JPH05291066A - Inductor and manufacture thereof - Google Patents
Inductor and manufacture thereofInfo
- Publication number
- JPH05291066A JPH05291066A JP9441792A JP9441792A JPH05291066A JP H05291066 A JPH05291066 A JP H05291066A JP 9441792 A JP9441792 A JP 9441792A JP 9441792 A JP9441792 A JP 9441792A JP H05291066 A JPH05291066 A JP H05291066A
- Authority
- JP
- Japan
- Prior art keywords
- inductor
- conductor
- binder
- powder
- core material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、磁性材と導電体とから
成り、主として電子機器のノイズ防止用に使用されるイ
ンダクタ及びその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inductor composed of a magnetic material and a conductor, which is mainly used for noise prevention of electronic equipment and a method for manufacturing the inductor.
【0002】[0002]
【従来の技術】従来、この種のインダクタは、上述した
如く、電子機器のノイズ防止用に使用されるもので、そ
の素子構造はトロイダル状の磁芯に導電体の巻線を巻回
したものが汎用的である。2. Description of the Related Art Heretofore, this type of inductor has been used for noise prevention of electronic equipment as described above, and its element structure is a toroidal magnetic core wound with a conductor winding. Is versatile.
【0003】ところで、近年の電子機器に対する小型化
への需要は顕著であり、これに伴ってインダクタにも一
層小型化が望まれている。しかしながら、磁芯に導電体
の巻線を巻回した構造のインダクタでは小型である程、
導電体の巻線が困難になるという問題が発生する。By the way, there is a remarkable demand for miniaturization of electronic devices in recent years, and accordingly, further miniaturization of inductors is desired. However, the smaller the size of an inductor with a structure in which a conductor winding is wound around the magnetic core,
The problem arises that winding of the conductor becomes difficult.
【0004】そこで、導電体と磁性粉体から成るシート
とを導電体の一部が接点を有するように交互に積層した
積層型インダクタが開発されている。この積層型インダ
クタは、導電体コイルを埋設した磁性材の圧粉体を得て
おき、その圧粉体を焼結することによって製造される。
このような積層型インダクタは、磁性材の磁芯に導電体
コイルを埋設した構造なので、導電体コイルが発生する
磁束を外部に漏洩させることなく、充分に小型化を図り
得るという長所がある。Therefore, a laminated inductor has been developed in which a conductor and a sheet made of magnetic powder are alternately laminated so that a part of the conductor has a contact point. This laminated inductor is manufactured by obtaining a green compact of a magnetic material in which a conductor coil is embedded and sintering the green compact.
Since such a laminated inductor has a structure in which a conductor coil is embedded in a magnetic core of a magnetic material, it has an advantage that it can be sufficiently miniaturized without leaking the magnetic flux generated by the conductor coil to the outside.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、上述し
た積層型インダクタの場合、製造工程が煩雑となり、製
造コストを廉価にできないという弱点がある。又、加え
て圧粉体の焼結工程において、導電体と磁性材との構成
成分が交互に拡散されることになる為、これら各材質の
特性が充分に発揮されないという難点がある。However, in the case of the above-mentioned laminated inductor, the manufacturing process is complicated, and the manufacturing cost cannot be reduced. In addition, in the sintering process of the green compact, the constituent components of the conductor and the magnetic material are alternately diffused, so that there is a drawback that the characteristics of these respective materials cannot be sufficiently exhibited.
【0006】本発明は、かかる問題点を解決すべくなさ
れたもので、その技術的課題は、小型であって、導電体
及び磁性材の各材質の特性を充分に発揮でき、しかも簡
易に得られるインダクタ及びその製造方法を提供するこ
とにある。The present invention has been made to solve the above problems, and its technical problem is that it is small in size, and the characteristics of each material of a conductor and a magnetic material can be sufficiently exhibited, and moreover, it is easily obtained. The present invention provides an inductor and a manufacturing method thereof.
