JPH05271992A - Formation of aluminum oxide film and electrolyte used therefor - Google Patents
Formation of aluminum oxide film and electrolyte used thereforInfo
- Publication number
- JPH05271992A JPH05271992A JP4101828A JP10182892A JPH05271992A JP H05271992 A JPH05271992 A JP H05271992A JP 4101828 A JP4101828 A JP 4101828A JP 10182892 A JP10182892 A JP 10182892A JP H05271992 A JPH05271992 A JP H05271992A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- electrolytic solution
- quaternary ammonium
- solvent
- phthalic acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、アルミニウム酸化皮膜
の形成方法、即ち、陽極酸化皮膜を有するアルミニウム
の製造方法、およびそれに用いる電解液に関する。本発
明の方法により得られる酸化皮膜は、繊維状の多孔性の
皮膜であり、該酸化皮膜を有するアルミニウムは各種の
機能用途に応用が期待される。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming an aluminum oxide film, that is, a method for producing aluminum having an anodic oxide film, and an electrolytic solution used therefor. The oxide film obtained by the method of the present invention is a fibrous porous film, and aluminum having the oxide film is expected to be applied to various functional applications.
【0002】[0002]
【従来の技術】アルミニウムの陽極酸化は古くから良く
知られた技術であり、工業的には、耐蝕性、耐候性の要
求される建築、車輛、船舶、航空機用材料、また、電気
絶縁性の要求されるアルマイト電線、プリント配線基
盤、半導体回路、電解コンデンサ、スイッチング素子、
電子写真用ドラム、磁気記録デイスク、湿度センサー、
光・熱特性の重要視される太陽熱吸収板、反射板、多色
アルマイト、感光性アルマイト、発光(蛍光)素子、I
C放熱板等の他、潤滑アルマイト、PS印刷板、触媒、
吸着剤、透過膜、濾過膜等への応用がなされている。2. Description of the Related Art Anodization of aluminum has been a well-known technology for a long time, and industrially, it is required to have corrosion resistance and weather resistance for construction, vehicles, ships, aircraft materials, and electrically insulating materials. Required anodized wire, printed wiring board, semiconductor circuit, electrolytic capacitor, switching element,
Electrophotographic drum, magnetic recording disk, humidity sensor,
Solar heat absorption plate, reflection plate, multicolored alumite, photosensitive alumite, light emitting (fluorescent) element, I, where light and heat characteristics are important
In addition to C heat dissipation plate, lubricating alumite, PS printing plate, catalyst,
It has been applied to adsorbents, permeable membranes, filtration membranes, etc.
【0003】陽極酸化は、通常、水系の電解液中で実施
され、電解液の種類によって、大別して2種の酸化皮膜
が形成されることが知られている。その一つは、硫酸や
シュウ酸等の酸性溶液中で形成されるポーラス型と呼ば
れる表面積の大きい多孔質の皮膜である。この細孔の中
に第3の物質を充填したり、封口処理することにより機
能化している。他の一つは硼酸アンモニウムやアジピン
酸アンモニウム等の中性溶液中で形成されるバリヤー型
と呼ばれるいわゆる緻密で電気絶縁性の高い皮膜で、ア
ルミ電解コンデンサに利用されている。It is known that anodic oxidation is usually carried out in an aqueous electrolytic solution, and roughly two types of oxide films are formed depending on the type of electrolytic solution. One of them is a porous film with a large surface area called a porous type that is formed in an acidic solution such as sulfuric acid or oxalic acid. The pores are functionalized by filling a third substance or by sealing. The other is a so-called dense and highly insulating film called a barrier type formed in a neutral solution such as ammonium borate or ammonium adipate, which is used for aluminum electrolytic capacitors.
【0004】一方、非水系の電解液を用いる方法も検討
されてはいるが、工業的に実施されているものはないの
が現状であり、機能物質として水に不溶で有機溶媒に可
溶な物質の使用が困難であるという問題がある。On the other hand, although a method using a non-aqueous electrolytic solution has also been studied, the present situation is that none of them has been industrially implemented, and it is insoluble in water as a functional substance and soluble in an organic solvent. There is a problem that it is difficult to use the substance.
