JPH05281034A - Manufacture of pyro-electric element - Google Patents

Abstract

PURPOSE:To provide a manufacturing method of pyro-electric elements which is capable of making the polalization process for various types of pyro-elements easier, and of achieving the improvement of mass-productivity. CONSTITUTION:Leader electrodes 6, 8, a dummy electrode 12, first and second auxiliary electrodes 9, 13 are formed on an insulating substrate 1 from which multiple insulating plates are taken, plural pyro-electric body-sheets 3 on which first - fourth, seventh, tenth, eleventh electrodes are formed, are supported on the insulating substrate, the leader electrode 6 and a gate terminal (a) of FET 5 are connected to the first electrode 4, the leader electrode 8 is connected to the second electrode 7, the dummy electrode is connected to an electric connection part (c) between the third and fourth electrodes, and high resistances 14 are connected to a gate terminal (a) and an earth terminal (b). After the pyro-electric body-sheets are polarized-processed by applying dc voltage between the auxiliary electrodes, the insulating substrate is cut in a state where electric connections of the leader electrodes and the dummy electrode to the auxiliary electrodes are cut out.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a pyroelectric element mounted on a pyroelectric detector for detecting infrared rays.

[0002]

2. Description of the Related Art Among the above pyroelectric detectors, a single type in which a pair of electrodes for infrared detection are formed on the front and back sides of a pyroelectric thin plate, and an array type in which a plurality of these electrodes are connected,
Alternatively, a dual type in which the first and second electrodes for infrared detection are formed on one side of the pyroelectric thin plate and the third and fourth electrodes are formed on the other side of the pyroelectric thin plate, or two of these There are a dual twin type in which the above are combined, and an array type in which a plurality of these are connected.

The pyroelectric detector 24 is constructed as follows, for example. That is, for example, a pyroelectric thin plate 3 made of PZT (titanic acid / zirconic acid / lead oxide ceramics)
While forming the first and second electrodes 4 and 7 on one side surface,
Third and fourth electrodes 10 and 11 which are electrically connected to each other in correspondence with the first and second electrodes 4 and 7 are formed on the other side surface, and the pyroelectric thin plate 3 is supported on the insulating plate 2. And let
The first electrode 4 is electrically connected to the gate terminal a of the FET 5 and the second electrode 7 is electrically connected to the ground terminal b, and the high resistance element 14 is connected across the gate terminal a and the ground terminal b, and The electric element 21 is formed. After the polarization treatment of the pyroelectric thin plate 3 described later, the lead pins 16, 17, 18 of the stem 15 are inserted through the through holes (for ground, drain and source) e, f and h of the insulating plate 2. While supporting the pyroelectric element 21 with the stem 15, the pyroelectric element 21 is
The pyroelectric detector 24 is configured by incorporating the above into a can 23 provided with an infrared transmission window 22 and sealing the lower opening of the can 23 with a stem 15.

The polarization treatment of the pyroelectric thin plate 3 of the pyroelectric detector 24 is performed between the three electrode portions provided on the insulating plate 2, more specifically, the first and second electrodes 4 , 7 are short-circuited, and the two electrodes 4, 7 and the third and fourth electrodes
A pin such as a contact probe of the circuit A in which the DC power source 20 is interposed is brought into contact with the electrical connection portion c of the first and third electrodes 11 and 11, and the first and third electrodes 4 and 10 and between the second and second electrodes 4 and 10. 4 electrodes 7,
A direct current voltage is applied between the electrodes 11, and the pyroelectric thin plate 3 is partially polarized by making the polarities different between the front and back electrodes 4, 10, 7, 11.

[0005]

However, the pyroelectric detector itself is extremely small, and the electrode portions at the three points for applying a DC voltage are extremely small, at most about 1 mm square, It was very difficult to align the pins with the three electrode parts. Moreover, in order to achieve the predetermined polarization treatment, it is necessary to apply a voltage to the electrode portions at the three points for about 200 seconds. During this time, it is very difficult to maintain the alignment state of the pins, and mass production is performed. There was a problem that the sex did not go up.

The present invention has been devised in view of the above circumstances, and provides a method for manufacturing a pyroelectric element that facilitates polarization treatment for various types of pyroelectric elements and improves mass productivity. The purpose is to do.