【0007】[0007]
【課題を解決するための手段】本発明によれば、磁性材
としての金属又はセラミックスの粉末とバインダーとを
混合,造粒して得た原料粉体に有機化合物及び/又は炭
素繊維から成るコイル状芯材を含めてプレス成形により
成形体を得る成形工程と、成形体を抽出してバインダー
及びコイル状芯材を除去することにより、貫通孔を有す
る脱脂体を得る脱脂工程と、脱脂体を焼結して焼結体を
得る焼結工程と、焼結体の貫通孔内部に導電体を設ける
導電体形成工程とを含むインダクタの製造方法が得られ
る。According to the present invention, a coil made of an organic compound and / or carbon fiber is added to a raw material powder obtained by mixing and granulating a metal or ceramic powder as a magnetic material and a binder. A molding step of obtaining a molded body by press molding including a core material, a degreasing step of obtaining a degreased body having through holes by extracting the molded body and removing the binder and the coiled core material, and the degreased body. A method for manufacturing an inductor including a sintering step of sintering to obtain a sintered body and a conductor forming step of providing a conductor inside the through hole of the sintered body is obtained.
【0008】又、本発明によれば、上記インダクタの製
造方法において、脱脂工程は加熱処理により行うもので
あるインダクタの製造方法が得られる。Further, according to the present invention, in the inductor manufacturing method, the degreasing step is performed by heat treatment.
【0009】更に、本発明によれば、上記インダクタの
製造方法により形成されたインダクタが得られる。Further, according to the present invention, an inductor formed by the above method of manufacturing an inductor can be obtained.
【0010】[0010]
【作用】本発明ではインダクタの製造工程における最初
の工程で磁性材である金属又はセラミックスの粉末とバ
インダーとを混合・造粒して原料粉体を得、この原料粉
体に有機化合物及び/又は炭素繊維から成るコイル状芯
材を含めてプレス成形により成形体を得ている。この成
形体はバインダーの脂成分を含む為、脱脂する必要があ
る。そこで、次の工程で成形体を抽出操作及び/又は加
熱処理し、バインダー及びコイル状芯材を除去すること
によって貫通孔を有する脱脂体を得、更なる工程で脱脂
体を焼結して焼結体を得た後、焼結体の貫通孔内部に導
電体を設けてインダクタを製造している。このようなイ
ンダクタは、容易に製造可能な上、導電体及び磁性体の
それぞれの材質特性が充分に発揮される。In the present invention, the raw material powder is obtained by mixing and granulating the powder of metal or ceramics as the magnetic material and the binder in the first step in the manufacturing process of the inductor, and the raw material powder is mixed with the organic compound and / or A molded body is obtained by press molding including a coil-shaped core material made of carbon fiber. Since this molded product contains the fat component of the binder, it must be degreased. Therefore, in the next step, the molded body is extracted and / or heat-treated to remove the binder and the coil-shaped core material to obtain a degreased body having through holes, and the degreased body is sintered and fired in a further step. After obtaining the bonded body, a conductor is provided inside the through hole of the sintered body to manufacture an inductor. Such an inductor can be easily manufactured, and the material characteristics of the conductor and the magnetic material can be sufficiently exhibited.
【0011】[0011]
【実施例】以下に実施例を挙げ、本発明のインダクタ及
びその製造方法について、図面を参照して詳細に説明す
る。The inductor and the method for manufacturing the same according to the present invention will be described below in detail with reference to the drawings.
【0012】最初にインダクタの製造方法について、図
1に示すその製造工程のフローチャートを参照して簡単
に説明する。先ず、磁性材として、例えば金属又はセラ
ミックスの粉末とバインダーとを準備し、これらをそれ
ぞれ評量し、混合・造粒を行う(ステップS1)ことに
より原料粉体を得る。次に、成形用の金型内に有機化合
物及び/又は炭素繊維からなるコイル状芯材を設置し、
この金型内に上述した原料粉体(被成形体)を充填し
(ステップS2)、プレス成形を行う(ステップS
3)。ここまでの工程は、原料粉体に芯材を含めてプレ
ス成形し、成形体を得るものなので、成形工程と呼ばれ
ても良い。First, a method of manufacturing an inductor will be briefly described with reference to the flowchart of the manufacturing process shown in FIG. First, for example, a powder of metal or ceramics and a binder are prepared as magnetic materials, and these are weighed and mixed and granulated (step S1) to obtain a raw material powder. Next, a coil-shaped core material made of an organic compound and / or carbon fiber is placed in a molding die,
The above-mentioned raw material powder (object to be molded) is filled in this mold (step S2), and press molding is performed (step S).
