JPH05273397A - Device for confirming emission position of radiation - Google Patents

Abstract

PURPOSE:To confirm an emission position of radiation without reference to the thickness change of a sample, by constituting so that an emission position of radiation is displayed on the sample. CONSTITUTION:A slit laser beam 11 perpendicular to an X-Y plane and making longitudinal a plane including the emission axis Z of radiation is emitted on the emission position of radiation of a sample 4. When the surface of the sample 4 is imaged by an image apparatus 6 to be displayed on the scope of a monitor 7, the displayed sample 4 becomes the state displaying a luminous line including the emission position of radiation. Therefore, where a bright line directional to the emission axis of radiation passing through the emission position of radiation of the sample 4 is displayed on the monitor scope by a monitor controller 10, the intersection of the luminous line by the beam 11 and the bright line constantly becomes the emission position of radiation of the sample 4, and the emission position of the sample 4 can be confirmed on the monitor scope without reference to the thickness change of the sample 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention images a sample surface in a radiation irradiating device which irradiates a sample with radiation such as charged particles and X-rays for performing microfabrication in semiconductor manufacturing and spectral analysis in material analysis. The present invention relates to a radiation irradiation position confirmation device for confirming a radiation irradiation position on a sample surface on a monitor screen.

[0002]

2. Description of the Related Art Radiation such as charged particles or X-rays can be accurately applied to a predetermined position of a sample when performing fine processing or analysis by irradiating the surface of a sample placed at a predetermined position. It is important that a radiation irradiation position confirmation device is used to confirm the irradiation position. FIG. 5 schematically shows a state in which the conventional radiation irradiation position confirmation device 30 is used. As shown in the figure, the radiation 34 emitted from the radiation generator 33 is applied to the surface of the sample 36 placed on the sample stage 35 installed at a predetermined position, and the sample 36 is subjected to etching or film formation. Fine processing such as the above or material analysis is performed. A radiation irradiation position confirmation device 30 is arranged in order to confirm the irradiation position of the radiation irradiated to the predetermined position of the sample 36. Radiation irradiation position confirmation device 3
Reference numeral 0 is configured to include an image pickup device 31 arranged at a predetermined position for picking up an image of the sample 36 and a monitor 32 for displaying the picked up image. FIG. 6 shows an example of an image of the sample 36 displayed on the monitor screen 37. As shown in the display image in the figure, the imager 31 images the sample 36 from an oblique direction of the irradiation direction of the radiation 34. In order to set the radiation irradiation position with the above configuration, a light emitting material that emits light by being irradiated with the radiation 34 is used so that the irradiation with the radiation can be visually observed. First, when the luminescent material having the same thickness and shape as the sample 36 is placed at a predetermined position on the sample stage 35 and irradiated with the radiation 34, the irradiated position emits light, so that the irradiation position can be visually checked. it can. Therefore, the installation position of the sample stage 35 is adjusted to set the radiation irradiation position. When the radiation irradiation position is set by the above operation, the display screen is configured so that the bright spot mark 38 is displayed at the radiation irradiation position on the surface of the sample 36 displayed on the monitor 32. By the above operation, the setting of the radiation irradiation position and the preparation of the irradiation position confirmation on the monitor screen are completed.
It is possible to start a predetermined work of placing a sample 36 on the sample stage 35 in place of the light emitting material and irradiating radiation. The confirmation of the radiation irradiation position is confirmed by the bright spot mark 38 set on the monitor screen 37.

[0003]

[Problem to be Solved by the Invention] However, sample 3
When the thickness of the sample 6 changes, for example, when the thickness of the sample 36 becomes thin as shown by the broken line in FIG. 6, the surface position of the sample 36 displayed on the monitor screen 38 shifts in the horizontal direction of the display screen. However, since the bright spot is at a fixed position on the monitor screen, it does not represent an accurate radiation irradiation position, and the position of the radiation irradiation position 38 'when the thickness of the sample 36 is thin cannot be accurately determined. The broken line shown in FIG. 6 indicates the case where the thickness of the sample 36 becomes thin, but conversely, when the thickness of the sample 36 becomes thicker, the surface position of the sample 36 shifts in the horizontal direction of the display screen similarly. The radiation irradiation position cannot be accurately determined. As described above, in the conventional radiation irradiation position confirmation apparatus, the accurate radiation irradiation position cannot be determined when the thickness of the sample changes, and in order to obtain the accurate radiation irradiation position, as shown in the conventional example, It is necessary to reset the radiation irradiation position with the light emitting material. When the thickness of the sample changes frequently, the work efficiency becomes extremely poor. The present invention was devised in view of the above problems, and the radiation irradiation position can be displayed on the sample at any time so that the radiation irradiation position can be confirmed even when the thickness of the sample changes. An object is to provide a radiation irradiation position confirmation device.

