JPH05273067A - Differential pressure sensor - Google Patents
Differential pressure sensorInfo
- Publication number
- JPH05273067A JPH05273067A JP6727892A JP6727892A JPH05273067A JP H05273067 A JPH05273067 A JP H05273067A JP 6727892 A JP6727892 A JP 6727892A JP 6727892 A JP6727892 A JP 6727892A JP H05273067 A JPH05273067 A JP H05273067A
- Authority
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- Prior art keywords
- strain
- pressure
- differential pressure
- straight line
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Measuring Fluid Pressure (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は差圧センサに係り、特に
土木機械や建設機械等に組み込まれる油圧駆動システム
の油圧回路各部の差圧の検出に好適な差圧センサにおけ
る歪みゲージの配置位置の改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a differential pressure sensor, and more particularly to an arrangement position of a strain gauge in a differential pressure sensor suitable for detecting the differential pressure of each part of a hydraulic circuit of a hydraulic drive system incorporated in civil engineering machines and construction machines. Regarding the improvement of.
【０００２】[0002]
【従来の技術】従来の差圧センサの機械的な構造とし
て、代表的に２つのタイプが存在する。第１のタイプ
は、それぞれ１つの圧力を検出するように構成された圧
力センサを２つ用意し、それらの出力に関し差の演算を
行うように構成される。このタイプの差圧センサは、各
圧力センサで検出特性が異なるので、主に、差圧の検出
精度が低くなり、信号処理に調整を要するという不具合
を有している。2. Description of the Related Art There are typically two types of mechanical structures of conventional differential pressure sensors. The first type is configured to provide two pressure sensors each configured to detect one pressure and perform a difference operation on their outputs. Since this type of differential pressure sensor has different detection characteristics from one pressure sensor to another, it has a drawback in that the detection accuracy of the differential pressure is mainly low and adjustment is required for signal processing.
【０００３】第２のタイプは、ダイヤフラムの両面に２
つの圧力を印加させる構造とし、一方の面に形成した差
圧検出用の成膜部の中にホイートストンブリッジ回路を
含ませ、このブリッジ回路を利用して差圧を直接的に検
出するように構成する。このタイプの差圧センサでは、
差圧に感応しこれを検出する成膜部が一方の圧力媒体に
直接に接液することになり、主に、当該成膜部の破損を
保護する手段を講じる必要があるという不具合を有して
いる。実際上、差圧検出用成膜部を完全に保護すること
は困難である。The second type has 2 on both sides of the diaphragm.
Two pressures are applied, and a Wheatstone bridge circuit is included in the film formation part for detecting the differential pressure formed on one surface, and the differential pressure is directly detected using this bridge circuit. To do. With this type of differential pressure sensor,
The film forming unit that is sensitive to the differential pressure and detects it will come into direct contact with one of the pressure mediums, and it is necessary to take measures to protect the film forming unit from damage. ing. In practice, it is difficult to completely protect the film forming unit for detecting the differential pressure.
【０００４】[0004]
【発明が解決しようとする課題】上記の従来の差圧セン
サに対して、本発明者らは、特願平３−３０６３８９号
で新規で且つ実用性の高い構造を有する差圧センサを提
案した。この差圧センサでは、一体として形成された圧
力を検出するための圧力検出用部材に、それぞれ異なる
圧力を受ける受圧面を有した起歪部を２か所形成し、各
起歪部の表面にそれぞれの圧力に感応しこれを検出する
ための成膜部を同時に形成するように構成したものであ
る。圧力を検出するための当該成膜部は、半導体成膜技
術を利用して歪みゲージを所定の配置パターンで作ら
れ、且つこれらの歪みゲージを所定の接続関係により接
続することにより形成される。この圧力検出用部材を利
用すれば、検出特性の線形性及び検出精度を高め且つ動
作信頼性を向上することができる。In contrast to the above-mentioned conventional differential pressure sensor, the present inventors proposed a differential pressure sensor having a novel and highly practical structure in Japanese Patent Application No. 3-306389. .. In this differential pressure sensor, a pressure detecting member for integrally detecting pressure is provided with two strain generating portions having pressure receiving surfaces for receiving different pressures, and the strain generating portions are formed on the surface of each strain generating portion. A film forming portion is formed at the same time, which is sensitive to each pressure and detects the pressure. The film forming unit for detecting the pressure is formed by using a semiconductor film forming technique to form strain gauges in a predetermined arrangement pattern and connecting the strain gauges in a predetermined connection relationship. By using this pressure detecting member, it is possible to improve the linearity of the detection characteristic and the detection accuracy and improve the operation reliability.
