JPH0527214B2 - - Google Patents

Info

Publication number
JPH0527214B2
JPH0527214B2 JP59149934A JP14993484A JPH0527214B2 JP H0527214 B2 JPH0527214 B2 JP H0527214B2 JP 59149934 A JP59149934 A JP 59149934A JP 14993484 A JP14993484 A JP 14993484A JP H0527214 B2 JPH0527214 B2 JP H0527214B2
Authority
JP
Japan
Prior art keywords
state
substance
synchrotron radiation
ion beam
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59149934A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127042A (ja
Inventor
Yoshihiro Ueda
Koichi Ono
Tatsuo Oomori
Shigeto Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59149934A priority Critical patent/JPS6127042A/ja
Publication of JPS6127042A publication Critical patent/JPS6127042A/ja
Publication of JPH0527214B2 publication Critical patent/JPH0527214B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59149934A 1984-07-17 1984-07-17 イオンビ−ム発生装置 Granted JPS6127042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59149934A JPS6127042A (ja) 1984-07-17 1984-07-17 イオンビ−ム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59149934A JPS6127042A (ja) 1984-07-17 1984-07-17 イオンビ−ム発生装置

Publications (2)

Publication Number Publication Date
JPS6127042A JPS6127042A (ja) 1986-02-06
JPH0527214B2 true JPH0527214B2 (cs) 1993-04-20

Family

ID=15485759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59149934A Granted JPS6127042A (ja) 1984-07-17 1984-07-17 イオンビ−ム発生装置

Country Status (1)

Country Link
JP (1) JPS6127042A (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3914655A (en) * 1973-06-28 1975-10-21 Ibm High brightness ion source

Also Published As

Publication number Publication date
JPS6127042A (ja) 1986-02-06

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