[0004]

In order to achieve the above object, the first means adopted by the present invention is to use one laser beam, in which a radiation generator and a sample are arranged at predetermined positions. For confirming the radiation irradiation position on the sample surface on the monitor screen by imaging the sample surface irradiated by the radiation emitted from the radiation generator from a predetermined position in a diagonal direction of the radiation irradiation direction with an imager In the radiation irradiation position confirmation apparatus, a first slit laser beam, which is orthogonal to a plane including the radiation irradiation axis and the imaging axis and has a first surface including the radiation irradiation axis as a longitudinal direction, is irradiated onto the sample surface. A first laser light source for irradiating an irradiation position and a monitor control for displaying a bright line passing through a radiation irradiation position of the sample surface displayed on the monitor screen and orthogonal to the first surface. Configured as a radiation position checking apparatus characterized by comprising; and a location. A second means adopted by the present invention is to use two laser beams, arrange a radiation generating device and a sample at a predetermined position, and irradiate the sample surface irradiated with the radiation emitted from the radiation generating device. In a radiation irradiation position confirmation device for capturing an image from a predetermined position in a diagonal direction of the radiation irradiation direction by an imager and confirming the radiation irradiation position on the sample surface on a monitor screen, the radiation irradiation axis and the imaging axis are A first laser light source for irradiating a radiation irradiation position on the sample surface with a first slit laser light which is orthogonal to a plane including the radiation and has a first surface including the radiation irradiation axis as a longitudinal direction; and the first surface A second laser light source for irradiating a radiation irradiation position on the sample surface with a second laser light having a second surface which is orthogonal to and has the radiation irradiation axis as a longitudinal direction. Irradiation configured as position confirmation device that.

[0005]

According to the first means of the present invention, the first surface including the radiation irradiation axis, which is orthogonal to the plane including the radiation irradiation axis and the imaging axis, is elongated at the radiation irradiation position of the sample irradiated with the radiation. By irradiating the first slit laser light that is directed to
By imaging this with an imager and displaying it on the monitor screen, the state of the sample in which the emission line including the radiation irradiation position on the sample surface is displayed can be seen. Therefore,
When the monitor control device controls to display on the monitor screen a bright line in the radiation irradiation axis direction that passes through the radiation irradiation position of the sample, the intersection of this bright line and the emission line of the first laser beam is always at the radiation irradiation position. Therefore, the radiation irradiation position can be easily confirmed by confirming on the monitor screen that this intersection is at the radiation irradiation position of the sample. Even when the thickness of the sample changes, the position of the light emitting line shifts on the bright line corresponding to the thickness of the sample, so that the radiation irradiation position can be confirmed regardless of the change in the thickness of the sample. Further, according to the second means of the present invention, a first slit laser beam having a first surface orthogonal to a plane including the radiation irradiation axis and the imaging axis and having a radiation irradiation axis as a longitudinal direction, A second slit laser beam, which is orthogonal to the first surface and is in the second surface longitudinal direction including the radiation irradiation axis, is irradiated to the radiation irradiation position on the sample surface,
By imaging this with an imager and displaying it on the monitor screen, the intersection of the emission line of the first slit laser light and the second slit laser light is always the radiation irradiation position. By confirming that the radiation irradiation position is on the monitor screen, the radiation irradiation position can be easily confirmed. Even when the thickness of the sample is changed, the position of the emission line of the first laser beam is shifted on the emission line of the second laser beam in correspondence with the thickness of the sample. Instead, it is possible to confirm the radiation irradiation position.

