JPH05291654A - Solid state laser rods - Google Patents
Solid state laser rodsInfo
- Publication number
- JPH05291654A JPH05291654A JP12254592A JP12254592A JPH05291654A JP H05291654 A JPH05291654 A JP H05291654A JP 12254592 A JP12254592 A JP 12254592A JP 12254592 A JP12254592 A JP 12254592A JP H05291654 A JPH05291654 A JP H05291654A
- Authority
- JP
- Japan
- Prior art keywords
- state laser
- solid state
- laser
- solid
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、高出力レーザを発生で
きる固体レーザ発振装置の固体レーザに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid-state laser oscillating device capable of generating a high-power laser.
【0002】[0002]
【従来の技術】従来、固体レーザ発振装置において、最
も多く用いられているYAGレーザ発振装置の場合、Y
AG単結晶育成技術に制限があるために、レーザロッド
の寸法は、太さが10mmφ、長さが150mmが最大
とされており、レーザ出力で400Wが限界であった。
また、YAGレーザ発振装置の効率は、2%から4%程
度であり、残りのほとんどが熱に変化するために、レー
ザロッド単位長さ当りのエネルギー投入に限界があり、
限界を越えると破損していた。これらの問題を解決する
手段として、図2に示すような複数の固体レーザ発振器
の固体レーザロッド3を個別に直列に配置し結合するこ
とで高出力レーザを得ている。しかし、レーザ出力を安
定化させるのに、複数の直列に配置結合した固体レーザ
発振器をコントロールすることは非常に困難であった。
しかも、使用する部品が多いため、故障の頻度が多かっ
た。2. Description of the Related Art In the case of the YAG laser oscillator, which is the most popular solid laser oscillator in the past, the Y
Due to the limitation of the AG single crystal growth technique, the maximum size of the laser rod is 10 mmφ in thickness and 150 mm in length, and the laser output is limited to 400 W.
In addition, the efficiency of the YAG laser oscillator is about 2% to 4%, and most of the rest is changed to heat, so there is a limit to the energy input per unit length of the laser rod.
It was damaged when the limit was exceeded. As a means for solving these problems, a high-power laser is obtained by individually arranging and connecting the solid-state laser rods 3 of a plurality of solid-state laser oscillators as shown in FIG. However, it was very difficult to control a plurality of solid-state laser oscillators arranged and coupled in series to stabilize the laser output.
Moreover, since many parts are used, the frequency of failure is high.
【0003】[0003]
【発明が解決しようとする課題】本発明は、複数の固体
レーザ発振器を個別に直列に配置することなく、安定な
高出力レーザが得られる固体レーザ発振装置を提供する
ことを目的とする。SUMMARY OF THE INVENTION It is an object of the present invention to provide a solid-state laser oscillator that can obtain a stable high-power laser without individually disposing a plurality of solid-state laser oscillators in series.
【0004】[0004]
【課題を解決するための手段】本発明は、両端面を鏡面
研磨した複数個の固体レーザロッドの各々の鏡面研磨し
た両端面を密着させて接着剤で固定した後、接着剤の部
分を光反射率の高い金属スリーブで覆うことを特徴とす
る長尺固定レーザロッドである。SUMMARY OF THE INVENTION According to the present invention, a plurality of solid-state laser rods having both end surfaces mirror-polished at their respective mirror-polished end surfaces are brought into close contact with each other and fixed with an adhesive, and then the adhesive portion is exposed to light. A long fixed laser rod covered with a metal sleeve having a high reflectance.
【0005】即ち本発明は、レーザ素子が、ガラス又は
単結晶から成る固体レーザロッドにおいて、接合する両
端面を鏡面研磨して、接合面を直列に密着させて接着剤
で固定した複数個の固体レーザロッドの夫々の接合面の
外周面を、光反射率の高い金属スリーブで覆い構成した
ことを特徴とする固体レーザロッドである。That is, according to the present invention, in a solid-state laser rod in which a laser element is made of glass or a single crystal, both end faces to be joined are mirror-polished, and a plurality of solid members are joined by bonding the joined faces in series and fixed with an adhesive. The solid-state laser rod is characterized in that the outer peripheral surface of each joining surface of the laser rod is covered with a metal sleeve having a high light reflectance.
