JPH05280695A - Branch pipe connecting mechanism - Google Patents

Abstract

PURPOSE:To automate the operation of a branch pipe connecting mechanism in remaining gas emitting-vaccumizing equipment by mounting swingingly a branch pipe connecting mechanism body having a hose joint part, a driven mechanism and a pressing mechanism for the same on a lift means. CONSTITUTION:A container fixed to a turntable 2 is moved beneath a container valve opening and closing mechanism 5 which is lowered by a lift unit 23. A branch pipe connecting mechanism body 6a delayed by 1 pulse is lowered by a lift unit 36. A pawl member of the valve opening and closing mechanism 5 is engaged with a handle in the valve part of the container to locate the branch pipe connecting mechanism body 6a in the pipe sleeve of the container valve. Next, the pressing mechanism 39 of the mechanism body 6a is operated to advance the driven mechanism 38 and connect a joint to the pipe sleeve. Then, the joint is automatically aligned and connected with pipe sleeve by the swing of a mounting plate 61. The container valve opening and closing mechanism 5 under such a condition is operated by the operation of a gas processing part to emit the remaining gas in the container.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a branch pipe connecting mechanism which can be used in a residual gas discharge / vacuum facility for automatically removing the residual gas from a used high pressure gas container and making the inside of the container vacuum.

[0002]

2. Description of the Related Art Various gases such as silane gas are filled in a high pressure gas container (hereinafter abbreviated as a container) and supplied to customers. The customer takes the gas out of the container and uses it, with some gas remaining in the used container. After this, the container is collected by the manufacturer and used again, but at this time, it is necessary to clean the inside of the container.

Conventionally, this work has been performed manually. That is, after connecting the pipeline of the gas processing equipment for releasing the residual gas of the high-pressure gas container to draw a vacuum in the container and the container valve of the container using a cap nut, operate the equipment to discharge the residual gas from the container. Was evacuated, and then a cleaning gas such as high-purity nitrogen gas was repeatedly injected and released several times, and finally the inside of the container was evacuated to keep the inside of the container clean.

As described above, conventionally, the work of connecting the container valve of the container to the pipeline of the gas treatment facility by using the cap nut must be manually performed one by one.
There has been a problem that the above work requires a lot of trouble.

Further, a gas processing facility for automating the residual gas discharge / vacuum work of the high-pressure gas container by hand has been developed. Examples of the automatic gas treatment device include, for example, a turntable for rotating and conveying a plurality of containers in an upright state, a valve opening / closing device for opening and closing a container valve of the container transferred to a predetermined position, and a container valve. There has been proposed a residual gas discharge / vacuum installation facility including a joint portion of a gas discharging / introducing hose connected to a base portion and a branch pipe connecting mechanism having a pressing mechanism for pushing the joint portion.

This residual gas discharge / vacuum evacuating equipment rotatably conveys a used container by a turntable, connects a hose joint to the container valve mouthpiece of the container which has been conveyed to a predetermined position, and uses a valve opening / closing device. Open the valve, discharge the residual gas from the joint to the hose, further vacuum the inside of the container through the hose, perform cleaning treatment such as pure nitrogen gas cleaning, then vacuum the inside of the container and close the container valve. .. When the processing of one container is completed in this way, the turntable rotates, the next container is sent to the work processing position, and the residual gas processing is performed by the same procedure.

[0007]

However, there are some problems in putting such residual gas discharge / vacuum drawing equipment into practical use. One of those problems is that the connection between the mouthpiece of the container valve and the joint of the hose cannot be performed smoothly. That is, when the hose joint is advanced and connected to the container valve mouthpiece of the container conveyed to the predetermined work processing position by the turntable, the advancing joint hits the container valve mouthpiece and the container is pushed. As a result, the container is tilted, and as a result, the relative position between the container valve mouthpiece portion and the joint portion is displaced, which may result in a poor connection between the joint portion and the container valve mouthpiece portion.

