JPH05264803A - Optical member - Google Patents
Optical memberInfo
- Publication number
- JPH05264803A JPH05264803A JP4093663A JP9366392A JPH05264803A JP H05264803 A JPH05264803 A JP H05264803A JP 4093663 A JP4093663 A JP 4093663A JP 9366392 A JP9366392 A JP 9366392A JP H05264803 A JPH05264803 A JP H05264803A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- sputtering
- mgf2
- optical member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Surface Treatment Of Optical Elements (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、光学部材用基板の表面
に設けられる反射防止膜や反射膜などに撥水性を付与し
た光学部材に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical member provided with water repellency on an antireflection film or a reflective film provided on the surface of an optical member substrate.
【０００２】[0002]
【従来の技術】従来より、ガラスなどの光学部材の表面
に撥水性を付与させるためには、基材表面をポリシロキ
サンやポリフルオロ化合物で被覆することが知られてい
る。しかし、これらの化合物はガラスとの密着強度が小
さく、耐久性、耐磨耗性にも劣る問題があった。そこ
で、耐久性能の高い撥水性部材を供給するために特開平
３−２０５３２７号公報には、ポリシロキン化合物をガ
ラス基板の表面に塗布した後、このポリシロキサン化合
物をコロナ放電または紫外線照射によってガラス基板の
表面に固着させる方法が開示されている。2. Description of the Related Art Conventionally, in order to impart water repellency to the surface of an optical member such as glass, it has been known to coat the surface of a base material with polysiloxane or a polyfluoro compound. However, these compounds have a problem that they have low adhesion strength with glass and are inferior in durability and abrasion resistance. Therefore, in order to supply a water-repellent member having high durability performance, Japanese Patent Laid-Open No. 3-205327 discloses that a polysiroquine compound is applied to the surface of a glass substrate and then the polysiloxane compound is applied to the glass substrate by corona discharge or ultraviolet irradiation. A method of sticking to a surface is disclosed.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上記特開平３
−２０５３２７号公報に開示されている従来方法により
製造された撥水性部材は、最表層に有機物質を用いてい
るため十分な耐久性、耐磨耗性を有していない。また、
この有機物質の塗布はディップコート等の方法によって
行うため、その膜厚の精密な制御が難しく、均一な膜厚
とすることも困難である。このようなことから、従来の
方法による撥水性部材は高い光学性能の必要のない自動
車、建築物の窓ガラスやミラーなどに使われるのみであ
り、精密な光学性能を要求されるカメラレンズなどの光
学部品としての使用には適していなかった。さらに従来
の製造方法では反射防止膜などを真空槽内で成膜した後
大気中に取り出し、その上に有機物質を成膜する工程が
必要なため、工程が複雑である問題も有していた。However, the above-mentioned Japanese Unexamined Patent Application Publication No.
The water-repellent member manufactured by the conventional method disclosed in Japanese Patent Laid-Open No. 205327 does not have sufficient durability and abrasion resistance because an organic substance is used for the outermost layer. Also,
Since this organic substance is applied by a method such as dip coating, it is difficult to precisely control the film thickness, and it is also difficult to obtain a uniform film thickness. For this reason, the water-repellent member produced by the conventional method is used only for automobiles and building window glass and mirrors that do not require high optical performance, and is used for camera lenses that require precise optical performance. It was not suitable for use as an optical component. Further, in the conventional manufacturing method, there is a problem that the process is complicated because a step of forming an antireflection film or the like in a vacuum chamber and then taking it out into the atmosphere and forming an organic substance on it is necessary. ..
【０００４】本発明は上記問題点を考慮してなされたも
のであり、通常の反射防止膜などと同質の無機物のみの
コーティングによって構成することにより耐久性および
耐磨耗性に優れた撥水性の光学部材を提供することを目
的とする。The present invention has been made in consideration of the above problems, and is composed of a coating of only an inorganic material of the same quality as an ordinary antireflection film and the like, which is excellent in durability and abrasion resistance and is water repellent. An object is to provide an optical member.
【０００５】[0005]
【課題を解決するための手段および作用】本発明の光学
部材は、空気と接する最表層をスパッタリングによって
成膜したフッ化マグネシウム（ＭｇＦ2 ）により構成し
たことを特徴とする。The optical member of the present invention is characterized in that the outermost layer in contact with air is made of magnesium fluoride (MgF 2 ) formed by sputtering.
【０００６】スパッタリングによって成膜したＭｇＦ2
膜は、スパッタリング時のプラズマの作用によってＭｇ
Ｆ2 の一部が解離しており、その表面には解離により生
じた（−Ｆ）基を有する。このためスパッタリングによ
るＭｇＦ2 を最表層に備えることにより、高い撥水性能
を有する。MgF 2 formed by sputtering
The film is made of Mg by the action of plasma during sputtering.
