JPH05265027A - Positioning method and its device - Google Patents

Abstract

PURPOSE:To provide a positioning device capable of minimizing the parts tolerance between two objects and a deviation of their positional relation and executing highly accurate positioning within a short time. CONSTITUTION:Plural positioning alignment marks are formed on each of liquid crystal glass base 11 and a TAB 12. A deviation from a reference position previously determined in each of the base 11 and the TAB 12 is found out correspondingly to each alignment mark. The base 11 and the TAB 12 are respectively moved by their corresponding XY tables 24, 28 so that the deviation becomes zero to determine the directions of the base 11 and the TAB 12. The positioning point of an opposite part is found out in each of the base 11 and the TAB 12. While holding the determining directions for allowing the positioning points of the base 11 and the TAB 12 to coincide with each other, the base 11 and the TAB 12 are moved by the corresponding XY theta tables 24, 28 to position them.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a liquid crystal glass substrate and a TA.
The present invention relates to a positioning method and an apparatus for positioning two objects to be opposed to each other in a predetermined positional relationship, which is used in B (Tape Automated Bonding) or a bonding step with a semiconductor chip.

[0002]

2. Description of the Related Art For example, TA is attached to a terminal portion of a liquid crystal glass substrate.
When mounting B, it is necessary to position both of these objects in a predetermined positional relationship. In this positioning, the liquid crystal glass substrate 11 and the TAB 12 are conventionally positioned relative to each other as shown in FIG.

That is, the liquid crystal glass substrate 11 is roughly positioned by the rough positioning mechanism 13 and then the XYθ table.
It is held on 14 and a predetermined positioning is performed. on the other hand,
The TAB 12 is transported / press-bonded to the TAB 12 through a predetermined positioning.
After being held by, and moved to a predetermined position, it is brought into pressure contact with a predetermined position on the liquid crystal glass substrate 11.

The XYθ table 14 is for moving the liquid crystal glass substrate 11, which is an object held on the XYθ table 14, in two directions X and Y and a rotation direction θ which are orthogonal to each other on the same plane. is there. When positioning the liquid crystal glass substrate 11, first, the liquid crystal glass substrate
As shown in FIG. 5, alignment marks A and B for positioning are attached to both corners on the surface of 11, and these alignment marks A and B are CCs having a light source 17 for imaging.
Each image is taken by the D camera 18. In the image processing unit 19, from the image data taken by the CCD camera 18,
The positions of the alignment marks A, B and the reference positions As, B for the preset alignment marks A, B
The amount of deviation from s is calculated for each of the X, Y, and θ directions.

Then, the XYθ driving section 20 moves the liquid crystal glass substrate 11 in each of the X, Y, and θ directions by the XYθ table 14 so that the calculated shift amount becomes zero, and positions it at the reference position. Then, this operation determines the direction of the liquid crystal glass substrate 11.

Next, the movement control of the XYθ table 14 is performed, and the vicinity of the position C shown in FIG.
Take an image with the D camera 18. The image data is stored in a memory (not shown) in the image processing unit 19. Note that position C
Is the end of the electrode portion to which the TAB 12 is attached.

On the other hand, with respect to the TAB 12, after carrying out rough positioning with respect to a predetermined mounting position of the liquid crystal glass substrate 11 to control the position of the carrying / compression bonding mechanism 15, the CCD camera 18 near the position C1 shown in FIG. Take an image with. This image data is also stored in the memory in the image processing unit 19. The position C1 is the end of the electrode portion on the TAB12 side corresponding to the position C.

Further, the image processing section 19 calculates the amount of deviation between the position C and the position C1 from the two image data stored in the image memory. Further, the XYθ drive unit 20 controls the movement of the XYθ table 14 so as to make the calculated shift amount zero, and positions the liquid crystal glass substrate 11 and the TAB 12 in a predetermined positional relationship. After the completion of this positioning operation, the transport / pressure bonding mechanism 15 is controlled and the TAB 12 is moved to the liquid crystal glass substrate 11
Stick on top.

