JPH05283506A - Chip push-up device - Google Patents

Abstract

PURPOSE:To enhance the working ratio by a method wherein each chip diced from a wafer, adhered onto an adhesive sheet, is pushed up by a needle, and it is unnecessary to adjust for a change of use conditions of a chip push-up device for forcibly separating chips from the adhesive sheet. CONSTITUTION:Within a cylindrical chip push-up holder 2 which is held in a frame 9 so as to move vertically, a sharp-pointed chip push-up needle 1 is inserted so as to move vertically, and each comes into contact with a holder cam 4 and a needle cam 3 which are fixed to an axis of a pulse driving motor 5 through a holder cam follower 4a and a needle cam follower 3a which are projected on the one side, and also the both are biased in the direction of holding this contact by springs 7, 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is directed to sticking up individual chips of a dicing-processed wafer stuck on a sticky sheet set on an XYθ table in a die bonding apparatus used in a semiconductor manufacturing process with a needle, The present invention relates to a chip push-up device for forcibly peeling a chip from a chip.

[0002]

2. Description of the Related Art Conventionally, this type of tip pushing device is
As shown in FIG. 9, a cylindrical tip push-up holder 2 is mounted on the frame 9 so that the height thereof can be adjusted by an adjusting screw 10, and a tip push-up needle 1 is mounted in the tip push-up holder 2 so as to be vertically movable. With the tip of the tip pushing-up holder 2 in contact with the back surface of the adhesive sheet B, the needle cam 3 contacted by the needle cam follower 3a protruding on one side of the lower end of the tip pushing-up needle 1 is rotated a predetermined angle by the pulse drive motor 5. By moving
The tip pushing needle 1 is pushed upward by the pulling force of the spring 7 stretched between the tip pushing holder 2 and the tip pushing holder 2, and its tip pierces the adhesive sheet B and adheres to the adhesive sheet B as shown in FIG. The chip A being used was peeled off. Then, the chip A peeled off from the pressure-sensitive adhesive sheet B is adsorbed by an adsorption collet (not shown) and conveyed to the next step.

[0003]

In the above-mentioned conventional tip pushing-up device, the projecting length of the tip pushing-up needle can be adjusted by the rotation angle of the needle cam, but when the position of the tip pushing-up holder is low, it is sufficient for the adhesive sheet. Since no strong tension is applied, the adhesive sheet B does not tear as shown in FIG.
The chip A is pushed up together with the adhesive sheet B, and the suction by the suction collet cannot be performed. Therefore, in that case,
After the tip push-up holder 2 is raised to a predetermined height by the holder height adjusting screw 10 shown in FIG. 3, it is fixed by the holder lock screw 12, and then the tip push-up needle 1 is adjusted so that the tip thereof is aligned with the tip push-up holder 2. The needle height adjusting screw 11 must be raised and the needle lock screw 13 must be fixed in the same way, which makes the work troublesome.
Moreover, this height adjustment must be delicately performed using a microscope or the like, which causes difficulty in the work. Furthermore, during this adjustment, the work must be stopped, and the operating rate of the device also decreases.

[0004]

According to the present invention, a holder cam having a predetermined shape is coaxially mounted on a pulse drive motor to which a needle cam for driving a tip push-up needle is attached, and the holder cam is attached to one side of the tip push-up holder. The above-mentioned conventional problems have been solved by projecting the holder cam followers that engage with each other.

[0005]

The holder cam acts to change the height of the tip push-up holder, and the needle cam drives the tip push-up needle up and down and aligns the tip push-up needle according to the height change of the tip push-up holder. Act to do.

[0006]

EXAMPLE FIG. 1 is a partially cutaway side view of an example. As shown in the figure, the tip pushing-up device of the present invention is provided with a frame 9
A guide bearing 6 provided at the upper part of the chip push-up needle 2 holds the cylindrical chip push-up holder 2 so as to be able to move up and down, and a tip push-up needle 1 having a sharp tip is provided in the chip push-up holder 2 so as to move up and down. 1
To the side of the shaft 5a of the pulse drive motor 5 as in the conventional case.
A needle cam follower 3a that abuts the lower end of the needle cam 3 attached to the tip cam, and a spring 7 for urging the tip push-up needle 1 upward is stretched between the tip push-up needle 1 and the tip push-up holder 2. It is set up. Here, in the tip pushing-up device of the present invention, a similar holder cam follower 4a is also provided on the side of the tip pushing-up holder 2, and the upper end of the holder cam 4 having the holder cam follower 4a mounted coaxially with the needle cam 3a 5a. Abutting against. Further, a spring 8 for pulling the tip pushing-up holder 2 downward is stretched between the lower end of the tip pushing-up holder 2 and the frame 9.

FIG. 2 shows an embodiment of the holder cam 4, in which three outer peripheral surfaces differing from each other by a distance of 0.5 mm from the center are formed.

FIG. 3 shows a needle cam 3 used together with the holder cam 4 described above. The needle cam 3 has three troughs whose distances from the center differ by 0.5 mm, and the troughs are continuous.
It has three peaks projecting 2 mm outward from each adjacent valley.

FIG. 4 shows the holder cam 4 and the needle cam 3 described above.
FIG. 6 is a correlation diagram showing a change in stroke at the rotation position of FIG. As shown in the figure, the holder cam of the present invention has three use sections in which the stroke does not change even when the holder cam rotates.
The needle cam changes its stroke by 2 mm in each usage section.