[0007]

The first invention of the present application provides a single type pyroelectric element in which a pair of electrodes are formed on the front and back surfaces of a pyroelectric thin plate, or an array type pyroelectric element in which a plurality of these electrodes are connected. According to the manufacturing method, more specifically, a pyroelectric thin plate having electrodes formed on both front and back surfaces is supported by an insulating plate, and one of the front and back electrodes serves as a gate terminal of the FET and the other electrode serves as a ground terminal. With electrical connection,
Manufacture of a pyroelectric element in which a direct current voltage is applied between both terminals while a high resistance body is connected across the gate terminal and the ground terminal to partially polarize the pyroelectric thin plate between the front and back electrodes. It depends on the method.

In such a method for manufacturing a pyroelectric element, according to the first aspect of the present invention, the lead-out electrodes for the gate terminal and the ground terminal and the lead-out electrodes are provided on the insulating substrate for taking a large number of the insulating plates. Separately, auxiliary electrodes connected in parallel are formed at predetermined intervals, and a plurality of pyroelectric thin plates are supported on the insulating substrate in correspondence with each extraction electrode, and one of the front and back sides of the pyroelectric thin plate is supported. The lead electrode for the gate terminal and the gate terminal of the FET are electrically connected to the electrode, the lead electrode for the ground terminal is electrically connected to the other of the front and back electrodes, and the gate terminal and the ground terminal are connected. A direct current voltage is applied between the auxiliary electrodes with the high-resistance element connected to partially polarize the pyroelectric thin plate, and then the electrical connection of each extraction electrode to the auxiliary electrode is separated. A state which is characterized by cutting the insulating substrate around a predetermined pyroelectric thin.

A second invention of the present application is a dual-type pyroelectric element in which the first and second electrodes are formed on one side surface of the pyroelectric thin plate and the third and fourth electrodes are formed on the other side surface of the pyroelectric thin plate. Alternatively, it relates to a method for manufacturing an array-type pyroelectric element in which a plurality of these elements are connected, and more specifically, the first and second electrodes are provided on one side face and correspond to the first and second electrodes, and are electrically connected to each other. A pyroelectric thin plate having third and fourth electrodes connected to each other on its other side surface is supported on an insulating plate, and the first electrode is electrically connected to the gate terminal of the FET and the second electrode is electrically connected to the ground terminal. And a high resistance body is connected across the gate terminal and the ground terminal, and the short-circuited portion and the electrical connection portion of the third and fourth electrodes in a state where the first and second electrodes are short-circuited. Apply a DC voltage between the Those Ru or the pyroelectric element manufacturing method for partially polarized with different polarities between.

In the method of manufacturing such a pyroelectric element, in the second aspect of the present invention, the lead-out electrodes for the gate terminal and the ground terminal and these lead-out electrodes are provided on the insulating substrate for taking a large number of the insulating plates. A first auxiliary electrode connected in parallel, a dummy electrode for an electrical connection between the third and fourth electrodes, and a second auxiliary electrode in which the dummy electrode is connected in parallel are formed at predetermined intervals. A plurality of pyroelectric thin plates are supported on the insulating substrate so as to correspond to the respective extraction electrodes and the dummy electrodes, and the first electrode of each pyroelectric thin plate is connected to the extraction electrode for the gate terminal and the gate terminal of the FET. And an extraction electrode for the ground terminal on the second electrode,
The dummy electrodes are electrically connected to the electrical connection portions between the third and fourth electrodes, respectively, and the high resistance body is connected across the gate terminal and the ground terminal. A direct current voltage is applied between the auxiliary electrodes to partially polarize the pyroelectric thin plate, and then the insulating substrate is placed in a state of disconnecting the electrical connection between each lead electrode and the dummy electrode with respect to the auxiliary electrode. It is characterized by cutting around a predetermined pyroelectric thin plate.

A third invention of the present application relates to a method of manufacturing a dual twin type pyroelectric element in which two of the above dual types are combined, or an array type pyroelectric element in which a plurality of these are combined. More specifically, a pyroelectric thin plate having first and second electrodes formed on one side surface and third and fourth electrodes formed on the other side surface and electrically connected to each other so as to correspond to the first and second electrodes. Is electrically connected to the insulating plate, the first electrode is electrically connected to the gate terminal of the FET, the second electrode is electrically connected to the ground terminal, and the lead electrode is electrically connected over a predetermined ground terminal, A high resistor is connected across the gate terminal and the ground terminal, and further, between the short-circuited portion and the electrical connection portion of the third and fourth electrodes in a state where the first and second electrodes are short-circuited. Applying DC voltage Pyroelectric thin is whether Ru as the manufacturing method of the pyroelectric to partially polarized with different polarities between the front and back electrodes.

