JPH0527046U - Cylindrical vapor deposition equipment - Google Patents

Abstract

(57) [Abstract] [Purpose] To reduce the manufacturing cost of a cylindrical vapor deposition apparatus that forms a film by vacuum vapor deposition on the end of a long cylindrical object, and improve reliability and workability during vapor deposition. .. A cylindrical body 2 is coaxially inserted through a cylindrical inner movable housing 11, and one end of the cylindrical body 2 is projected into the vacuum container 22, and the outer movable housing 16 is housed in the vacuum container 22 along the axis. After inserting into the
0 is used to rotate the cylinder 2 about its axis, a voltage is applied to the cylinder 2 using the voltage application device 41, the inside of the vacuum container 22 is evacuated, and the vapor deposition device 26 is also used.
And the heater 25 is operated to perform vacuum deposition.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a cylindrical object vapor deposition apparatus for forming a film by vacuum evaporation using a method such as ion plating or plasma CVD on the end of various long cylindrical objects such as a screw part of a petroleum drilling pipe. ..

[0002]

[Prior Art]

 A film may be formed by vacuum vapor deposition on the end of various long cylindrical objects such as the threaded portion of the oil mining pipe. In this case, as an apparatus for performing vacuum deposition only on the end portion, for example, the following apparatus has been conventionally devised.

FIG. 4 is a diagram schematically showing an example of this device. In the vacuum container 1, a cylindrical object 2 having a long cylindrical shape is supported from the outer peripheral side by an annular rotary bearing 3, and is rotatable about an axis with a motor 4 as a drive source. Further, a voltage applying device (not shown) is connected to the cylindrical body 2. On the other hand, a heater (not shown) is provided in the vacuum vessel 1, and a vapor deposition material generator 5 for generating a vapor deposition for forming a film and ionizing the vapor deposition is formed immediately below one end of the cylindrical body 2. ing . Here, the vapor deposition generation device 5 is movable along the axis to just below the other end of the cylinder 2 (A in the figure). As a method for forming a film, ion plating is shown in this figure, but plasma CVD is also possible. Further, the air in the vacuum container 1 is exhausted from the exhaust port 6 by an exhaust facility (not shown).

In the apparatus shown in FIG. 4, when a cylindrical object is installed in the rotary bearing 3 and the vacuum container 1 is evacuated and then the motor 4 is rotated, the rotation of the motor 4 passes through the speed reducer 7 and the cylindrical object 2 is rotated. Is transmitted to the cylinder 2 and the cylinder 2 rotates about the axis. Then, in this state, a voltage is applied to the cylindrical body 2 by the voltage application device, and the vapor deposition material generating device 5 is operated while the cylindrical body 2 is being heated by the heater. And a coating of the vapor deposition material is formed on this end. Further, after the vapor deposition work on one end of the cylinder 2 is completed, the vapor deposition product generator 5 is moved to directly below the other end of the cylinder 2 along the axis, and the vapor deposition work is performed again. It is vapor-deposited. Further, by performing the vapor deposition operation while moving the vapor deposit generation device 5, the vapor deposition range at the end can be arbitrarily expanded.

FIG. 5 is a diagram showing another example of this apparatus. The vacuum container 1 has a total length that is at least twice as long as that of the cylinder 2 for vapor deposition, a rail 8 is installed on the upper part of the vacuum container 1 along the longitudinal direction thereof, and a motor (not shown) is installed on the rail 8. ) A moving vehicle 9 traveling on the rail 8 is arranged with other sources as driving sources. Further, an annular rotary bearing 3 is hung from the moving vehicle 9, a cylindrical object 2 is inserted into the rotary bearing 3, and its outer peripheral side is rotated by the rotary bearing 3 with its axis parallel to the axis of the rail 8. It is supported by. As a result, the cylinder 2 can be moved along the rail 8 while being suspended from the moving vehicle 9. Further, the cylindrical body 2 can be rotated about its own axis during the movement by the cylindrical body rotating device 10 which uses the motor 4 as a drive source and moves along the rail 8 in synchronization with the movement of the cylindrical body 2. A voltage applying device (not shown) is connected to the cylinder 2.

