JPH05270805A - Pipe type ozone generator - Google Patents

Pipe type ozone generator

Info

Publication number
JPH05270805A
JPH05270805A JP9729092A JP9729092A JPH05270805A JP H05270805 A JPH05270805 A JP H05270805A JP 9729092 A JP9729092 A JP 9729092A JP 9729092 A JP9729092 A JP 9729092A JP H05270805 A JPH05270805 A JP H05270805A
Authority
JP
Japan
Prior art keywords
pipe
electrode
gas
capillary tube
ozone generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9729092A
Other languages
Japanese (ja)
Other versions
JP3311382B2 (en
Inventor
Michio Ohira
美智男 大平
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Jitsugyo Co Ltd
Original Assignee
Ebara Jitsugyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Jitsugyo Co Ltd filed Critical Ebara Jitsugyo Co Ltd
Priority to JP09729092A priority Critical patent/JP3311382B2/en
Publication of JPH05270805A publication Critical patent/JPH05270805A/en
Application granted granted Critical
Publication of JP3311382B2 publication Critical patent/JP3311382B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10Preparation of ozone
    • C01B13/11Preparation of ozone by electric discharge
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2201/00Preparation of ozone by electrical discharge
    • C01B2201/20Electrodes used for obtaining electrical discharge
    • C01B2201/22Constructional details of the electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE:To freely adjust the concn. of ozone and the amt. of the ozone to be formed by adjusting the length of an electrode wire from the outside and freely forming the discharge space of a suitable discharge length. CONSTITUTION:The total amt. of gaseous raw material in the ozone generator of a silent discharge type is passed into the discharge space formed between paired electrodes 2 and 5 and a high voltage is impressed between the paired electrodes 2 and 5 to form the ozone. The paired electrodes 2 and 5 are formed of the electrode wire 2 inserted into the small-diameter hole of a capillary tube 3 which is a dielectric substance and an electrode pipe 5 which is coaxially disposed on the outer periphery of the capillary tube 3 by providing an annular spacing to constitute a gas flow passage 4. Piping parts 6a, 7a for connecting the pipe ends on a gas introducing side and discharge side, inside pipe holding parts 6b, 7b for fixing and holding the gas flow passage 4 and the piping parts 6a, 7a in a communicating state and piping joint parts 6, 7 consisting of outside pipe holding parts 6c, 7c are formed at both ends of the tube 3 and the pipe 5. The wire length of the electrode wire 2 in the tube 3 is made freely adjustable.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、電極対の間隙に形成さ
れる放電空間内へ原料ガスを通過させ、電極対へ高電圧
を印加させてオゾンを生成する無声放電式のオゾン発生
器に関するものであり、詳しくは、主にガス導入側配管
路とガス排出側配管路から構成される適宜な配管路へ配
設させるための一対の配管継手部を備え、流入させた原
料ガスの全量を放電空間へ通過させて連続的にオゾンを
生成するパイプ型オゾン発生器に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a silent discharge type ozone generator for generating ozone by passing a source gas into a discharge space formed in a gap between electrode pairs and applying a high voltage to the electrode pairs. Specifically, it is provided with a pair of pipe joints for disposing it in an appropriate pipe line mainly composed of a gas introduction side pipe line and a gas discharge side pipe line, and the total amount of raw material gas flowed in is provided. The present invention relates to a pipe-type ozone generator that continuously generates ozone by passing it through a discharge space.

【0002】[0002]

【従来技術とその問題点】従来より、オゾン発生器に
は、例えば、無声放電法、電解法、光化学法、高周波電
解法、放射線照射法等によるものがあり、中でも、無声
放電法によるオゾン発生器が工業的に広く使用されてい
る。無声放電式のオゾン発生器は、誘電体を介して対峙
させた電極間の放電によりオゾンを生成させるもので、
電極配置により平板型、沿面型、同軸円筒型等に類別す
ることができるが、この内、小型オゾン発生器としての
利用に適した平板型、或いは、超小型オゾン発生器とし
て利用されているセラミックチップ等の誘電体を用いた
沿面型オゾン発生器101を使用するには、原料ガスを
放電空間内へ通過させるために、原料ガスの導入部から
オゾンガスの排出部へ至る適宜な配管路を形成し、配管
路内へ別体のケーシング等を用いてオゾン発生器を配設
させる必要があり、又、この場合の放電空間は、図5に
図示の如く、原料ガスの流れに対してごく一部にしか形
成し得ず、オゾンの生成効率が極めて悪かった。
2. Description of the Related Art Conventionally, there are ozone generators based on, for example, a silent discharge method, an electrolysis method, a photochemical method, a high-frequency electrolysis method, a radiation irradiation method, and the like. The vessel is widely used industrially. The silent discharge type ozone generator is one that generates ozone by the discharge between the electrodes facing each other through a dielectric.
The electrodes can be classified into a flat plate type, a creeping type, a coaxial cylindrical type, and the like. Among them, a flat plate type suitable for use as a small ozone generator, or a ceramic used as an ultra-small ozone generator In order to use the creeping type ozone generator 101 using a dielectric such as a chip, an appropriate pipe line is formed from the introduction portion of the raw material gas to the discharge portion of the ozone gas in order to pass the raw material gas into the discharge space. However, it is necessary to dispose the ozone generator in the pipe line by using a separate casing or the like, and the discharge space in this case is very small with respect to the flow of the raw material gas as shown in FIG. It could be formed only in the area, and the ozone generation efficiency was extremely poor.