In such a method for manufacturing a pyroelectric element, according to the third aspect of the present invention, the lead-out electrodes for the gate terminal and the ground terminal and the lead-out electrodes are provided on the insulating substrate for taking a large number of the insulating plates. A first auxiliary electrode connected in parallel, a dummy electrode for an electrical connection between the third and fourth electrodes, a second auxiliary electrode to which the dummy electrode is connected in parallel, and a lead for a predetermined ground terminal Lead electrodes for electrically connecting the electrodes are formed at predetermined intervals, and a plurality of pyroelectric thin plates are supported on the insulating substrate in correspondence with the extraction electrodes and the dummy electrodes, so that each pyroelectric layer is supported. Lead electrode for gate terminal and FET on the first electrode of the thin plate
And a dummy electrode at an electrical connection portion between the third and fourth electrodes, and a gate electrode for the ground terminal at the second electrode, and the gate terminal. And a grounding terminal with a high resistance connected, a DC voltage is applied between the first and second auxiliary electrodes to partially polarize the pyroelectric thin plate, and then the auxiliary electrode. Is characterized in that the insulating substrate is cut around a predetermined thin pyroelectric body plate in a state where the electrical connection between each extraction electrode and the dummy electrode is separated.

[0013]

In any of the above-mentioned first to third inventions, the polarization treatment for a plurality of pyroelectric thin plates can be achieved all at once by applying a voltage between the auxiliary electrodes. Then, by cutting the insulating substrate after the polarization treatment, a single type, an array type in which a plurality of these are connected, a dual type or a dual twin type, and an array type pyroelectric element in which a plurality of these are connected are provided. , Many are taken at once.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a method of manufacturing a dual type pyroelectric element which discloses the second invention shown in FIGS. 11 and 12 will be described with reference to FIGS. In these figures, 1 is an insulating substrate for taking a large number of insulating plates 2, and the first electrode 4 formed on the pyroelectric thin plate 3 is connected to the gate terminal a of the FET 5 mounted on the pyroelectric thin plate 3. A lead electrode 6 for electrically connecting, a lead electrode 8 for electrically connecting the second electrode 7 to the ground terminal b, and a first auxiliary electrode 9 for connecting these lead electrodes 6, 8 in parallel. And a dummy electrode 12 for the electrical connection c between the third and fourth electrodes 10 and 11, and a second auxiliary electrode 13 for connecting the dummy electrode 12 in parallel are formed on the surface side at predetermined intervals. On the back surface side, a high resistance body 14 is formed which is connected across the gate terminal a and the ground terminal b.

The insulating substrate 1 has a through hole d for electrically connecting the gate terminal a and the high resistance element 14, and three lead pins connected to the stem 15 (for grounding. Through holes e, f, h for inserting and holding the drain and source parts 16, 17, 18 are formed,
Moreover, the lead pin 16 for grounding electrically connects the grounding terminal b and the high resistance body 14 to each other. The first and second auxiliary electrodes 9 and 13 can be easily aligned with a pin such as a contact probe of a circuit A having a DC power source 20 described later and a DC voltage can be applied by contacting the pins. It is formed large in area so that it is performed.

As shown in FIG. 2, a predetermined portion of the insulating substrate 1 thus formed (in the embodiment, a portion surrounded by four through holes d, e, h, f) serves as a heat insulating material. A plurality of pyroelectric thin plates 3 are supported via spacers (see FIG. 11) 19, the first electrode 4 is used as a lead electrode 6 for a gate terminal, and the second electrode 7 is used as a ground terminal. , And the electrical connection portion c is electrically connected to the dummy electrode 12 by, for example, a conductive adhesive. As shown in FIG. 3, a DC power source 20 is connected between the first and second auxiliary electrodes 9 and 13 and a voltage of, for example, 200 V is applied between the auxiliary electrodes 9 and 13 for 200 seconds. As a result, in each of the plurality of pyroelectric thin plates 3, the portions corresponding to the first and second electrodes 4 and 7 are positive electrodes and the portions corresponding to the third and fourth electrodes 10 and 11 are negative electrodes, Each will be polarized at once.