【０００５】しかし、その後の研究によって、圧力検出
用部材の中心点周辺領域で中心点に関し対称的な位置に
２つの起歪部を形成する構造は、２つの圧力印加に伴い
圧力検出用部材の変形において或る特性を有することが
見出された。この現象について図８及び図９を参照して
説明する。However, as a result of subsequent research, a structure in which two strain generating portions are formed at symmetrical positions with respect to the center point in the peripheral region of the center point of the pressure detecting member is accompanied by the application of two pressures. It has been found to have certain properties in deformation. This phenomenon will be described with reference to FIGS.
【０００６】図８は、圧力Ｐ1 ，Ｐ2 が、それぞれ対応
する起歪部に印加された結果、圧力検出用部材１００が
変形した状態を誇張して示した縦断面図である。この縦
断面を形成する切断線は、圧力検出用部材１００の中心
点を含む。図９は、図８の断面の上部において発生する
応力の分布を示したものである。FIG. 8 is a longitudinal sectional view exaggeratingly showing a state in which the pressure detecting member 100 is deformed as a result of the pressures P 1 and P 2 being applied to the corresponding strain generating portions. The cutting line forming the vertical cross section includes the center point of the pressure detecting member 100. FIG. 9 shows the distribution of stress generated in the upper part of the cross section of FIG.
【０００７】図８に示す如く、圧力検出用部材１００は
その中心部近傍領域に２つの起歪部５１，５２を有す
る。圧力検出用部材１００の平面形状は円形である。圧
力Ｐ1 は圧力導入部５３を経由して第１の起歪部５１に
印加され、圧力Ｐ2 は圧力導入部５４を経由して第２の
起歪部５２に印加される。この圧力印加によって、各起
歪部５１，５２は変形し、上方に凸になる。これらの圧
力Ｐ1 ，Ｐ2 の作用によって起歪部５１，５２には応力
が発生する。この応力の種類は、場所によって異なる。
すなわち、起歪部５１，５２において、起歪部における
圧力検出用部材の中心側及び外周側に近い箇所５５，５
６，５７，５８には圧縮応力が発生し、起歪部の中心部
５９，６０には引張応力が発生する。As shown in FIG. 8, the pressure detecting member 100 has two strain generating portions 51 and 52 in the region near the center thereof. The planar shape of the pressure detecting member 100 is circular. The pressure P 1 is applied to the first strain generating section 51 via the pressure introducing section 53, and the pressure P 2 is applied to the second strain generating section 52 via the pressure introducing section 54. By this pressure application, the respective strain-flexing parts 51 and 52 are deformed and become convex upward. Stress is generated in the strain-flexing portions 51 and 52 by the action of these pressures P 1 and P 2 . The type of this stress varies depending on the location.
That is, in the strain-flexing parts 51 and 52, the portions 55 and 5 near the center side and the outer peripheral side of the pressure detecting member in the strain-flexing part.
Compressive stress is generated in 6, 57 and 58, and tensile stress is generated in the central portions 59 and 60 of the strain-flexing portion.
【０００８】図９に示す如く、各部には応力が発生して
いる。応力０を基準にすると、圧縮応力６２に比較して
引張応力６１は大きい値で発生する。また圧縮応力６２
について、図８に示した圧力検出用部材１００の中心部
及び各起歪部５１，５２の中心を結んだ線上の例では、
圧力検出用部材１００の中心側と外周側では、圧縮応力
６２の大きさが異なり、外周側が大きくなっている。す
なわち非対称の関係にある。この理由は、圧力検出用部
材１００の起歪部５１，５２に圧力Ｐ1 ，Ｐ2 が加わる
と、ダイヤフラム部材の中心部が浮き上がり、箇所５
６，５７の圧縮応力がなだらかになるためである。As shown in FIG. 9, stress is generated in each part. When the stress is 0 as a reference, the tensile stress 61 is larger than the compressive stress 62. Also, the compressive stress 62
For example, in the example on the line connecting the center of the pressure detecting member 100 and the centers of the strain-flexing parts 51 and 52 shown in FIG.
The magnitude of the compressive stress 62 is different between the center side and the outer peripheral side of the pressure detecting member 100, and the outer peripheral side is larger. That is, there is an asymmetric relationship. The reason for this is that when pressures P 1 and P 2 are applied to the strain-flexing portions 51 and 52 of the pressure detecting member 100, the central portion of the diaphragm member rises and the portion 5
This is because the compressive stress of 6,57 becomes gentle.