The present invention has been made in view of the above circumstances, and provides equipment for eliminating defective connection between a container valve mouthpiece and a joint and automating residual gas discharge / vacuum work of a high-pressure gas container. With the goal.

[0009]

SUMMARY OF THE INVENTION A branch pipe connecting mechanism of the present invention comprises a driven mechanism having a joint portion of a hose connected to a container valve of a high-pressure gas container attached to a tip thereof and a driven mechanism for pushing the driven mechanism. It is composed of a branch pipe connection mechanism main body provided with a pressing mechanism provided at the rear of the mechanism, and an elevating means for moving the branch pipe connection mechanism main body up and down, and the branch pipe connection mechanism main body can be swung to the elevating means. It is attached to.

[0010]

The branch pipe connecting mechanism of the present invention is provided with a driven mechanism having a hose joint attached to the tip thereof, and a pressing mechanism provided behind the driven mechanism to push the driven mechanism. Since the connecting mechanism body is configured to be swingably attached to the elevating means, when the hose joint is advanced to connect to the container valve mouthpiece, the advancing joint hits the container valve mouthpiece. Even if the container is slightly tilted, the branch pipe connecting mechanism body is swung to correct the advancing direction of the joint to follow the inclination of the container, and the container valve mouthpiece and the joint are reliably connected.

[0011]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the branch pipe connecting mechanism of the present invention will be described below with reference to the drawings. The branch pipe connection mechanism of this embodiment is
It is installed in the residual gas discharge / vacuum drawing facility of the high pressure gas container. This residual gas release / vacuum installation equipment for a high-pressure gas container is composed of a container handling unit 1 shown in FIG. 1 for handling a high-pressure gas container, and a gas treatment shown in FIG. It is roughly configured by the unit 2. The container handling unit 1 further includes a turntable 3 on which a high-pressure gas container is placed and rotated, a container support mechanism 4 for fixing the container, a container-valve opening / closing mechanism 5 for opening and closing the valve of the high-pressure gas container, and the high-pressure gas container having the above-mentioned predetermined configuration. When it is sent to a position, it is roughly configured by a branch pipe connecting mechanism 6 that connects the container valve and the gas processing unit 2.

As shown in FIG. 2, the turntable 3 is composed of a circular base 7, a motor 8 for rotating the base 7, and a speed reducer 9. This turntable 3
A container support mechanism 4 shown in FIG. 3 is provided at the center of the. The container support mechanism 4 is roughly configured by a column 10 standing upright in the center of the table 7, a container main body V receiver 11, a clamp mechanism 12, and a valve portion receiver 13. As shown in FIG. 4, the container main body V receiver 11 is a plate-like member having a substantially V-shaped notch formed therein, and is attached to the column 10 so as to abut the upper and lower parts of the main body of the container. ing. The clamp mechanism 12 is roughly configured by an air cylinder 15, a clamp 16 and a clamp confirmation air limit switch 17. The clamp mechanism 12 is provided between the V receivers 11 for the container body provided at two upper and lower positions, and when the air cylinder 15 is extended, an arrow Y in FIG.
As shown by, the clamp 16 falls and the container is sandwiched between it and the V receiver 11 for the container body to fix it. The air cylinder 15 and the air limit switch 17 are connected by a pipe line 90 as shown in FIG. 2, and when the pressure in the air cylinder 15 becomes a predetermined value or more by inclining the clamp 16 as described above, this is the air limit switch. It is detected by 17 and it is confirmed that the container is fixed. As shown in FIG. 5, the valve portion receiver 13 holds the valve portion 18 of the container, and is provided so that the vertical position can be adjusted. The valve portion receiver 13 includes a valve portion 18
A recessed portion 91 is formed on the side on which the safety valve 20 is provided with almost no looseness. The valve portion 1 is placed in the recess 91.
When the safety valve 20 side of No. 8 is inserted, the container valve mouthpiece portion (hereinafter abbreviated as the mouthpiece portion) 21 of the container faces the outside in the radial direction of the turntable 3.