【0006】[0006]
【作用】長尺固体レーザロッドを用いることにより長さ
に比例した励起エネルギーを投入でき、レーザの大出力
化が可能となる。また、接着箇所を光反射率の高い金属
スリーブで覆うことによって励起光による接着剤の劣化
と熱による変形を防ぐことが出来る。By using the long solid laser rod, the excitation energy proportional to the length can be input, and the laser output can be increased. In addition, by covering the bonded portion with a metal sleeve having a high light reflectance, deterioration of the adhesive due to excitation light and deformation due to heat can be prevented.
【0007】[0007]
【実施例】次に、本発明の実施例を説明する。図1は本
発明の実施例による大出力固体レーザ発振装置の構成図
である。全反射鏡5、出射鏡6間に設けられたYAGレ
ーザロッドの固体レーザロッド3を、断面が円筒楕円型
の金集光器4の焦点に配置し、もう一方の焦点に光励起
用ランプ2を設けて、この光励起用ランプ2によって励
起された固体レーザロッドから自然放出された光が平行
平面の全反射鏡5、出射鏡6間で誘導放出され増幅され
るように全反射鏡5、出射鏡6を調整することによっ
て、反射率の低い出射鏡6よりレーザ光が出射する。本
発明の実施例に用いた固体レーザロッド3は、直径が8
mmで長さが200mmのYAG結晶の両端面を平行度
5秒、直角度30秒、表面荒さRmax0.001μ
m、平坦度0.06μmで仕上げた後、弗化マグネシウ
ム(MgF2)をλ/4(λ=1.06μm)の厚さだ
け真空蒸着して反射損失を防いだ固体レーザロッド3本
を接着したものである。接着剤にはエポキシ系の硬化剤
を用い、端面どうしの接合面には接着剤が回り込まない
ように、接着剤を着けずに端面どうしを圧着した状態で
接合部分を中心に幅10mmの領域に接着剤を数十μm
着けて、その上に厚さ05mm、内径8.05mm、長
さ10mmの銀スリーブを接着した。銀スリーブ1はラ
ンプ光の95%以上の光を反射するため、光による接着
剤の劣化を防ぐ。しかも、放熱がよいので接着剤の熱に
よる変形を防ぐことが出来る。このロッドに図1の構成
を用いて、光励起用ランプ2に9Kwの電力を加えたと
ころ、平均出力1Kwのレーザが得られた。出力の安定
性は±5%であり、図2に示す様な従来の装置に比べて
非常に安定性がよかった。なほ、本発明の実施例は固体
レーザロッドで説明したが、他の単結晶、又はガラスを
用いてもよく、又レーザロッドの接合部分の外周を覆う
銀スリーブは、他の光反射率の高い金、白金、アルミナ
等の金属を用いても本発明を実施し得る。EXAMPLES Next, examples of the present invention will be described. FIG. 1 is a configuration diagram of a high-power solid-state laser oscillator according to an embodiment of the present invention. The solid-state laser rod 3 of the YAG laser rod provided between the total reflection mirror 5 and the emission mirror 6 is placed at the focal point of the gold concentrator 4 having a cylindrical elliptical cross section, and the optical excitation lamp 2 is provided at the other focal point. The total reflection mirror 5 and the emission mirror 6 are arranged so that the light spontaneously emitted from the solid-state laser rod excited by the light excitation lamp 2 is stimulated and emitted between the parallel reflection surface 5 and the emission mirror 6. By the adjustment, the laser light is emitted from the emission mirror 6 having a low reflectance. The solid-state laser rod 3 used in the embodiment of the present invention has a diameter of 8
A YAG crystal having a length of 200 mm and a length of 200 mm has a parallelism of 5 seconds, a squareness of 30 seconds, and a surface roughness Rmax of 0.001μ
m and flatness of 0.06μm, magnesium fluoride (MgF 2 ) is vacuum-deposited by a thickness of λ / 4 (λ = 1.06μm) to bond 3 solid laser rods to prevent reflection loss. It was done. An epoxy-based curing agent is used as the adhesive, and in order to prevent the adhesive from wrapping around the joint surfaces between the end faces, the end faces are crimped together without the adhesive being applied to a region with a width of 10 mm centering on the joint part. Tens of μm adhesive
Then, a silver sleeve having a thickness of 05 mm, an inner diameter of 8.05 mm, and a length of 10 mm was adhered on it. The silver sleeve 1 reflects 95% or more of the lamp light, and therefore prevents the adhesive from being deteriorated by the light. Moreover, since the heat radiation is good, the deformation of the adhesive due to the heat can be prevented. When the structure shown in FIG. 1 was used for this rod and 9 Kw of electric power was applied to the photoexcitation lamp 2, a laser having an average output of 1 Kw was obtained. The output stability was ± 5%, which was much better than the conventional device as shown in FIG. Although the embodiment of the present invention has been described with respect to the solid laser rod, other single crystals or glass may be used, and the silver sleeve covering the outer periphery of the joining portion of the laser rod has other high light reflectance. The present invention can also be practiced using metals such as gold, platinum, and alumina.