【0005】[0005]
【発明が解決しようとする課題】本発明は、従来の水系
電解液にかえて、非水系電解液を用い、表面積の大きい
多孔性の陽極酸化皮膜を形成でき、水に不溶で有機溶媒
に可溶な各種機能物質の使用が可能となる、新規なアル
ミニウム酸化皮膜の形成方法およびそれに用いられる電
解液を提供しようとするものである。The present invention is capable of forming a porous anodic oxide film having a large surface area by using a non-aqueous electrolytic solution instead of the conventional aqueous electrolytic solution, and is insoluble in water and compatible with organic solvents. It is intended to provide a novel method for forming an aluminum oxide film, which enables the use of various soluble functional substances, and an electrolytic solution used therein.
【0006】[0006]
【課題を解決するための手段】即ち、本発明は、アルミ
ニウムを、水分量0.1重量%以下のフタル酸の四級ア
ンモニウム塩の有機溶媒溶液中で陽極酸化処理すること
を特徴とするアルミニウム酸化皮膜の形成方法およびそ
れに用いられる電解液を提供するものである。That is, the present invention is characterized in that aluminum is anodized in an organic solvent solution of a quaternary ammonium salt of phthalic acid having a water content of 0.1% by weight or less. The present invention provides a method for forming an oxide film and an electrolytic solution used for the method.
【0007】本発明の電解液に用いるフタル酸の四級ア
ンモニウム塩としては、テトラメチルアンモニウム、テ
トラエチルアンモニウム、テトラプロピルアンモニウ
ム、テトラブチルアンモニウムなどの対称アルキル型;
トリメチルエチルアンモニウム、ジメチルジエチルアン
モニウム、トリエチルメチルアンモニウム、トリメチル
プロピルアンモニウム、ジメチルジプロピルアンモニウ
ム、トリプロピルメチルアンモニウム、トリメチルブチ
ルアンモニウム、ジメチルジブチルアンモニウム、トリ
ブチルメチルアンモニウム、トリエチルプロピルアンモ
ニウム、ジエチルジプロピルアンモニウム、トリプロピ
ルエチルアンモニウム、トリエチルブチルアンモニウ
ム、ジエチルジブチルアンモニウム、トリブチルエチル
アンモニウム、トリプロピルブチルアンモニウム、ジプ
ロピルジブチルアンモニウム、トリブチルプロピルアン
モニウム、メチルエチルプロピルブチルアンモニウムな
どの非対称アルキル型;N,N−ジメチルピロリジニウ
ム、N,N−ジメチルピペリジニウム、N,N−ジメチ
ルモルホリニウム、N−メチル−N−エチルピロリジニ
ウム、N−メチル−N−エチルピペリジニウム、N−メ
チル−N−エチルモルホリニウム、N,N−ジエチルピ
ロリジニウム、N,N−ジエチルピペリジニウム、N,
N−ジエチルモルホリニウム、N,N−テトラメチレン
ピロリジニウム、N,N−テトラメチレンピペリジニウ
ム、N,N−テトラメチレンモルホリニウム、N,N−
ペンタメチレンピペリジニウム、N,N−ペンタメチレ
ンモルホリニウムなどの脂環式型;及び、N−エチルピ
リジニウム、N,N−ジメチルイミダゾリウム、N−メ
チル−N−エチルイミダゾリウムなどの芳香族型の四級
アンモニウム塩を例示することができる。これらの中で
も、アルキル基がメチルあるいはエチル基のものが高い
電気伝導度を示すので好ましく、テトラメチルアンモニ
ウム、テトラエチルアンモニウム、トリメチルエチルア
ンモニウム、ジメチルジエチルアンモニウム、トリエチ
ルメチルアンモニウム、N,N−ジメチルピロリジニウ
ム、N−メチル−N−エチルピロリジニウム等が好まし
い。特に、テトラメチルアンモニウム、テトラエチルア
ンモニウム、トリエチルメチルアンモニウム塩が入手が
容易でより好ましい。The quaternary ammonium salt of phthalic acid used in the electrolytic solution of the present invention is a symmetrical alkyl type such as tetramethylammonium, tetraethylammonium, tetrapropylammonium, tetrabutylammonium;
Trimethylethylammonium, dimethyldiethylammonium, triethylmethylammonium, trimethylpropylammonium, dimethyldipropylammonium, tripropylmethylammonium, trimethylbutylammonium, dimethyldibutylammonium, tributylmethylammonium, triethylpropylammonium, diethyldipropylammonium, tripropylethyl Asymmetrical alkyl type such as ammonium, triethylbutylammonium, diethyldibutylammonium, tributylethylammonium, tripropylbutylammonium, dipropyldibutylammonium, tributylpropylammonium, methylethylpropylbutylammonium; N, N-dimethylpyrrolidinium, N, N-Dimethy Piperidinium, N, N-dimethylmorpholinium, N-methyl-N-ethylpyrrolidinium, N-methyl-N-ethylpiperidinium, N-methyl-N-ethylmorpholinium, N, N-diethylpyrrolinium Dinium, N, N-diethylpiperidinium, N,
N-diethylmorpholinium, N, N-tetramethylenepyrrolidinium, N, N-tetramethylenepiperidinium, N, N-tetramethylenemorpholinium, N, N-
Alicyclic types such as pentamethylene piperidinium and N, N-pentamethylene morpholinium; and aromatic compounds such as N-ethylpyridinium, N, N-dimethylimidazolium and N-methyl-N-ethylimidazolium Examples thereof include quaternary ammonium salts of the type. Among these, those having an alkyl group of a methyl or ethyl group are preferable because they show high electric conductivity, and tetramethylammonium, tetraethylammonium, trimethylethylammonium, dimethyldiethylammonium, triethylmethylammonium, N, N-dimethylpyrrolidinium are preferable. , N-methyl-N-ethylpyrrolidinium and the like are preferable. In particular, tetramethylammonium, tetraethylammonium, and triethylmethylammonium salts are more easily available and more preferable.
