JPH03293789A - Ld pumped solid state laser oscillator - Google Patents

Ld pumped solid state laser oscillator

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Publication number
JPH03293789A
JPH03293789A JP9599090A JP9599090A JPH03293789A JP H03293789 A JPH03293789 A JP H03293789A JP 9599090 A JP9599090 A JP 9599090A JP 9599090 A JP9599090 A JP 9599090A JP H03293789 A JPH03293789 A JP H03293789A
Authority
JP
Japan
Prior art keywords
laser
laser medium
medium
optical axis
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9599090A
Other languages
Japanese (ja)
Inventor
Yoshikazu Suzuki
良和 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9599090A priority Critical patent/JPH03293789A/en
Publication of JPH03293789A publication Critical patent/JPH03293789A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To eliminate adjusting work of optical axis and to prevent lowering of laser output by providing a total reflection mirror and a partially transparent mirror of dielectric multilayer film, respectively, on the opposite faces of a laser medium and bonding an ultrasonic oscillator directly to the other face of the laser medium. CONSTITUTION:Opposite faces of a laser medium 10 are polished to satisfy the conditions of an resonator and deposited with dielectric multilayer films so that a mirror 11 passing several % to several tens % of laser beam is formed on one end face whereas a total reflection mirror 12 is formed on the other end face. Exciting beam outputted from a semiconductor laser diode 13 is absorbed in the laser medium 10 and excites the medium atoms. Furthermore, an ultrasonic oscillator 14 is bonded directly to the top face of the laser medium 10. Upon application of an electric field from a high frequency power supply 15, the ultrasonic oscillator 14 produces ultrasonic wave and inducing a compression wave in the laser medium 10. Consequently, adjusting work of optical axis is eliminated, shift of optical axis due to vibration or temperature is suppressed and lowering of laser output is prevented.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、LD励起固体レーザ発振器に関し、特に半導
体レーザダイオード(以下、LDと称す)により光励起
を行い、Qスイッチ発振光を得るLD励起Qスイッチ発
振器に採用して好適なLD励起固体レーザ発振器に関す
る。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an LD-pumped solid-state laser oscillator, and particularly to an LD-pumped solid-state laser oscillator that performs optical pumping with a semiconductor laser diode (hereinafter referred to as LD) to obtain Q-switched oscillation light. The present invention relates to an LD pumped solid state laser oscillator suitable for use in a switch oscillator.

〔従来の技術〕[Conventional technology]

従来のQスイッチ発振光を得るLD励起固体レーザ発振
器は、第3図に示すように、固体レーザ媒質11部分透
過ミラー2及び0スイツチ素子3より構成されていた。
A conventional LD-pumped solid-state laser oscillator for obtaining Q-switched oscillation light is composed of a solid-state laser medium 11, a partially transmitting mirror 2, and an 0-switch element 3, as shown in FIG.

レーザ発振器の光共振器は、固体レーザ媒質1の端面に
蒸着された全反射ミラー4と部分透過ミラー2により構
成されている。
The optical resonator of the laser oscillator is composed of a total reflection mirror 4 and a partial transmission mirror 2 deposited on the end face of a solid-state laser medium 1.

また、LD5から出た励起光は、全反射ミラー4を通り
、固体レーザ媒質1内で集光されている。
Further, the excitation light emitted from the LD 5 passes through a total reflection mirror 4 and is focused within the solid-state laser medium 1.

ここで全ミラー4は、レーザ光波長に対しては、99.
9%以上の全反射特性を有し、かつ励起光波長に対して
は数%の反射特性しか有しない2色性の特性を有してい
る。励起された固体レーザ媒体lは、光共振器により増
幅され、部分透過ミラー2より出力される。
Here, all the mirrors 4 have a wavelength of 99.
It has a total reflection characteristic of 9% or more, and has a dichroic characteristic that has a reflection characteristic of only a few percent with respect to the excitation light wavelength. The excited solid-state laser medium l is amplified by the optical resonator and output from the partially transmitting mirror 2.