3). The steps up to this point may be referred to as a molding step, since a raw material powder including a core material is press-molded to obtain a molded body.
【0013】更に、ここで得られた成形体を抽出操作及
び/又は加熱処理によりバインダー及び芯材を除去して
脱脂する(ステップS4)。この結果、内部に貫通孔を
有する脱脂体が得られる。この工程は、バインダー及び
コイル状芯材を除去するものなので、脱脂工程と呼ばれ
ても良い。引き続き、脱脂体を焼成(ステップS5)し
て焼結体を得た後、焼結体の貫通孔内部に導電体を形成
(導電形成/ステップS6)してコイルを得る。最後
に、コイルの両端に電極を形成する(ステップS7)。
このようにして、金属又はセラミックス焼結体の内部に
導電体を含有するインダクタを製造する。Further, the molded body obtained here is degreased by removing the binder and the core material by an extraction operation and / or a heat treatment (step S4). As a result, a degreased body having a through hole inside is obtained. Since this step removes the binder and the coil-shaped core material, it may be called a degreasing step. Subsequently, the degreased body is fired (step S5) to obtain a sintered body, and then a conductor is formed inside the through hole of the sintered body (conductivity formation / step S6) to obtain a coil. Finally, electrodes are formed on both ends of the coil (step S7).
In this way, an inductor containing a conductor inside a metal or ceramic sintered body is manufactured.
【0014】このようにして得られたインダクタは、小
型で素子の効率が良く、低コストで製造できる。但し、
芯材の材質には各種の有機化合物又は炭素繊維が挙げら
れるが、特に炭素繊維を使用する場合、燃焼以外の方法
では除去することは困難であるので、酸化により特性が
劣化する磁性材を対象にするときには使用を避けた方が
良い。又、バインダーの材質には各種のポリオレフィ
ン、コポリマー、ワックス等が挙げられるが、その材質
は原料粉体の粒度や表面性等を考慮して適宣選択すれば
良い。The inductor thus obtained is small in size, has good element efficiency, and can be manufactured at low cost. However,
Although various organic compounds or carbon fibers can be mentioned as the material of the core material, especially when carbon fibers are used, it is difficult to remove them by a method other than combustion, so magnetic materials whose characteristics deteriorate due to oxidation are targeted. It is better to avoid using it. Further, various polyolefins, copolymers, waxes, etc. may be mentioned as the material of the binder, and the material may be appropriately selected in consideration of the particle size and surface property of the raw material powder.
【0015】尚、焼結体に形成された貫通孔(空孔)の
内部に導電体を形成する方法としては、各種鍍金法,金
属容湯の鋳込み法,化学的気相分解法,物理的気相分解
法等が挙げられるが、これらに限定されるものではな
い。As a method of forming a conductor inside the through hole (hole) formed in the sintered body, various plating methods, casting method of hot metal, chemical vapor decomposition method, physical method Examples thereof include, but are not limited to, vapor phase decomposition methods.
【0016】以下は上述した製造方法により得られるイ
ンダクタを具体的に説明する。The inductor obtained by the above-described manufacturing method will be specifically described below.
【0017】[実施例1]図2(A)は実施例1に係る
インダクタを示す斜視図、図2(B)はそのインダクタ
のプレス成形後に得られる成形体の形状を示す斜視図で
ある。[Embodiment 1] FIG. 2A is a perspective view showing an inductor according to Embodiment 1, and FIG. 2B is a perspective view showing the shape of a molded body obtained by press molding of the inductor.