On the other hand, a heater (not shown) is provided in the vacuum container 1, and a vapor deposition device 5 similar to that in the case of FIG. Has been done. The air in the vacuum container 1 is exhausted from the exhaust port 6 by an exhaust facility (not shown).

In the apparatus shown in FIG. 5, the cylindrical object 2 is placed in the vacuum container 1 so that one end of the cylindrical object 2 is located on the vapor deposition material generator 5, and then the vacuum container 1 is evacuated and the motor 4 is rotated. Then, the rotation of the motor 4 is transmitted to the cylindrical body 2 via the cylindrical body rotating device 10, and the cylindrical body 2 rotates about the axis. Then, in this state, a voltage is applied to the cylindrical body 2 by the voltage applying device, and the vapor deposition material generating device 5 is operated while heating the cylindrical body 2 by the heater. It is attracted to one end, and a film of the vapor deposition material is formed on one end of the cylindrical body 2. Further, after the vapor deposition work on one end of the cylindrical body 2 is completed, the cylindrical body 2 is moved along the rail 8 until the other end of the cylindrical body 2 is located on the vapor deposition material generator 5, and the vapor deposition work is performed again. Thereby, both ends of the cylinder 2 are vapor-deposited. By performing the vapor deposition work while moving the cylindrical object 2, the vapor deposition range at each end can be arbitrarily expanded.

[0008]

[Problems to be solved by the device]

 However, in the above-described conventional cylindrical object vapor deposition apparatus, it is necessary to store the entire cylindrical object 2 in the vacuum container 1. Therefore, the vacuum container 1 and the exhaust device become large in size, which causes an increase in equipment cost, and also the attachment / detachment of the cylinder 2 to the vapor deposition device is inevitably large. Furthermore, since the vapor deposition material generating device 5 or the moving mechanism of the cylindrical material 2, the cylindrical material rotating device 10, the rotary bearing 3 and the like are located in the vacuum container 1, the structure of the vapor deposition device becomes complicated and the failure rate is high. There was also the problem of rising.

Further, during the vapor deposition work, the rotary bearing 3 and the cylindrical object rotating device 10 are heated by the heater, but in this case, there is a problem in holding the cylindrical object 2 due to thermal deformation or thermal expansion of the bearing or the like. In addition, seizure of moving parts and malfunctions may occur due to the inability to use lubricating oil, and at high temperatures, the gas generated from the members that compose these equipment may mix into the above-mentioned coating. These devices required special consideration for heat resistance.

On the other hand, a commercially available product is usually used for the cylinder 2 on which vapor deposition is performed. In this case, if the surface of the cylinder 2 is contaminated during the production and distribution of the cylinder 2, this contamination is vacuum-deposited. During the operation, it may become an impure gas and mix with the coating film, and the physical properties of the coating film such as hardness and adhesion may be significantly reduced. Therefore, it is necessary to wash the cylindrical object 2 in advance before performing vacuum evaporation. However, in the conventional cylindrical object evaporation apparatus described above, the entire cylindrical object 2 is stored in the vacuum container 1, so When cleaning No. 2, the entire cylindrical body 2 had to be cleaned, and there was a problem that working efficiency was reduced.

[0011]

[Means for Solving the Problems]

 The present invention has been made in view of the above circumstances, and in a cylindrical object vapor deposition apparatus that applies a voltage to a cylindrical object in a vacuum container to form a film by vacuum evaporation at the end of the cylindrical object,

A cylindrical first member, and a second member that supports the first member rotatably from the outer peripheral side of the first member about its axis.

A vacuum container that is adjacent to one end side of the second member, has one end of the second member inserted from the axial direction, and has a relatively variable insertion amount, and the vacuum container. A deposition material generator installed in the chamber,

A rotating device for rotating the cylindrical body about its axis and a voltage applying device for applying a voltage to the cylindrical body,

The cylinder is coaxially inserted into the first member and fixed to the first member in a state of protruding into the vacuum container, and the cylinder, the first member, and The cylindrical object vapor deposition apparatus is characterized in that the second member and the vacuum container are sealed together, and the vacuum container and the cylindrical object are electrically insulated.