【0008】[0008]
【発明の効果】以上述べたごとく本発明による固体レー
ザロッドを用いることによって、1台の固体レーザ発振
器で出力変動が小さく1Kw以上の大出力が得られ、し
かも従来のように複数のレーザ発振器を用いることがな
い為、故障頻度が少なく、保守が容易である。また、個
々の電源を制御する為のコントローラーが不用となり、
装置が安価になる。As described above, by using the solid-state laser rod according to the present invention, a single solid-state laser oscillator has a small output fluctuation and a large output of 1 Kw or more can be obtained. Since it is not used, the frequency of failure is low and maintenance is easy. Moreover, the controller for controlling each power supply is unnecessary,
The device becomes cheaper.
【図1】本発明の実施例を用いた大出力固体レーザ発振
装置の構成図。FIG. 1 is a configuration diagram of a high-power solid-state laser oscillator using an embodiment of the present invention.
【図2】従来の大出力固体レーザ発振装置の構成図。FIG. 2 is a configuration diagram of a conventional high-power solid-state laser oscillator.
1 銀スリーブ 2 光励起用ランプ 3 固体レーザロッド 4 金集光器 5 全反射鏡 6 出射鏡 1 silver sleeve 2 optical excitation lamp 3 solid-state laser rod 4 gold concentrator 5 total reflection mirror 6 emission mirror
Claims (1)
る固体レーザロッドにおいて、接合する両端面を鏡面研
磨して、接合面を直列に密着させて接着剤で固定した複
数個の固体レーザロッドの夫々の接合面の外周面を、光
反射率の高い金属スリーブで覆い構成したことを特徴と
する固体レーザロッド。1. A solid-state laser rod in which a laser element is made of glass or a single crystal, and both end surfaces to be joined are mirror-polished, and the joining surfaces are closely adhered in series and fixed with an adhesive. A solid-state laser rod characterized in that an outer peripheral surface of each of the joint surfaces is covered with a metal sleeve having a high light reflectance.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12254592A JPH05291654A (en) | 1992-04-15 | 1992-04-15 | Solid state laser rods |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12254592A JPH05291654A (en) | 1992-04-15 | 1992-04-15 | Solid state laser rods |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05291654A true JPH05291654A (en) | 1993-11-05 |
Family
ID=14838528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12254592A Pending JPH05291654A (en) | 1992-04-15 | 1992-04-15 | Solid state laser rods |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05291654A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997028585A1 (en) * | 1996-02-02 | 1997-08-07 | Fanuc Ltd | Solid laser oscillator |
JP2016532285A (en) * | 2013-09-23 | 2016-10-13 | 中国科学院光▲電▼研究院 | Large aperture uniform amplification laser module |
-
1992
- 1992-04-15 JP JP12254592A patent/JPH05291654A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997028585A1 (en) * | 1996-02-02 | 1997-08-07 | Fanuc Ltd | Solid laser oscillator |
US6055263A (en) * | 1996-02-02 | 2000-04-25 | Fanuc Ltd. | Solid-state laser oscillating device |
JP2016532285A (en) * | 2013-09-23 | 2016-10-13 | 中国科学院光▲電▼研究院 | Large aperture uniform amplification laser module |
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