また、Qスイッチ素子3は、超音波変調器で、鉛ガラス
や石英等の光学媒体に超音波振動子を接着したものが用
いられている。そして、振動子に高周波電界を印加する
ことにより発生した弾性波が光学媒体を伝搬する際、媒
体中に生じる疎密領域が通過する光を回折し、透過光の
光強度を変調するように構成されており、レーデ発振器
の共振器内部に挿入することにより、光シヤツターの効
果がある。また、超音波が発生している場合には、回折
光の損失により、レーザ発振が停止し、超音波の発生が
止まった瞬間に光強度の大きいQスイッチが得られるよ
うになっている。
The Q-switch element 3 is an ultrasonic modulator in which an ultrasonic vibrator is bonded to an optical medium such as lead glass or quartz. When the elastic waves generated by applying a high-frequency electric field to the vibrator propagate through the optical medium, the dense and dense regions generated in the medium diffract the passing light and modulate the light intensity of the transmitted light. By inserting it inside the resonator of a Rade oscillator, it produces an optical shutter effect. Furthermore, when ultrasonic waves are being generated, the laser oscillation stops due to the loss of diffracted light, and a Q-switch with high light intensity is obtained at the moment when the ultrasonic waves stop being generated.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

しかしながら、従来のLD励起固体レーザ発振器におい
ては、固体レーザ媒質11部分透過ミラー2およびQス
イッチ素子3と個々の部分が分離しているため、レーザ
光を得るためには、それぞれの部分を同一光軸上に調整
するための調整作業を行う必要があった。また、個々に
分離しているため、保持部のズレや熱膨張等により、レ
ーザ出力が低下する要因になっていた。
However, in a conventional LD-pumped solid-state laser oscillator, the solid-state laser medium 11 partially transmitting mirror 2 and Q-switch element 3 are separated, so in order to obtain laser light, each part must be used to generate the same light. It was necessary to perform adjustment work to adjust it on the axis. Furthermore, since they are individually separated, misalignment of the holding portions, thermal expansion, and the like may cause a decrease in laser output.

本発明の目的は、上述した欠点に鑑み、光軸調整作業を
不要にしかつレーザ出力の低下を防止し得るLD励起固
体レーザ発振器を提供するにある。
SUMMARY OF THE INVENTION In view of the above-mentioned drawbacks, an object of the present invention is to provide an LD-pumped solid-state laser oscillator that eliminates the need for optical axis adjustment work and prevents a decrease in laser output.

〔課題を解決するための手段〕[Means to solve the problem]

この目的を達成するたtに、本発明は、半導体レーデダ
イオードを固体レーザ媒質の励起光源として用いたLD
励起固体レーザ発振器において、レーザ媒体の2つの面
が誘電体多層膜による全反射ミラーと部分透過ミラーに
成っており、かつこのレーザ媒質の他の面に超音波を発
生する振動子を直接接着した構成としたものである。
In order to achieve this object, the present invention provides an LD using a semiconductor laser diode as an excitation light source for a solid-state laser medium.
In a pumped solid-state laser oscillator, the two surfaces of the laser medium are a total reflection mirror and a partial transmission mirror made of a dielectric multilayer film, and a vibrator that generates ultrasonic waves is directly bonded to the other surface of the laser medium. It is structured as follows.

〔作用〕[Effect]

このように本発明にあっては、1個のレーザ媒質にレー
ザ共振器ふよびQスイッチ機能を含んでいるため、光軸
調整が不要となり、LDからの励起光を与えるだけで固
体レーザのQスイッチパルス光が得られる。また、個々
の部品が1つの固体に集中しているため、振動や温度に
よる光軸ずれ等が低減でき、レーザ出力の低下防止が図
れる。
In this way, in the present invention, since a single laser medium includes a laser resonator shift and a Q switch function, there is no need for optical axis adjustment, and the Q of a solid-state laser can be adjusted by simply applying excitation light from an LD. Switch pulse light is obtained. Furthermore, since the individual parts are concentrated in one solid body, optical axis deviation due to vibration or temperature can be reduced, and a decrease in laser output can be prevented.

〔実施例〕〔Example〕

次に、本発明について図面を参照して説明する。。 Next, the present invention will be explained with reference to the drawings. .

第1図は本発明に係るLD励起固体レーザ発振器の一実
施例を示す概略構成図、第2図(a)。
FIG. 1 is a schematic configuration diagram showing an embodiment of an LD pumped solid-state laser oscillator according to the present invention, and FIG. 2(a).

