JPH05288569A - Magnetic encoder - Google Patents

Magnetic encoder

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Publication number
JPH05288569A
JPH05288569A JP9055392A JP9055392A JPH05288569A JP H05288569 A JPH05288569 A JP H05288569A JP 9055392 A JP9055392 A JP 9055392A JP 9055392 A JP9055392 A JP 9055392A JP H05288569 A JPH05288569 A JP H05288569A
Authority
JP
Japan
Prior art keywords
magnetic
recording medium
effect element
magnetic recording
equation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9055392A
Other languages
Japanese (ja)
Inventor
Kazuhiko Soeda
一彦 副田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9055392A priority Critical patent/JPH05288569A/en
Publication of JPH05288569A publication Critical patent/JPH05288569A/en
Pending legal-status Critical Current

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  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To provide a magnetic encoder whose mechanism is simple and characteristics can be stabilized easily/highly accurately and which is suitable for mass-productivity at low cost. CONSTITUTION:A magnetic encoder is composed of a magnetic recording medium 1 and magnetic resistance effect elements 2 arranged oppositely on the magnetic recording medium 1. A magnetic resistance element 2 is divided into two or more parts, and patterns of the respective magnetic resistance effect elements 2 are approximately in parallel with the magnetic recording medium 1, and the respective magnetic resistance effect elements 2 are also approximately in parallel with each other, and are arranged at an interval (d) expressed by a formula.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は磁気記録媒体へ記録され
た磁気信号を磁気抵抗効果素子(以下、MR効果素子と
いう)によって読み取ることにより位置検出等を行う磁
気エンコーダに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic encoder for detecting a position by reading a magnetic signal recorded on a magnetic recording medium by a magnetoresistive effect element (hereinafter referred to as MR effect element).

【0002】[0002]

【従来の技術】近年、回転・位置・変位・移動量・角度
等の機械的量を、ディジタル量に変換するアナログ−デ
ィジタル(AD)変換器の一つであるエンコーダは、工
作機械の速度制御、切削工具の位置決め、ロボットアー
ムの行動制御、及びフロッピィディスクドライブやプリ
ンタ、複写機等のサーボモータと組み合わせた高度な位
置決め等を要する機構部に使用されてきている。
2. Description of the Related Art In recent years, an encoder, which is one of analog-digital (AD) converters for converting mechanical quantities such as rotation, position, displacement, movement, and angle into digital quantities, is a speed control for machine tools. , The positioning of cutting tools, the behavior control of robot arms, and the mechanical parts that require advanced positioning in combination with servo motors such as floppy disk drives, printers, and copiers.

【0003】このエンコーダには、機械的量の検出方式
により光学式と磁気式があり、周波数応答性、耐環境性
に優れる磁気式(磁気エンコーダ)は、その優位性によ
り徐々にその市場を確立しつつある。
This encoder is classified into an optical type and a magnetic type depending on a mechanical quantity detection method, and a magnetic type (magnetic encoder) excellent in frequency response and environment resistance gradually establishes its market due to its superiority. I am doing it.

【0004】以下に従来の磁気エンコーダについて説明
する。図3は従来の磁気エンコーダの模式図である。
A conventional magnetic encoder will be described below. FIG. 3 is a schematic diagram of a conventional magnetic encoder.

【0005】3は位置読み取り精度に応じて移動方向に
漏洩磁界が発生するように多極着磁された磁気記録媒
体、4は磁気記録媒体3からある距離(以下、ギャップ
という)離れた位置にパターンの幅方向が磁気記録媒体
3の表面と平行になるように配置されたMR効果素子で
あり、矢印は磁化方向を示す。MR効果素子4のパター
ンはガラス等の基板上に強磁性MR効果薄膜を蒸着し、
幅数〜数十μm、長さ数mmにエッチングして作製され
る。
Reference numeral 3 denotes a magnetic recording medium which is multipolarly magnetized so that a leakage magnetic field is generated in the moving direction according to the position reading accuracy, and 4 is a position which is apart from the magnetic recording medium 3 by a certain distance (hereinafter referred to as a gap). The MR effect element is arranged such that the width direction of the pattern is parallel to the surface of the magnetic recording medium 3, and the arrow indicates the magnetization direction. The pattern of the MR effect element 4 is obtained by depositing a ferromagnetic MR effect thin film on a substrate such as glass,
It is produced by etching to a width of several to several tens of μm and a length of several mm.