[0016]

[Action]

 In the cylindrical object vapor deposition apparatus of the present invention, since only the end of the cylindrical object needs to be inserted into the vacuum container, the vacuum container and the exhaust device can be downsized, and the equipment cost can be reduced. In addition, since the bearings, seals, rotating device, etc. are isolated from the heater during vapor deposition work, these failures are reduced, and impure gas is less likely to mix into the coating, resulting in reliability during work. improves. Moreover, since it is not necessary to design each part specially, it is possible to use general standard products, which reduces the manufacturing cost.

On the other hand, when cleaning the cylindrical object before the vapor deposition operation, it is sufficient to clean only the portion inserted in the vacuum container (including the inner circumference when the cylindrical object has a pipe shape). Therefore, the work efficiency in the cleaning work is significantly improved.

Further, since the cylindrical object can be attached to and detached from the vapor deposition apparatus outside the vacuum container, the attaching and detaching work becomes easy.

[0019]

【Example】

 Hereinafter, embodiments of the present invention will be described in more detail with reference to the drawings. FIG. 1 shows the cylindrical object vapor deposition apparatus of the present invention and the mounting status of the cylindrical object on this apparatus. In FIG. 1, reference numeral 11 is a cylindrical inner movable housing (first member), and a concave portion 11b is formed on the inner peripheral surface of the central hole 11a along the circumferential direction thereof, and a vacuum is formed in the concave portion 11b. The seal 12 is fitted. In this embodiment, an O-ring is used as the vacuum seal 12.

Further, the cylindrical body 2 is inserted into the inner movable housing 11 coaxially with the center hole 11 a, and as a result, one end of the cylindrical body 2 projects from the end surface of the inner movable housing 11 by a predetermined length. In this case, a vacuum seal portion 13 having a smooth outer peripheral surface is formed on the outer peripheral surface of the cylindrical object 2 located on the inner peripheral side of the vacuum seal 12 by a method such as machining, and as a result, the vacuum seal portion is formed. The outer circumference of 13 is completely sealed by a vacuum seal 12. The cylinder 2 is fixed to the inner movable housing 11 by this sealing. The vacuum seal portion 13 is similarly formed at the same position on the other end side of the cylindrical object 2.

Further, the inner ring of the rotary bearing 14 having an annular shape is fixed to the outer periphery of the inner movable housing 11 by a fixing metal fitting 15, and the outer ring of the rotary bearing 14 is fixed to a cylindrical outer movable housing (second metal fitting) by a fixing metal fitting 15a. Member 16). As a result, the inner movable housing 11 is rotatable about its axis while being supported by the outer movable housing 16. A rotary seal 17 seals between the inner movable housing 11 and the outer movable housing 16. Here, as the rotary seal 17, a magnetic seal, an oil seal, a lip seal, or the like is used. A channel 18 is formed in the inner movable housing 11, and cooling water 19 circulates in the channel 18.

The outer periphery of the external movable housing 16 is supported by a fixed housing 21 via a slide bearing 20 so as to be movable in the axial direction, and the fixed housing 21 is an insertion housing opened at one end surface of the vacuum container 22. 23 is inserted along the axial direction. As a result, the inner movable housing 11 and the outer movable housing 16 are movable in the vacuum vessel 22 in the axial direction while being supported by the fixed housing 21. An insulating portion 24 is formed between the fixed housing 21 and the insertion housing 23.

On the other hand, inside the vacuum container 22, a heater 25 and a vapor deposition material generator 26 for ion plating are installed above and below the axis, respectively. This vapor deposition generation device 26 includes a direct current discharge probe 27 installed immediately below the axis, a crucible 28 installed below the electron discharge probe 27, an electron gun 30 for heating a vapor deposition material 29 in the crucible 28, and a vacuum container 22. It comprises a gas introduction nozzle 31 for introducing a reaction gas therein and a DC discharge probe power source 31 for supplying power to the DC discharge probe 27. The electric wire 33 connecting between the DC discharge probe 27 and the DC discharge probe power source 32 is insulated by the insulating portion 24a. Reference numeral 34 is an exhaust port for exhausting the inside of the vacuum container 22, and the exhaust port 34 is further connected to an exhaust device (not shown).