【0018】図2(B)において、原料粉体は平均粒径
が0.4μmのNi−Znフェライト仮焼粉にバインダ
ーとして5wt%のポリビニルアルコール溶液を50v
ol%混合・造粒することにより得た。次に、炭素繊維
からなる線径φ0.5mmのコイル状芯材12′を金型
内に設置し、プレス成形を行い、成形体11′を得た。
尚、成形の際にはコイル状芯材12′の間にも粉体が充
分行き渡るように金型内に原料粉体を投入した後、金型
に振動を与え、粉末の充填を高めてからプレスを行っ
た。In FIG. 2 (B), the raw material powder is a Ni-Zn ferrite calcined powder having an average particle size of 0.4 μm and 50 v of a 5 wt% polyvinyl alcohol solution as a binder.
It was obtained by ol% mixing and granulation. Next, a coil-shaped core material 12 'made of carbon fiber and having a wire diameter of 0.5 mm was placed in a mold and press-molded to obtain a molded body 11'.
During molding, after the raw material powder is put into the mold so that the powder is sufficiently distributed between the coil-shaped core materials 12 ', the mold is vibrated to enhance the powder filling. I made a press.
【0019】更に、この成形体11′を5℃/Hrの昇
温速度で600℃に加熱処理することにより、バインダ
ー及び炭素繊維からなるコイル状芯材12′を除去し、
コイル状の貫通孔を有する脱脂体(図示せず)を得た。
この後、脱脂体を1200℃で5Hr焼成し、断面口径
φ5.0mm,長さ20.0mmの円柱状焼結体11を
得た。このようにして得られた焼結体11の空孔部の内
部にスズの溶湯を流し込んで導電体12を形成し、最終
的に導電体12の両端にAg−Pdによる電極13を形
成することにより、インダクター1を製造した。Further, the molded body 11 'is heat-treated at 600 ° C. at a temperature rising rate of 5 ° C./Hr to remove the coil-shaped core material 12' composed of a binder and carbon fiber,
A degreased body (not shown) having a coiled through hole was obtained.
Then, the degreased body was fired at 1200 ° C. for 5 hours to obtain a cylindrical sintered body 11 having a cross-sectional diameter of φ5.0 mm and a length of 20.0 mm. The molten metal of tin is poured into the voids of the sintered body 11 thus obtained to form the conductor 12, and finally the electrodes 13 made of Ag—Pd are formed at both ends of the conductor 12. Inductor 1 was manufactured according to the above.
【0020】[実施例2]図3(A)は実施例2に係わ
るインダクタを示す斜視図、図3(B)はそのインダク
ターのプレス成形後に得られる成形体を示す斜視図であ
る。[Embodiment 2] FIG. 3A is a perspective view showing an inductor according to Embodiment 2, and FIG. 3B is a perspective view showing a molded body obtained by press molding of the inductor.
【0021】図3(B)において実施例1と同様に調整
した原料粉体を使用し、酢酸ビニル含量が14%であっ
て平均分子量が120000のエチレン−酢酸ビニル共
重合体(EVA)からなる線径φ0.5mmのコイル状
芯材22′を金型内に設置し、プレス成形を行い、成形
体21′を得た。尚、ここでも成形の際には実施例1と
同様に金型に振動を与え、粉末の充填を高めてからプレ
スを行った。In FIG. 3 (B), a raw material powder prepared in the same manner as in Example 1 was used, and it was composed of an ethylene-vinyl acetate copolymer (EVA) having a vinyl acetate content of 14% and an average molecular weight of 120,000. A coil-shaped core material 22 'having a wire diameter of 0.5 mm was placed in a mold and press-molded to obtain a molded body 21'. Here, also in the molding, similarly to Example 1, the mold was vibrated to increase the powder filling, and then the pressing was performed.
【0022】又、この成形体21′を5℃/Hrの昇温
速度で400℃に加熱処理することによりバインダー及
びEVAからなるコイル状芯材22′を除去し、コイル
状の貫通孔を有する脱脂体(図示せず)を得た。この
後、脱脂体を1200℃で5Hr焼成し、断面寸法8.