The container valve opening / closing mechanism 5 is, as shown in FIG. 6, a beam member 2 provided above the turntable 3.
It is attached to an elevating unit 23 which is continuously provided under 2. As shown in FIG. 7, the container valve opening / closing mechanism 5 includes a claw member 24 provided at the lower end connected to a rotary drive mechanism 26 via a center compliance 25. The claw member 24 has a plurality of claws 27 arranged so as to be engaged with the handle 29 of the valve portion 18 of the container and projecting downward from the plate portion 28. Rotation drive mechanism 26
Is for rotating the claw member 24, and there are an electric type and a pneumatic type. The center compliance 25 interposed between the rotary drive mechanism 26 and the pawl member 24 allows the central axis of the rotary drive mechanism 26 and the central axis of the pawl member 24 to be slightly deviated from each other. Handle 29
The engagement of the claw member 24 with respect to is smoothly performed. As shown in FIG. 7, a descending stop position detecting mechanism 31 is attached to the lower end of the elevating unit 23. The descending stop position detecting mechanism 31 is provided with a photoelectric tube 33 at one lower end of the inverted L-shaped arm portions 32, 32 and a light emitting element 34 at the other. The photoelectric tube 33 and the light emitting element 34 of the descending stop position detecting mechanism 31 are provided at positions where the upper end of the mouthpiece portion 21 of the container is detected when the claw 27 of the container valve opening / closing mechanism 5 is properly engaged with the handle 29 of the container. Has been.

As shown in FIG. 6, the branch pipe connecting mechanism 6 is provided with an elevating unit 36 attached to the same beam member 22 as the container valve opening / closing mechanism 5, and is swingably attached to the elevating unit 36. It is composed of a branch pipe connection mechanism body 6a. As shown in FIG. 8, this branch pipe connection mechanism main body 6a is for connecting a hose 40 of the gas processing unit 2 described later to the base 21 of the container, and is connected to the hose 40 of the gas processing unit 2. The joint 37 is attached to the tip end side of the driven mechanism 38, and the driven mechanism 38 is pushed by the pressing mechanism 39. The joint 37 is formed by attaching a cover 44 having a chuck 43 to the outer periphery of the joint main body 42, in which the gas flow hole 41 is formed, on the front end side. The tip portion 42a of the joint body 42 is processed to a size that fits into the hole of the mouthpiece portion 21, and a collar portion 44a is formed behind the tip portion 42a. A packing 45 that comes into contact with the end surface of the mouthpiece portion 21 is attached to the front surface of the collar portion 44a. A driven mechanism 38 is provided at the rear of the joint 37.
Are connected.

The driven mechanism 38 is a bearing member 47 which is supported by a rail member 49 provided on a front portion of a lower surface of a support body 46 attached to the elevating unit 36 so as to be movable back and forth.
In addition, the sliding shaft 48 is provided so as to be movable back and forth.
The tip of the sliding shaft 48 is loosely inserted into the rear end of the joint body 42. Further, the tip end of the bearing member 47 and the joint main body 42 are provided with six coil springs 8 along the circumferential direction.
8 are connected by a floating mechanism 87.

A pressing mechanism 39 is provided on the rear side of the driven mechanism 38. The pressing mechanism 39 is the support 4
The slide rod 53 is inserted into the bearing member 52 attached to the central portion of the lower surface of the slide rod 6 so as to be movable back and forth.
Reference numeral 3 denotes a toggle link 54 attached to the rear end of the toggle link 54 which is moved by a piston 55 so as to be moved back and forth. The other end of the toggle link 54 is rotatably fixed to a block 57 attached to the rear end of the support 46. A roller 58 is provided at the rear of the block 57, and a column member 59 that supports the beam member 22.
The roller 58 abuts on a block 60 provided in the above to prevent the pressing mechanism 39 from retreating. This block 60
Limit switches 78 and 79 are attached to the plate via a plate 77. One limit switch 78 is provided so as to detect a state where the toggle link 54 is bent to a predetermined angle, and the other limit switch 79 is provided so as to detect a state where the toggle link 54 is fully extended.