(b)はレーザ媒質の横断面図と縦断面図である。(b) is a cross-sectional view and a vertical cross-sectional view of a laser medium.

レーザ媒質100両端面は平行平面または凹面と平面等
、共振器になる条件を満たすよう研磨されていると共に
、これら両端面には誘電体多層膜が蒸着されており、一
方の端面は数%〜数10%のレーザ波長の光を透過する
部分透過ミラー11となっており、かつ他方の端面は9
9.9%以上反射する全反射ミラー12となっている。
Both end faces of the laser medium 100 are polished to meet the conditions for becoming a resonator, such as parallel planes or concave and flat surfaces, and a dielectric multilayer film is deposited on both end faces, and one end face is It is a partially transmitting mirror 11 that transmits light with a laser wavelength of several 10%, and the other end surface is 9.
The total reflection mirror 12 reflects 9.9% or more.

また、LD13より出力される励起光は、前記レーザ媒
質10内で吸収され、媒質原子を励起する。さらに、レ
ーザ媒質10の上面には超音波振動子14が直接接着固
定されており、この超音波振動子14は高周波電源15
より印加される電界により、超音波を発生し、レーザ媒
質10内に疎密波を生じさせるようになっている。
Furthermore, the excitation light output from the LD 13 is absorbed within the laser medium 10 and excites the atoms of the medium. Further, an ultrasonic vibrator 14 is directly adhesively fixed to the upper surface of the laser medium 10, and this ultrasonic vibrator 14 is connected to a high frequency power source 15.
The applied electric field generates ultrasonic waves and generates compression waves in the laser medium 10.

今、第2図(A)で示すように、レーザ光の光軸16と
、超音波の波面17は、回折効率を最大にするためブラ
ック角度で傾いた状態にしている。
Now, as shown in FIG. 2(A), the optical axis 16 of the laser beam and the wavefront 17 of the ultrasonic wave are tilted at the Black angle in order to maximize the diffraction efficiency.

このため、レーザ媒質10の上面10aは、光軸16に
対しての以下の式ような角度θを有して予め研磨され、
この研磨されたレーザ媒質1Dの上面10aに超音波振
動子14が接着された構成となっている。なお、ここで
λ○はレーザ光波長、λSはレーザ媒質10中の超音波
の波長を示す。
For this reason, the upper surface 10a of the laser medium 10 is polished in advance with an angle θ expressed by the following formula with respect to the optical axis 16,
The ultrasonic vibrator 14 is bonded to the upper surface 10a of this polished laser medium 1D. Note that here, λ○ indicates the wavelength of the laser beam, and λS indicates the wavelength of the ultrasonic wave in the laser medium 10.

例えば、レーザ媒質10としてYAG結晶を用いた場合
で、超音波振動子14に印加する高周波電力の周波数を
80MH2とすると、このレーザ媒質10の上面10a
は光軸16に対して約057傾いている。また、従来の
Qスイッチ素子に必要とされていた高周波電力は、レー
ザ共振器内に挿入されるQスイッチ素子の回折損失を1
0%と見積もると、Qスイッチ素子の光学媒体が石英の
場合で約0.2W、鉛ガラスの場合で約0.IWである
。本実施例のようにレーザ媒質10にYAG結晶を用い
た場合、従来のQスイッチ素子と同等の回折効率を得る
ためには約4wの高周波電力が必要となる。また、レー
ザ媒質1oにNd(ネオジウム)をドープしたガラス材
料を用いる場合も本実施例の方法でQスイッチ発振が得
みれる。
For example, when a YAG crystal is used as the laser medium 10 and the frequency of the high-frequency power applied to the ultrasonic transducer 14 is 80 MH2, the upper surface 10a of the laser medium 10
is inclined by about 057 with respect to the optical axis 16. In addition, the high frequency power required for conventional Q-switch elements can reduce the diffraction loss of the Q-switch element inserted into the laser resonator by 1.
If the optical medium of the Q-switch element is estimated to be 0%, it will be approximately 0.2W when the optical medium is quartz, and approximately 0.2W when the optical medium of the Q-switch element is lead glass. It is IW. When a YAG crystal is used as the laser medium 10 as in this embodiment, a high frequency power of approximately 4 W is required to obtain a diffraction efficiency equivalent to that of a conventional Q-switch element. Further, even when a glass material doped with Nd (neodymium) is used as the laser medium 1o, Q-switch oscillation can be obtained by the method of this embodiment.