【０００９】従来、差圧センサの起歪部の表面に設けら
れる歪みゲージは４つであり、これらの歪みゲージでホ
イートストンブリッジ回路を組むように接続していた。
そして、従来、４つの歪みゲージは、圧縮応力が発生す
る箇所５５〜５８にそれぞれ１つずつ、また引張応力が
発生する箇所５９，６０に近接した状態で２つ配置する
のが一般的であった。しかし、図９で明らかなように、
各起歪部５１，５２において、ダイヤフラム部材の中心
部の浮き上がり作用に起因して中心側と外周側で発生す
る圧縮応力の大きさ及び分布が異なるので、それぞれの
箇所に歪みゲージを配置すると、圧縮応力に関する出力
が同一にならず、反対にばらつき、出力特性を悪化させ
る。Conventionally, there are four strain gauges provided on the surface of the strain generating portion of the differential pressure sensor, and these strain gauges are connected so as to form a Wheatstone bridge circuit.
Conventionally, it is general that four strain gauges are arranged, one at each of the points 55 to 58 where a compressive stress is generated and two at a position close to the points 59 and 60 where a tensile stress is generated. It was However, as is clear from FIG.
In each strain generating portion 51, 52, the magnitude and distribution of the compressive stress generated on the center side and the outer peripheral side due to the lifting action of the center portion of the diaphragm member are different, so if strain gauges are arranged at the respective locations, The output regarding the compressive stress does not become the same, but conversely varies, and the output characteristics deteriorate.
【００１０】本発明の目的は、２つの圧縮応力感応用歪
みゲージが配置される箇所の圧縮応力が等しくなるよう
に、前記２つの歪みゲージの配置箇所を適切に選択し、
２つの圧力の差を検出するブリッジ回路の出力特性を改
善した差圧センサを提供することにある。An object of the present invention is to appropriately select the locations of the two strain gauges so that the compressive stresses at the locations where the two strain gauges for compressive stress application are arranged are equal.
Another object of the present invention is to provide a differential pressure sensor with improved output characteristics of a bridge circuit that detects the difference between two pressures.
【００１１】[0011]
【課題を解決するための手段】本発明に係る差圧センサ
は、上記目的を達成するために、次のように構成され
る。In order to achieve the above object, the differential pressure sensor according to the present invention is constructed as follows.
【００１２】１つの圧力検出用部材に２つの起歪部を形
成し、２つの起歪部のそれぞれの面に、圧力に感応しこ
れを検出する成膜部を形成する。各成膜部は、引張応力
に感応する２つの歪みゲージと圧縮応力に感応する２つ
の歪みゲージを有する。これらのうち２つの圧縮応力感
応用歪みゲージは、起歪部の周辺部において、圧力検出
用部材の中心部の圧力変形が影響しない箇所で且つ圧縮
応力が等しい箇所に、配置される。Two strain generating portions are formed on one pressure detecting member, and a film forming portion which is sensitive to pressure and detects this is formed on each surface of the two strain generating portions. Each film forming unit has two strain gauges sensitive to tensile stress and two strain gauges sensitive to compressive stress. Two of these strain gauges for applying a compressive stress are arranged in the peripheral portion of the strain-flexing portion at a portion where the pressure deformation of the central portion of the pressure detecting member does not affect and the compressive stress is equal.
【００１３】前記の構成において、好ましくは、２つの
圧縮応力感応用歪みゲージは、対応する起歪部の中心点
を通る直線の上であって中心点に関し対称な位置に配置
される。In the above structure, preferably, the two compressive stress-sensitive strain gauges are arranged on a straight line passing through the center points of the corresponding strain-flexing parts and at symmetrical positions with respect to the center points.
【００１４】前記の構成において、好ましくは、前記直
線は、２つの起歪部の中心点を結ぶ直線に直交する直線
である。In the above structure, preferably, the straight line is a straight line orthogonal to the straight line connecting the center points of the two strain-flexing portions.