After this polarization treatment, as shown by the broken line in FIG. 4, the electrical connection between the respective lead-out electrodes 6 and 8 and the dummy electrode 12 with respect to the first and second auxiliary electrodes 9 and 13 is cut off. By cutting the insulating substrate 1 around each of the pyroelectric thin plates 3, a large number of dual type pyroelectric elements 21 are taken at once, and the pyroelectric elements 21 are used as a can 23 with an infrared transmitting window 22. By incorporating it and sealing the lower opening of the can 23 with the stem 15,
The dual type pyroelectric detector 24 shown in FIG. After the above polarization treatment, the insulating substrate 1 is cut at the location indicated by the chain double-dashed line in FIG.
It is possible to obtain a large number of array type pyroelectric elements in which a plurality of dual type pyroelectric elements 21 are connected.

FIG. 6 shows a manufacturing example of a dual-twin type pyroelectric element disclosing the third invention, and when forming an electrode pattern on the insulating substrate 1, a pair of two ground terminals which are vertically adjacent to each other are formed. The extraction electrode 6 for the through hole i
The lead electrode 25 is formed to be electrically connected to each other via. Note that all the lead electrodes 6 that are vertically adjacent to each other may be electrically connected by the lead electrodes 25.

According to the above structure, as shown by the chain double-dashed line in the figure, the insulating substrate 1 is cut at the portions surrounding the upper and lower two pyroelectric thin plates 3, respectively. A large number of dual twin type pyroelectric elements 21 are taken. Alternatively, as shown by a broken line in the figure, by taking a form in which a plurality of sets of upper and lower two pyroelectric elements 21 are integrally cut, an array type pyroelectric element 21 in which a plurality of dual twin type pyroelectric elements 21 are connected in series is formed. A large number of electric elements can be taken.

Further, as shown by a chain double-dashed line in FIG. 8, the insulating substrate 1 is cut at a portion surrounding four pyroelectric thin plates 3 which are vertically and horizontally adjacent to each other, and the pyroelectrics on the left and right of the insulating substrate 1 are cut. Thin plate 3
Between the extraction electrodes 6 and 8 and the dummy electrode 12
By forming a half-cut portion j shown by a broken line in the figure so as to divide the electrical connection to the second auxiliary electrodes 9 and 13, two sets of two dual twin type pyroelectric elements 21 are integrated. It is possible to take a large number of pyroelectric elements. The half cut portion j may be formed before the insulating substrate 1 is cut, and the number of the pyroelectric elements 21 is not limited to two. It is possible to implement in a form that aggregates. 6 and 8, the same components as those shown in FIG. 5 are designated by the same reference numerals to avoid redundant description.

FIG. 9 shows an example of manufacturing a single type pyroelectric element which starts the first invention, in which electrodes 26 and 27 are formed on both front and back surfaces of the pyroelectric thin plate 3 while insulation for supporting the pyroelectric thin plate is formed. On the front surface side of the insulating substrate 1 on which a large number of plates 2 are taken, a leading electrode 28 for the gate terminal for electrically connecting the front and back electrodes 26 to the gate terminal a of the FET 5, and the other front and back electrodes.
A ground terminal lead-out electrode 29 for electrically connecting 27 to the ground terminal b and auxiliary electrodes 30, 31 for parallel connection of the respective lead-out electrodes 28, 29 are formed at predetermined intervals, and the back surface is formed. On the side, a high resistor 32 is formed which is connected across the gate terminal a and the ground terminal b.

Then, similarly to the molding of the dual type pyroelectric element described above, the pyroelectric thin plate 3 is supported at a predetermined position of the insulating substrate 1 and predetermined electrical connection is made to each electrode and the auxiliary A DC power supply 33 is connected between the electrodes 30 and 31 to partially polarize the pyroelectric thin plate 3 around the electrodes 26 and 27. After this polarization process,
As shown by the chain double-dashed line in the figure, the insulating substrate 1 is cut around each pyroelectric thin plate 3 in a state where the electrical connection of each lead electrode 28, 29 to the auxiliary electrode 30, 31 is cut off. By this, a large number of single type pyroelectric elements 21 of the circuit shown in FIG. 10 are taken at once, or by taking a cutting form only in the vertical direction, an array in which a plurality of single type pyroelectric elements 21 are connected. Many types of pyroelectric elements can be taken.

