JPH02226512A - Floating magnetic head device - Google Patents

Floating magnetic head device

Info

Publication number
JPH02226512A
JPH02226512A JP4752789A JP4752789A JPH02226512A JP H02226512 A JPH02226512 A JP H02226512A JP 4752789 A JP4752789 A JP 4752789A JP 4752789 A JP4752789 A JP 4752789A JP H02226512 A JPH02226512 A JP H02226512A
Authority
JP
Japan
Prior art keywords
recording medium
slider
floating
magnetic
magnetic recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4752789A
Other languages
Japanese (ja)
Inventor
Tsukasa Matsuura
司 松浦
Shinsuke Yura
信介 由良
Munehito Kumagai
宗人 熊谷
Mitsuo Inumochi
犬持 光男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4752789A priority Critical patent/JPH02226512A/en
Publication of JPH02226512A publication Critical patent/JPH02226512A/en
Pending legal-status Critical Current

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  • Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)

Abstract

PURPOSE:To perform recording with high density by forming a floating head slider at the end part of a suspension confronted with a magnetic recording medium by a film forming process. CONSTITUTION:The floating head slider 2 is directly formed on the end part of the suspension 5 confronted with the magnetic recording medium 1 with alumina sputtering. At this time, since alumina is a grain of atom or molecule, and forms the layer of the floating head slider 2 by attaching and accumulating on the suspension 5 that is a substrate, the slider 2 can be manufactured in arbitrary shape by using a mask. The thickness of the slider can be controlled by sputtering time, and a layer with high thickness and size accuracy can be formed. In the slider 2, the plane of it confronted with the magnetic recording medium 1 is formed in such a way that a layer with size of 0.8mmX1.0mm is arranged in two rail shape. A magnetic head 3 is formed between two sliders 2, therefore, since the thickness of the slider 2 can be decided by that of the magnetic head 3, it is desirable to use a thin film type head whose thickness can be manufactured thinly.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、磁気ディスク装置の浮動磁気ヘッド装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a floating magnetic head device for a magnetic disk device.

〔従来の技術〕[Conventional technology]

第6図及び第7図は例えば特公昭58−21329号公
報等に示される従来の浮動磁気ヘッド装置を示す。第6
図はバルク型浮動磁気ヘッド装置の側面図、第7図は薄
膜型浮動磁気ヘッド装置の側面図である。第6図及び@
7図において、(1)は磁気記録媒体、(2)は磁気記
録媒体表面上に浮上する浮動ヘッドスライダで、第6図
の場合はフェライト等の磁性材料のブロックを、第7図
の具合はA I 20sTiC等のセラミック材を機械
加工して作成スル。
FIGS. 6 and 7 show a conventional floating magnetic head device disclosed in, for example, Japanese Patent Publication No. 58-21329. 6th
The figure is a side view of a bulk type floating magnetic head device, and FIG. 7 is a side view of a thin film type floating magnetic head device. Figure 6 and @
In Figure 7, (1) is a magnetic recording medium, and (2) is a floating head slider that floats above the surface of the magnetic recording medium. Created by machining ceramic materials such as AI 20sTiC.

(3)は浮動ヘッドスライダ(2)の端面に設けられ、
磁気記録媒体(1)に対向する側にSin、や空隙から
成るヘッドギャップ(4)を接つ磁気ヘッド、(5)は
磁気記録媒体(1)lこ近接する端部に浮動ヘッドスラ
イダ+21と磁気ヘッド(3)を持ち、他端をアーム(
6)に接続されたサスペンションである。
(3) is provided on the end face of the floating head slider (2),
A magnetic head (5) is connected with a head gap (4) consisting of a sinusoid or an air gap on the side facing the magnetic recording medium (1), and a floating head slider +21 is attached to the end adjacent to the magnetic recording medium (1). Hold the magnetic head (3) and attach the other end to the arm (
6) is the suspension connected to.

次に動作について説明する。Next, the operation will be explained.