【００１５】[0015]
【作用】本発明による差圧センサでは、４つの歪みゲー
ジのうち、圧縮応力に感応するための２つの歪みゲージ
を、起歪部において、圧力検出部部材の圧力変形部の影
響を受けず且つ圧縮応力の等しい箇所に配置するように
したため、圧縮応力感応用歪みゲージの配置箇所に関
し、圧縮応力の分布が非対称になるのを避けることがで
き、圧力を検出するブリッジ回路の出力特性を改善する
ことができる。In the differential pressure sensor according to the present invention, of the four strain gauges, two strain gauges that are sensitive to the compressive stress are not affected by the pressure deforming portion of the pressure detecting portion member at the strain generating portion. Since it is arranged at the location where the compressive stress is the same, it is possible to avoid the asymmetrical distribution of the compressive stress at the location where the compressive stress sensing strain gauge is arranged, and improve the output characteristics of the bridge circuit that detects pressure. be able to.
【００１６】[0016]
【実施例】以下に、本発明の実施例を添付図面に基づい
て説明する。Embodiments of the present invention will be described below with reference to the accompanying drawings.
【００１７】本発明による差圧センサでは、圧力を受け
てダイヤフラムとして作用する部材（以下圧力検出基体
という）を有する。図１は圧力検出基体の平面図であ
り、図２は図１中のＡ−Ａ線断面図である。The differential pressure sensor according to the present invention has a member (hereinafter referred to as a pressure detecting base) that acts as a diaphragm when receiving pressure. FIG. 1 is a plan view of the pressure detection substrate, and FIG. 2 is a sectional view taken along the line AA in FIG.
【００１８】１が圧力検出基体である。この圧力検出基
体１は差圧センサのベース部材となっている。圧力検出
基体１には、圧力検出基体の中心点を含む径方向の直線
Ａ−Ａ線の上に２つの起歪部２，３を、前記中心点に関
し対称的な位置に形成している。このＡ−Ａ線は、起歪
部２，３の各中心を結ぶ直線でも或る。起歪部２，３
は、図１に示す如く、平面形状が例えば円形に形成され
る。また図２に示す如く起歪部２，３は、それぞれその
下面が受圧面になり、圧力導入部４，５を経て圧力
Ｐ1 ，Ｐ2 が印加される。また起歪部２，３の上面には
絶縁膜を介して圧力に感応するための成膜部６，７が形
成される。これらの成膜部６，７は、例えば半導体成膜
技術を用いて、４つの歪みゲージを含む。これらの４つ
の歪みゲージが、ホイートストンブリッジ回路を構成す
るように接続され、印加圧力に感応し圧力検出部として
作用する。各起歪部の上の４つの歪みゲージは、それぞ
れ、所定の位置に配置され、起歪部が圧力を受けて変形
するときに発生する応力に対応してその抵抗値を変化す
る。このとき、ブリッジ回路の出力端子には、印加した
圧力に対応する出力電圧が発生する。Reference numeral 1 is a pressure detecting base. The pressure detection base 1 serves as a base member of the differential pressure sensor. In the pressure detection base body 1, two strain generating portions 2 and 3 are formed on a radial straight line AA including the center point of the pressure detection base body at symmetrical positions with respect to the center point. The line AA is also a straight line connecting the centers of the strain-flexing parts 2 and 3. Deflection part 2, 3
As shown in FIG. 1, the plane shape is formed in a circular shape, for example. Further, as shown in FIG. 2, the lower surface of each of the strain-flexing portions 2 and 3 serves as a pressure receiving surface, and the pressures P 1 and P 2 are applied via the pressure introducing portions 4 and 5. In addition, film forming portions 6 and 7 for sensing pressure are formed on the upper surfaces of the strain generating portions 2 and 3 through an insulating film. These film forming units 6 and 7 include four strain gauges using, for example, a semiconductor film forming technique. These four strain gauges are connected so as to form a Wheatstone bridge circuit, are sensitive to the applied pressure, and act as a pressure detection unit. The four strain gauges on the respective strain-flexing portions are arranged at predetermined positions, and change their resistance values in response to the stress generated when the strain-flexing portion receives pressure and deforms. At this time, an output voltage corresponding to the applied pressure is generated at the output terminal of the bridge circuit.
【００１９】なお、図１においてｘｙ座標の方向が定義
されている。上記Ａ−Ａ線はｘ方向に向いている。In FIG. 1, the directions of xy coordinates are defined. The line AA is oriented in the x direction.
【００２０】各起歪部の上面に形成される４つの歪みゲ
ージは、所定の配置パターンを有する。この所定の配置
パターンが、本発明の特徴である。まず、最も好ましい
実施例を説明する。The four strain gauges formed on the upper surface of each strain generating portion have a predetermined arrangement pattern. This predetermined arrangement pattern is a feature of the present invention. First, the most preferred embodiment will be described.