In each of the above embodiments, the electrodes 10, 11, and 26 on the surface side of the pyroelectric thin plate 3 are made positive, but they can be made negative. Even if it has the polarity of,
Pyroelectric element with 26 facing the back side of pyroelectric thin plate 3.
It is possible to configure 21.

[0024]

As described above, according to the method for manufacturing a pyroelectric element according to the present invention, the polarization treatment for a plurality of pyroelectric thin plates can be achieved all at once by applying a voltage between the auxiliary electrodes. Moreover, since it is possible to easily form an auxiliary electrode for applying a voltage in a large area, it is possible to align a pin of a contact probe or the like through which a DC power source is inserted and Application is easily achieved. Then, by cutting the insulating substrate after the above polarization treatment, a single type, an array type in which a plurality of these are connected, a dual type or a dual twin type, or an array type in which a plurality of these are connected is used. A large number of elements were taken at once, and eventually, various types of pyroelectric elements could be mass-produced at a significant cost reduction.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing details of a pyroelectric thin plate and an electrode pattern formed on a partially cut insulating substrate.

FIG. 2 is an explanatory diagram of attachment of a pyroelectric thin plate to an insulating substrate.

FIG. 3 is a circuit diagram before a plurality of pyroelectric elements are taken.

FIG. 4 is an explanatory diagram showing a plurality of pyroelectric elements.

FIG. 5 is an explanatory diagram in which a large number of dual type pyroelectric elements are formed as an array.

FIG. 6 is an explanatory diagram showing a dual twin type pyroelectric element and a large number of the pyroelectric elements as an array.

FIG. 7 is a circuit diagram of a dual twin type pyroelectric element.

FIG. 8 is an explanatory diagram in which two pairs of dual twin type pyroelectric elements are aggregated and taken in large numbers.

FIG. 9 is an explanatory view showing a large number of single-type pyroelectric elements.

FIG. 10 is a circuit diagram of a single type pyroelectric element.

FIG. 11 is an explanatory diagram of a dual type pyroelectric detector.

FIG. 12 is a circuit diagram of voltage application to a pyroelectric thin plate in a conventional example.

[Explanation of reference numerals] 1 ... Insulating substrate, 2 ... Insulating plate, 3 ... Pyroelectric thin plate, 4, 7,
10, 11, 26, 27 ... Electrodes formed on a pyroelectric thin plate, 5 ... FE
T, 6, 8, 28, 29 ... Extractor electrode, 9, 13, 30, 31 ...
Auxiliary electrode, 12 ... Dummy electrode, 14, 32 ... High resistance element, 20, 33
... DC power supply, 21 ... Pyroelectric element, 25 ... Lead electrode, a ... Gate terminal, b ... Ground terminal, c ... Electrical connection part.

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Masami Nakane, Inventor Masami Nakane 2 Higashimachi, Kichijoin Miya, Minami-ku, Kyoto-shi, Kyoto

Claims (3)