The transport / pressure bonding mechanism 15 and the rough positioning mechanism 13 are controlled by the main controller 21 at predetermined timings.

By repeating the series of operations described above, the work of attaching a predetermined number of TABs 12 is completed.

However, such a conventional technique has the following problems.

First, the liquid crystal glass substrate 11 and the TAB 12 are
Generally, it includes tolerances and it is difficult to always obtain a certain quality. In addition, the TA held in the transport / pressure bonding mechanism 15
Liquid crystal glass substrate 11 held on B12 and XYθ table 14
It cannot be said that the positional relationship between and is not always constant, and in particular, positional deviation in the rotational direction becomes a problem.

From these facts, even if both image data near the position C of the liquid crystal glass substrate 11 and near the position C1 of the TAB 12 are processed with high accuracy, only one end portion is obtained, so that the optimum positioning value is obtained. I can't.

[0014]

As described above, since the above-mentioned prior art is a method of calculating the positioning data by one end, it is possible to reduce the component tolerance and positional relationship between two objects, especially the positional deviation in the rotational direction. It is difficult to optimize the positioning amount.

An object of the present invention is to provide a positioning method and a device thereof which can minimize the deviation of the component tolerance and the positional relationship between two objects and can perform highly accurate positioning in a short time. is there.

[0016]

According to a first aspect of the present invention, there is provided a positioning method in which two objects are opposed to each other in a predetermined positional relationship. The two objects are provided with a plurality of positioning marks. A deviation amount between a mark and a reference position that is predetermined for each object corresponding to each mark is obtained, and each object is moved so that the deviation amount becomes zero to determine the direction of each object. From the positions of the marks provided near the facing parts to which the two objects are attached, the positioning points of the facing parts are obtained for each of the two objects, and the directions determined so as to make these two objects coincide with each other. Positioning is performed by moving while maintaining.

According to a second aspect of the present invention, there is provided a positioning device in which two objects are opposed to each other in a predetermined positional relationship. The positioning device is provided for each of the two objects, and the corresponding objects are provided in two directions orthogonal to each other on the same plane. An XYθ table that can be driven in the rotation direction, an image pickup device that is provided for each XYθ table, and that picks up an image of a positioning mark of an object held on the corresponding XYθ table. Further, a deviation amount between each of the marks and a reference position set in advance for each of the two objects is obtained, and direction determining means for driving the corresponding XYθ table so that the deviation amount becomes zero, and the imaging From the positions of the marks near the facing parts of the two objects imaged by the device, the positioning points of the facing parts are obtained for each of the two objects, Those having a facing position determination means for driving the corresponding XYθ table as these positioning points coincide with each other.

[0018]

In the positioning method according to the present invention, a plurality of positioning marks are provided on each of two objects, and the deviation amount between these marks and the reference position predetermined for each object corresponding to each mark is determined. Ask. Each object is moved so that the amount of displacement becomes zero, the direction of each object is determined, and the positioning point of this facing part is set to two objects from the position of the mark provided near the facing part where the two objects are attached. Ask for each. Positioning is performed by moving these two objects while keeping the directions determined so that their positioning points coincide with each other, and thus it is possible to minimize the amount of positional deviation between the two objects due to the tolerance of the two objects. Speeding up and relative positioning accuracy are improved.

The positioning device according to claim 2 is provided for every two objects, and drives the corresponding objects in the XYθ table in two directions and rotation directions which are orthogonal to each other on the same plane, and moves them on the corresponding XYθ table. Each mark for positioning the held object is imaged by the image pickup device, and each mark taken by each image pickup device by the direction determining means is
A deviation amount from a preset reference position is obtained for each object. Corresponding X so that these shift amounts become zero
The Yθ table is driven, and the facing point determining unit obtains the positioning points of the facing parts for each of the two objects from the positions of the marks near the facing parts of the two objects imaged by the imaging devices. Since the corresponding XYθ tables are driven so that these positioning points coincide with each other, the amount of positional deviation due to the tolerance of both objects can be minimized, and the speedup and relative positioning accuracy are improved.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the entire apparatus, and uses a liquid crystal glass substrate 11 and a TAB 12 as two objects to be positioned.