【0008】本発明の電解液に用いるフタル酸の四級ア
ンモニウム塩を溶解させる溶媒としては、N−メチルホ
ルムアミド、N−エチルホルムアミド、N,N−ジメチ
ルホルムアミド、N,N−ジエチルホルムアミド、N−
メチルアセトアミド、N,N−ジメチルアセトアミド、
N−メチルピロリジノン等のアミド溶媒;γ−ブチロラ
クトン、γ−バレロラクトン、δ−バレロラクトン等の
ラクトン溶媒;エチレンカーボネート、プロピレンカー
ボネート、ブチレンカーボネート等のカーボネート溶
媒;エチレングリコール、メチルセロソルブ等のアルコ
ール溶媒;3−メトキシプロピオニトリル、グルタロニ
トリル等のニトリル溶媒;トリメチルホスフェート、ト
リエチルホスフェート等のリン酸エステル溶媒等を例示
することが出来る。これらの溶媒は、2種以上の溶媒の
混合溶媒として使用することもできる。これらの中でも
γ−ブチロラクトンが実用上最も好ましい。As the solvent for dissolving the quaternary ammonium salt of phthalic acid used in the electrolytic solution of the present invention, N-methylformamide, N-ethylformamide, N, N-dimethylformamide, N, N-diethylformamide, N-
Methylacetamide, N, N-dimethylacetamide,
An amide solvent such as N-methylpyrrolidinone; a lactone solvent such as γ-butyrolactone, γ-valerolactone and δ-valerolactone; a carbonate solvent such as ethylene carbonate, propylene carbonate and butylene carbonate; an alcohol solvent such as ethylene glycol and methyl cellosolve; Examples thereof include nitrile solvents such as 3-methoxypropionitrile and glutaronitrile; and phosphate ester solvents such as trimethyl phosphate and triethyl phosphate. These solvents can also be used as a mixed solvent of two or more solvents. Of these, γ-butyrolactone is the most practically preferred.
【0009】上記溶媒に対する溶質フタル酸の四級アン
モニウム塩の溶解量は、得るべき電解液の比抵抗、及び
の化成電圧により異なるが、一般的に飽和濃度以下、好
ましくは1〜40重量%である。また、本発明の目的を
達成するためには、上記電解液の含水量は0.1重量%
以下、好ましくは0.05重量%以下に規制することが
必要である。含水量が多すぎると表面積の大きな多孔性
の皮膜を形成することができない。The amount of the quaternary ammonium salt of solute phthalic acid dissolved in the above-mentioned solvent varies depending on the specific resistance of the electrolytic solution to be obtained and the formation voltage, but it is generally below the saturation concentration, preferably 1 to 40% by weight. is there. In order to achieve the object of the present invention, the water content of the electrolytic solution is 0.1% by weight.
Hereafter, it is necessary to regulate the content to preferably 0.05% by weight or less. If the water content is too high, a porous film having a large surface area cannot be formed.
