 3 through the transparent tube 1, it is necessary to use a material that transmits the wavelength of the laser used for the transparent tube 1.
Therefore, glass, quartz, or translucent ceramics is selected as the translucent member according to the laser wavelength to be used and the molten metal material. For example, alumina, yttria, thoria,
Examples thereof include scandium oxide, spinel, magnesia, lithium aluminate, hafnium, dysprosium oxide, erbium oxide and the like.

FIG. 10 is a diagram showing the wavelength and transparency of the highly translucent ceramics used in the above seventh embodiment. From top to bottom, lithium aluminate, magnesia (melting point ~
2800 ° C), dysprosium oxide (melting point ~ 2300
C.), spinel (melting point to 2135 C.), scandium oxide (melting point to 2405 C.), thoria (melting point to 3000).
C.), yttria (melting point to 2400.degree. C.), and alumina.

FIG. 11 shows an eighth embodiment of the present invention. By using the excimer laser 3b as the laser light, the metal easily evaporates (ablates) due to its short wavelength (ultraviolet region) and high energy. The molten metal 2 can be easily and efficiently ejected. For example, the absorption rate of laser light for Ag is YAG laser (1.06 μm), CO
5% or less with ₂ lasers (10.6 μm), but 248
In the excimer laser (KrF) having a wavelength of nm, the absorptance is improved to about 70% and evaporation is likely to occur.

FIG. 12 shows a ninth embodiment of the present invention. By making the inner diameter of the portion 1b near the end face of the transparent tube 1 for irradiating the laser beam 3 smaller than the other portions, the partial heat capacity becomes small and low. The molten metal 2 can be vaporized even with laser energy, and the ejection efficiency of the molten metal 2 is improved.

FIG. 13 shows a tenth embodiment of the present invention, in which melting and holding of metal inside the light-transmitting tube 1 is performed by heat input by irradiating the laser beam 3a from the outside to the inside of the light-transmitting tube 1. By doing so, even a refractory metal such as Ni can be easily brought into a molten state.

FIG. 14 shows an eleventh embodiment of the present invention, in which the tubular body 6 can be freely designed by using only a transparent window 6c for irradiating the laser beam 3 of the tubular body 6 with a transparent material. In addition, it is possible to minimize the use of the light-transmissive member according to the laser wavelength and the molten metal material.

[0019]

As described above, in the metal spraying method according to the present invention, the molten metal is filled in the light-transmitting tube made of the light-transmitting member, and the laser beam is irradiated from the outside to the inside of the light-transmitting tube to transmit the light. Molten metal is ejected from the end surface of the light tube and collides with the surface of the base material to form a metal film on the surface of the base material, so that a film can be formed in a minute area, and the degree of freedom of the film material and film formation shape In addition, it is possible to form a film having a high film forming speed.

[Brief description of drawings]

FIG. 1 is an explanatory view illustrating thermal spraying of metal in a first embodiment of the present invention.

FIG. 2 is an explanatory diagram illustrating a metal melting step in the first embodiment of the present invention.

FIG. 3 is an explanatory diagram illustrating a laser irradiation vaporization step in the first embodiment of the present invention.

FIG. 4 is an explanatory diagram in the case where unevenness is provided on the base material in the second embodiment of the present invention.

FIG. 5 is an explanatory diagram in the case where a laser beam is applied to the surface of the base material in the third embodiment of the present invention.

FIG. 6 is an explanatory diagram in the case where ultrasonic vibration is applied to the base material in the fourth embodiment of the present invention.

FIG. 7 is an explanatory diagram for controlling a film thickness on a base material according to a fifth embodiment of the present invention.

FIG. 8 is an explanatory diagram for controlling the film quality on the base material in the sixth embodiment of the present invention.

FIG. 9 is an explanatory diagram illustrating a material of a light-transmitting tube according to a seventh embodiment of the present invention.

FIG. 10 is a diagram showing the wavelength and the transparency of the highly transparent ceramics which is the material of the transparent tube in the seventh embodiment of the present invention.

FIG. 11 is an explanatory diagram when an excimer laser beam is used in an eighth example of the present invention.

FIG. 12 is an explanatory diagram illustrating the shape of a light-transmitting tube according to a ninth embodiment of the present invention.

FIG. 13 is an explanatory diagram illustrating melting and holding of metal by laser light according to the tenth embodiment of the present invention.

FIG. 14 is an explanatory diagram of a case where a tubular body is provided with a light transmitting window in the eleventh embodiment of the present invention.

[Explanation of symbols]

 1 translucent tube 1a translucent tube end face 1b end face vicinity part 1c translucent window 2 molten metal 3 laser light 3a metal melting laser light 3b excimer laser light 4 heater 5 base material 6 tubular body 6a tubular body end surface 6c translucent window

Claims (11)

[Claims] 1. A molten metal is filled in a light-transmitting tube made of a light-transmitting member, a laser beam is irradiated from the outside of the light-transmitting tube inward, and the molten metal is ejected from the end surface of the light-transmitting tube to the surface of the base material. A method for thermal spraying of metal, which comprises colliding and forming a metal film on the surface of the base material. 2. The method for spraying a metal according to claim 1, wherein the surface of the base material is provided with irregularities or holes. 3. The metal spraying method according to claim 1, wherein the surface of the base material is irradiated with laser light. 4. The method for thermal spraying of a metal according to claim 1, wherein ultrasonic vibration is applied to the base material. 5. The metal spraying method according to claim 1, wherein the molten metal is jetted several times at the same position to control the film thickness. 6. The metal spraying method according to claim 1, wherein a plurality of said light-transmitting tubes are provided and a plurality of molten metals are jetted simultaneously or separately to control the quality of the formed film. 7. The transparent member of the transparent tube is glass,
Quartz, or translucent ceramics such as alumina, yttria, thoria, scandium oxide, spinel, magnesia, lithium aluminate, hafnium, dysprosium oxide, erbium oxide, etc. Method. 8. The metal spraying method according to claim 1, wherein an excimer laser is used as the laser light. 9. The metal spraying method according to claim 1, wherein an inner diameter of a portion near the end face of the light-transmitting tube for irradiating the laser beam is smaller than other portions. 10. The method for thermal spraying of a metal according to claim 1, wherein melting and holding of the metal inside the light-transmitting tube is performed by heat input from the outside of the light-transmitting tube to the inside by irradiation of laser light. 11. A tubular body is filled with molten metal, and a laser beam is irradiated from outside to inside of a light-transmitting window made of a laser-transmitting body provided in a part of the tubular body, so that the molten metal is discharged from the end surface of the tubular body. A thermal spraying method for a metal, which comprises ejecting and colliding with a surface of a base material to form a metal film on the surface of the base material.