[0006]

Embodiments of the present invention will be described below with reference to the accompanying drawings for the understanding of the present invention. The following embodiments are examples of embodying the present invention and do not limit the technical scope of the present invention. 1 is a schematic diagram showing the configuration of the radiation irradiation position confirmation apparatus according to the first embodiment of the present invention, FIG. 2 is an image diagram displayed on a monitor screen in the configuration shown in FIG. 1, and FIG. FIG. 4 is a schematic diagram showing the configuration of the radiation irradiation position confirmation apparatus according to the second embodiment of the invention, and FIG. 4 is an image diagram displayed on the monitor screen in the configuration shown in FIG. First, a first embodiment of the present invention will be described. In FIG. 1, a radiation irradiation device is configured by including a radiation generator 1 and a sample stage 3 arranged at predetermined positions, and a sample 4 is placed on the sample stage 3 to generate radiation. Radiation is emitted from the device, and predetermined work such as microfabrication and spectroscopic analysis is performed. In this radiation irradiating device, a radiation irradiating position confirming device 5 according to the present embodiment is installed in order to confirm that the predetermined irradiating position of the sample is accurately irradiated with the radiation. The radiation irradiation position confirmation device 5 includes an imager 6 that images the surface of the sample 4 from an oblique direction of the radiation irradiation direction (Z-axis direction), a monitor 7 that displays the captured image, and an image display on the monitor 7. Control device 10 for controlling the radiation, and the radiation irradiation axis Z
A first laser light source 12 for irradiating a radiation irradiation position of the sample 4 with a first slit laser light 11 which is orthogonal to an X-Z plane including the image pickup axis and has a Y-axis direction including the radiation irradiation axis Z as a longitudinal direction. And is configured. In the radiation irradiation position confirmation device 5 configured as described above, the monitor 7
The image displayed at is as shown in FIG. That is, in the image displayed on the screen 8 of the monitor 7, the sample 4 having the emission line 13 in the Y direction generated by the first slit laser beam 11 on its surface is displayed.
A bright line 14 in the radiation irradiation axis Z direction passing through the radiation irradiation position on the surface of the sample 4 is displayed above. The bright line 14 is displayed by causing the pixels corresponding to the radiation irradiation direction on the screen 8 to linearly emit light by the monitor control device. Figure 2
As is clear from the above, once the emission line 13 intersects at the radiation irradiation position 9, the bright line 14 on the screen 8
If the position of is set, the intersection of the emission line 13 and the bright line 14 is always at the predetermined radiation irradiation position 9 even if the thickness of the sample 4 is changed. Therefore, the first laser light source 12 is operated at any time and the first laser light source 12 is operated. The radiation irradiation position can be confirmed by observing on the monitor 7 the state in which the surface of the sample 4 is caused to emit light by the light 11. Therefore, even when the thickness of the sample 4 changes, the intersection of the emission line 13 and the bright line 14 becomes the radiation irradiation position.

Next, a second embodiment of the present invention will be described. In the following description, the same elements as those of the first embodiment described above are designated by the same reference numerals and the description thereof will be omitted. In FIG. 3, the radiation generator 1 and the sample stage 3 are arranged at predetermined positions, and the sample 4 is placed on the sample stage 3 to form a radiation irradiation device. In order to confirm the radiation irradiation position in this configuration, the radiation irradiation position confirmation device 15 according to this embodiment is installed. The radiation irradiation position confirmation device 15 includes an imager 6 that images the surface of the sample 4 from an oblique direction of the radiation irradiation direction (Z-axis direction), a monitor 7 that displays the captured image, and the radiation irradiation axis Z. First slit laser light 1 having a Y-axis direction orthogonal to the X-Z plane including the imaging axis and including the radiation irradiation axis Z as a longitudinal direction
XZ including a first laser light source 12 for irradiating the radiation irradiation position of the sample 4 with 1 and the radiation irradiation axis Z and the imaging axis.
A second laser light source 22 for irradiating the radiation irradiation position of the sample 4 with the second slit laser light 21 having the plane as the longitudinal direction.
And is configured. The captured image of the sample 4 by the radiation irradiation position confirmation device 15 configured as described above is as shown in FIG. That is, the screen 18 of the monitor 7
On the surface of the sample 4 placed on the sample stage 3 shown in FIG. 1, a first emission line 13 is formed by slit emission in the Y direction by the first slit laser beam 11, and
An image of the second emission line 23 formed by slit emission in the X direction by the second slit laser light 21 is captured. Therefore, the intersection of the first light emitting line 13 and the second light emitting line 23 indicates the predetermined radiation irradiation position 9. As is clear from FIG. 4, once the first light emitting line 13 and the second light emitting line 23 are set to intersect at the radiation irradiation position 9, the first light emitting line is changed even if the thickness of the sample 4 is changed. Since the intersection of 13 and the second light emission line 23 becomes the predetermined radiation irradiation position 9, the first laser light source 12 and the second laser light source 22 are operated at any time, and the first slit laser light 11 and 2 slit laser light 2
By observing the state where the surface of the sample 4 is caused to emit light by means of 1 and the monitor 7, the radiation irradiation position can be confirmed.

