JPH0528970U - Chip product inspection device - Google Patents

Abstract

(57) [Summary] [Purpose] In accordance with the pitch of the product to be measured, at least as many measuring terminals as the number of stations of the product to be measured are supported using support members, etc. Not only can the terminals be inspected, but the accurate contact can be made by pressing the inspection terminals to the electrode part of the product to be measured with a spring mechanism. The purpose of the present invention is to make it possible to conduct a continuity test. [Structure] A conductive member 11, 12 or 21, 22 made of two conductive materials that can be connected to a measuring device is made of an insulating material so that the width is equal to or less than the width of an electrode of a chip product to be inspected. The inspection terminal 10 or 20 is formed by fixing the insulating sheet 13 or 23 on both sides. Then, the electrode contact parts 14 or 24 are both electrodes 5 of the chip product 50 to be inspected.
By the action of the spring-and-sandwich type spring mechanism 16-18 or 26-28 formed so as to be respectively pressed in the directions 1a and 51b, both electrodes 51a of the electrode contact portion 14 or 24 and the chip product 50 to be inspected, 51b and 51b contact each other with a predetermined elastic force, which enables accurate resistance measurement of the four terminals while maintaining a good electrical contact state.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pitch product inspection apparatus, and more particularly to a pitch product inspection apparatus capable of detecting extremely small pitch products by a four-terminal measurement method.

[0002]

[Prior Art]

 Conventionally, the following methods have been used to measure the resistance value of chip resistors with extremely small pitch. That is, as shown in FIG. 4, the measuring terminals of the small contact probes 52a and 52b, which are mounted at the pitch intervals of the electrodes 51a and 51b of the product 50 according to the size (pitch between electrodes) of the product 50, are connected to the product 50. The resistance value of the product was measured by the resistance value measuring unit 60 connected to the measuring terminals while being pressed against the electrodes 51a and 51b.

Alternatively, as shown in FIG. 5, the pinsets and the like are modified so that the electrodes 51a and 51b of the product 50 are sandwiched between the pinsets tip ends 55a and 55b which are conductors, and the ends are connected to the tips 55a and 55b. The resistance value of the product was measured by the resistance value measuring unit 60.

[0004]

[Problems to be Solved by the Invention]

 However, the above-described conventional method for measuring the resistance value of the chip resistor having the minimum pitch has the following problems. In other words, the commercially available small contact probe used in the method of FIG. 4 has variations in the finished size, and the spring used for its small diameter is small, and its vane pressure is low, so that sufficient pressure contact pressure can be obtained. However, there was a limit to the measurement of low resistance value.

Further, in the method of FIG. 5, the pinsets have to be modified, and the hand detection by the operator is unavoidable, and the measurement results vary depending on the situation. Furthermore, it takes a lot of work to pinch multiple products such as four, one by one, with pinsets. Furthermore, it is not possible to conduct a continuity test between the neighbors.

[0006]

[Means for Solving the Problems]

 The present invention has been made for the purpose of solving the above problems, and has the following configuration as one means for solving the above problems. That is, the conductive member made of two conductive materials that can be connected to the measuring device is made of an insulating material so that the contact area of the chip product to be inspected with the electrode is at least the width of the electrode or less. The inspection terminals that are fixed on both sides of the insulating sheet are brought into contact with both electrodes of the chip product to be inspected, and a chip product inspection device that can perform four-terminal inspection is used. When the electrode contact part is pressed against the electrode of the chip product to be measured, it is equipped with a bar mechanism that presses the electrode contact part toward the electrode with a predetermined elastic force. The measurement terminals are brought into contact with both electrodes of the chip product to be inspected to measure the characteristics between the electrodes.

[0007] For example, the spring mechanism of the inspection terminal has a Japanese sandwich type shape formed laterally from the end of the standing portion extending from the electrode contact portion, and the inspection terminal pair is at least the number of consecutive chip products. It is provided with a measuring terminal supporting member arranged so as to be located at an electrode interval position of the divided chip product, and the measuring terminal supporting member supports at least the number of measuring terminals of the chip product to be inspected.

[0008]

[Action]

 With the above configuration, at least the measuring terminals for the number of stations of the product to be measured are supported by using a supporting member, etc., in line with the pitch of the product to be measured, and even if it is the product to be measured minimally, there are 4 terminals. In addition to being able to perform inspection, accurate inspection can be performed by pressing the inspection terminal to the electrode part of the product to be measured with a spring mechanism, and using the inspection terminals for multiple stations It may also be possible to perform a continuity check.

[0009]

【Example】

 Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

[0010]

[First Embodiment] FIGS. 1 and 2 show a detection terminal and a terminal of a resistance value measuring device of a miniature Pitch-tip type resistor, which is provided with the detection terminals of an embodiment according to the present invention for the number of stations of a product to be measured. It is a figure which shows the structure of a block. 1A is a plan view in which a terminal block, which will be described later, is cut out at the inspection terminal position, FIG. 1B is a side view, and FIG. 2 is a cross-sectional view taken along the line AA ′ of FIG. 1A. is there.