【0006】以上のように構成された従来の磁気エンコ
ーダの位置検出は、磁気記録媒体3の位置変動をMR効
果素子4の抵抗変化として検出することにより行ってい
る。
The position detection of the conventional magnetic encoder configured as described above is performed by detecting the position fluctuation of the magnetic recording medium 3 as the resistance change of the MR effect element 4.

【0007】[0007]

【発明が解決しようとする課題】しかしながら上記従来
の構成では、MR効果素子の抵抗変化特性が、磁気記録
媒体とMR効果素子間のギャップに大きく依存するた
め、その調整に高度の技術を要し、使用し難いという問
題点があった。またギャップの調整等の機構が複雑で、
かつ特性の安定化を図ることが極めて難しいという問題
点があった。
However, in the above-mentioned conventional structure, the resistance change characteristic of the MR effect element largely depends on the gap between the magnetic recording medium and the MR effect element, and therefore a high level of technique is required for its adjustment. There was a problem that it was difficult to use. Also, the mechanism for adjusting the gap is complicated,
In addition, it is extremely difficult to stabilize the characteristics.

【0008】一方、この問題点を克服するため、MR効
果素子によって構成された検出部を従来の非接触型から
接触型とすることにより、組立時のギャップ無調整化を
実現した接触式磁気エンコーダが一部開発されている
が、MR効果素子の機械的保護のため、磁気記録媒体と
の接触部表面に焼結アルミナ膜等の保護層を接着するこ
とが不可欠であり、この接着剤の量の制御が極めて難し
いため生産性が悪く、また接着層の厚みのバラツキによ
り特性が変動するため、特性の安定化を図ることが困難
で、かつ精度が劣るという問題点を有していた。
On the other hand, in order to overcome this problem, the contact type magnetic encoder which realizes no adjustment of the gap at the time of assembly by changing the conventional non-contact type to the contact type of the detecting portion constituted by the MR effect element. Has been partially developed, it is indispensable to adhere a protective layer such as a sintered alumina film to the surface of the contact portion with the magnetic recording medium for mechanical protection of the MR effect element. Since it is extremely difficult to control, the productivity is poor, and the characteristics fluctuate due to variations in the thickness of the adhesive layer, so that it is difficult to stabilize the characteristics and the accuracy is poor.

【0009】本発明は上記従来の問題点を解決するもの
で、機構が簡単で、かつ高精度で特性の安定化を容易に
図ることができ低原価で量産性に適した磁気エンコーダ
を提供することを目的としている。
The present invention solves the above-mentioned conventional problems, and provides a magnetic encoder having a simple mechanism, capable of easily stabilizing the characteristics with high accuracy, at low cost, and suitable for mass production. The purpose is to

【0010】[0010]

【課題を解決するための手段】この目的を達成するため
に本発明の磁気エンコーダは、磁気記録媒体と、前記磁
気記録媒体に対向して配置された磁気抵抗効果素子とか
らなる磁気エンコーダであって、前記磁気抵抗効果素子
が2以上からなり、各磁気抵抗効果素子のパターンが磁
気記録媒体と略平行で、かつ、各磁気抵抗効果型素子が
互いに略平行で、更に(数1)で示される間隔dで配置
されてなる構成を有している。
In order to achieve this object, a magnetic encoder according to the present invention is a magnetic encoder comprising a magnetic recording medium and a magnetoresistive effect element arranged so as to face the magnetic recording medium. In addition, the magnetoresistive effect element is composed of two or more, the pattern of each magnetoresistive effect element is substantially parallel to the magnetic recording medium, and each magnetoresistive effect element is substantially parallel to each other. It has a configuration in which it is arranged at an interval d.

