JPH05285772A - Posture control system of movable carriage device - Google Patents

Abstract

PURPOSE:To provide a posture control system of a movable carriage device which aims a processing table as a composing element necessary to interllectualize the processing, and utilizes the processing table. CONSTITUTION:In a movable carriage device in which moving elements 3 are provided movable to a track rail 1 through rolling elements 2, and a movable carriage 7 is installed at least at one side either the moving elements 3 or the track rail 1, a displacement generating means 4 is provided between the movable carriage 7 and the moving elements 3, and by moving the movable carriage 7 roughly by the movement of the moving elements 3, so as to operate the displacement generating means 4, the posture of the movable carriage 7 is controlled by moving the movable carriage 7 minutely.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a moving table apparatus used in, for example, a semiconductor manufacturing apparatus, a machine tool, various inspection apparatuses and the like, and more particularly to an attitude control system for the moving table apparatus for controlling the attitude of the moving table.

[0002]

2. Description of the Related Art In recent years, there has been an increasing demand for higher precision in fine processing as represented by semiconductor technology. Since NC (Numerical Control) was developed, the machining accuracy has improved dramatically by increasing the rigidity and position control of each part of the machine, but in order to further improve the precision of machining, "intelligence of machining" You need to incorporate your thoughts.

Intelligent processing means that the physical phenomenon occurring at the processing site is taken in as information by Sanse, input to a model prepared in advance, and compared with the output from that and the target value determined from the design, and the difference between them. The actuator is moved in accordance with the above, and the phenomenon itself that occurs during machining is changed in real time to perform the intended machining.

FIG. 31 shows the basic physical phenomenon that occurs during processing. When an object is processed, processing reaction force N and heat H are generated in the portion 100 where processing is performed. In addition to this, the power source 10
Base 10 by heat generation from 1 and transmission of heat and processing reaction force
2. Various phenomena such as deformation of structures such as the column 103 and the head 104, and divergence of heat H and sound S to the surroundings occur at the same time. In other words, all components are deformed by force and heat, and in order to achieve higher precision in machining, it is not enough to increase precision by simply increasing rigidity or systematize by combining conventional techniques. there were. As the physical phenomenon at the time of processing, various information such as ambient temperature change A, deformation B of each structural member due to heat and force, temperature distribution C due to heat transfer, internal strain D, external strain E, vibration F due to processing, etc. Can be grasped as.

From this point of view, various attempts have been made to date on the mechanical elements required for intelligent processing.

It is an object of the present invention to provide a posture control system of a movable table device which can be used for this machining table, focusing on the machining table as a constituent element required for the above-mentioned intelligent machining.

[0007]

In order to achieve the above object, in the present invention, a moving element is movably provided on a track rail via a rolling element, and at least one side of the moving element and the track rail. In the mobile platform device having the mobile platform attached to the mobile platform, a displacement generating section is provided between the mobile platform and the mover, the mobile platform is roughly moved by the movement of the mobile station, and the mobile platform is moved by operating the displacement generating section. It is characterized in that the posture of the movable table is controlled by finely moving it.

The displacement generating section is characterized in that it is provided on a leg section which supports the movable table.

The legs of the movable table are characterized by being supported by an intermediate table attached to the movable element.

The legs of the movable table are directly supported by the movable element.

The displacement generator is provided on the moving element.

A plurality of moving elements are provided, and at least one of the plurality of moving elements is provided with a minute displacement generating portion.

The control of the attitude of the mobile platform is performed in the direction of correcting pitching, rolling and yawing during traveling of the mobile platform.
It is characterized in that the displacement generation unit of each moving element is controlled.

It is characterized in that the posture of the movable table is recognized from the outside and the displacement generating section is controlled based on the recognized posture information.

A feature is that the force acting on the movable table is detected, and the displacement generating portion of the moving element is controlled based on the detected force information.

Displacement detecting means is provided on the mover, the posture of the movable table is recognized from the displacement information detected by the displacement detecting means, and the displacement generating section is controlled based on the recognized posture information. And

A force detecting means is provided on the mover, the posture of the movable table is recognized from the force information detected by the detecting means from the value, and the displacement generating section is controlled based on the recognized posture information. Characterize.

The displacement amount of the mover is calculated from the force information detected by the force detecting means, and the displacement generating portion is displaced so as to cancel the displacement amount, thereby maintaining the posture of the movable table at a constant position. It is characterized by

The movable table is a machining table of the machine tool,
It is characterized in that the relative position between the work and the tool on the processing table is recognized, and the posture of the movable table is controlled so that the relative position becomes appropriate.

[0020]

In the attitude control system of the moving table apparatus having the above-described structure, the moving table is coarsely moved by moving the mover. On the other hand, the posture of the movable table is controlled by generating a minute displacement in the displacement generating section provided between the movable table and the mover.

The attitude control is performed by correcting pitching, rolling, and yawing during traveling of the mobile platform.
The effects of pitching, rolling and yawing can be ignored.