【００２１】図１に示すように、ダイヤフラム基体１の
上面において、Ａ−Ａ線に直角なＢ−Ｂ線とＣ−Ｃ線を
定義する。Ｂ−Ｂ線は起歪部２の中心を通り、Ｃ−Ｃ線
は起歪部３の中心を通る。Ｂ−Ｂ線及びＣ−Ｃ線は、ｙ
方向を向いている。As shown in FIG. 1, on the upper surface of the diaphragm base 1, a line BB and a line CC which are perpendicular to the line AA are defined. The line BB passes through the center of the strain generating portion 2, and the line CC passes through the center of the strain generating portion 3. The BB line and the CC line are y
Facing the direction.
【００２２】起歪部２，３に圧力Ｐ1 と圧力Ｐ2 が印加
された場合における応力分布の一例を図３（ａ），
（ｂ）に示す。この場合、図３（ａ）の応力分布は起歪
部２におけるＢ−Ｂ線に沿った分布であるとし、図３
（ｂ）の応力分布は起歪部３におけるＣ−Ｃ線に沿った
分布であるとする。また、圧力Ｐ1 は圧力Ｐ2 よりも高
いものとする。図３（ａ）で明らかなように、起歪部２
では、その中心部で引張応力８が発生し、両側の周囲部
９，１０で圧縮応力が発生する。起歪部３においても図
３（ｂ）に示される如く同様な応力分布特性が生じる。
起歪部２のＢ−Ｂ線方向の応力分布及び起歪部３のＣ−
Ｃ線方向の応力分布では、それぞれ、圧縮応力９，１０
の分布状態が対称に形成される。つまり、従来の問題点
で述べたように、非対称な分布とならない。An example of stress distribution when pressure P 1 and pressure P 2 are applied to the strain-flexing parts 2 and 3 is shown in FIG.
It shows in (b). In this case, it is assumed that the stress distribution in FIG. 3A is a distribution along the line BB in the strain-flexing portion 2.
It is assumed that the stress distribution in (b) is along the line CC in the strain-flexing portion 3. The pressure P 1 is higher than the pressure P 2 . As is clear from FIG. 3A, the strain generating portion 2
Then, a tensile stress 8 is generated in the central portion thereof, and a compressive stress is generated in the peripheral portions 9 and 10 on both sides. Similar strain distribution characteristics also occur in the strain-flexing portion 3 as shown in FIG.
Stress distribution in the BB line direction of the strain generating section 2 and C- of the strain generating section 3
In the stress distribution in the C line direction, compressive stresses of 9 and 10 respectively
Are distributed symmetrically. That is, as described in the conventional problem, the distribution does not become asymmetric.
【００２３】上述した応力分布特性を考慮して、本実施
例による差圧センサでは、各起歪部の表面に形成される
圧力感応用の成膜部６，７における歪みゲージの配置パ
ターンを次のようにしている。In consideration of the above-mentioned stress distribution characteristics, in the differential pressure sensor according to this embodiment, the arrangement pattern of the strain gauges in the film-forming portions 6 and 7 for applying a pressure feeling formed on the surface of each strain generating portion is set as follows. Like
【００２４】まず図４に示すように、起歪部２では、歪
みゲージ６ａ，６ｃをＢ−Ｂ線上の両端周囲部に配置
し、歪みゲージ６ｂ，６ｄをＢ−Ｂ線に沿って中心部に
配置する。このとき、各歪みゲージの感応方向（長形で
示された歪みゲージの長手方向）はＢ−Ｂ線の方向に向
けられている。起歪部３では、歪みゲージ７ａ，７ｃを
Ｃ−Ｃ線上の両端周囲部に配置し、歪みゲージ７ｂ，７
ｄをＣ−Ｃ線に沿って中心部に配置する。このとき、各
歪みゲージの感応方向はＣ−Ｃ線の方向に向けられてい
る。各起歪部２，３において、４つの歪みゲージを上記
のように配置して形成すると、特に起歪部２，３で圧縮
応力の大きさが等しくその分布が対称に生じる起歪部の
周囲箇所に歪みゲージ６ａ，６ｃ（又は７ａ，７ｃ）を
配置するようにしたため、各ブリッジ回路の出力特性の
直線性が改善され、出力特性が良好となる。この結果、
差圧センサの差圧検出特性が良好になる。First, as shown in FIG. 4, in the strain-flexing part 2, the strain gauges 6a and 6c are arranged around both ends on the line BB, and the strain gauges 6b and 6d are centered along the line BB. To place. At this time, the sensitive direction of each strain gauge (longitudinal direction of the strain gauge shown by the elongated shape) is oriented in the direction of line BB. In the strain-flexing part 3, the strain gauges 7a and 7c are arranged around both ends on the line CC, and the strain gauges 7b and 7c are arranged.