Next, the operation of the tip push-up device of the present invention having the above-mentioned structure will be described. First, both cams 3 and 4 are rotated within the range of the cam allocation angle of 0 ° to 90 ° shown in FIGS. 2 and 3. Assuming a case, since the diameter of the holder cam 4 does not change at this time, the position of the holder cam follower 4a in contact with the holder cam 4 does not change, and the tip push-up holder 2 is held at the current position. On the other hand, since the diameter of the needle cam 3 changes from the valley to the top with a width of 2 mm, the needle cam follower 3 contacting the needle cam 3
a is driven with a stroke of 2 mm, and the spring 7
As shown in FIG. 5, the tip push-up needle 1 urged upward by means of the tip push-up needle 2 is projected and retracted from the tip of the tip push-up holder 2.

Next, when the cam allocation angle is changed to the range of 120 ° to 210 °, the diameter of the holder cam 4 does not change within this range, but from the above state, the diameter becomes 0.5 mm smaller. Therefore,
The tip push-up holder 2, which is in contact with the holder cam 4 via the holder cam follower 4a, is held by the pulling force of the spring 8 in a state of being lowered by 0.5 mm. Further, the diameter of the needle cam 3 changes in the range of 2 mm from the valley portion to the top portion as in the above, but the diameter is increased by 0.5 mm as a whole from the above state. Therefore, the tip push-up needle 1, which is in contact with the needle cam 3 via the needle cam follower 3a, resists the tensile force of the spring 7 to reach 0.5 m from the above state.
At the lowered position, similarly move up and down with a stroke of 2 mm.
Therefore, as shown in FIG.
Is lowered in accordance with the tip pushing-up holder 2 which is lowered by 0.5 mm, and is projected and retracted within a range of 2 mm from the tip of the tip pushing-up holder 2 as before.

When the cam allocation angle is further changed from 240 ° to 330 °, the tip pushing-up holder 2 and the tip pushing-up needle 1 are likewise further lowered by 0.5 mm without changing their relative relationship.

As described above, in the tip push-up device of the present invention, the height of the tip push-up holder can be changed and the position of the tip push-up needle can be adjusted accordingly only by changing the cam rotation range by the pulse drive motor. Can be done at the same time.

Further, in order to change the protruding length of the tip pushing-up needle, it is sufficient to limit the rotation range within the pushing-up use section shown in FIG. 4. For example, as shown in FIG. 8, the cam allocation angle is 90 °. If the pulse drive motor is controlled in the range of ~ 36 °, the tip push-up length will be 1.2 mm.

FIGS. 6 and 7 are explanatory views of the usage state. First, as shown in FIG. 6, the height of the tip push-up holder 2 is adjusted so that the adhesive sheet B has an appropriate tension, and thereafter, When the tip push-up needle 1 is raised by the above-described cam rotation operation, the tip of the tip push-up needle 1 breaks through the adhesive sheet B as shown in FIG. Peel off. Therefore, the chip A is adsorbed by the adsorption collet C located above the chip A so that it can be conveyed, and is conveyed to the next step. In this way, the tip push-up device of the present invention operates.

In this embodiment, an example in which three kinds of use sections are set in the cam is shown, but the present invention is
The gist of the invention is that the height of the upper end of the apparatus is variable. From this fact, it is only necessary to set a plurality of use sections, and the shapes and dimensions of both cams are not limited to the illustrated embodiment. In the embodiment, the holder cam follower is in contact with the upper end of the holder cam, and the needle cam follower is in contact with the lower end of the needle cam. The contact direction may be opposite to that shown, or both cam followers may contact the respective cams on the same side.

[0017]

As described above, in the tip pushing-up device of the present invention, the height of the tip pushing-up holder can be changed and the tip pushing-up can be performed in accordance with the change of the cam rotation range by the pulse drive motor. The needles can be aligned at the same time, eliminating the need for fine adjustments by the operator and the time required for that.
This has an excellent effect that the operating condition of the device can be easily changed and the operation rate is improved.

[Brief description of drawings]

FIG. 1 is a partially cutaway side view of an embodiment.

FIG. 2 is an enlarged front view showing an embodiment of a holder cam.

FIG. 3 is an enlarged front view showing an embodiment of a needle cam.

FIG. 4 is a correlation diagram showing a change in stroke at rotational positions of a holder cam and a needle cam.

FIG. 5 is an explanatory diagram showing the correlation between the tip push-up holder and the tip push-up needle at the rotational position of the cam.

FIG. 6 is a vertical cross-sectional side view before the tip push-up needle is projected.

FIG. 7 is a vertical cross-sectional side view of the tip push-up needle protruding state.

FIG. 8 is a correlation diagram of strokes of a holder cam and a needle cam showing an example of cam rotation.

FIG. 9 is a partially cutaway side view of a conventional example.

FIG. 10 is a vertical cross-sectional view of the main part of the same as above, in an appropriately used state.

FIG. 11 is a vertical cross-sectional view of a main part showing an operation failure state of the above.

[Explanation of symbols]

 1 Tip push-up needle 2 Tip push-up holder 3 Needle cam 3a Needle cam follower 4 Holder cam 4a Holder cam follower 5 Pulse drive motor 5a Shaft 6 Guide bearing 7, 8 Spring 9 Frame A Tip B Adhesive sheet C Adsorption collet

Claims (1)

[Claims] 1. A cylindrical tip push-up holder having a holder cam follower protruding from one side is held by a frame so as to be able to move up and down, and a tip push-up needle having a needle cam follower protruding from one side is raised and lowered in the tip push-up holder. A holder cam and a needle cam of a predetermined shape are fixed to the shaft of a pulse drive motor mounted on the above frame, and the tip push-up holder is biased by a spring in the direction in which the holder cam and the holder cam follower come into contact with each other. A tip pushing-up device comprising a spring for biasing the needle cam in a direction in which the needle cam and the needle cam follower come into contact with each other.