磁気記録媒体(1)が矢印方向(a)に一定速度で回転
すると、初め浮動ヘッドスライダ(2)は上記磁気記録
媒体(13表面に接触して滑り、その時の機械的衝撃か
ら磁気ヘッド(3)を保護する。次に、上記浮動ヘッド
スライダ(2)は空気流(b)による押し上げ力を受け
て、上記押し上げ力とサスペンション(5)による押し
下げ力との釣り合いにより、磁気記録媒体(1)から一
定距離りを保って上記磁気記録媒体+1)表面上に浮上
する。この時磁気ヘッド(3)のヘッドギャップ(4)
先端に漏れ磁束を発生させて上記磁気記録媒体(1)を
磁化して記録し、また、逆に磁化した磁気記録媒体(1
)の漏れ磁束を上記ヘッドギャップ(4)先端で受けて
再生を行う。
When the magnetic recording medium (1) rotates at a constant speed in the direction of the arrow (a), the floating head slider (2) first contacts and slides on the surface of the magnetic recording medium (13), and the mechanical impact at that time causes the magnetic head (3) to slide. ).Next, the floating head slider (2) receives a pushing force from the airflow (b), and due to the balance between the pushing force and the pushing force from the suspension (5), the floating head slider (2) protects the magnetic recording medium (1). It floats above the surface of the magnetic recording medium +1) while maintaining a certain distance from the magnetic recording medium. At this time, the head gap (4) of the magnetic head (3)
A leakage magnetic flux is generated at the tip to magnetize and record on the magnetic recording medium (1), and conversely the magnetic recording medium (1) is magnetized.
) is received at the tip of the head gap (4) to perform reproduction.

以上の動作を終了すると、上記磁気記録媒体(1)の回
転が弱まり、上記浮動ヘッドスライダ(2)は上記磁気
記録媒f+t1)表面に接触して滑り、その時の機械的
衝撃から磁気ヘッド(3)を保護する。
When the above operations are completed, the rotation of the magnetic recording medium (1) weakens, and the floating head slider (2) comes into contact with the surface of the magnetic recording medium (f+t1) and slides, and due to the mechanical impact at that time, the magnetic head (3) ) to protect.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

磁気ディスク装置において、記録密度をより高めるため
には、ヘッドギャップ(4)と磁気記録媒体(1)の距
離りをできるだけ小さ(して、上記ヘッドギャップ(4
)先端の漏れ磁束密度の高い部分で上記磁気記録媒体(
1)への記録を行うことが必要である。
In a magnetic disk device, in order to further increase the recording density, the distance between the head gap (4) and the magnetic recording medium (1) is made as small as possible (the distance between the head gap (4)
) The above magnetic recording medium (
1) It is necessary to record.

しかし、従来の浮動磁気ヘッド装置は以上のように構成
されているので、浮動ヘッドスライダ(2)をフェライ
トやA110* T+ C等のブロックを機械加工して
形成しなければならず、上記浮動ヘッドスライダ(2)
の上記磁気記録媒体+11に対向する面の加工精度は限
界に達しており、現在の磁気ディスク装置における0、
27imPi!度の距1hの大きさを、さらに小さくす
ることは不可能であるという問題点があった。
However, since the conventional floating magnetic head device is configured as described above, the floating head slider (2) must be formed by machining a block of ferrite, A110*T+C, etc. Slider (2)
The processing accuracy of the surface facing the above-mentioned magnetic recording medium +11 has reached its limit;
27imPi! There was a problem in that it was impossible to further reduce the size of the degree distance 1h.

また、磁気記録媒体(1)の記録又は再生すべき位置に
磁気ヘッド(3)を移動させ位置決めするのに要するア
クセス時間を短(するためには、浮動ヘッドスライダ(
2)をより小さ(して軽(することが必要である。しか
し、従来の浮動ヘッドスライダ(2)は、フェライト等
のブロックから機械的に切断したものをサスペンション
(5)に取り付けなければならず、現在の浮動ヘッドス
ライダ(2)の大きさ4朋X 3111 X O,85
龍(厚さ)程度を大幅に小さ(することは、機械加工の
難度が非常に高(なり、実用上不可能であるという問題
点があった。
In addition, in order to shorten the access time required to move and position the magnetic head (3) to the position where recording or reproduction is to be performed on the magnetic recording medium (1), a floating head slider (
2) to be smaller and lighter. However, the conventional floating head slider (2) must be mechanically cut from a block of ferrite or the like and attached to the suspension (5). The size of the current floating head slider (2) is 4 mm x 3111 x 0,85
There was a problem in that significantly reducing the thickness would require extremely difficult machining and would be practically impossible.