【0010】陽極酸化処理の方法としては、一般的に実
用化されている方法を採用することができる。陽極酸化
処理は、温度0〜125℃の温度範囲の電解浴中で、0
5〜50mA/cm2の電流密度で行われる。電解液の火花電
圧は電解液の濃度を下げることにより約500Vまで上
げることは可能であるが、電解液の抵抗が増大し化成時
の発熱が激しくなり電力損失も大きくなるので、実用的
には化成電圧が200V以下が好ましい。As a method of anodizing treatment, a method which has been generally put into practical use can be adopted. The anodizing treatment is performed in an electrolytic bath in a temperature range of 0 to 125 ° C.
It is performed at a current density of 5 to 50 mA / cm 2 . The spark voltage of the electrolytic solution can be raised to about 500 V by decreasing the concentration of the electrolytic solution, but the resistance of the electrolytic solution increases, heat generation during formation becomes intense, and power loss also increases. The formation voltage is preferably 200 V or less.
【0011】[0011]
【実施例】以下に実施例および比較例を挙げて本発明を
更に具体的に説明する。 (実施例1)フタル酸水素テトラメチルアンモニウム塩
をγ−ブチロラクトン溶媒に21重量%溶解して電解液
を調製し、電解液中の水分を0.01重量%に調節し
た。この電解液の25℃における比抵抗及びこの電解液
中で5mA/cm2 でアルミ箔を陽極酸化したときの火
花電圧はそれぞれ101Ωcm、90Vであった。EXAMPLES The present invention will be described more specifically with reference to Examples and Comparative Examples below. (Example 1) Tetramethylammonium hydrogen phthalate salt was dissolved in γ-butyrolactone solvent in an amount of 21% by weight to prepare an electrolytic solution, and the water content in the electrolytic solution was adjusted to 0.01% by weight. The specific resistance of this electrolytic solution at 25 ° C. and the spark voltage when the aluminum foil was anodized at 5 mA / cm 2 in this electrolytic solution were 101 Ωcm and 90 V, respectively.
【0012】(実施例2)実施例1の電解液を使用しア
ルミ箔を室温で5mA/cm2 で90Vまで化成した。
得られた酸化皮膜を走査型電子顕微鏡で観察した結果を
図1示す。形成された皮膜は繊維状の形態をとる表面積
の大きい多孔性のものであった。(Example 2) Using the electrolytic solution of Example 1, an aluminum foil was formed at room temperature at 5 mA / cm 2 up to 90V.
The result of observing the obtained oxide film with a scanning electron microscope is shown in FIG. The film formed was porous with a large surface area in the form of fibers.
【0013】(実施例3)フタル酸水素テトラメチルア
ンモニウム塩をγ−ブチロラクトン溶媒に10重量%溶
解して電解液を調製し、電解液中の水分を0.04重量
%に調節した。この電解液の25℃における比抵抗及び
この電解液中で5mA/cm2 でアルミ箔を陽極酸化し
たときの火花電圧はそれぞれ134Ωcm、100Vで
あった。この電解液を使用しアルミ箔を室温で10mA
/cm2 で100Vまで化成し、得られた酸化皮膜を透
過型電子顕微鏡で観察した結果を図2示す。形成された
皮膜は繊維状のものであった。Example 3 Tetramethylammonium hydrogen phthalate was dissolved in a γ-butyrolactone solvent in an amount of 10% by weight to prepare an electrolytic solution, and the water content in the electrolytic solution was adjusted to 0.04% by weight. The specific resistance of this electrolytic solution at 25 ° C. and the spark voltage when the aluminum foil was anodized at 5 mA / cm 2 in this electrolytic solution were 134 Ωcm and 100 V, respectively. Aluminum foil is 10mA at room temperature using this electrolyte.
FIG. 2 shows the results of observing the resulting oxide film with a transmission electron microscope after forming the film at 100 V / cm 2 up to 100 V. The film formed was fibrous.
【0014】(比較例1)実施例1の電解液の水分量を
1重量%にした他は実施例1と同一の電解液を使用し、
この電解液中で実施例2と同様にしてアルミ箔を90V
まで化成して得られた皮膜を走査型電子顕微鏡で観察し
たところ、図3示したように皮膜表面は比較的滑らか
で、繊維状の形態をとる皮膜は得られなかった。(Comparative Example 1) The same electrolytic solution as in Example 1 was used except that the water content of the electrolytic solution in Example 1 was changed to 1% by weight.
In this electrolytic solution, an aluminum foil of 90 V was prepared in the same manner as in Example 2.