【0011】[0011]

【作用】この構成によって、磁気記録媒体からMR効果
素子の受ける磁界強度に対し、MR効果素子の安定化を
実現し得る最適位置に配列させることができるので、ギ
ャップ変動に対して、抵抗変化特性を安定化できる。そ
の結果、高精度でかつ位置検出機能の安定化を図ること
ができる。
With this structure, it is possible to arrange the MR effect element at an optimum position for stabilizing the MR effect element with respect to the magnetic field strength received from the magnetic recording medium. Can be stabilized. As a result, the position detection function can be stabilized with high accuracy.

【0012】[0012]

【実施例】以下本発明の一実施例について、図面を参照
しながら説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

【0013】図1は本発明の一実施例である磁気エンコ
ーダの模式図である。1は磁気記録媒体であり、2は2
つに分割され配置間隔dで互いに略平行でかつそのパタ
ーンが磁気記録媒体1と平行で磁気記録媒体1との距離
(ギャップ)Dで配置されたMR効果素子である。尚、
MR効果素子2は別異に2個準備して配設してもよい。
FIG. 1 is a schematic view of a magnetic encoder which is an embodiment of the present invention. 1 is a magnetic recording medium, 2 is 2
It is an MR effect element which is divided into two parts and is arranged substantially parallel to each other at an arrangement distance d, and the pattern thereof is parallel to the magnetic recording medium 1 and arranged at a distance (gap) D from the magnetic recording medium 1. still,
Two different MR effect elements 2 may be prepared and arranged.

【0014】本実施例では(表1)(表2)に示される
特性を有する磁気記録媒体1及びMR効果素子2を準備
した。
In this embodiment, a magnetic recording medium 1 and an MR effect element 2 having the characteristics shown in (Table 1) and (Table 2) were prepared.

【0015】[0015]

【表1】 [Table 1]

【0016】[0016]

【表2】 [Table 2]

【0017】尚、このMR効果素子2には、焼結アルミ
ナ薄板よりなる保護層が貼り付けられ、この保護層を介
して磁気記録媒体1と接触摺動する。このMR効果素子
は2つに分割され、互いに、以下に説明する(数1)で
与えられる間隔、本実施例の場合d≒20μm(保護層
の平均厚における最適値)で配置されている。
A protective layer made of a sintered alumina thin plate is attached to the MR effect element 2 and slides in contact with the magnetic recording medium 1 through the protective layer. This MR effect element is divided into two, and they are arranged at an interval given by (Equation 1) described below, d≈20 μm (optimum value in the average thickness of the protective layer) in this embodiment.

【0018】尚、本実施例では磁気記録媒体1からMR
効果素子2の受ける磁界強度に対し、MR効果素子2の
配置の最適化を次式により設定した。
In this embodiment, the magnetic recording medium 1 to MR
The optimization of the arrangement of the MR effect element 2 with respect to the magnetic field strength received by the effect element 2 is set by the following equation.

【0019】MR効果素子2の抵抗変化特性(MR特
性)は、(数2)及び(数3)に示す近似式で表現でき
る。
The resistance change characteristic (MR characteristic) of the MR effect element 2 can be expressed by the approximate expressions shown in (Equation 2) and (Equation 3).

【0020】[0020]

【数2】 [Equation 2]

【0021】[0021]

【数3】 [Equation 3]

【0022】ここで、ρ/ρmax;抵抗変化率 H ;MR効果素子の受ける磁界強度 Hs;MR特性のスプリット Hk;MR特性のひろがりを表す係数 x ;移動方向距離 又、等間隔で多極着磁された磁気記録媒体1からMR効
果素子2の受ける磁界強度Hは、(数4)の余弦波(又
は正弦波)で近似できる。
Here, ρ / ρmax; resistance change rate H; magnetic field strength Hs received by MR effect element; split Hk of MR characteristic; coefficient x showing spread of MR characteristic; moving direction distance; and multipole attachment at equal intervals. The magnetic field strength H that the MR effect element 2 receives from the magnetized magnetic recording medium 1 can be approximated by the cosine wave (or sine wave) of (Equation 4).