Further, the posture of the movable table can be precisely controlled by recognizing the posture of the movable table from the outside and controlling the displacement generating section of each mover based on the recognized posture information.

On the other hand, by detecting the force acting on the moving table and controlling the displacement generating portion of each moving element based on this force information, it is possible to obtain the optimum posture according to the force.

Further, if each moving element is provided with a displacement detecting means and the posture of the movable table is recognized from the detected displacement information, an external posture recognizing means becomes unnecessary.

If a force detecting means is provided on each moving element,
No external force detection means is required.

Further, the displacement amount of each slider is obtained from the force information detected by the force detecting means, and the displacement is generated in the displacement generating portion of each slider so as to cancel the displacement amount, thereby the movable table is moved. If the posture is maintained at a fixed position, it is possible to realize a movable table device having an apparently infinite rigidity.

If the movable table is used as a machining table of a machine tool, the relative position between the work and the tool on the machining table is recognized, and the posture of the movable table is controlled so that the relative position becomes appropriate. Even if other components of the machine tool are deformed by heat or force, the machining state can be always kept constant and the machining accuracy can be improved.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to illustrated embodiments.

FIG. 1 shows a basic configuration of an attitude control system for a mobile table apparatus according to an embodiment of the present invention. The movable base device uses a rolling linear motion guide device as a linear guide for the movable base. The rolling linear motion guide device has a configuration in which a plurality of moving elements 3 are movably provided on a track rail 1 via rolling elements 2, and at least one of the moving element 3 and the track rail 1, that is, a moving element in the illustrated example. Mobile stand 3
Is attached, and the track rail 1 is fixed to the base 101.

The moving base 7 is a coarse feed system 10 such as a ball screw.
3, the coarse movement control device 111 outputs a coarse movement command signal based on the NC information, and the coarse movement feed motor 113 is driven via the motor driver 112. The control of the coarse feed system 103 may be open loop control or closed loop control by feeding back the position of the moving table 7.

On the other hand, the control of the displacement generating means 4 is performed on the basis of the information on the posture of the moving table 7 obtained from the force detecting means 9 or the displacement detecting means 8 provided on the external sensor 114 or the moving element 3. The posture of the moving base 7 changes depending on the deformation of the system components such as the track rail 1, the mover 3, the base 101, the ball screw shaft 105 of the coarse feed system 103, and the ball nut 106. The deformation of is caused by heat and force. As the external sensor 114 for knowing the attitude of the movable table 7, first, a displacement sensor for directly observing the displacement of the movable table 7 itself or a visual sensor such as a video camera can be used. Further, instead of directly detecting the posture of the movable table 7, the deformation amount of each component may be detected. In order to detect the deformation amount of each component, the deformation amount of the component may be directly detected by the deformation sensor, or the strain may be detected. Further, the amount of deformation may be calculated by detecting heat and force applied to each component. Further, since it is possible that the vibration characteristics including sound change depending on the internal force state of each component, the vibration characteristics may be detected as the posture information. In short, all components generate information as strain, temperature, sound, shape, etc., and among the information emitted from these components, the fine movement control device 100 moves based on all available information. The posture 7 of the table is recognized to calculate a fine movement control amount, and the displacement generating means 4 is driven and controlled via the displacement generating means driver 114.

FIG. 2 shows various embodiments of the displacement generating section provided in the movable table device. 2 (c) shows the minute displacement generating means provided on the movable table, and FIGS. 2 (d) and 2 (e) show the displacement generating section provided on the leg portion supporting the movable table. Of these, Fig. 2 (d) shows an example in which the legs of the moving table are supported by the intermediate table attached to the moving element, and Fig. 2 (e) shows an example in which the legs of the moving table are directly supported by the moving element. Is.

Further, FIG. 2 (f) is an example in which the displacement generating means is provided on the moving element. It is a noh play.

FIG. 3 shows the attitude control state of the moving table by taking the case where the moving element of FIG. 2 (f) is provided with displacement generating means as an example. That is, as shown in FIGS. 2 (a) and 2 (b), the moving direction of the mover 3 along the track rail 1 is the Y axis, which is orthogonal to the track rail 1 and is a pseudo sliding surface of the mover 3. 3 (b) is the Z axis direction, and FIG. 3 (c) is the X axis when the vertical direction orthogonal to the pseudo sliding surface S of the mover 3 is the Z axis. Direction, and FIG. 3 (d) shows how displacement is generated in the Y-axis direction.

3 (e) to 3 (g), the posture of the movable table 7 is shown as a rolling state in which the movable table 7 rotates about the Y axis, a pitching pattern about the X axis, and a Z axis direction. The displacement generator 4 of each moving element 3 is controlled in a direction to correct the rotating yawing.