【0003】一方、同軸円筒型オゾン発生器102は、
図6に図示の如く、配管路内へそのまま配設できる構造
を有しているものの、主に大型オゾン発生器として装置
化され且つ構造が複雑であり、特に内部の高圧電極へ電
気的な絶縁性とシール性を維持しつつ、電気エネルギー
を供給しなければならないということが構造を複雑化し
ていた。又、同軸円筒型オゾン発生器102は、例え
ば、誘電体である硝子管104の内周面にライニング加
工によって金属被膜103を形成するか、或いは、金属
管の外周面にガラス被膜を形成(図示せず)させて内部
電極体として使用しているため、製造に手間がかかるだ
けでなく電極間のギャップ長が不均一となり、従って、
この種の同軸円筒型オゾン発生器102をそのまま小型
オゾン発生器として装置化させることは、コスト面や機
能面で極めて困難であった。
On the other hand, the coaxial cylindrical ozone generator 102 is
As shown in FIG. 6, although it has a structure that can be directly installed in the pipeline, it is mainly used as a large-sized ozone generator and its structure is complicated. Especially, it is electrically insulated from the internal high-voltage electrode. The structure was complicated by the fact that electric energy had to be supplied while maintaining the sealing property and the sealing property. In the coaxial cylindrical ozone generator 102, for example, a metal coating 103 is formed on the inner peripheral surface of a glass tube 104, which is a dielectric, by lining, or a glass coating is formed on the outer peripheral surface of the metal tube (Fig. Since it is used as an internal electrode body by not showing it), it not only takes time to manufacture but also the gap length between the electrodes becomes non-uniform, and therefore,
It has been extremely difficult in terms of cost and function to make the coaxial cylindrical ozone generator 102 of this type as a small ozone generator as it is.

【0004】[0004]

【発明の目的】本発明の主たる目的は、前述の問題点に
鑑みて、配管継手部を形成させて配管路への配設を可能
とさせると共に、誘電体と電極対を石英等の硝子製のキ
ャピラリチューブ、ステンレス線、ステンレスパイプ等
の安価な構造部品で構成し、構造の単純化、小型化、メ
ンテナンス性の向上等に貢献するパイプ型オゾン発生器
を提供する目的であり、又、本発明の別の目的は、従来
型の小型オゾン発生器と大型オゾン発生器では得られな
かった範囲のオゾン生成量を供給できる新規な小型オゾ
ン発生器を提供する目的である。
SUMMARY OF THE INVENTION In view of the above-mentioned problems, a main object of the present invention is to form a pipe joint portion so that it can be arranged in a pipe passage and to make a dielectric and an electrode pair made of glass such as quartz. The purpose is to provide a pipe-type ozone generator that is composed of inexpensive structural parts such as capillary tubes, stainless wires, and stainless pipes, and contributes to simplification of structure, miniaturization, improvement of maintainability, etc. Another object of the invention is to provide a novel small ozone generator capable of supplying an ozone production amount in a range that cannot be obtained by the conventional small ozone generator and large ozone generator.

【0005】[0005]