In FIG. 1, the liquid crystal glass substrate 11, which is one of the objects, is transported to the first XYθ table 24 by the first transport mechanism 23, is roughly positioned by the first rough positioning mechanism 25, and is then It is held and fixed on the first XYθ table 24.

On the other hand, the other object, TAB12
Are transported to the second rough positioning mechanism 27 by the second transport mechanism 26, where they are roughly positioned, and then the second XYθ
It is held and fixed on the table 28. Then, after being positioned at a predetermined facing position on the liquid crystal glass substrate 11 by the XYθ table 28, it is pressure-bonded at a predetermined facing position on the liquid crystal glass substrate 11 by the transport / pressure bonding mechanism 29. In this way, the liquid crystal glass substrate 11 to which the TAB 12 is attached
Are carried to the next step by the third transport mechanism 30.

At each corner of the liquid crystal glass substrate 11, first positioning alignment marks D and E are provided as shown in FIG. 2, and as shown in FIG.
The second positioning alignment marks H and I are provided at the position where the AB12 is attached, that is, near the portion facing the TAB12. On the other hand, TAB12 has
The second positioning alignment marks H and I and the facing positioning marks F and G are provided. These alignment marks F and G for positioning
Is set so that the TAB 12 is correctly aligned with a predetermined facing portion on the liquid crystal glass substrate 11, so that the TAB 12 is aligned with the second positioning alignment marks H and I on the liquid crystal glass substrate 11 side.

A first CCD camera 32 and a second CCD camera 34 are provided as image pickup means for picking up the alignment marks D to I for positioning described above. The first CCD camera 32 has a light source 33 for illuminating a subject, and first alignment marks D, E and second alignment marks D and E of the liquid crystal glass substrate 11 held and fixed on the first XYθ table 24. The positioning alignment marks H and I are arranged so that they can be imaged. The second CCD camera 34 also has a light source 35 for illuminating the subject, and is arranged so that it can image the alignment marks F, G for positioning the TAB 12 held and fixed on the second XYθ table 28. ing.
The CCD cameras 32 and 34 and the light sources 33 and 35 are installed on a plane parallel to the corresponding liquid crystal glass substrate 11 and TAB 12.

The image data picked up by the first CCD camera 32 and the second CCD camera 34 are input to the image processing section 37, and the image processing section 37 performs image processing. As a result, positioning data is calculated. The image processing unit 37 has a memory unit 38 for temporarily storing image data.

Here, the image processing section 37 processes the image data from the first CCD camera 32, and the liquid crystal glass substrate 11 is processed.
Of the first positioning alignment marks D and E from the preset reference positions D1 and E1 and the imaging data of the second positioning alignment marks H and I shown in FIG. From these center positions J
Is calculated, and the amount of deviation from the center position M of the first CCD camera 32 is calculated as the set position. In addition, the image processing unit 37
Processes the image data from the second CCD camera 34,
As shown in FIG. 2, the positions of the alignment marks F and G for positioning and the preset reference positions F1 and G1 are set.
And the center position K of these alignment marks F and G for positioning, as shown in FIG.
Is calculated and the amount of deviation from the center position M1 of the second CCD camera 34 is calculated as the set position.

The straight line connecting the reference positions D1 and E1 and the straight line connecting the reference positions F1 and G1 are respectively the first X
It is set to be parallel to the X axis of the Yθ table 24. The center position M of the first CCD camera 32 and the center position M1 of the second CCD camera 34 are set so as to be located on the same straight line perpendicular to the X axis of the first XYθ table 24. Has been done.