The d is arranged at the center along the line CC. At this time, the sensitive direction of each strain gauge is oriented along the line CC. When the four strain gauges are arranged and formed in each of the strain-flexing portions 2 and 3 as described above, especially in the strain-flexing portions 2 and 3, the magnitude of the compressive stress is equal and the distribution is symmetrical around the strain-generating portion. Since the strain gauges 6a and 6c (or 7a and 7c) are arranged at the positions, the linearity of the output characteristic of each bridge circuit is improved, and the output characteristic becomes good. As a result,
The differential pressure detection characteristic of the differential pressure sensor is improved.
【００２５】他の配置パターンとしては、図５に示すよ
うに、起歪部２，３の中心部に配置される歪みゲージ６
ｂ，６ｄ，７ｂ，７ｄの感応方向をＡ−Ａ線の方向に向
けることもできる。その他の構成は前記実施例の場合と
同じである。起歪部の中心部に配置される２つの歪みゲ
ージについては、当該中心部の周辺部では応力分布がい
ずれの方向にもほぼ対称に保持されるので、その感応方
向を自由に変更することができる。従って、起歪部の中
心部に配置される２つの歪みゲージについては、２つの
感応方向が同じであるという条件の下で、その感応方向
をＡ−Ａ線方向、又はＡ−Ａ線方向に直交する方向、又
はそれ以外の方向に向けて形成することができる。As another arrangement pattern, as shown in FIG. 5, a strain gauge 6 arranged at the center of the strain-flexing portions 2 and 3 is used.
The sensitive directions of b, 6d, 7b, and 7d can also be directed to the AA line. Other configurations are the same as those in the above embodiment. With regard to the two strain gauges arranged in the central portion of the strain-flexing portion, the stress distributions are kept substantially symmetrical in any direction in the peripheral portion of the central portion, so that the sensitive direction can be freely changed. it can. Therefore, regarding the two strain gauges arranged in the central portion of the strain-flexing part, the sensitive direction is changed to the A-A line direction or the A-A line direction under the condition that the two sensitive directions are the same. It can be formed in a direction orthogonal to the above or in a direction other than the above.
【００２６】本発明の他の実施例について説明する。本
発明の特徴は、前述の説明で明らかなように、１つの圧
力検出基体１にその中心点を境に対称な位置に２つの起
歪部２，３を形成した構造を有する差圧センサにおい
て、各起歪部における非対称な圧縮応力分布が生じる領
域を除外して、圧縮応力に感応するための２つの歪みゲ
ージを配置することにある。従って、圧縮応力を検出す
るための２つの歪みゲージ６ａ，６ｃ（又は７ａ，７
ｃ）のそれぞれを、ダイヤフラム基体１の中心部の近傍
領域を避け、且つ起歪部２（又は起歪部３）のほぼ実質
的に同一の圧縮応力分布を生じる箇所に配置すれば良
い。従って、この条件を満足する限り、歪みゲージ６
ａ，６ｃ，７ａ，７ｃは各起歪部において、任意の位置
に設けることができる。ただし、歪みゲージ６ａ，６ｃ
の配置箇所と歪みゲージ７ａ，７ｃの配置位置は同一で
あることが望ましい。図１において、圧縮応力を検出す
るための歪みゲージを配置する箇所として望ましくない
領域を斜線部１１で示す。Another embodiment of the present invention will be described. As is apparent from the above description, the feature of the present invention is in a differential pressure sensor having a structure in which two strain generating portions 2 and 3 are formed in one pressure detecting base 1 at symmetrical positions with respect to the center point thereof. That is, the two strain gauges for sensing the compressive stress are arranged by excluding the region where the asymmetrical compressive stress distribution is generated in each strain generating portion. Therefore, two strain gauges 6a, 6c (or 7a, 7) for detecting the compressive stress are used.