Hereinafter, an embodiment according to the present invention will be described in detail with reference to FIGS. 1 and 2. 1 and 2, 1 and 2 are terminal blocks made of an insulating material, each of which has at least as many measuring terminals as the number of stations of the measurement target product fixedly supported. A product pitch (electrode pitch) of the measurement target product. It is equipped with the inspection terminal locking groove that is roughly aligned with. The terminal blocks 1 and 2 are configured so that their intervals can be arbitrarily adjusted while maintaining a parallel relationship with each other by locking means (not shown), and can be adjusted according to the electrode intervals of the product. Can be easily dealt with at any interval.

Reference numeral 10 denotes a measuring terminal, and conductive members 11 and 12 made of two conductive materials are provided on both side surfaces of an insulating sheet 13 having substantially the same shape as the conductive members 11 and 12 made of an insulating material. It is fixed. Like the inspection terminal 10, the inspection terminal 20 is also configured such that the conductive members 21 and 22 are fixed to both side surfaces of the insulating sheet 23. The thickness of the inspection terminals 10 and 20 is at least less than or equal to the width of the electrode portion of the product to be measured.

Then, as shown in FIG. 1A, the inspection terminals 10 and 20 have electrode surface contact portions 14 and 24 of a product whose surface is smoothed, and the electrode portion contact portions 14 and 24, respectively. And an upper arm 16 and 26 which are formed laterally from the ends of the standing portions 15 and 25, and are slightly thinner than the upper arms 16 and 26. Bent arms 17 and 27, lower arms 18 and 28 fitted into the detection terminal locking grooves of the terminal blocks 1 and 2, and positioning protrusions when fitted into the detection terminal locking grooves of the terminal blocks 1 and 2. It is equipped with a spring mechanism of a substantially Japanese type sandwiched by 19 and 29. When either the terminal blocks 1 and 2 or the product to be measured 50 are moved and pressed against each other, the electrode contact portions 14 and 24 On the electrodes 51a and 51b of the product to be measured. It is configured to be pressed into contact with the elastic force of the mechanism and to be in a good contact state.

The inspection terminals are inserted into the inspection terminal locking grooves of the terminal blocks 1 and 2 arranged in accordance with the pitch of the product to be inspected, for example, by the number of the product stations. Then, the characteristics between the electrodes of the product to be measured, for example, the measurement terminal of the four-terminal resistance value measuring unit for measuring the resistance value between the electrodes and the conductive members 11, 12, 21, 22 of the detection terminals 10 and 20 are set. By connecting, the resistance value of the product located between the inspection terminals 10 and 20 can be measured with four terminals.

When measuring the resistance value of this product, the product 50 whose resistance value is to be measured is held by a product holding mechanism (not shown), and for example, the conductive members 11 and 12 of the measurement terminal 10 and the measurement terminal 20 are held. It suffices to bring the electrode parts contacting portions 14, 24 of the conductive members 21, 22 and both electrodes 51a, 51b of the measurement product 50 into pressure contact with each other at a predetermined pressure. As a result, the electrode portion contact portions 14, 24 are brought into close contact with each other at a predetermined pressure by the elastic force of the spring mechanisms 16-18 or 26-28, and a good electrical contact state is obtained. At this time, the inspection terminal has a structure in which the conductive members 11, 12 or 21, 22 are fixed to both side surfaces of the insulating sheet 13 or 23. Therefore, as shown in FIG. The contact state of the electrode 51 with the electrode 51 is a state in which, for example, the two conductive members 11 and 12 are in contact with each other while keeping a predetermined distance. Because of the above-mentioned state, if the conductive members 11 and 12 are connected to the four-terminal resistance value measuring section, the resistance value can be easily measured at the four terminals.

The resistance value measuring step of the chip resistor of the minimum pitch of the apparatus of the present embodiment having the above-mentioned configuration will be described below with reference to the process chart of FIG. When the resistance value of the product in the present embodiment is to be measured, first, in step 1, the test terminals are fitted into the test terminal locking grooves of the terminal blocks 1 and 2 by the number of stations of the product to be measured. .. Then, in step 2, the distance between the terminal blocks 1 and 2 (work pitch) is adjusted to be approximately the electrode distance of the product to be measured. This completes the adjustment of the resistance value measurement mechanism according to the size of the product to be measured, the number of stations, and so on. When the adjustment of the resistance value measuring mechanism is not necessary, for example, when the product pitch or the space between the electrodes of the product is not changed, the above steps 1 and 2 are unnecessary.

Now that the measurement preparation is completed, the process proceeds to the product resistance value measuring step. First, in step 3, a resistance locking mechanism (not shown) sandwiches, for example, a predetermined number of resistors to be measured, and the electrode portion of each product is just the contact position of the electrode contact portion of the detection terminal. Position, and the electrode part of the resistor and the measurement terminal are pressed against each other with a predetermined pressure. FIG. 1 shows the contact state between the resistor 50 and the inspection terminal at this time.