0×8.0[mm],長さ20.0mmの角柱状焼結体
21を得た。このようにして得られた焼結体21の空孔
部の内部にスズの溶湯を流し込んで導電体22を形成
し、更にこの導電体22の両端にAg−Pdによる電極
23を形成することにより、インダクター2を製造し
た。The molded body 21 'is heat-treated at 400 ° C. at a temperature rising rate of 5 ° C./Hr to remove the coil-shaped core material 22' composed of the binder and EVA, and has a coil-shaped through hole. A defatted body (not shown) was obtained. Then, the degreased body was fired at 1200 ° C. for 5 hours to obtain a cross-sectional dimension of 8.
A prismatic sintered body 21 having a length of 0 × 8.0 [mm] and a length of 20.0 mm was obtained. A molten metal of tin is poured into the pores of the sintered body 21 thus obtained to form a conductor 22, and electrodes 23 made of Ag—Pd are formed on both ends of the conductor 22. , Inductor 2 was manufactured.
【0023】尚、実施例1及び2では成形体からバイン
ダー及びコイル状芯材を加熱処理により除去する例を説
明したが、この他の抽出操作により除去しても良い。
又、コイル状芯材には上述した炭素繊維及び有機化合物
を化合した材質を用いても良い。更に、磁性材に金属粉
体を用いることも可能である。Although the examples in which the binder and the coil-shaped core material are removed from the molded body by the heat treatment have been described in Examples 1 and 2, they may be removed by another extraction operation.
The coil-shaped core material may be made of the above-mentioned carbon fiber and an organic compound. Further, it is possible to use metal powder as the magnetic material.
【0024】[0024]
【発明の効果】以上に説明したように、本発明によれ
ば、磁性材及び導電体の本来の特性を損なうことなく、
コイル状導電体を内蔵した小型のインダクタを廉価に、
且つ容易に製造することが可能となる。従って、本発明
は電子機器の小形化に寄与するところが非常に大きく、
工業上極めて有益となる。As described above, according to the present invention, the original characteristics of the magnetic material and the conductor are not impaired,
A small inductor with a coiled conductor built in at a low price
And it becomes possible to manufacture easily. Therefore, the present invention greatly contributes to downsizing of electronic devices,
It will be extremely useful in industry.
【図1】本発明のインダクタの製造方法について、その
製造工程を示したフローチャートである。FIG. 1 is a flowchart showing manufacturing steps of an inductor manufacturing method of the present invention.
【図2】(A)は本発明の実施例1に係るインダクタを
示す斜視図、(B)はそのインダクタのプレス成形後に
得られる成形体を示す斜視図である。2A is a perspective view showing an inductor according to Embodiment 1 of the present invention, and FIG. 2B is a perspective view showing a molded body obtained after press molding of the inductor.
【図3】(A)は本発明の実施例2に係るインダクタを
示す斜視図。(B)はそのインダクタのプレス成形後に
得られる成形体を示す斜視図である。FIG. 3A is a perspective view showing an inductor according to a second embodiment of the present invention. (B) is a perspective view showing a molded body obtained after press molding of the inductor.
1,2 インダクタ 11,21 焼結体 12,22 導電体 12´,22´ コイル状芯材 1, 2 Inductor 11, 21 Sintered body 12, 22 Conductor 12 ', 22' Coil-shaped core material
Claims (3)
粉末とバインダーとを混合,造粒して得た原料粉体に有
機化合物及び/又は炭素繊維から成るコイル状芯材を含
めてプレス成形により成形体を得る成形工程と、前記成
形体を抽出して前記バインダー及び前記コイル状芯材を
除去することにより、貫通孔を有する脱脂体を得る脱脂
工程と、前記脱脂体を焼結して焼結体を得る焼結工程
と、前記焼結体の貫通孔内部に導電体を設ける導電体形
成工程とを含むことを特徴とするインダクタの製造方
法。1. A raw material powder obtained by mixing and granulating a powder of metal or ceramics as a magnetic material and a binder, and including a coiled core material made of an organic compound and / or carbon fiber by press molding. A forming step of obtaining a body, a degreasing step of extracting the forming body to remove the binder and the coil-shaped core material to obtain a degreasing body having a through hole, and sintering and sintering the degreasing body A method of manufacturing an inductor, comprising: a sintering step of obtaining a body; and a conductor forming step of providing a conductor inside a through hole of the sintered body.