Each of c) may be arranged at a position which avoids a region near the center of the diaphragm base 1 and causes substantially the same compressive stress distribution of the strain generating portion 2 (or the strain generating portion 3). Therefore, as long as this condition is satisfied, the strain gauge 6
The a, 6c, 7a, and 7c can be provided at arbitrary positions in each strain generating portion. However, strain gauges 6a, 6c
It is desirable that the location of the strain gauge and the location of the strain gauges 7a and 7c are the same. In FIG. 1, an undesired region is shown by a shaded portion 11 as a location where a strain gauge for detecting the compressive stress is arranged.
【００２７】図６に起歪部２のみを取り出して示す。起
歪部２の中心点に関して対称的な位置に歪みゲージ６
ａ，６ｃを配置する例としては、中心点を通る直線１２
（破線で示す）の上に配置することも可能である。この
場合も、圧縮応力の分布が対称となるいう上記条件を満
たす。更に、一点鎖線で示す線１３に沿って配置するこ
とも可能である。この場合も、圧縮応力の分布が対称と
なるいう上記条件を満たす。これらの実施例の場合に、
各直線の傾斜角としては、Ｂ−Ｂ線に対して最大３０度
程度の角度まで許容することができる。一方、起歪部３
の歪みゲージ７ａ，７ｃについては、起歪部２に対して
対称的な配置パターンを形成するように配置される。FIG. 6 shows only the strain-flexing portion 2 taken out. The strain gauge 6 is placed at a position symmetrical with respect to the center point of the strain-flexing part 2.
As an example of arranging a and 6c, a straight line 12 passing through the center point
It is also possible to place it above (indicated by the dashed line). Also in this case, the above condition that the distribution of the compressive stress is symmetric is satisfied. Further, it is also possible to dispose along the line 13 indicated by the alternate long and short dash line. Also in this case, the above condition that the distribution of the compressive stress is symmetric is satisfied. For these examples,
The inclination angle of each straight line can be up to about 30 degrees with respect to the line BB. On the other hand, the strain-flexing part 3
The strain gauges 7a and 7c are arranged so as to form a symmetrical arrangement pattern with respect to the strain generating section 2.
【００２８】歪みゲージの他の配置パターンとしては、
更に、図７に示すようなパターンを考えることができ
る。As another arrangement pattern of the strain gauge,
Further, a pattern as shown in FIG. 7 can be considered.
【００２９】[0029]
【発明の効果】以上の説明で明らかなように、本発明に
よれば、１つの圧力検出部材に２つの起歪部を有し、こ
の起歪部の一方の面に４つの歪みゲージを設けてブリッ
ジ回路を形成する構成において、圧縮応力感応用の２つ
の歪みゲージを、それぞれ圧縮応力の分布が等しい箇所
に配置したため、ブリッジ回路の出力の直線性が良好に
なり、検出特性が良好になる。これによって差圧センサ
の検出精度を高めることができる。As is apparent from the above description, according to the present invention, one pressure detecting member has two strain generating portions, and four strain gauges are provided on one surface of the strain generating portion. In the configuration in which the bridge circuit is formed by arranging the two strain gauges for compressive stress application at locations where the distributions of the compressive stress are equal, the linearity of the output of the bridge circuit is improved and the detection characteristics are improved. .. This can improve the detection accuracy of the differential pressure sensor.
【図１】本発明に係る差圧センサの圧力検出基体の平面
図である。FIG. 1 is a plan view of a pressure detection base of a differential pressure sensor according to the present invention.
【図２】図１におけるＡ−Ａ線断面図である。FIG. 2 is a sectional view taken along line AA in FIG.
【図３】引張応力及び圧縮応力に関する応力分布の特性
を示す図である。FIG. 3 is a diagram showing characteristics of stress distribution regarding tensile stress and compressive stress.
【図４】歪みゲージの配置パターンの第１の例を示した
圧力検出基体の平面図である。FIG. 4 is a plan view of a pressure detection substrate showing a first example of an arrangement pattern of strain gauges.
【図５】歪みゲージの配置パターンの第２の例を示した
圧力検出基体の平面図である。FIG. 5 is a plan view of a pressure detection substrate showing a second example of a strain gauge arrangement pattern.
【図６】圧縮応力感応用歪みゲージの配置許容範囲を説
明するための１つの起歪部の平面図である。FIG. 6 is a plan view of one strain generating portion for explaining an arrangement allowable range of a compressive stress sensation applied strain gauge.
【図７】その他の起歪部配置パターンを示す２つの起歪
部の平面図である。FIG. 7 is a plan view of two strain generating portions showing another strain generating portion arrangement pattern.
