JPH0528771Y2 - - Google Patents
Info
- Publication number
- JPH0528771Y2 JPH0528771Y2 JP15422987U JP15422987U JPH0528771Y2 JP H0528771 Y2 JPH0528771 Y2 JP H0528771Y2 JP 15422987 U JP15422987 U JP 15422987U JP 15422987 U JP15422987 U JP 15422987U JP H0528771 Y2 JPH0528771 Y2 JP H0528771Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- centers
- arcs
- positioning
- positioning plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001360 synchronised effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 24
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15422987U JPH0528771Y2 (cs) | 1987-10-07 | 1987-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15422987U JPH0528771Y2 (cs) | 1987-10-07 | 1987-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0158939U JPH0158939U (cs) | 1989-04-13 |
| JPH0528771Y2 true JPH0528771Y2 (cs) | 1993-07-23 |
Family
ID=31430777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15422987U Expired - Lifetime JPH0528771Y2 (cs) | 1987-10-07 | 1987-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528771Y2 (cs) |
-
1987
- 1987-10-07 JP JP15422987U patent/JPH0528771Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0158939U (cs) | 1989-04-13 |
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