The driven mechanism 38 and the pressing mechanism 39 are
They are connected to the lower surface side of the support body 46 via bearing members 47 and 52, respectively. Further, the support body 46 to which the branch pipe connection mechanism main body 6a including the driven mechanism 38 and the pressing mechanism 39 is fixed is provided with a hanging body extending downward from a mounting plate 61 fixed to the tip of the elevating unit 36 as shown in FIG. The lower plate 62 is swingably suspended. Also, the mounting plate 61 and the support 46
Four springs 63 are interposed between and. As shown in FIG. 10, the lower end portion of the hanging plate 62 is rotatably attached to the lower end portion of the exterior plate 64 fixed to both side surfaces of the support body 46 by using a pin joint 65. While the support body 46 swings around the pin joint 65 as an axis, the swing range is defined by the repulsive forces of the four springs 63, and a large swing exceeding a predetermined range is prevented. These springs 63 have a rectangular mounting plate 61.
Are attached in a loosely inserted state to the bolts 66 fixed to the respective corners of the.

The branch pipe connecting mechanism 6 has a driven mechanism 38 having a joint 37 of a hose 40 attached to the tip thereof, and a pressing mechanism 3 provided behind the driven mechanism 38 for pushing the driven mechanism 38.
The branch pipe connection mechanism main body 6a composed of 9 and 9 is swingably attached to the elevating unit, so that when the joint 37 is advanced and connected to the mouthpiece portion 21, the tip end portion 42a of the advancing joint is moved to the mouthpiece portion 21. Even if the container slightly tilts due to this, the branch pipe connection mechanism body 6a swings so that the forward direction of the joint 37 is corrected so as to follow the tilt of the container.

As shown in FIG. 11, the gas processing section 2 is connected to the branch pipe connecting mechanism 6 by a hose 40, and a main pipe line 68 to which the hose 40 is connected, and this main pipe line 68. The discharge conduit 70 is connected to the abatement device 69, and the vacuum conduit 72 is connected to the main conduit 68 and the vacuum pump 71. One end of the main pipe 68 is connected to a pure nitrogen supply source 92, and the other end of the main pipe 68 is connected to a continuous forming pressure gauge 74. Main line 68 hose 40
A nitrogen valve 81 is provided at a position closer to one end than the portion to which is connected. Further, the discharge pipe 70 is provided with a discharge valve 82, and the vacuum pipe 72 is provided with a vacuum valve 83. These valves 81, 82 and 83 are adapted to be opened and closed by operating nitrogen supplied from the operating nitrogen pipe 84 via electromagnetic valves 81a, 82a and 83a.

Next, the operation of the residual gas discharge / evacuation equipment of the high-pressure gas container having the above structure will be described. In order to process the residual gas in the high-pressure gas container with this equipment, the container is first placed on the turntable 3. At this time, as shown in FIG. 5, the safety valve 20 side of the valve portion 18 of the container is put into the recess 91 of the valve portion receiver 13 of the container support mechanism 4, and the main body portion of the container is set to the container main body V as shown in FIG. Put it in the receiver 11. After that, the air cylinder 15 of the clamp mechanism 12 is extended to bring down the clamp 16 to fix the container. That the container is thus fixed is confirmed by detecting that the air pressure in the air cylinder 15 has reached a predetermined value or more with the air limit switch 17. After placing one container on the turntable 3 in this manner,
Place 5 containers as shown in, and turntable 3
Is rotated by a specified angle, the first container is
It is sent to the work processing point indicated by the middle code A. Then, the container valve opening / closing mechanism 5 is lowered, and the branch pipe connecting mechanism main body 6a is lowered following this. The descent of the branch pipe connection mechanism body 6a is started one pulse later than the container valve opening / closing mechanism 5. As shown in FIG. 7, this descent is caused by the descent stop position detection mechanism 3 attached to the elevating unit 23 on the container valve opening / closing mechanism 5 side.
The upper end of the handle portion 29 of the container valve is detected by 1,
As shown in FIG. 8, the claw 27 of the claw member 24 is connected to the valve portion 1 of the container.
It meshes with the handle 29 of No. 8. Further, the lowering stop position detecting mechanism 31 detects the upper end of the mouthpiece portion 21 of the container valve, and the branch pipe connecting mechanism 6 descends to complete the positioning of the branch pipe connecting mechanism body 6a.