【発明の構成】本発明の構成は、電極対は誘電体である
キャピラリチューブの細径孔内へ挿入させた電極線とキ
ャピラリチューブの外周方向へガス流路となる環状間隙
を設けて同軸状に配置された電極パイプとで形設され、
キャピラリチューブと電極パイプの両端部へガス導入側
配管路又はガス排出側配管路の管端部に接続させる配管
部を設けると共にキャピラリチューブ及び電極パイプを
同軸状に且つガス流路と配管部とが連通した状態で固定
保持させる内管保持部及び外管保持部を設けた一対の配
管継手部を形成し、一方の配管継手部からは電極線の端
部を露出させてキャピラリチューブ内での線長を調節自
在とさせ、電極線の端部と電極パイプの外周部へ電源と
の接続部を形成させて、ガス流路内へ適宜な放電長さの
放電空間を形成させた構成である。
According to the structure of the present invention, the electrode pair is coaxial with the electrode wire inserted into the small diameter hole of the capillary tube made of a dielectric material and the annular gap serving as a gas flow path in the outer peripheral direction of the capillary tube. Is formed with an electrode pipe placed in
The capillary tube and the electrode pipe are provided at both ends thereof with a pipe portion connected to the pipe end portion of the gas introduction side pipe passage or the gas discharge side pipe passage, and the capillary tube and the electrode pipe are coaxial and the gas flow passage and the pipe portion are Form a pair of pipe joints that have an inner pipe holding part and an outer pipe holding part that are fixed and held in communication with each other, and expose the end of the electrode wire from one of the pipe joints to form a wire in the capillary tube. The length is adjustable, and a connecting portion for connecting to a power source is formed at the end portion of the electrode wire and the outer peripheral portion of the electrode pipe to form a discharge space having an appropriate discharge length in the gas flow path.

【0006】[0006]

【実施例】斯る目的を達成せしめた本発明を以下実施例
の図面により説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention, which has achieved such an object, will be described below with reference to the drawings of the embodiments.

【0007】図1は、本発明のパイプ型オゾン発生器の
長さ方向の概要断面図であり、図2は、本発明のパイプ
型オゾン発生器の放電空間を説明するための長さ方向の
概要断面図であり、図3は、本発明のパイプ型オゾン発
生器の図1におけるA−A線断面図であり、図4は、本
発明のパイプ型オゾン発生器の一実施例の全体説明図で
あり、図5は、従来の沿面型オゾン発生器の放電空間を
示す概要図であり、図6は、従来の同軸円筒型オゾン発
生器の概要断面図である。
FIG. 1 is a schematic cross-sectional view of the pipe-type ozone generator of the present invention in the longitudinal direction, and FIG. 2 is a longitudinal sectional view for explaining the discharge space of the pipe-type ozone generator of the present invention. FIG. 3 is a schematic cross-sectional view, FIG. 3 is a cross-sectional view of the pipe-type ozone generator of the present invention taken along the line AA in FIG. 1, and FIG. 4 is an overall description of an embodiment of the pipe-type ozone generator of the present invention. FIG. 5 is a schematic diagram showing a discharge space of a conventional creeping ozone generator, and FIG. 6 is a schematic sectional view of a conventional coaxial cylindrical ozone generator.

【0008】本発明は、材料試験場等においてオゾンに
よるゴム材料等の劣化を判定する試験装置や、病院、実
験動物施設、食品工場、貯蔵庫等における燻蒸装置、或
いは、病院、食品工場、一般家庭等における脱臭装置等
の様々な用途に用いられる簡易構造のオゾン発生器に関
するものであり、原料ガスの全量を電極対2.5の間に
形成される放電空間10内へ通過させると共に電極対
2.5へ高電圧を印加させてオゾン生成を行なう無声放
電式のオゾン発生器であって、前記電極対2.5は誘電
体であるキャピラリチューブ3の細径孔内へ挿入させた
電極線2と、キャピラリチューブ3の外周へガス流路4
となる環状間隙を設けて同軸状に配置された電極パイプ
5とで形設されると共に、前記キャピラリチューブ3と
電極パイプ5の両端部へはガス導入側配管路8又はガス
排出側配管路9の管端部と接続させる配管部6a.7a
を設けると共に前記キャピラリチューブ3及び電極パイ
プ5を同軸状に且つ前記ガス流路4と配管部6a.7a
とが連通した状態で固定保持させる内管保持部6b.7
b及び外管保持部6c.7cを設けた一対の配管継手部
6.7を形成し、少なくとも一方の配管継手部6からは
前記電極線2の端部を露出させてキャピラリチューブ3
内での線長を調節自在とさせ、該電極線2の端部と前記
電極パイプ5の外周部へは電源との接続部2a.5aを
夫々形成させて、前記ガス流路4内へ適宜な放電長さの
放電空間10を形成させたものである。
The present invention is a test apparatus for determining the deterioration of rubber materials and the like due to ozone in a material test site, a fumigation apparatus in a hospital, a laboratory animal facility, a food factory, a storage cabinet, or a hospital, a food factory, a general household, The present invention relates to an ozone generator having a simple structure used for various purposes such as a deodorizing device in 1., and allows the entire amount of raw material gas to pass into the discharge space 10 formed between the electrode pair 2.5 and the electrode pair 2. 5 is a silent discharge ozone generator for generating ozone by applying a high voltage to the electrode 5. The electrode pair 2.5 includes an electrode wire 2 inserted into a small diameter hole of a capillary tube 3 which is a dielectric. , Gas passage 4 to the outer circumference of the capillary tube 3
Is formed by an electrode pipe 5 coaxially arranged with an annular gap that becomes a gas introduction side pipe line 8 or a gas discharge side pipe line 9 to both ends of the capillary tube 3 and the electrode pipe 5. Of the pipe portion 6a. 7a
And the capillary tube 3 and the electrode pipe 5 are coaxial with each other, and the gas flow path 4 and the pipe portion 6a. 7a
And inner tube holding portion 6b. 7
b and the outer tube holding portion 6c. 7c is provided to form a pair of pipe joint portions 6.7, and the end portion of the electrode wire 2 is exposed from at least one pipe joint portion 6 so as to expose the capillary tube 3
The length of the wire within the electrode pipe 2 is made adjustable, and the end portion of the electrode wire 2 and the outer peripheral portion of the electrode pipe 5 are connected to a power supply connecting portion 2a. 5a is formed in each gas flow path 4 to form a discharge space 10 having an appropriate discharge length.

