JPH052807Y2 - - Google Patents

Info

Publication number
JPH052807Y2
JPH052807Y2 JP1987018224U JP1822487U JPH052807Y2 JP H052807 Y2 JPH052807 Y2 JP H052807Y2 JP 1987018224 U JP1987018224 U JP 1987018224U JP 1822487 U JP1822487 U JP 1822487U JP H052807 Y2 JPH052807 Y2 JP H052807Y2
Authority
JP
Japan
Prior art keywords
measured
light
displacement
lens
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987018224U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63126812U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987018224U priority Critical patent/JPH052807Y2/ja
Publication of JPS63126812U publication Critical patent/JPS63126812U/ja
Application granted granted Critical
Publication of JPH052807Y2 publication Critical patent/JPH052807Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987018224U 1987-02-10 1987-02-10 Expired - Lifetime JPH052807Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987018224U JPH052807Y2 (fr) 1987-02-10 1987-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987018224U JPH052807Y2 (fr) 1987-02-10 1987-02-10

Publications (2)

Publication Number Publication Date
JPS63126812U JPS63126812U (fr) 1988-08-18
JPH052807Y2 true JPH052807Y2 (fr) 1993-01-25

Family

ID=30811702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987018224U Expired - Lifetime JPH052807Y2 (fr) 1987-02-10 1987-02-10

Country Status (1)

Country Link
JP (1) JPH052807Y2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2785196B2 (ja) * 1989-02-16 1998-08-13 ソニー株式会社 非接触厚み分布測定方法
US8537376B2 (en) * 2011-04-15 2013-09-17 Faro Technologies, Inc. Enhanced position detector in laser tracker

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139240A (ja) * 1984-07-27 1986-02-25 Matsushita Electric Ind Co Ltd 焦点検出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139240A (ja) * 1984-07-27 1986-02-25 Matsushita Electric Ind Co Ltd 焦点検出装置

Also Published As

Publication number Publication date
JPS63126812U (fr) 1988-08-18

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