この発明は上記のような課題を解決するためになされた
もので、浮動ヘッドスライダ(2)を大幅に小さくする
とともに、上記浮動ヘッドスライダ(2)の磁気記録媒
体+1)に対向する曲の寸法精度を高(した浮動磁気ヘ
ッド装置を得ることを目的とする。
This invention was made to solve the above-mentioned problems, and it significantly reduces the size of the floating head slider (2) and reduces the size of the song facing the magnetic recording medium + 1) of the floating head slider (2). The purpose is to obtain a floating magnetic head device with high accuracy.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係る浮動磁気ヘッド装置は、磁気記録媒体に
対向する端部に記録再生を行うための磁気ヘッドを有し
、上記磁気ヘッドを上記磁気記録媒体の方向に付勢する
サスペンションと、上記サスペンションの上記端部に膜
形成プロセスにヨリ形成され、上記磁気ヘッドを機械的
衝撃から保護する浮動ヘッドスライダとを有するもので
ある。
A floating magnetic head device according to the present invention has a magnetic head for recording and reproducing at an end facing a magnetic recording medium, a suspension for biasing the magnetic head in the direction of the magnetic recording medium, and a suspension for biasing the magnetic head toward the magnetic recording medium; A floating head slider is formed at the end of the magnetic head during a film forming process to protect the magnetic head from mechanical impact.

ここで、膜形成プロセスで形成される浮動ヘッドスライ
ダの材料は、アルミナ及び八l、o、、Tic。
Here, the materials of the floating head slider formed in the film forming process are alumina and 8Tic.

A 120.、 T’i02等アルミナの化合物、カー
ボンやダイヤモンド状カーボン等カーボン材料、Si及
び5iC1Si02、Si、、N、等シリコンの化合物
等しゅう動性のある無機材料及びテフロン等の弗素化合
物やボリイ主ド等しゅう動性のある有機材料が用いられ
る。
A 120. , alumina compounds such as T'i02, carbon materials such as carbon and diamond-like carbon, inorganic materials with sliding properties such as silicon compounds such as Si and 5iC1Si02, Si, N, and fluorine compounds such as Teflon, and polycarbonate, etc. An organic material with sliding properties is used.

またここで用いられ名膜形成プロセスとして、スパッタ
リング、真空蒸着、CVI)(Chemica I V
apourDeposition)法、ICB (to
n C1uster Beam )法、PVD(Phy
sical Vapour Deposition  
)法等の気相プロセスやスピンコード法、スクリーン印
刷法等のコーティングプロセスが用いられる。
Also, the famous film forming processes used here include sputtering, vacuum evaporation, CVI) (Chemica I V
apourDeposition) method, ICB (to
n C1uster Beam) method, PVD (Physical
sical Vapor Deposition
), a coating process such as a spin code method, a screen printing method, etc. is used.

〔作用〕[Effect]

この発明における浮動磁気ヘッド装置は、浮動ヘッドス
ライダの磁気記録媒体に対向する面の寸法精度を高くし
、また上記浮動ヘッドスライダを大幅に小さくして軽く
し、磁気ディスク装置における上記浮動ヘッドスライダ
の上記磁気記録媒体表面上の浮上距離を小さ(するとと
もに、磁気ヘッドの移動速度を早くする。
The floating magnetic head device of the present invention improves the dimensional accuracy of the surface of the floating head slider facing the magnetic recording medium, and also makes the floating head slider significantly smaller and lighter. To reduce the flying distance above the surface of the magnetic recording medium and to increase the moving speed of the magnetic head.

〔実施例〕〔Example〕

以下、この発明の一実施例を図について説明する。第1
図はこの発明による浮動磁気ヘッド装置を示す側面図、
第2図はこの発明による浮動磁気ヘッド装置の磁気記録
媒体側から見た平面図である。
An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a side view showing a floating magnetic head device according to the present invention.
FIG. 2 is a plan view of the floating magnetic head device according to the present invention, viewed from the magnetic recording medium side.

第1図及び第2図において、(2)はサスペンション(
5)の磁気記録媒体(1)に対向する端部にスパッタリ
ングで形成されたアルミナから成る一対の浮動ヘッドス
ライダで磁気記録媒体(1)の回転方向に延びた長方形
に形成されている。(3)は上記サスペンジョン(5)
の上記端部の上記浮動ヘッドスライダのない場所に形成
された磁気ヘッドである。他の構成部分は第6図及び第
7図の従来装置と同じである。
In Figures 1 and 2, (2) is the suspension (
5) A pair of floating head sliders made of alumina formed by sputtering are formed at the ends facing the magnetic recording medium (1) into a rectangular shape extending in the rotational direction of the magnetic recording medium (1). (3) is the suspension (5) above.
A magnetic head is formed at the end of the magnetic head at a location where the floating head slider is not present. The other components are the same as the conventional apparatus shown in FIGS. 6 and 7.