Further, the displacement amount of each slider is obtained from the force information detected by the force detecting means, and the displacement is generated in the displacement generating portion of each slider so as to cancel the displacement amount, whereby the displacement table is moved. If the posture is maintained at a fixed position, it is possible to realize a movable table device having an apparently infinite rigidity. FIG. 4 shows various configuration examples of the mobile table device.

That is, FIG. 4 (a) shows an example in which the track rail 1 has a uniaxial structure, and FIG. 4 (b) shows an example in which the track rail 1 has a biaxial structure. In contrast to the example shown in FIG. , Track rail 1
The movable table 7 is attached to the.

FIG. 4 (c) shows an example in which two axes are opposed to each other.
Are arranged facing each other on the left and right.

In the example shown in FIG. 4 (d), the left and right movers 3 are arranged vertically and horizontally.

FIG. 4 (e) shows an example of a structure in which the two axes are opposed to each other and rotated by 90 degrees.

The example shown in FIG. 4 (f) is the configuration opposite to the example shown in FIG. 4 (c), and FIG. 4 (g) is the configuration example opposite to the example shown in FIG. 4 (d).

FIG. 5 shows a structure in which one of the moving elements 3 is supported by a spring without providing the displacement generating portion 4 in the case of using the two axes facing each other as shown in FIGS. 4 (c), (f) and (e). Is.

Although the configuration examples shown in FIGS. 4 and 5 are cases in which they move in the Y-axis direction, as shown in FIG. 6, they can move in the two directions of the XY axes. May be

7 and 8 show an embodiment in which the movable table 7 is used as a machining table of a machine tool.
That is, the relative position between the work W and the tool T on the movable table 7 is recognized, and the posture of the movable table is controlled so that the relative position is appropriate.

FIG. 7 shows this basic system configuration. In addition to the system of FIG. 1, the force acting on the tool T side,
A sensor 116 for detecting heat, a deformation amount, etc. is provided, the relative position on the tool T and the moving table 7 is recognized, and the posture of the moving table 7 is controlled so as to obtain an optimum processing state.

That is, taking a machining center as an example, as shown in FIG. 31, all the components are deformed by heat and force, and the attitude of the tool T also changes. Therefore, it has been attempted to control the attitude of the tool T by using a column or the like as an active structure, but in the present invention, the attitude of the movable table 7 is controlled by following the change in the attitude of the tool T.

For that purpose, first, it is necessary to accurately recognize the relative positional relationship between the tool T and the work W. The relative position between the tool T and the work W is the position and orientation of the tool T and the work W.
It can be recognized by individually detecting the position and orientation of. It is also possible to judge the relative position between the tool T and the work W by detecting the magnitude and direction of the processing reaction force between the tool T and the work W without detecting the position itself. In addition, the sound sensor allows the tool T and the work W to be
It is also possible to recognize the relative position of. Further, it is also possible to detect a relative positional relationship with a visual sensor.

In this way, by controlling the attitude of the moving table 7 so as to follow the attitude change of the tool T, even if other components of the machine tool are deformed by heat or force, the machining state is always optimized. Can be kept in a state.

FIGS. 9 (a) to 9 (c) show the conceptual construction of the displacement generating linear motion guide device of the present invention. This guide device for displacement-generating linear movement is composed of a track rail 1 that extends linearly and a slide base 3 that is mounted on the track rail 1 via a large number of balls 2 as rolling elements. Further, the slide base 3 is provided with a displacement generator 4, and the position of the guided member 5 such as a movable table guided by the slide base 3 can be controlled by causing the displacement generator 4 to generate a displacement. I am trying.

As for the direction of displacement generation, as shown in FIG. 9 (d), the direction in which the slide base 3 moves along the track rail 1 is the Y axis, and the direction perpendicular to the track rail 1 and the slide base 3 is used. 9A, when the X-axis is the direction parallel to the pseudo-sliding surface and the Z-axis is the vertical direction orthogonal to the pseudo-sliding surface S of the slide base 3, in FIG. In FIG. 9B, the displacement is generated in the X-axis direction, and in FIG. 9C, the displacement is generated in the Y-axis direction.

FIG. 10A shows an example in which displacement detecting means 8 for detecting the displacement amount of the displacement generating section 4 is provided. By providing the displacement detecting means 8 in this way, the actual amount of displacement can be monitored, and if the operation of the displacement generating section 4 is controlled based on this displacement information, the position of the guided member 5 can be more accurately determined. It becomes possible to control. In addition, FIG.
(b) is provided with force detecting means 9 for detecting the force acting on the slide base 3, and the displacement generating unit 4 is based on the acting force information.
Can also be controlled.