After the height positions of the container valve opening / closing mechanism 5 and the branch pipe connecting mechanism body 6a are determined as described above, the joint main body 42 of the branch pipe connecting mechanism 6 and the mouthpiece portion 21 of the container are connected. First, the piston 55 of the pressing mechanism 39 of the branch pipe connecting mechanism 6 extends and the toggle link 54 extends. Then, the pressing mechanism 39
The sliding rod 53 moves forward to move the driven mechanism 38 forward, and the tip portion 42a of the joint body 42 of the joint 37 is lightly inserted into the mouthpiece portion 21 and is strongly pressed. The joint body 42 is a floating mechanism 8 provided between the sliding shaft 48 and the joint body 42.
The position of the joint body 42 can be freely moved to a certain extent by 7 so that the tip of the joint main body 42 is smoothly guided into the hole of the base 21. Further, since the branch pipe connection mechanism body 6a is swingably suspended on the mounting plate 61 fixed to the elevating unit 36, when the joint 37 is advanced and connected to the mouthpiece portion 21, the joint 37 that advances is connected. Even if the tip portion 42a hits the mouthpiece portion 21 and the container slightly tilts, the branch pipe connection mechanism body 6a swings so that the forward direction of the joint 37 is corrected so as to follow the inclination of the container. The tip portion 42a of the joint 37 is securely inserted and strongly pressed. This completes the connection between the base 21 and the branch pipe connection mechanism 6.

When the connection to the container valve mouthpiece portion 21 is completed in this way, the residual gas treatment by the gas treatment portion 2 shown in FIG. 11 is performed as follows. First, the vacuum valve 83 of the vacuum line 72 is opened to open the main line 68.
And the inside of the hose 40 is exhausted. After this, the vacuum valve 83 is closed, and then the valve portion 18 of the container is opened by the container valve opening / closing mechanism 5 and the discharge valve 8 of the discharge pipeline 70 is opened.
Open 2 to release the residual gas in the container. Then, the discharge valve 82 is closed and the nitrogen valve 81 of the main line 68 is closed.
Open and pour high purity nitrogen into the container. Next, the nitrogen valve 81 is closed and the discharge valve 82 is opened to discharge the high-purity nitrogen injected into the container. The above steps are repeated a predetermined number of times. The discharge valve 82 is closed and the vacuum valve 83 is opened to evacuate the inside of the container. The vacuum valve 83 is closed. As described above, after the container is washed with high-purity nitrogen and the evacuation of the container is completed, the valve part 18 of the container is closed by the container valve opening / closing mechanism 5. Then, the piston 55 of the rear branch pipe connection mechanism 6 is driven to remove the joint main body 42 from the mouthpiece portion 21. When the processing of one container is completed in this way, the turntable 3 is rotated, the next container is sent to the work processing point A, and the residual gas processing is performed again by the above procedure.

In the branch pipe connecting mechanism 6 of this embodiment, when the high-pressure gas container is set at a predetermined position and the pressing mechanism 39 is operated, the joint 37 is connected to the base 21 of the high-pressure gas container. Therefore, according to the branch pipe connection mechanism 6 of this embodiment, the work of connecting the mouthpiece portion 21 of the container to the hose 40 of the gas processing equipment by using the cap nut is not necessary, and the residual gas discharge and the vacuum evacuation of the high pressure gas container are eliminated. The manpower required for the work can be reduced.