次に浮動ヘッドスライダ(2)の形成について説明する
Next, the formation of the floating head slider (2) will be explained.

浮動ヘッドスライダ(2)はサスペンション(5)の磁
気記録媒体(1)に対向する端部にアルミナのスパッタ
リングで直接形成される。この時、アルミナは原子或い
は分子の粒子となって基板であるサスペンション(5目
ζ付着し堆積して浮動ヘッドスライダ(2)の層を形成
するので、任意の非常に小さな部分にマスク等を用いて
任意の形状に浮動ヘッドスライダ(2)を作ることがで
きる。また、その厚みはスパッタリングの時間によって
制御でき、非常に厚みの寸法精度に優れた層が簡単に形
成される。ここで得られた浮動ヘッドスライダ(2)は
、磁気記録媒体(1)に対向する面がQ、 3111 
X l、 Q fflの大きさの層が2本のレール状に
並んだものである。
The floating head slider (2) is formed directly on the end of the suspension (5) facing the magnetic recording medium (1) by sputtering alumina. At this time, alumina becomes atomic or molecular particles and adheres to the suspension (5) which is the substrate and is deposited to form the layer of the floating head slider (2), so use a mask etc. to cover any very small part. The floating head slider (2) can be made into any shape by using the method.Furthermore, its thickness can be controlled by the sputtering time, and a layer with extremely high dimensional accuracy can be easily formed. The surface of the floating head slider (2) facing the magnetic recording medium (1) is Q, 3111
Layers with sizes X l and Q ffl are arranged in the shape of two rails.

磁気ヘッド(3)は2本の浮動ヘッドスライダ(2)の
間に形成される。従って、上記浮動ヘッドスライダ(2
)の厚みは上記磁気ヘッド(3)の厚みによって決まる
ので、上記磁気ヘッド(3)は、厚みを薄く作れる薄膜
型ヘッドを用いることが好ましい。また磁気ヘッド(3
)の位置は、浮動ヘッドスライダ(2)が形成すれたサ
スペンション(51の磁気記録媒体(1)に対向する面
上であれば特に制限はな(、例えば、第3図に示すよう
に浮動ヘッドスライダ(2)中に形成してもよい。
A magnetic head (3) is formed between two floating head sliders (2). Therefore, the floating head slider (2
) is determined by the thickness of the magnetic head (3), so it is preferable that the magnetic head (3) be a thin film head that can be made thin. Also, the magnetic head (3
) is not particularly limited as long as it is on the surface facing the magnetic recording medium (1) of the suspension (51) on which the floating head slider (2) is formed (for example, as shown in FIG. It may also be formed in the slider (2).

また、この発明は負圧形浮動ヘッドスライダ(2)に用
いてもよい。第4図は磁気記録媒体(1)側から見たそ
の実施例の平面図、第5図は第4図のV−V線に沿った
断面図である。第4図及び第5図にわいて、(7)は負
圧を発生させる空洞部で、浮動ヘッドスライダ(2)に
設けられている。M1気記録媒体(図示せず)が回転し
て、浮動ヘッドスライダ(2)と上記磁気記録媒体との
細隙に流れ込んだ空気が上記空洞部(7)にくると、上
記空気が急激に等温膨張してサスペンション(5)を押
し上げる方向に負圧が発生する。この負圧の大きさは、
上記浮動ヘッドスライダ(2)と上記磁気記録媒体との
細隙の大きさの逆数に依存するので、磁気ヘッド(3)
の先端と上記上気記録媒体の間の距1hを一定に保つよ
うに自動的に調節するように働く。
Further, the present invention may be used in a negative pressure type floating head slider (2). FIG. 4 is a plan view of the embodiment seen from the magnetic recording medium (1) side, and FIG. 5 is a sectional view taken along line V-V in FIG. 4. In FIGS. 4 and 5, (7) is a cavity for generating negative pressure, which is provided in the floating head slider (2). When the M1 magnetic recording medium (not shown) rotates and the air that has flowed into the gap between the floating head slider (2) and the magnetic recording medium reaches the cavity (7), the air suddenly becomes isothermal. Negative pressure is generated in the direction of expansion and pushing up the suspension (5). The magnitude of this negative pressure is
Since it depends on the reciprocal of the size of the gap between the floating head slider (2) and the magnetic recording medium, the magnetic head (3)
The distance 1h between the tip of the recording medium and the upper air recording medium is automatically adjusted to be kept constant.