In the vacuum container 22, between the arrival positions of the tips of the movable housings 11 and 16 when the outer movable housing 16 is inserted into the vacuum container 22 most, and between the deposit generating device 26 and the heater 25. A partition wall 35 perpendicular to the axis is formed, and around the intersection of the partition wall 35 and the axis, a circular opening 35a is formed centering on this intersection. As a result, when the cylindrical object 2 is mounted on the internal movable housing 11, only the end of the cylindrical object 2 protruding from the end surface of the internal movable housing 11 passes through the opening 35a and the vapor deposition device 26 and the heater. Is projected between the heater 25.

On the other hand, a flange portion 16a is formed at the other end of the external movable housing 16 toward the outer peripheral direction, and the space between the end surface of the flange portion 16a on the vacuum container 22 side and the end surface of the fixed housing 21 on the flange portion 16a side extends and contracts. It is sealed by a seal 36. Since the expandable seal 36 is expandable and contractable in the axial direction, the external movable housing 16 and the fixed housing 21 are always sealed regardless of the movement of the external movable housing 16 in the vacuum container 22.

Further, behind the flange portion 16a, a carriage 37 having a length matched to the entire length of the cylindrical object 2 is arranged so as to be movable along the axis line with its longitudinal direction aligned with the axis line. The front end is fixed to the rear end of the external movable housing 16 via the insulating portion 24b.

At the rear end of the carriage 37, a support base 38 is formed on which one end of the cylinder 2 is mounted when the cylinder 2 is attached to the vapor deposition apparatus. Here, the position of the support base 38 is a position for supporting the vacuum seal portion 13 formed on the other end side of the cylindrical body 2 from its outer peripheral surface, and the vacuum seal portion 13 is mounted on the support base 38. When supported, a rotary bearing 39 is provided so that the cylinder 2 can rotate coaxially with the axis. Further, reference numeral 15 is a roller of the rotary bearing 39. As an example of the rotary bearing 39, there is one in which rollers 39a are arranged at three positions and a vacuum seal portion 13 is mounted at the center thereof as shown in FIG. In this case, the upper roller 39a can be easily removed to facilitate the mounting of the cylindrical body 2.

Further, the cylindrical object rotating device 10 is formed on the carriage 37. The cylindrical object rotating device 10 includes a motor 4 installed on a carriage 37, a gear 40 that rotates about the axis, and a reduction gear 40a that reduces the rotation of the motor 4 and transmits the rotation to the gear 40. Further, the gear 40 is detachable from the outer peripheral surface of the cylindrical object 2 when the cylindrical object 2 is mounted on the carriage 37. Here, insulating portions 24c and 24d are formed between the support base 38, the rotary bearing 39, the motor 4 and the reduction gear 40a, respectively.

That is, in the cylindrical vapor deposition apparatus of the present embodiment, the movable housings 11 and 16, the support 38 and the cylindrical member rotating device 10 are all mounted on the carriage 37. The object 2 is supported exclusively by these members. Therefore, by moving the carriage 37 in the axial direction while operating the cylindrical object rotating device 10, it is possible to perform the rotational movement of the cylindrical object 2 about the axis and the movement in the axial direction. ..

Reference numeral 41 is a voltage applying device. This is composed of a cylindrical power source 42 and a voltage applying section 43 connected to it. When the cylinder 2 is mounted on the carriage 37, the outer peripheral surface of the cylindrical object 2 and the voltage applying section 43 are brought into contact with each other. The negative voltage of the cylinder power source 42 is applied to the cylinder 2. In this voltage applying device 41, since the voltage applying section 43 can contact the outer peripheral surface of the cylindrical body 2 regardless of whether the cylindrical body 2 rotates or moves in the axial direction, the negative voltage is always applied to the cylindrical body 2. It is possible.