Further, the XYθ driving section 39, based on the obtained displacement amounts, sets the operation amounts for making the displacement amounts zero for the corresponding XYθ tables 24 and 28 in the X, Y and θ directions. And drive each of these.

Then, the main control section 40 controls the transfer mechanisms 23, 2
6, 30, each coarse positioning mechanism 25, 27, each XYθ table 2
4, 28 and the conveying / pressing mechanism 29 are sequentially operated at predetermined timings.

Next, the operation of the above embodiment will be described.

First, the first transport mechanism 23 operates to move the liquid crystal glass substrate 11 to the first XYθ table 24 and stop it. Then, the main control unit 40 uses the first rough positioning mechanism 25.
Is performed to perform rough positioning, and after the rough positioning is completed, the liquid crystal glass substrate 11 is held and fixed on the first XYθ table 24. After that, the first transport mechanism 23 and the first rough positioning mechanism 25 are controlled to return to their original positions.

The first XYθ table 24 is one of the first positioning alignment marks E of the liquid crystal glass substrate 11.
Moves to a predetermined position within the field of view of the first CCD camera 32 and then stops. Then, the first CCD camera 32
A part of the liquid crystal glass substrate 11 including the alignment mark E for positioning is imaged, and the imaged image data is output to the image processing unit 37. Further, the image processing unit 37 processes this image data to calculate the amount of deviation between the positioning alignment mark E and the preset reference position E1, and the XYθ driving unit 39 uses this amount of deviation as positioning data. Output. The XYθ drive unit 39 is configured to correspond to the first XYθ table 24 corresponding to the positioning data,
The operation amount is output so that the deviation amount becomes zero. Therefore, the first XYθ table 24 is driven in each of the X and Y axis directions, and stops at the reference position E1.

Further, the first XYθ table 24 stops after the other first alignment mark D for positioning on the liquid crystal glass substrate 11 moves to a predetermined position within the field of view of the first CCD camera 32. The image processing unit 37 similarly uses the first C
The image data captured by the CD camera 32 is processed to calculate the amount of deviation from the preset reference position D1. Then, the first XYθ table 24 controls the movement of the θ axis about the reference position E1 in accordance with the calculated shift amount, and stops at any position on the extension line of the reference positions D1 and E1.

Since the straight line connecting the reference positions D1 and E1 is parallel to the X axis of the first XYθ table 24, the liquid crystal glass substrate 11 is also positioned in the same direction. That is, the image processing unit 37 and the XYθ driving unit 39 function as a direction determining unit that positions the liquid crystal glass substrate 11 in parallel with the X axis of the XYθ table based on the image data from the first CCD camera 32.

Next, the first XYθ table 24 is provided with one of the second positioning alignment marks H of the liquid crystal glass substrate 11.
Moves to a predetermined position within the field of view of the first CCD camera 32 and then stops. Then, the first CCD camera 32 images the portion including the alignment mark H for positioning, and the image data thereof is input to the image processing unit 37. The image processing unit 37 processes the image data and stores it in the internal memory unit 38. After this, the first XYθ table 24
Moves to a predetermined position where the other second alignment alignment mark I of the liquid crystal glass substrate 11 enters the field of view of the first CCD camera 32 and stops. Similarly, the first CCD camera 32 images the part including the alignment mark I for positioning, and the imaged image data is processed by the image processing part 37 and stored in the internal memory part 38.

Then, the image processing section 37 calculates the center position J of the second alignment marks H and I based on the stored data. As shown in FIG. 3, the alignment marks H and I for the second positioning are provided on both sides near the facing portion of the TAB 12, and the center position J thereof is a positioning point for the facing portion. In addition, the image processing unit 37
Calculates the amount of deviation between the calculated positioning point J and the center position M of the first CCD camera 32. Then, the first XYθ
The table 24 performs movement control in the X and Y axis directions according to the calculated shift amount. As a result, of the liquid crystal glass substrate 11,
Positioning to the position where TAB12 is attached is completed.