【0023】[0023]

【数4】 [Equation 4]

【0024】ここで、Hm;最大磁界強度 λ ;磁極間距離(x方向) z ;ギャップ方向距離 従って、磁気記録媒体1が、x方向へ移動したときのM
R効果素子2の抵抗変化特性は、(数4)を(数2)及
び(数3)へ代入することにより求められ、xについて
λ/4周期の関数となることが分かる。又、この抵抗変
化特性をzで偏微分することにより、ギャップ依存性を
求めることができ、zに対し単調減少特性であることが
分かった。
Here, Hm; maximum magnetic field strength λ; distance between magnetic poles (x direction) z; gap direction distance Therefore, M when the magnetic recording medium 1 moves in the x direction
It can be seen that the resistance change characteristic of the R effect element 2 is obtained by substituting (Equation 4) into (Equation 2) and (Equation 3), and is a function of λ / 4 period for x. Further, by partially differentiating this resistance change characteristic with z, the gap dependency can be obtained, and it was found that the characteristic is a monotonically decreasing characteristic with respect to z.

【0025】次に、磁気記録媒体1に対向して、2つの
MR効果素子2を間隔(d)で配置させた時のMR抵抗
変化特性は、(数2)乃至(数4)を用いて、(数5)
で求められることが分かる。
Next, the MR resistance change characteristics when the two MR effect elements 2 are arranged at the interval (d) so as to face the magnetic recording medium 1 are given by using (Equation 2) to (Equation 4). , (Equation 5)
You can see that is required.

【0026】[0026]

【数5】 [Equation 5]

【0027】従って、変化率が最大となる位置(x=
0)における特性は、(数5)で、x=0を代入して、
(数6)で表される。
Therefore, the position (x =
The characteristic in (0) is (Equation 5), substituting x = 0,
It is represented by (Equation 6).

【0028】[0028]

【数6】 [Equation 6]

【0029】次に、本実施例の磁気エンコーダを用い、
最大抵抗変化量のギャップ依存性を確認した。その結果
を図2に示す。図2は本実施例の磁気エンコーダの抵抗
変化特性のギャップ依存性を表した図である。
Next, using the magnetic encoder of this embodiment,
The gap dependence of the maximum resistance change was confirmed. The result is shown in FIG. FIG. 2 is a diagram showing the gap dependence of the resistance change characteristic of the magnetic encoder of this embodiment.

【0030】この図からわかるようにZ方向に対し最大
値が認められ、これは、(数6)からも明らかなよう
に、抵抗変化特性は、z方向に対し、(数7)で与えら
れる位置Dで、極値をもつことと一致することが分かっ
た。
As can be seen from this figure, the maximum value is recognized in the Z direction, and as is clear from (Equation 6), the resistance change characteristic is given by (Equation 7) in the z direction. At position D, it was found to be consistent with having an extremum.

【0031】[0031]

【数7】 [Equation 7]

【0032】この図2から明らかなように保護層の厚さ
のバラツキ(45〜55μm)の範囲内で特性の変動が
軽減されていることがわかる。この(数7)をdについ
て整理すると(数8)が得られる。
As is apparent from FIG. 2, it is understood that the variation of the characteristics is reduced within the range of the thickness variation (45 to 55 μm) of the protective layer. By rearranging this (Equation 7) for d, (Equation 8) is obtained.