[Claims] 1. A pyroelectric thin plate having electrodes formed on both front and back surfaces thereof is supported by an insulating plate, and one of the front and back electrodes is electrically connected to a gate terminal of an FET and the other electrode is electrically connected to a ground terminal. Manufacture of a pyroelectric element in which a direct current voltage is applied between both terminals while a high resistance element is connected across the gate terminal and the ground terminal to partially polarize the pyroelectric thin plate between the front and back electrodes. A method for forming a plurality of insulating plates, wherein an extraction electrode for a gate terminal and a ground terminal, and an auxiliary electrode in which each extraction electrode is connected in parallel are formed at predetermined intervals on an insulating substrate for obtaining a large number of the insulation plates. In addition, a plurality of pyroelectric thin plates are supported on the insulating substrate so as to correspond to the respective extraction electrodes, and one of the front and back electrodes of the pyroelectric thin plate is connected to the extraction electrode for the gate terminal and the FE.
In a state where the gate terminal of T is electrically connected, the lead electrode for the ground terminal is electrically connected to the other electrode on the front and back sides, and the high resistance body is connected across the gate terminal and the ground terminal. A direct current voltage is applied between the auxiliary electrodes to partially polarize the pyroelectric thin plate, and then the insulating substrate is set to a predetermined state in a state of disconnecting the electrical connection of each extraction electrode to the auxiliary electrode. A method for manufacturing a pyroelectric element, which comprises cutting around a pyroelectric thin plate. 2. A pyroelectric body having first and second electrodes formed on one side surface and third and fourth electrodes formed on the other side surface and electrically connected to each other so as to correspond to the first and second electrodes. A thin plate
The first electrode is electrically connected to the gate terminal of the FET, and the second electrode is electrically connected to the ground terminal, and the high resistance is connected across the gate terminal and the ground terminal, and the first resistor is connected. In the state where the second electrode is short-circuited, a direct current voltage is applied between the short-circuited portion and the electrical connection portion of the third and fourth electrodes to make the pyroelectric thin plate have polarities mutually between the front and back electrodes. A method of manufacturing a pyroelectric element, which comprises differently partially polarizing treatments, comprising: an insulating substrate for taking a large number of the insulating plates, extraction electrodes for gate terminals and ground terminals, and these extraction electrodes arranged in parallel. A first auxiliary electrode connected to, a dummy electrode for an electrical connection between the third and fourth electrodes, and a second auxiliary electrode to which the dummy electrode is connected in parallel are formed at predetermined intervals, Each extraction electrode A plurality of pyroelectric thin plates are supported on the insulating substrate in association with the dummy electrodes, and a first electrode of each pyroelectric thin plate has a lead electrode for a gate terminal and a gate terminal of an FET, and A ground electrode lead-out electrode is electrically connected to the second electrode, and a dummy electrode is electrically connected to an electrical connection portion between the third and fourth electrodes, and a high resistance is provided across the gate terminal and the ground terminal. With the body connected, a DC voltage is applied between the first and second auxiliary electrodes to partially polarize the pyroelectric thin plate, and then each extraction electrode and dummy electrode for the auxiliary electrode. A method for manufacturing a pyroelectric element, characterized in that the insulating substrate is cut around a predetermined pyroelectric thin plate in a state in which the electrical connection of (1) is disconnected. 3. A pyroelectric body having first and second electrodes formed on one side surface and third and fourth electrodes formed on the other side surface and electrically connected to each other so as to correspond to the first and second electrodes. A thin plate
The gate is supported by an insulating plate, the first electrode is electrically connected to the gate terminal of the FET, the second electrode is electrically connected to the ground terminal, and the lead electrode is electrically connected across a predetermined ground terminal. A high-voltage resistor is connected across the terminal and the ground terminal, and a DC voltage is further applied between the short-circuited portion and the electrical connection portion of the third and fourth electrodes with the first and second electrodes short-circuited. Is applied,
A method for manufacturing a pyroelectric element in which a thin thin plate of pyroelectric material is partially polarized by making the polarities different between the front and back electrodes, wherein an insulating substrate for taking a large number of the insulating plates, a gate terminal and a ground. A lead electrode for a terminal, a first auxiliary electrode to which these lead electrodes are connected in parallel, a dummy electrode for an electrical connection between the third and fourth electrodes, and a dummy electrode to which the dummy electrode is connected in parallel. 2 Auxiliary electrodes and lead electrodes for electrically connecting predetermined ground terminal lead electrodes are formed at predetermined intervals, and a plurality of lead electrodes and dummy electrodes are formed on the insulating substrate in association with each other. The pyroelectric thin plates are supported, and the first electrode of each pyroelectric thin plate has the extraction electrode for the gate terminal and the gate terminal of the FET, and the second electrode has the extraction electrode for the ground terminal.
Further, dummy electrodes are electrically connected to the electrical connection portions between the third and fourth electrodes, respectively, and a high resistance element is connected across the gate terminal and the ground terminal,
Applying a DC voltage between the first and second auxiliary electrodes,
After partially polarizing the pyroelectric thin plate, cutting the insulating substrate around a predetermined pyroelectric thin plate in a state where the electrical connection between each extraction electrode and the dummy electrode with respect to the auxiliary electrode is disconnected. A method for manufacturing a pyroelectric element, comprising: