JP3188503B2 - Branch pipe connection mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a branch pipe connecting mechanism that can be used in a residual gas discharging / evacuating facility for automatically removing residual gas from a used high-pressure gas container and evacuating the container.

[0002]

2. Description of the Related Art Various gases such as silane gas are filled in high-pressure gas containers (hereinafter abbreviated as containers) and supplied to customers. The customer takes out the gas from the container and uses it. At that time, some gas remains in the used container. After that, the container is collected by the manufacturer and used again, but it is necessary to keep the inside of the container clean.

Conventionally, this work has been performed manually. That is, after connecting the pipe of the gas treatment equipment for discharging the residual gas of the high-pressure gas container and drawing the interior of the container to a vacuum and the container valve of the container using a cap nut, the equipment is operated and the residual gas is discharged from the container. Was exhausted, and then injection and discharge of a cleaning gas such as high-purity nitrogen gas were repeated several times. Finally, the inside of the container was evacuated to keep the inside of the container clean.

[0004]

As described above, conventionally, the work of connecting the container valve of the container to the pipe of the gas treatment facility using the cap nut has to be performed manually one by one. There was a problem that a lot of work was required. The present invention has been made in view of the above circumstances,
It is an object of the present invention to provide a facility capable of reducing the labor required for releasing the residual gas and evacuation of a high-pressure gas container.

[0005]

According to the first aspect of the present invention, there is provided a branch pipe connecting mechanism for positioning and driving a container to an engagement position with a valve handle.
The branch pipe connection mechanism is driven following the container valve opening / closing mechanism.
Therefore, the container valve opening / closing mechanism at the valve handle engagement position
When stopped, the joint of the branch hose is positioned at the base of the container valve.
And the joint part of the branch pipe hose to the base.
Fine adjustment unit that performs fine adjustment to match
A driven mechanism in which the joint portion of the branch pipe hose connected to the container valve by being inserted into the base part by the operation of the adjusting unit is attached to the tip, and a pressing mechanism provided behind the driven mechanism to press the driven mechanism And a mechanism. The branch pipe connecting mechanism according to claim 2 is characterized in that the pressing mechanism is driven by a pressing unit that moves the rod back and forth by a toggle mechanism and an eccentric cam provided between the rod of the pressing unit and the driven mechanism. And a fine adjustment unit capable of moving the mechanism forward.

[0006]

In the branch pipe connection mechanism of the first aspect, when the high pressure gas container is set at a predetermined position and the pressing mechanism is operated, the joint of the hose is connected to the container valve of the high pressure gas container. In the branch pipe connecting mechanism according to the second aspect, when the fine adjustment unit is operated and the pressurizing unit of the pressing mechanism is operated, the driven mechanism is pushed forward, and the joint of the hose of the driven mechanism is firmly attached to the container valve of the high-pressure gas container. Connected.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a branch pipe connecting mechanism according to the present invention will be described below with reference to the drawings. The branch pipe connection mechanism of this embodiment includes:
It is installed in the residual gas discharge / vacuum equipment of the high pressure gas container. The high-pressure gas container residual gas discharging / evacuating equipment includes a container handling unit 1 shown in FIG. 1 for handling the high-pressure gas container, and a gas treatment shown in FIG. 9 for discharging the residual gas from the high-pressure gas container to evacuate the container. And the section 2. Further, the container handling unit 1 further includes a turntable 3 on which the high-pressure gas container is mounted and rotated, a container support mechanism 4 for fixing the container, a container valve opening / closing mechanism 5 for opening / closing a valve of the high-pressure gas container, and the high-pressure gas container having the predetermined pressure. It is schematically constituted by a branch pipe connection mechanism 6 that connects the container valve and the gas processing section 2 when sent to the position.

As shown in FIG. 2, the turntable 3 comprises a circular base 7, a motor 8 for rotating the base 7, and a speed reducer 9. This turntable 3
A container support mechanism 4 shown in FIG. The container support mechanism 4 is roughly composed of a column 10 erected at the center of the table 7, a container body V receiver 11, a clamp mechanism 12, and a valve part receiver 13. As shown in FIG. 4, the container body V receiver 11 is a plate-like object having a substantially V-shaped notch formed thereon, and is attached to the column 10 so as to contact the upper and lower parts of the container body. ing. The clamp mechanism 12 is roughly constituted by an air cylinder 15, a clamp 16, and an air limit switch 17 for checking a clamp. This clamp mechanism 12 is provided between the container body V receivers 11 provided at two upper and lower positions. When the air cylinder 15 is extended, an arrow Y in FIG.
As shown by, the clamp 16 is tilted down and the container is sandwiched between the clamp 16 and the container body V receiver 11 to fix the container. As shown in FIG. 2, the air cylinder 15 and the air limit switch 17 are connected by a pipe 90. As described above, when the clamp 16 is depressed and the pressure in the air cylinder 15 exceeds a predetermined value, the air limit switch 17 17 to detect that the container has been fixed. As shown in FIG. 5, the valve receiver 13 holds the valve 18 of the container, and is provided so that the position can be adjusted up and down. The valve portion receiver 13 includes a valve portion 18.
A recess 91 into which the side on which the safety valve 20 is provided enters almost without looseness is formed. The valve portion 1 is provided in the recess 91.
When the safety valve 20 side of the container 8 is inserted, a container valve mouth portion (hereinafter abbreviated as a mouth portion) 21 of the container is directed outward in the radial direction of the turntable 3.

As shown in FIG. 6, the container valve opening / closing mechanism 5 includes a beam member 2 provided above the turntable 3.
2 is attached to a lifting unit 23 provided continuously below. As shown in FIG. 7, the container valve opening / closing mechanism 5 is configured such that a claw member 24 provided at a lower end is connected to a rotation driving mechanism 26 via a center compliance 25. The claw member 24 has a plurality of claws 27 disposed so as to engage with the handle 29 of the valve portion 18 of the container, and protrudes downward from the plate portion 28. Rotation drive mechanism 26
Is for rotating the claw member 24, and there are electric type and pneumatic type. The center compliance 25 interposed between the rotation drive mechanism 26 and the claw member 24 allows the center axis of the rotation drive mechanism 26 and the center axis of the claw member 24 to slightly deviate from each other. Handle 29
The engagement of the claw member 24 with the hook is performed smoothly. As shown in FIG. 7, a lowering stop position detecting mechanism 31 is attached to the lower end of the elevating unit 23. The descent stop position detecting mechanism 31 has a structure in which a photoelectric tube 33 is provided at one lower end of the inverted L-shaped arms 32 and a light emitting element 34 is provided at the other. The photoelectric tube 33 and the light emitting element 34 of the lowering stop position detecting mechanism 31 are provided at a position for detecting the upper end of the base 21 of the container when the claw 27 of the container valve opening / closing mechanism 5 is properly engaged with the handle 29 of the container. Have been.

As shown in FIG. 6, the branch pipe connection mechanism 6 is provided below the same beam member 22 as the container valve opening / closing mechanism 5 via a lifting unit 36. As shown in FIG. 8, the branch pipe connection mechanism 6 is for connecting a hose 40 of the gas processing unit 2 to be described later to the base 21 of the container.
A joint 37 connected to a hose 40 of the gas processing unit 2 is attached to a distal end of a driven mechanism 38, and the driven mechanism 38 is pushed by a pressing mechanism 39. The joint 37 is formed by attaching a cover 44 provided with a chuck 43 to an outer periphery on the distal end side of a joint body 42 having a gas flow hole 41 formed therein. The distal end portion 43 of the joint main body 42 is machined to a size that fits into the hole of the base 21, and a flange portion 44 is formed behind the distal end portion 43. On the front surface of the flange portion 44, a packing 4 which comes into contact with the end surface of the base portion 21 is provided.
5 is attached. A driven mechanism 38 is connected to the rear of the joint 37.

The driven mechanism 38 includes a bearing member 47 supported by a rail member 49 provided at the front of the lower surface of a support plate 46 attached to the elevating unit 36 so as to be able to move back and forth.
In addition, a sliding shaft 48 is provided so as to be movable back and forth.
The tip of the sliding shaft 48 is loosely inserted into the rear end of the joint body 42. Further, the tip of the bearing member 47 and the joint body 42 are connected to each other by six coil springs 8 along the circumferential direction.
8 are connected by a floating mechanism 87 in which the components 8 are arranged. A pressing mechanism 39 is provided behind the driven mechanism 38.
Is provided. The pressing mechanism 39 includes a pressing unit 50
And a fine adjustment unit 51. The pressure unit 50 includes a toggle member 54 in which a sliding rod 53 is inserted into a bearing member 52 attached to the center of the lower surface of the support plate 46 so as to be movable back and forth, and the sliding rod 53 is attached to the rear end. Is moved back and forth by moving the piston 55 with the piston 55. The other end of the toggle link 54 is rotatably fixed to a block 57 attached to the rear end of the support plate 46. A roller 58 is provided at the rear of the block 57, and the roller 58 abuts on a block 60 provided on a column member 59 supporting the beam member 22, thereby preventing the pressing mechanism 39 from retreating. . Limit switches 78 and 79 are attached to the block 60 via a plate 77.
One limit switch 78 is provided to detect a state in which the toggle link 54 is bent to a predetermined angle, and the other limit switch 79 is provided to detect a state in which the toggle link 54 is fully extended. The fine adjustment unit 51 is attached to the front end of the sliding rod 53 of the pressing mechanism 39 via a front member 61.

The fine adjustment unit 51 includes the front member 61.
A rod 63 is fitted into a bearing member 62 fixed below the rod so as to be movable back and forth. The tip of the rod 63 is fixed to a bearing member 47 of the driven mechanism 38. A frame 64 is attached to the rear end of the rod 63,
An eccentric cam 65 is fitted in the frame 64. The eccentric cam 65 is connected to a piston 66 via a link 67. When the eccentric cam 65 is rotated by the piston 66, the rod 63 moves back and forth. The piston 66 is provided with a triangular member 7 provided below the bearing member 62.
3 vertically fixed.

[0013] As shown in FIG.
A main pipe 68 connected to the branch pipe connection mechanism 6 by a hose 40 and connected to the hose 40, a discharge pipe 70 connecting the main pipe 68 and the abatement apparatus 69; 68 and a vacuum pipe 72 connecting the vacuum pump 71. One end of the main line 68 is connected to a supply source 92 of pure nitrogen, and the other end is connected to a pressure gauge 74 for continuous molding. A nitrogen valve 81 is provided at a position on one end side of a portion of the main line 68 to which the hose 40 is connected. The discharge line 70 is provided with a discharge valve 82, and the vacuum line 72 is provided with a vacuum valve 83. These valves 81, 82, 83 are opened and closed by operating nitrogen supplied from the operating nitrogen pipe 84 via solenoid valves 81a, 82a, 83a.

Next, the operation of the residual gas discharging / evacuating equipment of the high-pressure gas container having the above configuration will be described. In order to treat the residual gas in the high-pressure gas container with this equipment, the container is first placed on the turntable 3. At this time, as shown in FIG. 5, the safety valve 20 side of the valve portion 18 of the container is inserted into the concave portion 91 of the valve receiver 13 of the container support mechanism 4, and as shown in FIG. Put it in the receiver 11. Thereafter, the air cylinder 15 of the clamp mechanism 12 is extended, and the clamp 16 is lowered to fix the container. That the container is fixed in this way is confirmed by detecting with the air limit switch 17 that the air pressure in the air cylinder 15 has exceeded a predetermined value. After one container is placed on the turntable 3 in this way, the turntable 3 is rotated to a position where the next container is placed, and the second container is set on the turntable 3. In this way, as shown in FIG. 10, five containers are placed, and when the turntable 3 is further rotated by a predetermined angle, the first container is sent to the work processing point indicated by the symbol A in FIG. Then, the container valve opening / closing mechanism 5 is lowered, and the branch pipe connecting mechanism 6 is lowered accordingly. The lowering of the branch pipe connection mechanism 6 is started one pulse later than the container valve opening / closing mechanism 5. As shown in FIG. 7, the descent is performed by the descent stop position detecting mechanism 31 attached to the elevating unit 23 on the container valve opening / closing mechanism 5 side.
When the upper end of the base 21 of the container is detected by the above, the operation is temporarily stopped. The positioning of the branch pipe connection mechanism 6 is now completed. Only the other side of the container valve opening / closing mechanism 5 further drops by a certain amount of pulse, and the claw 27 of the claw member 24 is engaged with the handle 29 of the valve portion 18 of the container as shown in FIG.

After the height positions of the container valve opening / closing mechanism 5 and the branch pipe connection mechanism 6 are determined as described above, the joint body 42 of the branch pipe connection mechanism 6 and the base 21 of the container are connected. For this purpose, first, the piston 66 of the fine adjustment unit 51 of the branch pipe connection mechanism 6 rotates the eccentric cam 65. Then the rod 63
Moves forward and pushes the bearing member 52 of the driven mechanism 38 forward, and the piston 55 of the pressurizing unit 50 of the branch pipe connection mechanism 6
Extend, and the toggle link 54 extends. Then, the sliding rod 53 of the pressurizing unit 50 advances, the driven mechanism 38 advances, and the joint main body 42 of the joint 37 is lightly inserted into the base 21 and is strongly pushed. Since the position of the joint body 42 can be freely moved to some extent by a floating mechanism 87 provided between the sliding shaft 48 and the joint body 42, the tip of the joint body 42 is inserted into the hole of the base 21. The connection between the base 21 and the branch pipe connection mechanism 6 is completed by being smoothly guided and strongly pressed.

When the connection to the base 21 is completed as described above, the residual gas processing by the gas processing unit 2 shown in FIG. 9 is performed as follows. First, the main valve 68 is opened by opening the vacuum valve 83 of the vacuum line 72.
And the inside of the hose 40 is exhausted. Thereafter, the vacuum valve 83 is closed, and then the container valve portion 18 is opened by the container valve opening / closing mechanism 5, and the discharge valve 8 of the discharge line 70 is opened.
Open 2 to release the residual gas in the container. Next, the discharge valve 82 is closed, and the nitrogen valve 81 of the main line 68 is closed.
Open and inject high purity nitrogen into the container. Next, the nitrogen valve 81 is closed and the release valve 82 is opened to release the high-purity nitrogen injected into the container. The above steps are repeated a predetermined number of times. The discharge valve 82 is closed and the vacuum valve 83 is opened to evacuate the container. The vacuum valve 83 is closed. As described above, the container is washed with high-purity nitrogen, and after the evacuation of the container is completed, the container valve opening / closing mechanism 5 closes the valve portion 18 of the container. Then, the pistons 55 and 66 of the rear branch pipe connection mechanism 6 are driven to drive the joint body 4 from the base 21.
Remove 2. When the processing of one container is completed in this way, the turntable 3 rotates, the next container is sent to the work processing point A, and the residual gas processing is performed again in the above-described procedure.

The branch pipe connection mechanism 6 of this embodiment includes a driven mechanism 38 having a joint 37 connected to the base 21 of the high-pressure gas container at the tip thereof, and a driven mechanism 38 for pushing the driven mechanism 38. When the high-pressure gas container is set at a predetermined position and the pressing mechanism 39 is operated, the joint 37 is connected to the base 21 of the high-pressure gas container. Therefore, according to the branch pipe connection mechanism 6 of this embodiment, there is no need to connect the mouthpiece 21 of the container to the hose 40 of the gas processing equipment using the cap nut, and the residual gas is released from the high-pressure gas container and evacuated. The labor required for work can be reduced.

Further, in the branch pipe connecting mechanism 6 of this embodiment, the pressing mechanism 39 is a mechanism using the toggle link 54 and the pressing unit 50 for moving the sliding rod 53 back and forth and the sliding rod of the pressing unit 50. A fine adjustment unit 51 is provided between the driven mechanism 53 and the driven mechanism 38. When the fine adjustment unit 51 is operated, the joint 3 of the driven mechanism 38
7 is inserted into the base 21 of the high-pressure container, the driven mechanism 38 is pushed forward through the fine adjustment unit 51 by the operation of the pressurizing unit 50 of the pressing mechanism 39, and the joint 37 is connected to the base of the high-pressure gas container. 21 is strongly pressed. Therefore, according to the branch pipe connection mechanism 6 of this embodiment, the connection of the high-pressure gas container to the base 21 can be reliably achieved.

[0019]

According to a first aspect of the present invention, there is provided a branch pipe connecting mechanism, wherein a driven part having a joint connected to a base of a high-pressure gas container is attached to a tip thereof, and a driven mechanism is provided behind the driven mechanism for pushing the driven mechanism. Since the high pressure gas container is provided with a pressing mechanism, when the high pressure gas container is set at a predetermined position and the pressing mechanism is operated, the joint is connected to the base of the high pressure gas container. Therefore, according to this branch pipe connection mechanism, the work of connecting the base of the container to the hose of the gas processing equipment using the cap nut becomes unnecessary, and the labor required for the residual gas discharge and vacuuming work of the high-pressure gas container is reduced. be able to.

In the branch pipe connecting mechanism according to the second aspect, the pressing mechanism is provided between the pressing unit for moving the sliding rod back and forth by the toggle mechanism and the sliding rod of the pressing unit and the driven mechanism. And a fine adjustment unit. When the fine adjustment unit is operated, the joint of the driven mechanism is inserted into the base of the high-pressure gas container, and the operation of the pressure unit of the pressing mechanism pushes the driven mechanism forward, and the joint of the driven mechanism is connected to the high-pressure gas container. It is strongly pressed against the base. Therefore, according to this branch pipe connection mechanism, the hose connection to the high-pressure gas container can be quickly and reliably achieved.