【0033】[0033]

【数8】 [Equation 8]

【0034】尚、従来品について、最大抵抗変化量のギ
ャップ依存性を確認した。図4は従来の磁気エンコーダ
の抵抗変化特性のギャップ依存性を表した図である。
For the conventional product, the gap dependency of the maximum resistance change amount was confirmed. FIG. 4 is a diagram showing the gap dependence of the resistance change characteristic of the conventional magnetic encoder.

【0035】図4から明らかなように従来の磁気エンコ
ーダではZ方向に対して最大値が認められなかった。
As is apparent from FIG. 4, in the conventional magnetic encoder, the maximum value was not recognized in the Z direction.

【0036】以上のように本実施例では、MR効果素子
2を2つに分割し、磁気記録媒体1に対し同一ギャップ
位置に、互いに平行に配列させた構成とすることによ
り、上記ギャップ依存性を変化させ安定化を実現し得る
特性に制御するものである。
As described above, in this embodiment, the MR effect element 2 is divided into two, and the MR effect element 2 is arranged in parallel with each other at the same gap position with respect to the magnetic recording medium 1, whereby the above-mentioned gap dependence is obtained. Is controlled so that stabilization can be realized.

【0037】[0037]

【発明の効果】以上のように本発明は、磁気抵抗効果素
子を2つに分け各々を所定間隔dで平行に配置すること
により容易に特性の安定化、高精度化を図ることができ
るとともに構成を簡素化することができ低原価で量産性
に優れた磁気エンコーダを実現できるものである。
As described above, according to the present invention, by dividing the magnetoresistive effect element into two and arranging them in parallel at a predetermined interval d, it is possible to easily stabilize the characteristics and improve the accuracy. It is possible to realize a magnetic encoder with a simple structure, low cost and excellent mass productivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例における磁気エンコーダの模
式図
FIG. 1 is a schematic diagram of a magnetic encoder according to an embodiment of the present invention.

【図2】本実施例の磁気エンコーダの抵抗変化特性のギ
ャップ依存性を示す図
FIG. 2 is a diagram showing gap dependence of resistance change characteristics of the magnetic encoder of the present embodiment.

【図3】従来の磁気エンコーダの模式図FIG. 3 is a schematic diagram of a conventional magnetic encoder.

【図4】従来の磁気エンコーダの抵抗変化特性のギャッ
プ依存性を示す図
FIG. 4 is a diagram showing gap dependence of resistance change characteristics of a conventional magnetic encoder.

【符号の説明】[Explanation of symbols]

1 磁気記録媒体 2 磁気抵抗効果素子 3 磁気記録媒体 4 磁気抵抗効果素子 1 magnetic recording medium 2 magnetoresistive effect element 3 magnetic recording medium 4 magnetoresistive effect element

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】磁気記録媒体と、前記磁気記録媒体に対向
して配置された磁気抵抗効果素子とからなる磁気エンコ
ーダであって、前記磁気抵抗効果素子が2以上からな
り、かつ、各磁気抵抗効果型素子が互いに略平行で、か
つ 【数1】 で示される間隔dで配置されていることを特徴とする磁
気エンコーダ。
1. A magnetic encoder comprising a magnetic recording medium and a magnetoresistive effect element arranged to face the magnetic recording medium, wherein the magnetoresistive effect element comprises two or more magnetoresistive elements. The effect elements are substantially parallel to each other, and A magnetic encoder characterized in that the magnetic encoders are arranged at an interval d shown by.
JP9055392A 1992-04-10 1992-04-10 Magnetic encoder Pending JPH05288569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9055392A JPH05288569A (en) 1992-04-10 1992-04-10 Magnetic encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9055392A JPH05288569A (en) 1992-04-10 1992-04-10 Magnetic encoder

Publications (1)

Publication Number Publication Date
JPH05288569A true JPH05288569A (en) 1993-11-02

Family

ID=14001605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9055392A Pending JPH05288569A (en) 1992-04-10 1992-04-10 Magnetic encoder

Country Status (1)

Country Link
JP (1) JPH05288569A (en)

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