[0008]

As described above, according to the first means of the present invention, the radiation irradiation axis of the sample irradiated with the radiation is orthogonal to the plane including the radiation irradiation axis and the imaging axis. By irradiating the first slit laser light having the first surface including the first surface as the longitudinal direction, imaging the image with the first slit laser light and displaying it on the monitor screen, the emission line including the radiation irradiation position on the sample surface is displayed. It can be seen in the state of the prepared sample. Therefore, when the monitor control device is controlled to display a bright line in the radiation irradiation axis direction passing through the radiation irradiation position of the sample on the monitor screen, the intersection of this bright line and the emission line of the first slit laser light is always present. Since it is the radiation irradiation position, the radiation irradiation position can be easily confirmed by confirming on the monitor screen that this intersection is at the radiation irradiation position of the sample. Further, according to the second means of the present invention, a first slit laser beam having a first surface orthogonal to a plane including the radiation irradiation axis and the imaging axis and having a radiation irradiation axis as a longitudinal direction, A second slit laser beam having a second surface orthogonal to the first surface and including the radiation irradiation axis as a longitudinal direction is irradiated to a radiation irradiation position on the surface of the sample, and this is imaged by an imager to be monitored. By displaying it on the screen, the intersection of the emission line of the first slit laser light and the second slit laser light is always the radiation irradiation position. Therefore, it is necessary to monitor that this intersection is at the radiation irradiation position of the sample. By checking the above, the radiation irradiation position can be easily confirmed. Therefore, according to the present invention, the intersection of the emission line and the bright line by the slit laser light or the intersection of two slit laser lights orthogonal to each other indicates the radiation irradiation position regardless of the change in the thickness of the sample. By observing on the monitor screen that the irradiation position is on the surface of the sample, the irradiation position can be confirmed accurately regardless of the sample thickness.

[Brief description of drawings]

FIG. 1 is a schematic diagram of a radiation irradiation position confirmation apparatus according to a first embodiment of the present invention.

FIG. 2 is a display screen diagram of a monitor according to the first embodiment.

FIG. 3 is a schematic diagram of a radiation irradiation position confirmation device according to a second embodiment of the present invention.

FIG. 4 is a display screen diagram of a monitor according to a second embodiment.

FIG. 5 is a schematic view of a conventional radiation irradiation position confirmation device.

FIG. 6 is a display screen diagram of a monitor according to a conventional example.

[Explanation of symbols]

 1-Radiation generator 3--Sample stage 4--Sample 5,25-Radiation irradiation position confirmation device 6-Imager 7-Monitor 9-Radiation irradiation position 11-First slit laser beam 12 --First laser light source 14 --Bright line 21 --Second slit laser light 22 --Second laser light source

Claims (2)

[Claims] 1. A radiation generator and a sample are arranged at a predetermined position, and the surface of the sample irradiated with the radiation emitted from the radiation generator is imaged by a camera from a predetermined position oblique to the radiation irradiation direction. Then, in a radiation irradiation position confirmation device for confirming the radiation irradiation position on the surface of the sample on a monitor screen, in a plane orthogonal to the plane including the radiation irradiation axis and the imaging axis,
A first surface having a first surface including the radiation irradiation axis as a longitudinal direction
A first laser light source for irradiating the radiation irradiation position on the sample surface with the slit laser light, and a bright line passing through the radiation irradiation position on the sample surface displayed on the monitor screen and orthogonal to the first surface. A radiation irradiation position confirmation device, comprising: 2. A radiation generator and a sample are arranged at a predetermined position, and the surface of the sample irradiated with the radiation emitted from the radiation generator is imaged by a camera from a predetermined position in a diagonal direction of the radiation irradiation direction. Then, in a radiation irradiation position confirmation device for confirming the radiation irradiation position on the surface of the sample on a monitor screen, in a plane orthogonal to the plane including the radiation irradiation axis and the imaging axis,
A first surface having a first surface including the radiation irradiation axis as a longitudinal direction
Laser light source for irradiating the radiation irradiation position on the surface of the sample with the slit laser light, and a second slit laser having a second surface orthogonal to the first surface and including the radiation irradiation axis as a longitudinal direction. A radiation irradiation position confirmation device, comprising: a second laser light source for irradiating light onto a radiation irradiation position on the surface of the sample.