As the displacement detecting means 8, for example, FIG.
A resistance type sensor 8a such as a strain gauge as shown in 1 (a),
A sensor 8b for detecting displacement as a voltage change using a piezoelectric element as shown in FIG. 2B, an electromagnetic induction sensor 8c such as an operating transformer or an eddy current sensor as shown in FIG. 2C,
Capacitance type sensor 8d as shown in FIG.
Various sensors capable of detecting a minute displacement can be used, such as a light interference type sensor 8e using a light fiber as shown in (e). 11 (f) and 11 (g) show an example of the force detecting means. That is, what is shown in FIG. 11 (f) is composed of an elastic member 9b that elastically deforms in the load acting direction according to a load, and a strain gauge 9a for detecting the amount of strain of this elastic member 9b. The force acting is detected from the detected value of the strain amount of the elastic member 9b.

The example shown in FIG. 11 (g) includes an elastic member 9b,
The acting force is detected from the detected value of the strain amount of the piezoelectric elements 9c arranged side by side on the elastic member 9b.

Of course, as the force detecting means, various detecting means other than the illustrated example can be used.

FIG. 12 shows various basic structural examples of the displacement generator 4.

That is, FIG. 12 (a) shows a case where a displacement is generated in the Z axis direction, FIG. 10 (b) shows a case where a displacement is generated in the X axis direction, and FIG. 12 (c) shows a case where a displacement is generated in the Y axis direction. It is a configuration example in the case of making it. Although not shown in other figures, FIG. 11 (b),
By combining the configuration of (c), it is possible to generate displacement in two directions of the XY axes, and FIG. 11 (a) and FIG.
Displacement can be generated in two directions of the XZ axis by combining the configuration of (b) and in two directions of the YZ axis by combining the configurations of FIG. 11 (a) and FIG. 11 (c). Furthermore, by combining the three configurations shown in FIGS. 11A to 11C, displacement can be generated in the three directions of the XYZ axes. Furthermore, the displacement can be generated in any direction, not limited to the XYZ axis directions.

In each of the examples, as the structure of the displacement generator,
The elastic member 6 includes an elastic member 6 that is elastically deformable in the displacement direction and is rigid in a direction other than the displacement direction, and a displacement means 7 such as a piezoelectric element or an electrostrictive element that can expand and contract in the displacement direction. And the displacing means 7 are provided side by side between the facing surfaces of the sliding table body 31 and the mounting portion 32 on which the table or the like is mounted.

In the example shown in FIG. 12 (d), the displacement transmitting member 33
Is used. That is, only the elastic member 6 is provided between the facing surfaces of the sliding base main body 31 having a ball rolling portion and the mounting portion 32, and one end 33a of the displacement generation transmission member is provided.
Is fixed to either the slide base body 31 or the attachment portion 32, in the illustrated example, to the attachment portion 32, and the free end portion 33b of the displacement transmission member 33, the slide base body portion 31, and the attachment portion 32 are the other end. The displacing means 7 is interposed between the side member, in this embodiment, the sliding base body 31.

As the displacement means 6, in addition to a piezoelectric element or an electrostrictive element, a thermal actuator that expands and contracts by utilizing thermal expansion of an object, or a fluid pressure as shown in FIGS. 12 (e) and 12 (f) is used. Various actuators that expand and contract in proportion to the command value based on the command value, such as a voice coil and a magnetostrictive element, can be applied.

FIG. 13 shows various structural examples when the elastic member 6 has a thin leaf spring structure in the basic structure of the displacement generating portion shown in FIG.

FIG. 13A shows the basic structure of the elastic member when a displacement is generated in the Z-axis direction shown in FIG. 12A. That is, the elastic member 6A has a thin-walled structure that is elastically deformable in the displacement generation direction and rigid in the other directions.
One end is fixed to the mounting portion 32 and the other end is the slide base body portion 31.
It is fixed to.

FIG. 13 (b) shows a specific example of the displacement generating section using the displacement transmitting member shown in FIG. 12 (d).

FIG. 13 (c) shows an example in which a thin annular flat plate structure is used as the elastic member 6B. FIG.
(d) to (f) show the planar shape of the elastic member 6B, which may be a simple annular flat plate shape as shown in FIG. 7 (d), or as shown in FIGS. The shape may be such that an appropriate hole 6C is provided in the.

13 (g) to 13 (i) show an example of the arrangement of the displacement means 7 and the elastic member 6B.

FIG. 13 (g) shows the elastic member 6B and the displacement means 7.
This is an example in which both are formed in a ring shape and arranged concentrically.

FIG. 13 (h) shows a rod-shaped displacement means 7 using a rod-shaped displacement means 7 and a ring-shaped elastic member 6B.
13 (i) showing an example in which the rod-shaped displacement means 7 is arranged at three places, the elastic member 6B is divided in the circumferential direction so as to avoid the rod-shaped displacement means 7. Is.

FIG. 14 shows the X-axis shown in FIGS. 12 (b) and 12 (c).
The basic configuration example of the elastic member when the displacement is generated in the Y-axis direction is shown.

FIG. 14A shows an example in which the elastic member 6D has a parallel plate structure composed of thin portions arranged in parallel to each other, and can be elastically deformed only in one direction of the X axis or the Y axis. It has a structure.