なお、サスペンション(5)の形には特に限定はなく、
所謂ワトラス形、ウィンチエスタ形成いはジンバル形で
もよい。
Note that there is no particular limitation on the shape of the suspension (5);
It may be a so-called Watrous shape, a winchiesta shape, or a gimbal shape.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば浮動ヘッドスライダを
、サスペンションの磁気記録媒体に対向する端部に腰形
成プロセスにより形成したので、磁気ディスク装五にお
いて高密度紀幾ができ、また記録又は再生のアクセス時
間が大幅に短縮できる浮動磁気ヘッド装置が得られる効
果がある。
As described above, according to the present invention, since the floating head slider is formed at the end of the suspension facing the magnetic recording medium by a waist forming process, high-density alignment can be achieved in the magnetic disk assembly, and recording or reproducing is possible. This has the effect of providing a floating magnetic head device that can significantly shorten the access time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例による浮動磁気ヘッド装置
を示す側面図、第2図はその浮動磁気ヘッド装置を磁気
記録媒体側から見た平面図、第3図はこの発明の他の実
施例による浮動磁気ヘッド装置の主要部を磁気記録媒体
側から見た平面図。 第4図はこの賢明の更に別の実施例にょる負圧形浮動ヘ
ッドスライダを有する浮動磁気ヘッド装置の磁気記録媒
体側から見た平面図、第5図は第4図のマーV線に沿う
断面図、第6図は従来のバルク型浮動磁気ヘッド装置を
示す側面図、第7図は従来の薄膜型浮動m気ヘッド装置
を示す側面図である。 図において、(1)は磁気記録媒体、(2)は浮動ヘッ
ドスライダ、(3)は磁気ヘッド、(5)はサスペンシ
ョンである。 なお、図中、同一符号は同一、又は相当部分を示す。
FIG. 1 is a side view showing a floating magnetic head device according to an embodiment of the invention, FIG. 2 is a plan view of the floating magnetic head device viewed from the magnetic recording medium side, and FIG. 3 is another embodiment of the invention. FIG. 2 is a plan view of the main parts of the floating magnetic head device according to the example, viewed from the magnetic recording medium side. FIG. 4 is a plan view of a floating magnetic head device having a negative pressure type floating head slider according to yet another embodiment of this invention, as seen from the magnetic recording medium side, and FIG. 5 is a plan view taken along the line V in FIG. 6 is a side view showing a conventional bulk type floating magnetic head device, and FIG. 7 is a side view showing a conventional thin film type floating magnetic head device. In the figure, (1) is a magnetic recording medium, (2) is a floating head slider, (3) is a magnetic head, and (5) is a suspension. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】[Claims] 磁気記録媒体に対向する端部に記録再生を行うための磁
気ヘッドを有し、上記磁気ヘッドを上記磁気記録媒体の
方向に付勢するサスペンションと、上記サスペンション
の上記端部に膜形成プロセスにより形成され、上記磁気
ヘッドを機械的衝撃から保護する浮動ヘッドスライダと
を有する浮動磁気ヘッド装置。
a suspension that has a magnetic head for recording and reproducing at an end facing a magnetic recording medium and urges the magnetic head in the direction of the magnetic recording medium; and a suspension formed by a film forming process on the end of the suspension. and a floating head slider that protects the magnetic head from mechanical impact.
JP4752789A 1989-02-27 1989-02-27 Floating magnetic head device Pending JPH02226512A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4752789A JPH02226512A (en) 1989-02-27 1989-02-27 Floating magnetic head device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4752789A JPH02226512A (en) 1989-02-27 1989-02-27 Floating magnetic head device

Publications (1)

Publication Number Publication Date
JPH02226512A true JPH02226512A (en) 1990-09-10

Family

ID=12777593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4752789A Pending JPH02226512A (en) 1989-02-27 1989-02-27 Floating magnetic head device

Country Status (1)

Country Link
JP (1) JPH02226512A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335126A (en) * 1991-05-23 1994-08-02 Hitachi, Ltd. Magnetic disk device without slider and having magnetic head mounted directly on magnetic head support including integral gas pressure generating structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5335126A (en) * 1991-05-23 1994-08-02 Hitachi, Ltd. Magnetic disk device without slider and having magnetic head mounted directly on magnetic head support including integral gas pressure generating structure
US5757573A (en) * 1991-05-23 1998-05-26 Hitachi, Ltd. Magnetic disk device without slider and having magnetic head mounted directly on magnetic head support

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