Further, in the branch pipe connecting mechanism 6 of this embodiment, the branch pipe connecting mechanism main body 6 is composed of a driven mechanism having a joint portion of a hose attached to a tip thereof and a pressing mechanism for pushing the driven mechanism.
Since a is swingably attached to the elevating unit 36, the pressing mechanism is actuated to push the driven mechanism to move the joint 3
7 is advanced to connect the tip portion 42a to the mouthpiece portion 21 of the container valve, even if the tip portion 42a of the advancing joint 37 hits the mouthpiece portion 21 and the container is slightly inclined, the branch pipe connection mechanism body By swinging 6a, the forward direction of the joint 37 is corrected so as to follow the inclination of the container, and the base portion 21 and the joint 37 are reliably connected. Therefore, according to the branch pipe connection mechanism 6 of this embodiment, the connection to the base portion 21 of the high pressure gas container can be reliably achieved.

In the previous embodiment, the lifting unit 36
As a means for swingably attaching the branch pipe connection mechanism main body 6a to the support body 4 to which the branch pipe connection mechanism main body 6a is fixed.
6 is suspended from a mounting plate 61 fixed to the elevating unit 36, and a spring 63 is interposed between the support 46 and the mounting plate 61 so as to be swingably mounted. The means for swingably attaching the mechanism main body 6a is not limited to this, and it is also possible to swingably connect the elevating unit 36 and the support 46 by a tension spring, a hydraulic buffer mechanism, or the like. Furthermore, a stationary lifting device may be used instead of the hanging lifting unit 36 used in this embodiment.

[0026]

As described above, in the branch pipe connecting mechanism according to the present invention, the driven mechanism having the joint part of the hose connected to the container valve of the high pressure gas container attached to the tip and the driven mechanism for pushing the driven mechanism. It is composed of a branch pipe connecting mechanism main body having a pressing mechanism provided behind the driven mechanism and an elevating means for moving the branch pipe connecting mechanism main body up and down. Since it is movably attached, when the high-pressure gas container is set at a predetermined position and the pressing mechanism is operated, the joint is connected to the mouthpiece of the high-pressure gas container. Therefore, according to this branch pipe connection mechanism, the work of connecting the mouthpiece part of the container to the hose of the gas processing equipment by using the cap nut is unnecessary, and the manpower required for discharging the residual gas of the high-pressure gas container and vacuuming work is reduced. be able to.

Further, in the branch pipe connection mechanism according to the present invention, since the branch pipe connection mechanism main body is swingably attached to the elevating means, when the hose joint is advanced to connect to the mouthpiece of the container valve. In addition, even if the advancing joint part hits the mouthpiece part of the container valve and the container slightly tilts, the branch pipe connection mechanism main body is oscillated so that the advancing direction of the joint part is corrected to follow the inclination of the container. The base portion and the joint portion are reliably connected. Therefore, according to this branch pipe connection mechanism, hose connection to the high-pressure gas container can be achieved quickly and reliably.

[Brief description of drawings]

FIG. 1 is a view showing a container handling unit of a residual gas discharge / evacuation facility provided with a branch pipe connection mechanism of an embodiment.

FIG. 2 is a schematic view showing a configuration of a turntable and a clamp mechanism of the residual gas discharge / vacuum drawing facility.

FIG. 3 is a view showing a container support mechanism of the equipment.

FIG. 4 is a plan view showing a container main body V receiver and a clamp mechanism of the container support mechanism of the same equipment.

FIG. 5 is a plan view showing a valve receiver of the container support mechanism of the equipment.

FIG. 6 is a view showing a container valve opening / closing mechanism of the same equipment, a branch pipe connecting mechanism, and an elevating unit holding them.

FIG. 7 is a front view showing a descending stop position detection mechanism of the same equipment.

FIG. 8 is a sectional view showing a branch pipe connection mechanism of the embodiment.

FIG. 9 is a side view of a main part of the branch pipe connection mechanism.