[Brief description of the drawings]

FIG. 1 is a view showing a container handling unit of a residual gas discharge / evacuation facility provided with a branch pipe connection mechanism according to an embodiment.

FIG. 2 is a schematic diagram showing a configuration of a turntable part and a clamp mechanism of the residual gas discharging / evacuating equipment.

FIG. 3 is a view showing a container support mechanism of the facility.

FIG. 4 is a plan view showing a container body V receiver and a clamp mechanism of the container support mechanism of the facility.

FIG. 5 is a plan view showing a valve receiver of the container support mechanism of the facility.

FIG. 6 is a diagram showing a container valve opening / closing mechanism, a branch pipe connection mechanism, and a lifting unit that holds these mechanisms in the facility.

FIG. 7 is a front view showing a descent stop position detecting mechanism of the equipment.

FIG. 8 is a sectional view showing a branch pipe connection mechanism of the embodiment.

FIG. 9 is a system diagram showing a gas processing section of the residual gas discharging / evacuating equipment.

FIG. 10 is a plan view showing a container handling unit of the facility.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Container handling unit, 2 ... Gas processing part, 3 ... Turntable, 4 ... Container support mechanism, 5 ... Container valve opening / closing mechanism, 6 ... Branch pipe connection mechanism, 7 ... Stand, 8 ... …motor,
9: Reducer, 10: Support, 11: V receptacle for container body, 12: Clamp mechanism, 13: Valve receptacle, 15 ...
... air cylinder, 16 ... clamp, 17 ... air limit switch, 18 ... valve section, 20 ... safety valve, 21
... Container valve base, 22 Beam member, 23 Lifting unit, 24 Claw member, 25 Center compliance, 26 Rotation drive mechanism, 27 Claw, 28 Plate part, 29 ... Handle, 31... Descending stop position detecting mechanism, 32... Arm part, 33... Photoelectric tube, 34... Light emitting element, 36. Pressing mechanism, 41: gas flow hole, 42
... Joint body, 43 ... Tip, 44 ... Flange, 45 ...
... packing, 46 ... support plate part, 47 ... bearing member,
48 sliding shaft, 49 rail member, 50 pressing unit, 51 fine adjustment unit, 52 bearing member, 53 sliding rod, 54 toggle link, 55
…… Piston, 57 …… Block, 58 …… Roller, 5
9: pillar member, 60: block, 61: front member,
62 ... bearing member, 63 ... rod, 64 ... frame, 6
5 ... eccentric cam, 66 ... piston, 67 ... link,
68 ... main line, 69 ... abatement device, 70 ... discharge line, 71 ... vacuum pump, 72 ... vacuum line, 73 ...
Triangle member, 74 Pressure gauge, 78, 79 Limit switch, 81 Nitrogen valve, 82 Release valve, 83 Vacuum valve, 84 Nitrogen pipeline for operation, 87 Floating mechanism , 88 ... spring, 91 ... recess, 92 ...
Pure nitrogen source.

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kenji Hiromi 3-10-12 Nishiizumi, Yukuhashi-shi, Fukuoka Prefecture (72) Inventor Yasuo Toyoda 3-6-18 Uminomino, Kokurakita-ku, Kitakyushu-shi, Fukuoka In-company (56) References JP-A-63-219996 (JP, A) JP-A 63-99100 (JP, U) JP-A 64-13000 (JP, U) (58) Fields investigated (Int. . ^7, DB name) F17C 13/00 301

Claims (2)

(57) [Claims] The container is positioned at an engagement position with the valve handle.
Branch pipe connection driven following fixedly driven container valve opening / closing mechanism
A continuation mechanism, wherein a valve handle of the container valve opening / closing mechanism is provided.
Stop at the joint position and connect the joint of the branch pipe hose to the cap of the container valve.
Positioning mechanism and branch pipe hose joint
Fine adjustment unit that performs fine adjustment to engage with the base
A driven mechanism which is inserted into the base part by the operation of the fine adjustment unit and has a joint portion of a branch pipe hose connected to the container valve attached at the tip thereof, and a driven mechanism for pushing the driven mechanism. A branch pipe connection mechanism comprising a pressing mechanism provided behind the mechanism. 2. A pressure mechanism for moving a rod back and forth by a toggle mechanism, and an eccentric cam provided between the rod of the pressure unit and the driven mechanism, so that the driven mechanism can be moved forward. 2. The branch pipe connection mechanism according to claim 1, comprising a fine adjustment unit.