おいて、前記脱脂工程は加熱処理により行うものである
ことを特徴とするインダクタの製造方法。2. The method for manufacturing an inductor according to claim 1, wherein the degreasing step is performed by heat treatment.
方法により形成されたことを特徴とするインダクタ。3. An inductor formed by the method for manufacturing an inductor according to claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9441792A JPH05291066A (en) | 1992-04-14 | 1992-04-14 | Inductor and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9441792A JPH05291066A (en) | 1992-04-14 | 1992-04-14 | Inductor and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05291066A true JPH05291066A (en) | 1993-11-05 |
Family
ID=14109667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9441792A Withdrawn JPH05291066A (en) | 1992-04-14 | 1992-04-14 | Inductor and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05291066A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041163A (en) * | 1996-07-24 | 1998-02-13 | Taiyo Yuden Co Ltd | Chip type inductor |
EP1303163A1 (en) * | 2001-10-16 | 2003-04-16 | Keng Kuei Su | Audio reproduction apparatus |
KR100404187B1 (en) * | 2000-07-08 | 2003-11-01 | 엘지전자 주식회사 | inductor using carbon nano tube or carbon nano fiber |
JP2005223279A (en) * | 2004-02-09 | 2005-08-18 | Murata Mfg Co Ltd | Chip-type electronic component and its manufacturing method |
US9129843B1 (en) * | 2014-06-12 | 2015-09-08 | Globalfoundries Inc. | Integrated inductor |
-
1992
- 1992-04-14 JP JP9441792A patent/JPH05291066A/en not_active Withdrawn
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1041163A (en) * | 1996-07-24 | 1998-02-13 | Taiyo Yuden Co Ltd | Chip type inductor |
KR100404187B1 (en) * | 2000-07-08 | 2003-11-01 | 엘지전자 주식회사 | inductor using carbon nano tube or carbon nano fiber |
EP1303163A1 (en) * | 2001-10-16 | 2003-04-16 | Keng Kuei Su | Audio reproduction apparatus |
JP2005223279A (en) * | 2004-02-09 | 2005-08-18 | Murata Mfg Co Ltd | Chip-type electronic component and its manufacturing method |
US9129843B1 (en) * | 2014-06-12 | 2015-09-08 | Globalfoundries Inc. | Integrated inductor |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3332069B2 (en) | Inductor and manufacturing method thereof | |
CN1967742B (en) | Composite magnetic body , magnetic element ,method of manufacturing the same | |
JP2010034102A (en) | Composite magnetic clay material, and magnetic core and magnetic element using the same | |
CN107799260B (en) | Magnetic powder and inductor containing the same | |
JP2018182209A (en) | Coil component | |
KR20130064352A (en) | Laminated inductor and manufacturing method thereof | |
CN111243814A (en) | Copper sheet embedded soft magnetic powder core inductor and preparation method and application thereof | |
JP2010245505A (en) | Method for manufacturing fired ceramic body including metallic wire inside | |
JP3614080B2 (en) | Manufacturing method of chip inductor | |
JP2018182204A (en) | Coil component | |
JP4881192B2 (en) | Manufacturing method of electronic parts | |
JPH0135483B2 (en) | ||
JPH04373106A (en) | Inductor and manufacturing method thereof | |
JP2007123376A (en) | Compound magnetic substance and magnetic device using same, and method of manufacturing same | |
JPH11121234A (en) | Inductor and manufacture thereof | |
US6918173B2 (en) | Method for fabricating surface mountable chip inductor | |
JPH05291066A (en) | Inductor and manufacture thereof | |
JP2004319652A (en) | Core and method of manufacturing the same | |
JPH065427A (en) | Inductor and manufacture thereof | |
JP2018182205A (en) | Coil component | |
JPS5848410A (en) | Manufacture of inductor | |
JP3248463B2 (en) | Inductor and manufacturing method thereof | |
JP6427933B2 (en) | Metal magnetic materials and electronic components | |
JP4659463B2 (en) | Multilayer inductor and manufacturing method thereof | |
JPH07106141A (en) | Small size inductor and manufacture thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 19990706 |