Further, as shown in FIG. 1, when the cylindrical body 2 has a pipe shape having a hollow portion 44, in order to prevent the inflow of air from the hollow portion 44 at the time of exhausting and vapor deposition. After using the lid-shaped vacuum seal member 45 to cover the other end of the cylindrical body 2 in advance, vacuum deposition is performed. Here, in order to ensure the sealing by the vacuum seal member 45, the end surface of the cylindrical body 2 needs to be made smooth by means such as machining.

Next, the procedure of vacuum vapor deposition in this embodiment will be described. (1) As shown in FIG. 1, in a state in which the cylinder 2 is attached to the cylinder evaporation apparatus, the carriage 37 is moved in the axial direction, and the range for performing coating by vacuum evaporation is the evaporation flow generated during vacuum evaporation. One end of the cylindrical body 2 is projected from the partition wall 35 of the vacuum container 22 until it overlaps with the generation range (the range indicated by the arrow x in FIG. 1).

(2) The cylinder rotating device 10 is operated to rotate the cylinder 2 about the axis, and the exhaust device is operated to bring the inside of the vacuum container 22 into a vacuum state.

(3) A reaction gas is introduced from the gas introduction nozzle 31 into the vacuum container 22 to maintain the inside of the vacuum container 22 within a predetermined concentration, and the vapor deposition material 29 in the crucible 28 is dissolved and ionized by the electron gun 30. At the same time, the ionized vapor deposition material 29 and the reaction gas are positively ionized by the DC discharge probe 27 to which a DC voltage is applied by the DC discharge probe power source 32.

(4) The positive ions are attracted to the cylinder 2 heated by the heater 25 and to which a negative voltage is applied by the cylinder power supply 42, thereby forming a film by vacuum vapor deposition.

In this embodiment, the vacuum vapor deposition is performed by ion plating, but plasma CVD can be used instead of ion plating as the vacuum vapor deposition method. In this case, the DC discharge probe 27, the crucible 28, the electron gun 30, and the DC discharge probe power source 32 in the vacuum container 22 are not necessary.

The procedure of vacuum vapor deposition using plasma CVD will be described below. (A) After evacuating the vacuum container 22 in the state of (1), the raw material gas containing the carrier gas is introduced into the vacuum container 22 from the gas introduction nozzle 31 to keep the inside of the vacuum container 22 within a predetermined concentration.

(B) A direct-current voltage is applied to the cylindrical body 2 by the cylindrical power source 42 to cause glow discharge between the cylindrical body 2 and the vacuum vessel 22, and the raw material gas containing the carrier gas is turned into plasma.

(C) The positive ions in the plasma are attracted to the cylinder 2 which is heated by the heater 25 and to which a negative voltage is applied by the cylinder power supply 42 to form a film by vacuum evaporation. ..

In any of the above-mentioned methods, after the coating of one end of the cylindrical body 2 is completed, the cylindrical body 2 is pulled out from the empty container 22, and the cylindrical body 2 on the carriage 37 is turned upside down so that the other end of the cylindrical body 2 is By performing the coating, both ends of the cylindrical portion 2 can be easily coated in a short time. Further, since the movable housings 11 and 16 and the fixed housing 21 are blocked from the tip of the cylindrical body 2 by the partition wall 35, the vapor of the vapor deposition material during vapor deposition is transferred to the movable housings 11 and 16 and the fixed housing 21. The movable housings 11 and 16 and the fixed housing 21 are not overheated by the heater 25.

As described above, in this embodiment, when adjusting the position of the cylinder 2 in the vacuum container 22, the carriage 37 carrying the cylinder 2 is moved with respect to the vacuum container 22. However, the cylinder 2 may be fixed and the vacuum container 22 may be moved in the axial direction of the cylinder 2 if necessary.

Further, as a sealing method between the external movable housing 16 and the fixed housing 21, as shown in FIG. 3, the fixed housing 21 is extended rearward in the insertion direction, and the flange portion 16a is abolished. It is also possible to arrange a lip seal 46 in the circumferential direction between the inner periphery of the portion and the outer periphery of the outer movable housing 16 to seal the two.