FIG. 14 (b) shows a thin-walled cylindrical shape as the structure of the elastic member 6E. If you do this, X
It can be elastically deformed in both the axis and Y-axis directions,
The direction of elastic deformation is not limited to one direction.

Next, more specific examples of the present invention will be described. Hereinafter, the first to eighth examples are Z
It is an axial displacement type embodiment, the ninth embodiment is an X axis displacement type embodiment, and the tenth embodiment is a Y axis displacement type embodiment.
One embodiment is an XY-axis bidirectional displacement type embodiment, and a twelfth embodiment
The embodiment is a modification of the X-axis Y-axis displacement type.

[First Embodiment] FIGS. 15 and 16 show the first embodiment.
The example of is shown. This first embodiment embodies the model configuration of FIG. 12 (a) for generating displacement in the Z-axis direction, FIG. 15 shows a schematic configuration, and FIG. 10 shows a more specific configuration example. ing.

First, a schematic structure will be described with reference to FIG. 15, and then a more detailed part will be described with reference to FIG.

In the example of FIG. 15, the elastic member 6B is shown in FIG.
This is an example in which the thin annular flat plate structure shown in (c) is applied. That is, the slide base 3 includes a slide base body 31 having a portion where the balls 2 roll, a mounting portion 32 to which the guided member 5 is mounted, and a space between the slide base body 31 and the mounting portion 32. And a displacement generator 4 interposed therebetween.

The displacement generating section 4 includes a leaf spring-shaped elastic member 6B.
And a displacement means 7 for varying the distance between the mounting portion 31 and the slide portion 32. The elastic member 6B has a thin annular flat plate shape, the outer end of which is fixed to the inner end of the annular mounting portion 32, and the inner end of which is fixed to the slide base body 31.
It is configured to be elastically deformable in the axial direction.

Since the elastic member 6B has an annular flat plate structure, the elastic member 6B is elastically deformable in the Z-axis direction and rigid in the X- and Y-axis directions other than the Z-axis.
The rigidity in the axial and Y-axis directions can be kept high.

A resistance type sensor 8a is attached to the surface of the elastic member 6B as a detecting means for detecting a displacement amount corresponding to elastic deformation of the elastic member 6B. As shown in FIG. 15 (b), the resistance type sensor 8a has its sensitivity enhanced by being attached to the base of the elastic member 6B having the largest strain.

Next, with respect to the example of FIG. 10, differences from FIG. 15 and more specific points will be described.

In this example, the mounting portion 32, the elastic member 6B, and the sliding base body 31 are integrally formed by processing a rectangular block body forming the sliding base 3. That is, slits 34 are formed around the front, rear, left and right sides of the slide base 3, while a circular recess 35 is formed in the center of the upper surface of the slide base 3, and a thin wall is provided between the bottom surface of the recess 35 and the slit 34. And constitutes the elastic member 6B. The opening of the recess 35 of the slide base 3 is closed by a lid 36.

As the resistance type sensor 8a, the elastic member 6B is used.
4 are equally arranged on the outer diameter end and the inner diameter end, and the phases of the resistance type sensors 8a on the inner diameter end side and the outer diameter end side are shifted by 45 degrees. Further, the resistance type sensor 8a is attached to the surface of the elastic member 6B on the concave portion 34 side, and the signal line from the resistance type sensor 8a is taken out through the connection terminal 9 fixed to the attachment portion 31.

FIG. 18 shows a control block diagram of such a guide device for displacement generating linear motion.

That is, in order to operate the displacement means 7 such as a piezoelectric element, a D / A for converting the command value into an analog signal.
The converter 100, the drive amplifier 101 that amplifies this signal, and the resistance type sensor 8 attached to the elastic member 6B.
a strain amplifier 102 for reading the resistance value of a, an A / D converter 103 for converting an analog detection value output from the stray amplifier 102 into a digital signal,
And an arithmetic circuit 104 for processing and controlling it. Then, the displacement information detected by the resistance type sensor 8a is constantly monitored and fed back to the arithmetic circuit 104, and the displacement means 7 such as a piezoelectric element is controlled so as to generate an appropriate displacement so that the displacement is sequentially adjusted. It That is, the position of the guided member such as the table attached to the slide base 3 is controlled.

As the control configuration, as shown by the dotted line in the drawing, the analog information from the resistance type sensor may be directly compared with the analog signal of the command value for control without being converted into digital information. ..

[Second Embodiment] FIG. 18 shows a second embodiment. In this embodiment, the displacement generating section 4 uses a displacement transmitting member 33 as shown in FIG. 13 (b). .. The displacement is generated in the Z-axis direction, and the resistance type sensor 8a is attached to the elastic member 6 as displacement detecting means.