【図８】圧力検出基体における変形特性を説明するため
の縦断面図である。FIG. 8 is a vertical cross-sectional view for explaining deformation characteristics of the pressure detection base.
【図９】従来の圧力検出基体における応力分布特性を説
明するための図である．FIG. 9 is a diagram for explaining stress distribution characteristics in a conventional pressure detection base body.
１ …圧力検出基体 ２，３ …起歪部 ６，７ …成膜部 ６ａ〜６ｄ …歪みゲージ ７ａ〜７ｄ …歪みゲージ ８ …引張応力 ９，１０ …圧縮応力 DESCRIPTION OF SYMBOLS 1 ... Pressure detection base 2,3 ... Strain generating part 6,7 ... Film-forming part 6a-6d ... Strain gauge 7a-7d ... Strain gauge 8 ... Tensile stress 9,10 ... Compressive stress
───────────────────────────────────────────────────── フロントページの続き (72)発明者 坂本 幸男 茨城県土浦市神立町650番地 日立建機株 式会社土浦工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yukio Sakamoto 650 Kazunachi-cho, Tsuchiura-shi, Ibaraki Hitachi Construction Machinery Co., Ltd. Tsuchiura factory
Claims (3)
の起歪部のそれぞれの面に、圧力に感応する成膜部を形
成し、前記成膜部のそれぞれは２つの引張応力感応用歪
みゲージと２つの圧縮応力感応用歪みゲージを有し、前
記２つの圧縮応力感応用歪みゲージは、前記起歪部の周
辺部における前記圧力検出用部材の中心部の圧力変形が
影響しない箇所で且つ圧縮応力が等しい箇所に配置され
ることを特徴とする差圧センサ。1. A pressure sensitive film forming portion is formed on each surface of two strain generating portions formed on one pressure detecting member, and each of the film forming portions has two tensile stress sensing applications. A strain gauge and two strain gauges for applying a compressive stress are provided, and the two strain gauges for applying a compressive stress are provided at a location where the pressure deformation of the central portion of the pressure detecting member does not affect the peripheral portion of the strain generating portion. A differential pressure sensor characterized in that the differential pressure sensor is arranged at locations having the same compressive stress.
記２つの圧縮応力感応用歪みゲージは、前記起歪部の中
心点を通る直線の上であって前記中心点に関し対称な位
置に配置されることを特徴とする差圧センサ。2. The differential pressure sensor according to claim 1, wherein the two compressive-stress-applied strain gauges are arranged on a straight line passing through a center point of the strain-flexing portion and symmetrically with respect to the center point. And a differential pressure sensor.
記直線は、前記２つの起歪部の中心点を結ぶ直線に直交
する直線であることを特徴とする差圧センサ。3. The differential pressure sensor according to claim 2, wherein the straight line is a straight line orthogonal to a straight line connecting the center points of the two strain-flexing portions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4067278A JP2771070B2 (en) | 1992-03-25 | 1992-03-25 | Differential pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4067278A JP2771070B2 (en) | 1992-03-25 | 1992-03-25 | Differential pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05273067A true JPH05273067A (en) | 1993-10-22 |
| JP2771070B2 JP2771070B2 (en) | 1998-07-02 |
Family
ID=13340346
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4067278A Expired - Lifetime JP2771070B2 (en) | 1992-03-25 | 1992-03-25 | Differential pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2771070B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7516667B2 (en) | 2006-06-29 | 2009-04-14 | Denso Corporation | Differential pressure sensor having symmetrically-provided sensor chips and pressure introduction passages |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123077A (en) * | 1978-03-17 | 1979-09-25 | Hitachi Ltd | Pressure sensor |
| JPS62294930A (en) * | 1986-06-13 | 1987-12-22 | Nippon Soken Inc | Pressure detector |
-
1992
- 1992-03-25 JP JP4067278A patent/JP2771070B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54123077A (en) * | 1978-03-17 | 1979-09-25 | Hitachi Ltd | Pressure sensor |
| JPS62294930A (en) * | 1986-06-13 | 1987-12-22 | Nippon Soken Inc | Pressure detector |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7516667B2 (en) | 2006-06-29 | 2009-04-14 | Denso Corporation | Differential pressure sensor having symmetrically-provided sensor chips and pressure introduction passages |
| KR100965802B1 (en) * | 2006-06-29 | 2010-06-24 | 가부시키가이샤 덴소 | Differential pressure sensor having symmetrically-provided sensor chips and pressure introduction passages |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2771070B2 (en) | 1998-07-02 |
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