On the other hand, the TAB 12 is transported to the second coarse positioning mechanism 27 by the second transport mechanism 26, and after the coarse positioning by the rough positioning mechanism 27, the second XYθ table 28 is used.
It is held and fixed by. Then, the second transport mechanism 26 and the second rough positioning mechanism 27 are returned to their original positions.

In the second XYθ table 28, the alignment mark G for positioning the TAB 12 is the second CCD camera.
Stop after moving to the position where you will be in the field of view of 34. The second CCD camera 34 captures an image of a portion including the alignment mark G for positioning, and the image data is input to the image processing unit 37. The image processing unit 37 processes this image data and calculates the amount of deviation from the preset reference position G1. In the second XYθ table 28, movement control of the X and Y axes is performed by the XYθ drive unit 39 based on the calculated shift amount, and the second XYθ table 28 is stopped at the reference position G1.

The second XYθ table 28 is TAB.
The other positioning alignment mark F of 12 is the second C
It moves to a position where the CD camera 34 will be in the field of view and stops. The image processing unit 37 processes the image data captured by the second CCD camera 34 to set a preset reference position F.
Calculate the deviation from 1. The second XYθ table 28 is
According to the calculated shift amount, the movement control of the θ axis is performed with the reference position G1 as the center, and the movement is stopped at any position on the extension line of the reference positions F1 and G1.

Since the straight line connecting the reference positions F1 and G1 is also parallel to the X axis of the first XYθ table 24, the TAB 12 is also in the direction parallel to the X axis, like the liquid crystal glass substrate 11. It has been positioned. That is, the image processing unit 37 and the XYθ drive unit 39 also function as direction determining means for positioning the TAB 12 in parallel with the X axis of the XYθ table.

After this, the second CCD camera 34 again turns to the T
The positioning alignment mark F of AB12 is imaged, and the image processing unit 37 calculates the amount of deviation from the reference position F1 from the image data. Then, the center position of the positioning alignment marks G and F, that is, the positioning point K is obtained from the calculated shift amount. And this positioning point K
And the amount of deviation between the center position M1 of the second CCD camera 34 is calculated. Further, the second XYθ table 28 performs movement control in the X and Y axis directions according to the calculated shift amount.
As a result, the positioning with respect to the TAB 12 is completed.

Here, the center position M of the first CCD camera 32 and the center position M1 of the second CCD camera 34 are located on the same straight line perpendicular to the X axis of the first XYθ table 24. Therefore, the positioning point J of the liquid crystal glass substrate 11 is aligned with the center M of the first CCD camera 32, and the positioning point K of the TAB 12 is aligned with the center position M1 of the second CCD camera 34. As a result, these facing portions shown in FIG. 3 coincide with each other on the same line perpendicular to the X axis. Therefore, the image processing unit 37 and the XYθ drive unit 39 are
Corresponding X so that the positioning points J and K coincide with each other
It functions as a facing position determining means for driving the Yθ tables 24 and 28.

Next, the main controller 40 controls the carrying / compression bonding mechanism 29 to move the TAB 12 to a predetermined position on the predetermined facing portion of the liquid crystal glass substrate 11 shown in FIG. The TAB 12 is stuck on the liquid crystal glass substrate 11 by the vertical movement of the part. After the attaching operation, the transport / pressure bonding mechanism 29 is returned to the original position.

By repeating the above operation a plurality of times, the bonding work of the TAB 12 to the liquid crystal glass substrate 11 is completed, and the liquid crystal glass substrate 11 is carried out to the next step by the third transport mechanism 30.

Thus, the liquid crystal glass substrate 11 and the TAB 12 are
After locating and along the same direction, the alignment marks H, I and J, K for positioning provided near these facing parts are imaged by the corresponding CCD cameras 32 and 34, and the respective image data are used to determine The center positions J and K between the alignment marks for positioning are respectively obtained, the shift amount of the positioning point at the center position is calculated from these image data, and the corresponding XYθ tables 24 and 28 are controlled according to the calculated shift amounts. Because it is, the liquid crystal glass substrate
The 11 and the TAB 12 can be automatically and accurately positioned with reference to the center position, and the influence of variation, which is a component tolerance, can be minimized.