[Third Embodiment] FIG. 19 shows a third embodiment, and this embodiment also shows the structure of the displacement generator 4 as shown in FIG.
The elastic member 6B having an annular thin plate structure shown in (c) is applied, and is a type that causes displacement in the Z-axis direction. Then, instead of detecting the displacement, a force detecting means 9 is provided to detect the force.

The force detecting means 9 is as shown in FIGS. 11 (f) and 11 (g).
The strain of the elastic member that deforms in response to the force as shown in (4) is converted into an electric signal and detected by the resistance sensor 9a. As the elastic member 9b, like the elastic member 6B applied to the displacement generating portion 4, a thin annular flat plate-shaped leaf spring that is elastically deformable in the force acting direction and rigid in the other direction is used. It has an integrated structure with the moving table body 31, the mounting portion 32, and the displacement generating portion 4. When the displacement generating section 4 is extended by a predetermined amount, the force increases by that amount, the elastic member 6b of the force detecting means 9 bends in accordance with the increase in the force, and the amount of bending is electrically changed by the resistance sensor 9a. It is designed to be detected as a resistance change.

[Fourth Embodiment] FIG. 20 shows a fourth embodiment of the present invention. In this embodiment, a force detecting means 9 similar to that of the third embodiment is applied to the type using the displacement transmitting member 33 as in the second embodiment of FIG. 18, instead of the displacement detecting means.

[Fifth Embodiment] FIGS. 21 and 22 show a fifth embodiment of the present invention. Of these, FIG. 21 shows a schematic configuration, and FIG. 22 shows a more specific configuration example.

That is, in the example shown in FIG. 21, the displacement generating section 4 of the first embodiment shown in FIG. 15 is separated from the slide base main body 31 to be a separate structure.

The specific example shown in FIG. 22 (a) is a configuration in which the displacement generating section 4 of the specific example shown in FIG. 16 is separated from the sliding base main body 31 to be a separate structure.

If the displacement generating section 4 is separated in this way, it can be attached to an existing product as a displacement generating attachment.

22 (b) and 22 (c) show a modification of the displacement generating section 4. As shown in FIG.

FIG. 22 (b) shows a parallel plate structure in which elastic members 6B having a thin annular plate structure are combined in parallel with each other.

FIG. 22 (c) shows an elastic member 6B having a thin annular flat plate structure formed by cutting the inner and outer circumferences of a cylindrical body with flanges at both ends. Piezoelectric elements are provided between the flange portions at both ends. A more simplified configuration example in which the displacement means 7 such as the above is interposed is shown.

[Sixth Embodiment] FIG. 23 shows a sixth embodiment of the present invention. In this embodiment, the displacement generating portion 4 of the second embodiment shown in FIG. 18 is separated from the sliding base body portion 31 to form a separate structure.

[Seventh Embodiment] FIG. 24 shows a seventh embodiment of the present invention. In this embodiment, the displacement generating portion 4 of the third embodiment shown in FIG. 19 is separated from the sliding base body portion 31 to be a separate structure.

[Eighth Embodiment] FIG. 25 shows an eighth embodiment of the present invention. In this embodiment, the displacement generating section 4 of the fourth embodiment shown in FIG. 20 is configured separately from the sliding base body section 31.

[Ninth Embodiment] FIG. 26 shows a ninth embodiment of the present invention. This embodiment is a displacement type in the X-axis direction.
Fig. 14 (a) shows the structure of the displacement generator of the basic configuration of 2 (b).
Is applied.

In FIG. 26 (a), the displacement generating section 4 and the sliding base 3 are integrated, and in FIG. 26 (b), the displacement generating section 4 is separated from the sliding base main body 31 to form a separate structure. It is what

[Tenth Embodiment] FIG. 27 shows a tenth embodiment of the present invention.
An example is shown. This embodiment is a Y-axis direction displacement type,
As the structure of the displacement generating part of the basic configuration of FIG.
It applies (a).

In FIG. 27 (a), the displacement generating part and the slide base 3 are integrated with each other. In FIG. 27 (b), the displacement generating part 4 is separated from the slide base body 31 to form a separate structure. It was done.

[Eleventh Embodiment] FIGS. 28 (a) and 28 (b) show an eleventh embodiment of the present invention. In this embodiment, X axis, Y
A displacement is generated in both axial directions of the shaft, which is a combination of the ninth embodiment shown in FIG. 26 and the tenth embodiment shown in FIG.

FIG. 28 (c) shows a structure in which the displacement generating section 4 is separated from the sliding base body section 31 to be a separate structure.

[Twelfth Embodiment] FIGS. 29 and 30 show a twelfth embodiment of the present invention. In order to generate displacements in the X-axis direction and the Y-axis direction, a common structure as shown in FIG. 14 (b) is used. The thin cylindrical elastic member is applied.

FIG. 29 (a) shows a structure in which the displacement means 7 is provided along the X axis to generate displacement in the X axis direction.
(b) is a configuration in which the displacement means 7 is provided along the Y-axis direction to generate displacement in the Y-axis direction.