なお、レーザ媒質10の下面10bが第2図(B)で示
すように斜めに形成されているのは、超音波が正反射し
て、レーザ光に損失を与えないためである。
Note that the reason why the lower surface 10b of the laser medium 10 is formed obliquely as shown in FIG. 2(B) is to prevent the ultrasonic waves from being specularly reflected and causing loss to the laser beam.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明に係るLD励起固体レーザ発
振器によれば、レーザ媒質の2つの面が誘電体多層膜に
よる全反射ミラーと部分透過ミラーになっており、かつ
このレーザ媒質の他の面に超音波を発生する振動子を直
接接着した構成としており、1個のレーザ媒質にレーザ
共振器及びQスイッチ機能を含んだ構成としているため
、光軸調整が不要となり、したがってLDからの励起光
を与えるだけで固体レーザのQスイッチパルス光が得ら
れるという効果を有する。また、個々の部分が1つの固
体レーザ媒質に集中しているため、振動や温度による光
軸ずれ等を低減することが可能となり、レーザ出力の低
下を防止できるという効果も有する。
As explained above, according to the LD-pumped solid-state laser oscillator according to the present invention, the two surfaces of the laser medium are a total reflection mirror and a partial transmission mirror formed by a dielectric multilayer film, and the other surface of the laser medium A vibrator that generates ultrasonic waves is directly bonded to the oscillator, and a single laser medium includes a laser resonator and a Q-switch function, eliminating the need for optical axis adjustment. It has the effect that a Q-switched pulsed light of a solid-state laser can be obtained by simply giving . Furthermore, since the individual parts are concentrated in one solid laser medium, optical axis deviation due to vibration and temperature can be reduced, and a decrease in laser output can be prevented.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係るLD励起固体レーザ発振器の一実
施例を示す概略構成図、第2図(A)はレーザ媒質の横
断面図と、同図(B)はその縦断面図、第3図は従来例
の概略構成図である。 0・・・・・・レーザ媒質、 1・・・・・・部分透過ミラー 2・・・・・・全反射ミラー 4・・・・・・超音波振動子。 10a・・・・・・上面、 3・・・・・・LD。
FIG. 1 is a schematic configuration diagram showing an embodiment of an LD pumped solid-state laser oscillator according to the present invention, FIG. 2(A) is a cross-sectional view of the laser medium, FIG. FIG. 3 is a schematic configuration diagram of a conventional example. 0... Laser medium, 1... Partial transmission mirror 2... Total reflection mirror 4... Ultrasonic transducer. 10a...Top surface, 3...LD.

Claims (1)

【特許請求の範囲】[Claims] 半導体レーザダイオードを固体レーザ媒質の励起光源と
して用いたLD励起固体レーザ発振器において、レーザ
媒質の2つの面が誘電体多層膜による全反射ミラーと部
分透過ミラーによって構成されており、かつこのレーザ
媒質の他の面に超音波を発生する振動子を直接接着した
ことを特徴とするLD励起固体レーザ発振器。
In an LD-pumped solid-state laser oscillator using a semiconductor laser diode as a pumping light source for a solid-state laser medium, two surfaces of the laser medium are composed of a total reflection mirror and a partial transmission mirror made of a dielectric multilayer film, and An LD-excited solid-state laser oscillator characterized in that a vibrator that generates ultrasonic waves is directly bonded to the other surface.
JP9599090A 1990-04-11 1990-04-11 Ld pumped solid state laser oscillator Pending JPH03293789A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9599090A JPH03293789A (en) 1990-04-11 1990-04-11 Ld pumped solid state laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9599090A JPH03293789A (en) 1990-04-11 1990-04-11 Ld pumped solid state laser oscillator

Publications (1)

Publication Number Publication Date
JPH03293789A true JPH03293789A (en) 1991-12-25

Family

ID=14152572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9599090A Pending JPH03293789A (en) 1990-04-11 1990-04-11 Ld pumped solid state laser oscillator

Country Status (1)

Country Link
JP (1) JPH03293789A (en)

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