[0047]

According to the positioning method of the first aspect,
A plurality of positioning marks are provided on each of the two objects, and the amount of deviation between the marks and the reference position predetermined for each object corresponding to each mark is determined. Each object is moved so that the amount of displacement becomes zero, the direction of each object is determined, and the positioning point of this facing part is set to two objects from the position of the mark provided near the facing part where the two objects are attached. Ask for each. Positioning is performed by moving these two objects while keeping the directions determined so that their positioning points coincide with each other, and thus it is possible to minimize the amount of positional deviation between the two objects due to the tolerance of the two objects. Since the speed is increased and the relative positioning accuracy is improved, the influence of the component tolerance between the two objects can be minimized, and the positional deviation due to the component tolerance can be minimized, and high-precision positioning can be achieved in a short time. Can be done.

According to the positioning device of claim 2, 2
Each object is provided for each object, and the corresponding object is driven by the XYθ table in the two directions and the rotation direction orthogonal to each other on the same plane, and the positioning mark of the object held on the corresponding XYθ table is read by the imaging device. Each image is captured, and the amount of deviation between each mark imaged by each imaging device and the reference position preset for each of the two objects is obtained by the direction determining means. The corresponding XYθ table is driven so that these shift amounts become zero, and from the position of the mark near each facing part of the two objects imaged by each imaging device by the facing position determining means, the facing part for each two objects is detected. Find the positioning points of. Since the corresponding XYθ tables are driven so that these positioning points coincide with each other, the amount of positional deviation due to the tolerance of both objects can be minimized, and speedup and relative positioning accuracy are improved. Can be minimized, the positional deviation due to the component tolerance or the like can be minimized, and highly accurate positioning can be performed in a short time.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of a positioning device used in a positioning method of the present invention.

FIG. 2 is an explanatory diagram illustrating a positioning process of two objects in the same as above.

FIG. 3 is an enlarged view showing a positioning process of a facing portion of two objects of the same.

FIG. 4 is a block diagram showing a conventional technique.

FIG. 5 is an explanatory diagram illustrating a positioning process in a conventional device.

[Explanation of symbols]

11 Liquid crystal glass substrate as an object 12 TAB as an object 24, 28 XYθ table 32, 34 CCD camera as an imaging camera 37, 39 Image processing unit and XYθ drive unit having direction determining means and facing position determining means as functions

Claims (2)

[Claims] 1. A positioning method in which two objects are opposed to each other in a predetermined positional relationship, wherein each of the two objects is provided with a plurality of positioning marks, and each object corresponds to each of these marks and each mark. A mark provided near the facing portion where the two objects are attached is obtained by determining the amount of deviation from a predetermined reference position, moving each object so that the amount of deviation becomes zero, and determining the direction of each object. The positioning point of the facing portion is obtained for each of the two objects from the position of, and the positioning is performed by moving these two objects while keeping the determined direction so that the positioning points coincide with each other. And positioning method. 2. A positioning device for facing two objects in a predetermined positional relationship, wherein the positioning device is provided for each of the two objects, and the corresponding objects can be driven in two directions and a rotation direction orthogonal to each other on the same plane. An XYθ table and corresponding XYθ provided for each of these XYθ tables
An image pickup device for picking up an image for positioning marks of an object held on a table, and a deviation amount between each mark picked up by each of these image pickup devices and a reference position preset for each of the two objects are shown. Two objects are obtained from the direction determining means that respectively obtains and drives the corresponding XYθ table so that these shift amounts become zero, and the position of the mark near each facing portion of the two objects imaged by each imaging device. A positioning device comprising: facing position determining means for determining a positioning point of the facing portion for each position and driving a corresponding XYθ table so that these positioning points coincide with each other.