Further, FIG. 29 (c) shows an example in which the displacement generating section 4 is separated from the slide base main body 31 to be a separate structure.

FIG. 30 shows a more specific configuration example of the configuration of FIG. 29 (a), which is a more specific configuration example of the type using the thin cylindrical elastic member 6D of the twelfth embodiment. ..

That is, the arm portion 37 is provided at a predetermined distance from one end of the sliding base body portion 31 to the side surface of the mounting portion 32, and the displacement means 7 is provided between the arm portion 37 and the mounting portion 32. The position of the guided member mounted on the mounting portion 31 is controlled by expanding and contracting the minute displacement means 7.

[0107]

EFFECTS OF THE INVENTION The present invention has the above-described structure and operation. By providing the displacement generating portion, the sliding base can be displaced and the position of the guided member attached to the sliding base can be controlled.

[Brief description of drawings]

FIG. 1 is a diagram showing a basic system configuration of an attitude control system for a mobile table device according to an embodiment of the present invention.

FIG. 2 (a) is a schematic perspective view showing a basic configuration of a moving table device, FIG. 2 (b) is a schematic sectional view of a rolling linear motion guide device, and FIGS. 2 (c) to 2 (f). FIG. 4 is a diagram schematically showing various structural examples of displacement generating means.

FIG. 3 (a) is a schematic perspective view of a mobile platform apparatus to which a control system for a mobile platform apparatus of the present invention is applied, and FIG. 3 (b) is the same figure.
(a) is a cross-sectional view showing the basic configuration of the linear motion guide device used in the mobile table device, and (c) to (g) of FIG. 11 show the attitude control state of the mobile table device of the same figure (a). It is a schematic diagram.

4 (a) to 4 (g) are diagrams showing various configuration examples of the mobile table device.

5A to 5C are diagrams showing another configuration example of the mobile table device.

6A and 6B show a movable table device that moves in the XY directions. FIG. 6A is a schematic perspective view, FIG. 6B is a front view, and FIG.
(c) is a side view.

FIG. 7 is a basic configuration diagram of a control system when used for a work table of a machine tool.

FIG. 8 is a cross-sectional view showing a state of a processing table of a machine tool.

9 is a diagram showing a conceptual configuration of a displacement generation linear motion guide device, FIG. 9 (b) is a diagram showing a basic configuration example of a displacement generation unit in FIG. 9 (a), and FIG. ) And (d) are diagrams showing a schematic configuration in the case where a fluid pressure cylinder is used as the minute displacement means of the displacement generation part in FIG.

10 (a) is a diagram showing a conceptual configuration when displacement detecting means is provided in the configuration of FIG. 7, and FIG. 10 (b) is a conceptual configuration when force detecting means is provided in the configuration of FIG. FIG.

11 (a) to 11 (e) are configuration diagrams in the vicinity of a displacement generating portion when displacement detecting means is used, and FIGS. 11 (f) and 11 (g) are displacement generation when using force detecting means. It is a block diagram of a part vicinity.

12A to 12C are diagrams schematically showing a basic configuration example of a displacement generating section, and FIG. 12D is a diagram schematically showing a configuration example using a displacement transmitting member. , (E) and (f) are diagrams schematically showing an example in which a fluid pressure cylinder is used as the displacement means.

13 (a) is a cross-sectional view of an essential part when the elastic member of the displacement generating part shown in FIG. 10 is constituted by a leaf spring, FIG.
12 (b) is a cross-sectional view of a main part when the elastic member of the displacement generating portion shown in FIG. 12 (d) is composed of a leaf spring, and FIG. 12 (c) is an example in which the elastic member is constituted by a thin annular flat plate structure leaf spring. Figures (d) to (f) are plan views showing various aspects of the elastic member in Figure (c), and Figures (g) to (i) are various arrangements of elastic members and displacement means. It is a figure which shows an example.

FIG. 14 (a) is a schematic view of a case where a displacement generating part for generating a lateral displacement is configured by using a plate spring having a parallel flat plate structure, and FIG. 14 (b) is a thin-walled cylinder of an elastic member. It is a typical block diagram when it is formed in a shape.

FIG. 15 shows a linear motion guide device according to a first embodiment of the present invention, in which FIG. 15 (a) is a schematic configuration diagram and FIG.
(b) is a cross-sectional view of a main part in a state where displacement occurs.

FIG. 16 shows a linear motion guide device in which the configuration of FIG. 15 is further embodied. FIG. 16 (a) is a schematic configuration diagram,
The figure (b) is a plan view and the figures (c) and (d) are cross-sectional views of the main part for explaining the operating state.

FIG. 17 is a control block diagram of the apparatus of FIG.

FIG. 18 is a schematic configuration diagram showing a linear motion guide device according to a second embodiment of the present invention.

FIG. 19 shows a linear motion guide device according to a third embodiment of the present invention. FIG. 19 (a) is a schematic configuration diagram and FIG.
(b) is a sectional view of a main part for explaining an operating state.