【0009】即ち、本発明のパイプ型オゾン発生器1
は、図4に図示の如く、原料ガスを導入するガス導入部
Aからオゾンガスを排出するガス排出部Bに至る適宜な
配管路、詳細には、主としてガス導入側配管路8とガス
排出側配管路9から構成された配管路へ簡易に配設でき
る一対の配管継手部6.7を有し、図2に図示の如く、
原料ガスの全量を電極対2.5の間に形成される放電空
間10内へ通過させてオゾンを生成させる無声放電式の
オゾン発生器であって、図3に図示の如く、前記電極対
2.5は誘電体であるキャピラリチューブ3の細径孔内
へ挿入させた電極線2とキャピラリチューブ3の外周へ
ガス流路4となる環状間隙を設けて同軸状に配置された
電極パイプ5とで形設されたものである。
That is, the pipe-type ozone generator 1 of the present invention
4 is an appropriate pipe passage from the gas introduction portion A for introducing the raw material gas to the gas discharge portion B for discharging the ozone gas, specifically, mainly the gas introduction side piping passage 8 and the gas discharge side piping. As shown in FIG. 2, it has a pair of pipe joint parts 6.7 that can be easily arranged in the pipe line formed from the line 9.
A silent discharge type ozone generator for generating ozone by passing the entire amount of raw material gas into the discharge space 10 formed between the electrode pair 2 and the electrode pair 2 as shown in FIG. Reference numeral 5 denotes an electrode wire 2 inserted into a small-diameter hole of a capillary tube 3 which is a dielectric, and an electrode pipe 5 coaxially arranged on the outer circumference of the capillary tube 3 with an annular gap serving as a gas flow path 4. It was formed in.

【0010】前記電極線2はステンレス等の金属製の細
線から成り、該電極線2を誘電体である直管型の硝子製
等のキャピラリチューブ3の細径孔へ軸方向に移動可能
に挿入させることによりロッド型の内部電極体を構成さ
せており、又、前記電極パイプ5はキャピラリチューブ
3より大径の、例えば、衛生設備、建材等で使用される
汎用のステンレス製パイプ等から形設したものである。
The electrode wire 2 is composed of a thin wire made of metal such as stainless steel, and the electrode wire 2 is axially movably inserted into a small diameter hole of a capillary tube 3 made of a straight tube type glass which is a dielectric material. To form a rod-shaped internal electrode body, and the electrode pipe 5 is formed from a general-purpose stainless pipe or the like having a diameter larger than that of the capillary tube 3, for example, used in sanitary equipment, building materials, etc. It was done.

【0011】本発明のパイプ型オゾン発生器1は、前述
の如く、前記電極パイプ5をキャピラリチューブ3の外
周へガス流路4となる環状間隙を設けて同軸状に配置さ
せるものであるが、この電極配置は、前記電極パイプ5
内へ前記キャピラリチューブ3を挿入させると共に、夫
々の両端部へキャピラリチューブ3を固定させる内管保
持部6b.7b及び電極パイプ5を固定させる外管保持
部6c.7cを適宜に設けた一対の配管継手部6.7を
形成させることにより可能とさせたものである。
As described above, the pipe-type ozone generator 1 of the present invention is arranged such that the electrode pipe 5 is coaxially arranged on the outer periphery of the capillary tube 3 with an annular gap serving as the gas passage 4. This electrode arrangement corresponds to the electrode pipe 5
Inner tube holding portions 6b. For inserting the capillary tubes 3 therein and fixing the capillary tubes 3 to both ends thereof. 7b and the outer pipe holding portion 6c for fixing the electrode pipe 5. This is made possible by forming a pair of pipe joint parts 6.7 with 7c being provided appropriately.

【0012】前記夫々の配管継手部6.7は、図1乃至
図4に図示の如く、ガス導入側配管路8又はガス排出側
配管路9の管端部(図示せず)へ接続させる配管部6
a.7aを有しており、該配管部6a.7aと前記管端
部とを接続させることにより、ガス導入部Aからガス導
入側配管路8を介して流入させた原料ガスの全量をガス
流路4内へと流入させ、更にガス排出側配管路9を介し
てガス排出部Bから排出させるものであり、従って、前
記電極パイプ5及びキャピラリチューブ3の両端部は環
状間隙に形成されたガス流路4と前記夫々の配管部6
a.7aとが連通した状態で固定保持させるものであ
る。
As shown in FIGS. 1 to 4, each of the pipe joint portions 6.7 is connected to a pipe end portion (not shown) of the gas introduction side pipe passage 8 or the gas discharge side pipe passage 9. Part 6
a. 7a, and the piping portion 6a. By connecting 7a and the pipe end portion, the entire amount of the raw material gas that has flowed from the gas introduction portion A through the gas introduction side pipe passage 8 flows into the gas flow path 4, and the gas discharge side pipe The gas is discharged from the gas discharge portion B through the passage 9. Therefore, both ends of the electrode pipe 5 and the capillary tube 3 are formed in an annular gap between the gas flow path 4 and the respective pipe portions 6.
a. 7a is fixed and held in a state of communicating with 7a.

【0013】前記配管継手部6.7の内、少なくとも一
方の配管継手部6からは前記キャピラリチューブ3の端
部を内管保持部6bで保持させた状態で外部へ貫通させ
て突設させ、該キャピラリチューブ3の細径孔から前記
電極線2の端部を露出させるものであり、又、前記電極
線2はキャピラリチューブ3の細径孔内で軸方向に移動
可能であることから、電極線2の線長を調節自在とさせ
たものである。
From at least one of the pipe joint portions 6.7, the end portion of the capillary tube 3 is held by the inner pipe holding portion 6b and penetrated to the outside to be projected. The end portion of the electrode wire 2 is exposed from the small-diameter hole of the capillary tube 3, and the electrode wire 2 is axially movable within the small-diameter hole of the capillary tube 3, so that the electrode The length of the wire 2 is adjustable.

【0014】本発明は、前記電極線2の露出する端部と
電極パイプ5の外周部へ交流電源との接続部2a.5a
を形成させて、電極対2.5へ高電圧を印加させること
を可能とさせると共に、図2に図示の如く、前記電極パ
イプ5とキャピラリチューブ3間の環状間隙であるガス
流路4内にキャピラリチューブ3内の電極線2の線長に
よって決定される適宜な放電長さの放電空間10を形成
させるものである。
According to the present invention, the exposed end portion of the electrode wire 2 and the outer peripheral portion of the electrode pipe 5 are connected to the connecting portion 2a. 5a
To allow a high voltage to be applied to the electrode pair 2.5, and as shown in FIG. 2, in the gas flow path 4 which is an annular gap between the electrode pipe 5 and the capillary tube 3. The discharge space 10 having an appropriate discharge length determined by the line length of the electrode wire 2 in the capillary tube 3 is formed.

【0015】[0015]

【作用】本発明のパイプ型オゾン発生器1は、図4に図
示の如く、ガス導入部Aを設けたガス導入側配管路8と
ガス排出部Bを設けたガス排出側配管路9から構成され
る適宜な配管路内へ一対の配管継手部6.7により配設
させるものであり、前記ガス排出部Bを、例えば、薫蒸
室や試験チャンバー等に配置させることによりオゾンガ
スを利用した殺菌脱臭装置、試験装置等として機能させ
ることができる。
As shown in FIG. 4, the pipe-type ozone generator 1 of the present invention comprises a gas introduction side pipe line 8 having a gas introduction part A and a gas discharge side pipe line 9 having a gas discharge part B. The gas discharge part B is disposed in a suitable pipe line by a pair of pipe joint parts 6.7. For example, by disposing the gas discharge part B in a fumigation chamber, a test chamber or the like, sterilization using ozone gas is performed. It can function as a deodorizing device, a test device, and the like.

【0016】本発明のパイプ型オゾン発生器1は、前述
の如く、電極対2.5の間に形成される放電空間10を
原料ガスの全量を流入させるガス流路4内に形成してお
り、図2に図示の如く、電源を作動させて電極対2.5
へ高電圧を印加すると放電空間10内には無数の放電柱
が成長する無声放電が生じる。
In the pipe-type ozone generator 1 of the present invention, as described above, the discharge space 10 formed between the electrode pair 2.5 is formed in the gas flow path 4 into which the entire amount of the raw material gas flows. As shown in FIG. 2, the power source is activated to activate the electrode pair 2.5.
When a high voltage is applied to the discharge space 10, a silent discharge in which an infinite number of discharge columns grow is generated.

【0017】先ず、図4に図示の配管構成において、配
管路内に設けたポンプ装置等(図示せず)を作動させ
て、ガス導入部Aよりガス導入側配管路8内へ原料ガス
を導入させると、図1及び図2に図示の如く、原料ガス
は一方の配管継手部6の配管部6aから電極パイプ5と
キャピラリチューブ3間の環状間隙であるガス流路4内
へ流入し、電極線2の線長により決定される適宜な放電
長さの放電空間10を通過する。
First, in the piping structure shown in FIG. 4, a pump device or the like (not shown) provided in the pipe line is operated to introduce the raw material gas from the gas introduction part A into the gas introduction side pipe line 8. Then, as shown in FIGS. 1 and 2, the raw material gas flows from the pipe portion 6a of the one pipe joint portion 6 into the gas flow passage 4 which is an annular gap between the electrode pipe 5 and the capillary tube 3, and the electrode gas It passes through the discharge space 10 having an appropriate discharge length determined by the line length of the line 2.

【0018】次ぎに、前記放電空間10内ではオゾン生
成反応が生じ、オゾンガスを生成させた後に、他方の配
管継手部7の配管部7aからガス排出側配管路9を介し
てガス排出部Bより排出されるものである。又、前記ガ
ス流路4内においては、流入する原料ガスが電極パイプ
5及び電極線2を効果的に冷却させるもので、特にキャ
ピラリチューブ3内の電極線2は細線であることから充
分に冷却させることができる。
Next, after ozone generation reaction occurs in the discharge space 10 to generate ozone gas, the ozone gas is generated from the gas discharge part B from the pipe part 7a of the other pipe joint part 7 through the gas discharge side pipe line 9. It is what is discharged. Further, in the gas flow path 4, the inflowing raw material gas effectively cools the electrode pipe 5 and the electrode wire 2. Especially, the electrode wire 2 in the capillary tube 3 is a thin wire, so that it is sufficiently cooled. Can be made

【0019】尚、本発明のパイプ型オゾン発生器1は、
従来型のオゾン発生器では得られなかった範囲のオゾン
発生量を供給することができるものであり、従来型のオ
ゾン発生器(小型オゾン発生器、及び大型オゾン発生
器)との比較例を[表1]に示す。
The pipe type ozone generator 1 of the present invention is
It is possible to supply a range of ozone generation that cannot be obtained with conventional ozone generators, and a comparative example with conventional ozone generators (small ozone generator and large ozone generator) Table 1].

【0020】[0020]

【表1】 [Table 1]

【0021】本発明のパイプ型オゾン発生器1は、電源
に直流電源を用いることによってイオン化装置への適用
も可能である。
The pipe-type ozone generator 1 of the present invention can be applied to an ionization device by using a DC power source as a power source.

【発明の効果】本発明のパイプ型オゾン発生器は、前述
の如く、誘電体と電極対を硝子製のキャピラリチュー
ブ、ステンレス線、ステンレスパイプ等の安価な構造部
品で構成し、更に配管路へ簡易に配設できる配管継手部
を形成させたことにより、従来の沿面型の電極等を使用
する場合の様に、電極を内設するケーシング等を不要と
すると共に、原料ガスによる電極表面の冷却効果によっ
て冷却装置を簡易化させるので、オゾン発生器を利用し
た各種装置の全体構造を単純化、小型化させることがで
き、又、各部品が分解可能な構造であると共に、特に内
部の電極体に硝子製のキャピラリチューブを使用してい
るため、電極体が窒素酸化物等で汚れた場合でも洗浄を
容易に行なえる等のメンテナンス性の向上にも貢献する
ものである。更に、オゾン発生器自体は、前述の原料ガ
スによる電極表面の冷却効果によりオゾン生成効率を改
善させるので小型化に極めて適しており、又、簡易構造
のために低コストで製作できると共に、電源条件、オゾ
ン発生器の数、全体の長さの設定は勿論のこと、電極線
の長さを外部から調節して適宜な放電長さの放電空間を
自在に形成できるので、オゾン濃度を自由に調整できる
等の機能性にも優れ、従来型の小型オゾン発生器と大型
オゾン発生器では得られなかった範囲のオゾン生成量を
供給できる新規な小型オゾン発生器を実現させた画期的
な発明である。
As described above, in the pipe-type ozone generator of the present invention, the dielectric and the electrode pair are composed of inexpensive structural parts such as a glass-made capillary tube, a stainless wire, and a stainless pipe, and further connected to the pipeline. By forming a pipe joint that can be easily arranged, there is no need for a casing or the like to install the electrode inside, as is the case when using conventional creeping electrodes, and the electrode surface is cooled by the source gas. Since the cooling device is simplified by the effect, the overall structure of various devices using the ozone generator can be simplified and downsized, and each component can be disassembled, and especially the internal electrode body Since the capillary tube made of glass is used in the above, it contributes to improvement of maintainability such as easy cleaning even when the electrode body is contaminated with nitrogen oxide or the like. Furthermore, the ozone generator itself is extremely suitable for downsizing because it improves the ozone generation efficiency due to the cooling effect of the electrode surface by the above-mentioned raw material gas, and because it has a simple structure, it can be manufactured at low cost, and power supply conditions The number of ozone generators and the total length can be set as well as the length of the electrode wire can be adjusted from the outside to freely form a discharge space of an appropriate discharge length, so the ozone concentration can be adjusted freely. It is an epoch-making invention that realizes a new small ozone generator that is excellent in functionality such as capable of supplying ozone generation amount in a range that could not be obtained with conventional small ozone generators and large ozone generators. is there.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のパイプ型オゾン発生器の長さ方向の概
要断面図である。
FIG. 1 is a schematic cross-sectional view of a pipe type ozone generator of the present invention in a length direction.

【図2】本発明のパイプ型オゾン発生器の放電空間を説
明するための長さ方向の概要断面図である。
FIG. 2 is a schematic cross-sectional view in the length direction for explaining the discharge space of the pipe-type ozone generator of the present invention.

【図3】本発明のパイプ型オゾン発生器の図1及び図2
におけるA−A線断面図である。
FIG. 3 is a view showing a pipe type ozone generator according to the present invention.
FIG. 6 is a sectional view taken along line AA in FIG.

【図4】本発明のパイプ型オゾン発生器の一実施例の全
体説明図である。
FIG. 4 is an overall explanatory view of an embodiment of the pipe type ozone generator of the present invention.

【図5】従来の沿面型オゾン発生器の放電空間を示す概
要図である。
FIG. 5 is a schematic diagram showing a discharge space of a conventional creeping ozone generator.

【図6】従来の同軸円筒型オゾン発生器の概要断面図で
ある。
FIG. 6 is a schematic sectional view of a conventional coaxial cylindrical ozone generator.

【符号の説明】[Explanation of symbols]

A ガス導入部 B ガス排出部 1 パイプ型オゾン発生器 2 電極線 2a 接続部 3 キャピラリチューブ 4 ガス流路 5 電極パイプ 5a 接続部 6 配管継手部 6a 配管部 6b 内管保持部 6c 外管保持部 7 配管継手部 7a 配管部 7b 内管保持部 7c 外管保持部 8 ガス導入側配管路 9 ガス排出側配管路 10 放電空間 101 沿面型オゾン発生器 102 同軸円筒型オゾン発生器 103 金属被膜 104 硝子管 105 電極管 A gas introduction part B gas discharge part 1 pipe type ozone generator 2 electrode wire 2a connection part 3 capillary tube 4 gas flow path 5 electrode pipe 5a connection part 6 pipe joint part 6a pipe part 6b inner pipe holding part 6c outer pipe holding part Reference Signs List 7 pipe joint part 7a pipe part 7b inner pipe holding part 7c outer pipe holding part 8 gas introduction side pipe line 9 gas discharge side pipe line 10 discharge space 101 creeping ozone generator 102 coaxial cylindrical ozone generator 103 metal coating 104 glass Tube 105 electrode tube