10 is a sectional view taken along line XX in FIG.

FIG. 11 is a system diagram showing a gas processing unit of the residual gas discharge / vacuum equipment.

FIG. 12 is a plan view showing a container handling unit of the same equipment.

[Explanation of symbols]

1 ... Container handling unit, 2 ... Gas processing unit, 3 ... Turntable, 4 ... Container support mechanism, 5 ... Container valve opening / closing mechanism, 6 ... Branch pipe connection mechanism, 6a ... Branch pipe connection mechanism Main unit, 7 ... Stand, 8 ... Motor, 9 ... Reducer, 10 ...
Prop, 11 ... V receiver for container body, 12 ... Clamp mechanism, 13 ... Valve portion receiver, 15 ... Air cylinder, 16
...... Clamp, 17 ...... Air limit switch, 18 ...
… Valve section, 20 …… Safety valve, 21 …… Container valve mouthpiece section, 22
...... Beam member, 23 ...... Lifting unit, 24 ...... Claw member,
25 ... Center compliance, 26 ... Rotation drive mechanism, 27 ... Claw, 28 ... Plate part, 29 ... Handle,
31 ... Descent stop position detection mechanism, 32 ... Arm, 33 ...
… Photocell, 34 …… Light emitting element, 36 …… Lifting unit,
37 ... Joint, 38 ... Following mechanism, 39 ... Pressing mechanism,
40 ... Hose, 41 ... Gas distribution hole, 42 ... Joint body, 42a ... Tip part, 43 ... Chuck, 44 ... Cover, 44a ... Collar part, 45 ... Packing, 46 ... Supporting body , 47 ... Bearing member, 48 ... Sliding shaft, 49 ...
Rail member, 52 ... Bearing member, 53 ... Sliding rod, 54 ... Toggle link, 55 ... Piston, 57 ...
... blocks, 58 ... rollers, 59 ... pillar members, 60 ...
... Blocks, 61 ... Mounting plates, 62 ... Hanging plates, 63 ...
… Spring, 64… Exterior plate, 65… Pin joint, 6
6 ... Bolt, 68 ... Main line, 69 ... Harmful device, 7
0 ... Release pipe, 71 ... Vacuum pump, 72 ... Vacuum pipe, 73 ... Triangular member, 74 ... Pressure gauge, 77 ... Plate, 78, 79 ... Limit switch, 81 ... Nitrogen Valve, 82 ... Release valve, 83 ... Vacuum valve, 81a, 82a,
83a ... Solenoid valve, 84 ... Nitrogen line for operation, 87 ...
Floating mechanism, 88 ... Spring, 90 ... Pipeline, 91 ... Recess, 92 ... Pure nitrogen supply source.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Hiroshi Kojima, Hiroshi Kojima, 2-3-3 Higashiko, Kitakyushu, Kitakyushu City, Fukuoka Prefecture Nihon Oxygen Co., Ltd. Kitakyushu Factory (72) Inventor Yamaguchi ▲ Shun ▼ 1 Kokura, Kitakyushu City, Fukuoka Prefecture 2-3-1 East Port, Kita-ku Nihon Oxygen Co., Ltd. Kitakyushu Plant (72) Inventor Kenji Hiromi 3-10-12 Nishiizumi, Yukuhashi City, Fukuoka Prefecture (72) Inventor Yasuo Toyota, Kamikita-san, Kokurakita-ku, Kitakyushu City, Fukuoka Prefecture Chome 16-8 Fuji Kosan Co., Ltd.

Claims (1)

[Claims] 1. A driven mechanism having a joint part of a hose connected to a container valve of a high-pressure gas container attached to a tip thereof, and a pressing mechanism provided behind the driven mechanism to push the driven mechanism. A branch pipe connection mechanism comprising a branch pipe connection mechanism main body and an elevating means for vertically moving the branch pipe connection mechanism main body, wherein the branch pipe connection mechanism main body is swingably attached to the elevating means. ..