FIG. 20 is a schematic configuration diagram showing a linear motion guide device according to a fourth embodiment of the present invention.

FIG. 21 is a schematic configuration diagram showing a linear motion guide device according to a fifth embodiment of the present invention.

22 is a basic configuration diagram showing an example in which the displacement generating section of FIG. 21 of the present invention is divided.

FIG. 23 is a schematic configuration diagram showing a linear motion guide device according to a sixth embodiment of the present invention.

FIG. 24 is a schematic configuration diagram showing a linear motion guide device according to a seventh embodiment of the present invention.

FIG. 25 is a schematic configuration diagram showing a linear motion guide device according to an eighth embodiment of the present invention.

FIG. 26 (a) is a schematic configuration diagram showing a linear movement guide device according to a ninth embodiment of the present invention, and FIG. 26 (b) is the same diagram (a).
FIG. 3 is a schematic configuration diagram in which the displacement generating unit of FIG.

27 (a) is a schematic configuration diagram showing a linear motion guide device according to a tenth embodiment of the present invention, and FIG. 27 (b) is the same diagram.
It is a schematic block diagram which separated the displacement generation part of (a).

28 (a) is a schematic configuration diagram showing a linear movement guide device according to an eleventh embodiment of the present invention, and FIG. 28 (b) is the same diagram.
It is a schematic block diagram which separated the displacement generation part of (a).

29 shows a linear motion guide device according to a twelfth embodiment of the present invention. FIG. 29 (a) is a schematic configuration diagram of an X-axis displacement type, and FIG. 29 (b) is a Y-axis displacement. Schematic block diagram of the mold
(c) is a schematic configuration diagram in which the displacement generating part of (a) is separated.

30 shows a linear motion guide device in which the configuration of FIG. 29 (a) is more concretely realized, FIG. 30 (a) is a schematic configuration diagram, and FIG. 30 (b) is a plan view.

FIG. 31 is a diagram showing a basic physical phenomenon that occurs during machining of a machine tool.

[Explanation of symbols]

 1 track rail 2 ball (rolling element) 3 sliding base 31 sliding base main body 32 mounting part 4 displacement generating part 5 guided member 6, 6A, 6B, 6D elastic member 7 small displacement means 8 displacement detection means

Claims (13)

[Claims] 1. A moving table apparatus in which a moving element is movably provided on a track rail via rolling elements, and a moving table is attached to at least one side of the moving element and the track rail. A displacement table is provided in the position of the movable table, coarse movement of the movable table is performed by movement of the moving element, and the position of the movable table is controlled by finely moving the movable table by operating the minute displacement generating section. Attitude control system. 2. The attitude control system for a mobile platform apparatus according to claim 1, wherein the displacement generating section is provided on a leg portion supporting the mobile platform. 3. The attitude control system for a mobile platform apparatus according to claim 2, wherein the legs of the mobile platform are supported by an intermediate platform attached to the mover. 4. The attitude control system for a mobile platform according to claim 2, wherein the legs of the mobile platform are directly supported by the mover. 5. The attitude control system for a movable table apparatus according to claim 1, wherein the displacement generating unit is provided on the moving element. 6. A plurality of moving elements are provided, and at least one of the plurality of moving elements is provided with a minute displacement generating portion.
An attitude control system for a mobile platform device according to. 7. The control of the attitude of the moving table controls the displacement generating section of each moving element in a direction to correct pitching, rolling and yawing during traveling of the moving table.
The attitude control system of the mobile table device according to 3, 4, 5 or 6. 8. The movement according to claim 1, wherein the displacement of the movable table is recognized from the outside and the displacement generator is controlled based on the recognized attitude information. Attitude control system for stand equipment. 9. The method according to claim 1, wherein the force acting on the moving table is detected, and the displacement generating section of the moving element is controlled based on the detected force information. 8. A posture control system for a mobile platform device according to item 8. 10. A displacement detector is provided on the mover, the posture of the movable table is recognized from the displacement information detected by the displacement detector, and the displacement generator is controlled based on the recognized posture information. The attitude control system for a mobile table apparatus according to any one of claims 1 to 9. 11. The moving element is provided with force detecting means, the posture of the movable table is recognized from the force information detected by the detecting means, and the displacement generating section is controlled based on the recognized posture information. The attitude control system for a mobile table device according to claim 1. 12. A displacement amount of a moving element is obtained from force information detected by force detecting means, and a displacement is generated in a displacement generating portion so as to cancel the displacement amount, whereby the posture of a movable table is kept at a fixed position. 12. Maintaining
An attitude control system for a mobile platform device according to. 13. The moving table is a machining table of a machine tool, the relative position of the work and the tool on the machining table is recognized, and the posture of the moving table is controlled so as to be an appropriate relative position. An attitude control system for a mobile table device according to claim 1.