When the film obtained by chemical conversion was observed with a scanning electron microscope, the film surface was relatively smooth as shown in FIG. 3, and a film having a fibrous form was not obtained.
【0015】[0015]
【発明の効果】本発明によれば、非水系電解液で、繊維
状の表面積の大きい多孔性の皮膜を形成できる。本発明
の方法により得られる酸化皮膜を有するアルミニウム
は、建築材料、磁気記録デイスク、湿度センサー、太陽
熱放射板、吸収板、多色アルマイト、発光素子、潤滑ア
ルマイト、触媒等の多方面に応用が期待される。According to the present invention, a fibrous porous film having a large surface area can be formed with a non-aqueous electrolyte. Aluminum having an oxide film obtained by the method of the present invention is expected to be applied to various fields such as building materials, magnetic recording disks, humidity sensors, solar heat radiation plates, absorption plates, multicolor alumites, light emitting devices, lubricating alumites, and catalysts. To be done.
【図1】は、実施例2で得られた陽極酸化皮膜の断面の
走査型電子顕微鏡写真である。FIG. 1 is a scanning electron micrograph of a cross section of an anodized film obtained in Example 2.
【図2】は、実施例3で得られた陽極酸化皮膜の断面の
透過型電子顕微鏡写真である。FIG. 2 is a transmission electron micrograph of the cross section of the anodized film obtained in Example 3.
【図3】は、比較例1で得られた陽極酸化皮膜の断面の
走査型電子顕微鏡写真である。FIG. 3 is a scanning electron micrograph of a cross section of the anodized film obtained in Comparative Example 1.
Claims (4)
下のフタル酸の四級アンモニウム塩の有機溶媒溶液中で
陽極酸化処理することを特徴とするアルミニウム酸化皮
膜の形成方法。1. A method for forming an aluminum oxide film, which comprises anodizing aluminum in an organic solvent solution of a quaternary ammonium salt of phthalic acid having a water content of 0.1% by weight or less.
解浴中で、0.5〜50mA/cm2の電流密度で行われる請
求項1に記載の方法2. The method according to claim 1, wherein the anodizing treatment is performed in an electrolytic bath at a temperature of 0 to 125 ° C. and a current density of 0.5 to 50 mA / cm 2.
級アンモニウム塩を有機溶媒に溶解してなる水含量0.
1重量%以下の電解液3. The water content of the quaternary ammonium salt of phthalic acid used in the method according to claim 1 dissolved in an organic solvent.
1 wt% or less electrolyte
求項3に記載の電解液4. The electrolytic solution according to claim 3, wherein the organic solvent is γ-butyrolactone.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4101828A JPH05271992A (en) | 1992-03-27 | 1992-03-27 | Formation of aluminum oxide film and electrolyte used therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4101828A JPH05271992A (en) | 1992-03-27 | 1992-03-27 | Formation of aluminum oxide film and electrolyte used therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05271992A true JPH05271992A (en) | 1993-10-19 |
Family
ID=14310967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4101828A Pending JPH05271992A (en) | 1992-03-27 | 1992-03-27 | Formation of aluminum oxide film and electrolyte used therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05271992A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6368485B1 (en) | 1997-11-18 | 2002-04-09 | Mitsubishi Chemical Corporation | Forming electrolyte for forming metal oxide coating film |
KR100672389B1 (en) * | 2005-01-28 | 2007-01-24 | 엘지전자 주식회사 | Case and the making method for mobile phone |
CN100354456C (en) * | 2004-04-20 | 2007-12-12 | 中国科学院理化技术研究所 | Process for preparing aperture-controllable alumina template |
JP2017066513A (en) * | 2015-09-29 | 2017-04-06 | 日立金属株式会社 | Manufacturing method of aluminum foil and aluminum foil |
-
1992
- 1992-03-27 JP JP4101828A patent/JPH05271992A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6368485B1 (en) | 1997-11-18 | 2002-04-09 | Mitsubishi Chemical Corporation | Forming electrolyte for forming metal oxide coating film |
CN100354456C (en) * | 2004-04-20 | 2007-12-12 | 中国科学院理化技术研究所 | Process for preparing aperture-controllable alumina template |
KR100672389B1 (en) * | 2005-01-28 | 2007-01-24 | 엘지전자 주식회사 | Case and the making method for mobile phone |
JP2017066513A (en) * | 2015-09-29 | 2017-04-06 | 日立金属株式会社 | Manufacturing method of aluminum foil and aluminum foil |
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