JPH052807Y2 - - Google Patents
Info
- Publication number
- JPH052807Y2 JPH052807Y2 JP1987018224U JP1822487U JPH052807Y2 JP H052807 Y2 JPH052807 Y2 JP H052807Y2 JP 1987018224 U JP1987018224 U JP 1987018224U JP 1822487 U JP1822487 U JP 1822487U JP H052807 Y2 JPH052807 Y2 JP H052807Y2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- light
- displacement
- lens
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 29
- 201000009310 astigmatism Diseases 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 15
- 238000005259 measurement Methods 0.000 description 9
- 239000000523 sample Substances 0.000 description 8
- 238000001514 detection method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987018224U JPH052807Y2 (fr) | 1987-02-10 | 1987-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987018224U JPH052807Y2 (fr) | 1987-02-10 | 1987-02-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63126812U JPS63126812U (fr) | 1988-08-18 |
JPH052807Y2 true JPH052807Y2 (fr) | 1993-01-25 |
Family
ID=30811702
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987018224U Expired - Lifetime JPH052807Y2 (fr) | 1987-02-10 | 1987-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH052807Y2 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2785196B2 (ja) * | 1989-02-16 | 1998-08-13 | ソニー株式会社 | 非接触厚み分布測定方法 |
US8537376B2 (en) * | 2011-04-15 | 2013-09-17 | Faro Technologies, Inc. | Enhanced position detector in laser tracker |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6139240A (ja) * | 1984-07-27 | 1986-02-25 | Matsushita Electric Ind Co Ltd | 焦点検出装置 |
-
1987
- 1987-02-10 JP JP1987018224U patent/JPH052807Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6139240A (ja) * | 1984-07-27 | 1986-02-25 | Matsushita Electric Ind Co Ltd | 焦点検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS63126812U (fr) | 1988-08-18 |
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