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】原料ガスの全量を電極対の間に形成される
放電空間内へ通過させてオゾンを生成させる無声放電式
のオゾン発生器であって、前記電極対は誘電体であるキ
ャピラリチューブの細径孔内へ挿入させた電極線と、キ
ャピラリチューブの外周へ原料ガスのガス流路となる環
状間隙を設けて同軸状に配置された電極パイプとで形設
されると共に、前記キャピラリチューブと電極パイプの
両端部へはガス導入側配管路又はガス排出側配管路の管
端部に接続させる配管部を設けると共に前記キャピラリ
チューブ及び電極パイプを同軸状に且つ前記ガス流路と
配管部とが連通した状態で固定保持させる内管保持部及
び外管保持部を設けた一対の配管継手部を形成し、少な
くとも一方の配管継手部からは前記電極線の端部を露出
させてキャピラリチューブ内での線長を調節自在とさ
せ、該電極線の端部と前記電極パイプの外周部へは電源
との接続部を夫々形成させて、前記ガス流路内へ適宜な
放電長さの放電空間を形成させたことを特徴とするパイ
プ型オゾン発生器。
1. A silent discharge ozone generator for generating ozone by passing the entire amount of a source gas into a discharge space formed between an electrode pair, wherein the electrode pair is a dielectric capillary tube. The capillary tube is formed by an electrode wire inserted into the small-diameter hole of the capillary tube and an electrode pipe coaxially arranged on the outer circumference of the capillary tube with an annular gap serving as a gas flow path for the raw material gas. And a pipe part for connecting to the pipe end part of the gas introduction side pipe line or the gas discharge side pipe line is provided to both ends of the electrode pipe, and the capillary tube and the electrode pipe are coaxial and the gas flow passage and the pipe part. Form a pair of pipe joint portions provided with an inner pipe holding portion and an outer pipe holding portion that are fixedly held in a state in which the capillaries expose the end portions of the electrode wires from at least one pipe joint portion. The length of the wire in the tube is adjustable, and the ends of the electrode wire and the outer circumference of the electrode pipe are connected to a power source, respectively. A pipe-type ozone generator characterized in that a discharge space is formed.
JP09729092A 1992-03-25 1992-03-25 Pipe type ozone generator Expired - Lifetime JP3311382B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP09729092A JP3311382B2 (en) 1992-03-25 1992-03-25 Pipe type ozone generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP09729092A JP3311382B2 (en) 1992-03-25 1992-03-25 Pipe type ozone generator

Publications (2)

Publication Number Publication Date
JPH05270805A true JPH05270805A (en) 1993-10-19
JP3311382B2 JP3311382B2 (en) 2002-08-05

Family

ID=14188376

Family Applications (1)

Application Number Title Priority Date Filing Date
JP09729092A Expired - Lifetime JP3311382B2 (en) 1992-03-25 1992-03-25 Pipe type ozone generator

Country Status (1)

Country Link
JP (1) JP3311382B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2454458A (en) * 2007-11-06 2009-05-13 Plasma Clean Ltd Plasma discharge ozone generator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2454458A (en) * 2007-11-06 2009-05-13 Plasma Clean Ltd Plasma discharge ozone generator

Also Published As

Publication number Publication date
JP3311382B2 (en) 2002-08-05

Similar Documents

Publication Publication Date Title
US5409673A (en) Ozone generator having an electrode formed of a mass of helical windings and associated method
JP2003210556A (en) Pipe sterilizer with plasma
JP3404405B2 (en) Equipment for generating ozone
CN111770623A (en) Plasma air sterilization and disinfection equipment
JPH05270805A (en) Pipe type ozone generator
CN108325351A (en) A kind of double medium low temperature plasma gas purifiers of electromagnetic induction coupling
WO2014136063A2 (en) Systems and methods for generating and collecting reactive species
CN205323500U (en) Single medium blocks low temperature plasma discharge module
JP2002255514A (en) Ozone generator
KR20180055816A (en) Multi-Oxygen Generator
JP2005288398A (en) Surface treatment method
JPH1053404A (en) Ozone generator
CN105344212A (en) Single-dielectric barrier low temperature plasma discharge module
JP2009096693A (en) Ozone generating device
KR200187879Y1 (en) Ozone generation apparatus for industrial
CN103212096A (en) Dielectric barrier discharge plasma device for disinfecting catheter
CN109539426A (en) Ionic tube and air cleaning unit
CN219019097U (en) Small-sized dual-purpose planar atmospheric pressure plasma discharge device
JP2013018682A (en) Ozone generating apparatus, and method for manufacturing the same
JP3183473B2 (en) Capillary ozone generator
KR101921034B1 (en) Exhaust gas purification apparatus for semiconductor production process
CN207957768U (en) A kind of ozone generator and the discharge cell for the ozone generator
JPH0831548A (en) Deodorizing and sterilizing discharge tube
JPH0831547A (en) Ozonizer
JP2003272896A (en) Plasma generating device

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080524

Year of fee payment: 6

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090524

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090524

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090524

Year of fee payment: 7

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100524

Year of fee payment: 8

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 8

Free format text: PAYMENT UNTIL: 20100524

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110524

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110524

Year of fee payment: 9

FPAY Renewal fee payment (prs date is renewal date of database)

Year of fee payment: 10

Free format text: PAYMENT UNTIL: 20120524

EXPY Cancellation because of completion of term