Furthermore, when a commercially available product is used as the cylindrical body 2, the surface roughness may be rough as it is and vacuum sealing may be impossible. In this case, it is necessary to perform machining, but as described above, in the present invention, only the vacuum seal portion 13 and both ends of the cylindrical body 2 need to be machined, so the machining range is extremely small. There is an advantage.

[0044]

[Effect of the device]

 As described above, in the cylindrical object vapor deposition apparatus of the present invention, since only the end of the cylindrical object needs to be inserted into the vacuum container, the vacuum container and the exhaust device can be downsized, and the equipment cost is reduced. In addition, since the bearings, seals, rotating device, etc. are isolated from the heater during vapor deposition work, these failures are reduced, and impure gas is less likely to enter the coating, improving reliability during work. did. Moreover, since it is not necessary to design each part specially, it is possible to use general standard products, which reduces the manufacturing cost.

On the other hand, when cleaning the cylindrical object before the vapor deposition operation, only the portion inserted in the vacuum container (including the inner circumference when the cylindrical object has a pipe shape) may be cleaned. Therefore, the work efficiency in the cleaning work is significantly improved.

Furthermore, since the cylindrical object can be attached to and detached from the cylindrical object vapor deposition apparatus outside the vacuum container, the attaching and detaching work is facilitated.

[Brief description of drawings]

FIG. 1 is a sectional view of a cylindrical object vapor deposition apparatus showing a first embodiment of the present invention.

FIG. 2 is a sectional view taken along line II-II showing an example of the arrangement of rollers on the support base of the present invention.

FIG. 3 is a sectional view showing an example of a sealing method between an external movable housing and a fixed housing in the present invention.

FIG. 4 is a schematic view showing an example of a conventional cylindrical object vapor deposition device.

FIG. 5 is a schematic view showing an example of a conventional cylindrical object vapor deposition device.

[Explanation of symbols]

1, 22 Vacuum container 2 Cylindrical object 3,14,39 Rotary bearing 4 Motor 5,26 Evaporation product generator 6,34 Exhaust port 7 Speed reducer 8 Rail 9 Moving vehicle 10 Cylindrical object rotating device 11 Internal movable housing (first Member) 11a Central hole 11b Recess 12 Vacuum seal 13 Vacuum seal part 15, 15a Fixing metal fitting 16 External movable housing (second member) 16a Flange part 17 Rotating seal 18 Flow path 19 Cooling water 20 Sliding bearing 21 Fixed housing 23 For insertion Housing 24, 24a, 24b, 24c, 24d Insulation part 25 Heater 27 DC discharge probe 28 Crucible 29 Vapor deposition material 30 Electron gun 31 Gas introduction nozzle 32 DC discharge probe power supply 33 Electric wire 35 Partition wall 35a Opening 36 Expansion seal 37 Cart 38 Support Stand 39a Roller 40 Gear 40 Formation range of the vapor deposition flow in the vacuum deposition using the movement position x ion plating of the reduction gear 41 voltage applying device 42 cylindrical object for power supply 43 voltage applying unit 44 hollow portion 45 vacuum sealing member 46 a lip seal A deposit generator

Claims (2)

[Scope of utility model registration request] 1. A cylindrical object vapor deposition apparatus for applying a voltage to a cylindrical object in a vacuum container to form a film by vacuum evaporation on an end portion of the cylindrical object, comprising: a cylindrical first member; One member, a second member that rotatably supports from the outer peripheral side of the first member around its axis, is formed on one end side of the second member, one end of the second member A vacuum container that is inserted from the axial direction and the amount of insertion of which is relatively variable, a vapor deposition device that is installed in the vacuum container, and a rotation that rotates the cylindrical object about its axis. An apparatus and a voltage applying device for applying a voltage to the cylindrical body, wherein the cylindrical body is coaxially inserted into the first member and fixed to the first member in a state of protruding into the vacuum container. ,
Moreover, while the cylindrical object, the first member, the second member and the vacuum container are respectively sealed,
A cylindrical object vapor deposition apparatus, wherein the vacuum container and the cylindrical object are electrically insulated. 2. The cylindrical vapor deposition apparatus according to claim 1, wherein either ion plating or plasma CVD is used as the vacuum vapor deposition method.