Then, in the subsequent step 4, the resistance value measuring process of the resistor is performed by the four-terminal resistance value measuring unit. In this case, when the resistance value to be measured is multiple stations, the measuring mechanism of the 4-terminal resistance value measuring unit is sequentially switched to measure the resistance value between the electrode contact detection terminals of each measuring resistor. .. If the four-terminal resistance value measurement unit is configured to be able to measure the resistance value for the number of stations of the measurement resistor at one time, it is possible to detect a large number of resistors at a time without switching the inspection terminals. Is possible.

In the next step 5, it is checked whether or not the inspection of all products is completed, and if the measurement of the next resistor is continued, the process returns to step 4, and the resistance value measurement process of the next resistor is performed. I do. In this way, when the measurement of the resistance value of the resistor requiring all the measurement is completed, the processing is terminated. It should be noted that each of the resistors whose resistance values are measured according to the present embodiment, both defects of the product are judged according to the measured resistance value.

As described above, according to the present embodiment, the resistance value measuring device capable of flexibly applying to all product specifications with only simple adjustment and capable of automatically measuring the resistance value of the resistor having a large number of stations. Can be provided. Further, according to the present embodiment, since the resistance value can be measured by the four terminals, there is no problem such as the decrease in reliability of the measured resistance value due to the variation of the contact resistance etc. as in the past, and the accuracy is high. It is possible to measure the resistance value of.

[0021]

[Other Examples]

 In the above description, only the measurement of the resistance value between the electrodes of one product has been described. However, by adopting the configuration of the above-mentioned embodiment, the electrodes of the resistors of a plurality of stations are brought into contact with each other at once. It is possible to measure the resistance value between the electrodes of adjacent resistors.

By thus measuring the resistance value between the electrodes of the resistors adjacent to each other, the continuity test between the two electrodes adjacent to each other or between the resistors can be performed. As a result, the quality of the product can be determined more reliably. That is, in addition to the measurement of the resistance value between the electrodes of one product in step 4 of FIG. 3 in the above-described embodiment, the resistance value between the electrodes of adjacent products may be measured together.

Accordingly, the continuity test between adjacent products can be performed together, and the occurrence of defects in the product separation process or the like in the post-treatment can be prevented. As described above, according to the present embodiment, it is possible to measure the minimum measurement target product with four terminals, and to measure the resistance value of the minimum pitch chip type resistor that can perform the measurement of the product of any shape by simple adjustment. Is possible.

In the above description, the measurement of the resistance value of the resistor is taken as an example. However, the device of this embodiment is not applicable only to the resistor, but a device for measuring characteristics between electrodes of arbitrary electronic components. Can be applied to. For example, it can be applied as it is to a device for measuring the inter-electrode characteristics of any electronic component, such as measuring the capacitance of a capacitor chip, measuring the reactance amount of a reactance element chip, measuring the complex impedance, etc. Of course.

Furthermore, it is needless to say that the present invention is not limited to the inspection of a very small chip and can be applied to the measurement of the characteristics of a product having an arbitrary shape.

[0026]

【The invention's effect】

 As described above, according to the present invention, it is possible to inspect a product to be measured with a minimum value with four terminals.

[Brief description of drawings]

FIG. 1 is a diagram showing a measuring terminal of a first embodiment according to the present invention, (A) is a plan view and (B) is a side view.

FIG. 2 is a sectional view taken along the line AA ′ shown in FIG.

FIG. 3 is a diagram showing a resistance value measuring process using the inspection terminal of the present embodiment.

[Fig. 4]

FIG. 5 is a diagram illustrating a conventional method for measuring a resistance value of an extremely small pitch product.

[Explanation of symbols]

1,2 terminal block 11,12,21,22 Conductive member 13,23 Insulation sheet 10 Miniature Pitch-type resistor 51a, 51b Product electrode 52a, 52b Contact probe 55a, 55b Modified pin set 60 Resistance value measurement unit

Claims (3)

[Scope of utility model registration request] 1. A conductive member made of two conductive materials that can be connected to a measuring device is used as an insulating material so that a contact portion of the chip product to be measured with the electrode has a width at least equal to or less than the width of the electrode. A chip product inspection device capable of four-terminal inspection by contacting both electrodes of the chip product to be inspected with the inspection terminals fixed on both sides of the insulating sheet composed of , A spring mechanism formed so that the electrode contact portion is pressed toward the electrode by a predetermined elastic force when the electrode contact portion is pressed against the electrode of the chip product to be inspected. A chip product inspection device, characterized in that a pair of measuring terminals is brought into contact with both electrodes of the chip product to be inspected to measure characteristics between the electrodes. 2. The chip product according to claim 1, wherein the spring mechanism of the inspection terminal has a Japanese sandwich shape formed laterally from the end of the standing portion extending from the electrode contact portion. Inspection device. 3. A sensing terminal supporting member is provided, wherein the sensing terminal pair is arranged at least at an electrode interval position of the chip product by the number of consecutive chip products, and the sensing terminal supporting member is provided with the sensing terminal. 2. The chip product inspection device according to claim 1, wherein at least the same number of chips as the inspection target chip products are supported.