Part of F 2 is dissociated, and the surface thereof has a (-F) group generated by dissociation. Therefore, by providing MgF 2 by sputtering on the outermost layer, it has high water repellency.
【０００７】また、一般に化合物ＭｇＦ2 は、カメラな
どの高い性能が要求される光学部品の反射防止膜などに
使われている物質であり、その耐久性能および光学性能
が非常に高いものとなっている。なお、スパッタリング
により形成したＭｇＦ2 膜は、スパッタリング中のＭｇ
Ｆ2 の解離により生じた金属マグネシウムをも膜中に含
むため、吸収膜となり、膜厚によっては光学性能に影響
するほどの吸収性を有した膜となる虞があるが、このス
パッタリングによるＭｇＦ2 膜の厚さを光学性能に影響
するような吸収性を有しない範囲に設定することにより
解決することができる。In general, the compound MgF 2 is a substance used for an antireflection film of an optical component such as a camera which requires high performance, and its durability and optical performance are extremely high. There is. The MgF 2 film formed by sputtering is
Since also include in the film a metal magnesium produced by dissociation of F 2, becomes absorbing film, although the film thickness is likely to be a membrane having an absorbent enough to affect the optical performance, MgF 2 by the sputtering This can be solved by setting the thickness of the film in a range that does not have absorptivity that affects the optical performance.
【０００８】[0008]
【実施例】図１は本発明の実施例１の光学部材を示し、
ＢＫ７のガラスからなる基板１上に反射防止膜を設けて
いる。この反射防止膜は膜厚λ／４のＡｌ2 Ｏ3 膜２、
膜厚λ／２のＺｒＯ2 膜３、膜厚λ／４のＭｇＦ2 膜４
（λ＝５００ｎｍ、以下同様）を真空蒸着によって基板
１上に順に成膜することにより形成されるものである。
さらに、ＭｇＦ2 膜４上の最表層には膜厚１０ｎｍのＭ
ｇＦ2 膜がマグネトロンスパッタリングにより成膜さ
れ、これにより、光学部材が構成されている。図３はこ
の実施例１の比較例を示し、ＢＫ７のガラスからなる基
板１上に膜厚λ／４のＡｌ2 Ｏ3 膜２、膜厚λ／２のＺ
ｒＯ2 膜３、膜厚λ／４のＭｇＦ2 膜４が真空蒸着によ
り順に成膜されている（比較例１）。EXAMPLE FIG. 1 shows an optical member of Example 1 of the present invention.
An antireflection film is provided on the substrate 1 made of BK7 glass. This antireflection film is an Al 2 O 3 film 2 having a thickness of λ / 4,
ZrO 2 film 3 having a film thickness λ / 2, MgF 2 film 4 having a film thickness λ / 4
(Λ = 500 nm, the same applies hereinafter) is formed by sequentially forming films on the substrate 1 by vacuum vapor deposition.
Further, the outermost layer on the MgF 2 film 4 has a thickness of M of 10 nm.
A gF 2 film is formed by magnetron sputtering, which constitutes an optical member. FIG. 3 shows a comparative example of this Example 1, in which an Al 2 O 3 film 2 having a film thickness of λ / 4 and a Z film having a film thickness of λ / 2 are formed on a substrate 1 made of BK7 glass.
An rO 2 film 3 and a MgF 2 film 4 having a film thickness of λ / 4 are sequentially formed by vacuum evaporation (Comparative Example 1).
【０００９】図２は本発明の実施例２の光学部材を示
し、ポリメチルメタアクリレート（ＰＭＭＡ）からなる
基板１１上に反射防止膜を設けている。この反射防止膜
は膜厚λ／４のＳｉＯ膜１１、膜厚λ／２のＺｒＯ2 膜
１２、膜厚λ／４のＳｉＯ2 膜１３を真空蒸着によって
基板１１上に順に成膜することにより形成される。さら
にＳｉＯ2 膜１３上の最表層には膜厚１０ｎｍのＭｇＦ
2 膜がマグネトロンスパッタリングにより成膜されてい
る。図４はこの実施例２の比較例を示し、ＰＭＭＡから
なる基板１１上に膜厚λ／４のＳｉＯ膜１２、膜厚λ／
２のＺｒＯ2 膜、膜厚λ／４のＳｉＯ2 膜１３が真空蒸
着により順に成膜されている（比較例２）。FIG. 2 shows an optical member of Example 2 of the present invention, in which an antireflection film is provided on a substrate 11 made of polymethylmethacrylate (PMMA). This antireflection film is formed by sequentially forming a SiO film 11 having a thickness of λ / 4, a ZrO 2 film 12 having a thickness of λ / 2, and a SiO 2 film 13 having a thickness of λ / 4 on the substrate 11 by vacuum evaporation. It is formed. Further, the outermost layer on the SiO 2 film 13 has a thickness of 10 nm MgF.
Two films are formed by magnetron sputtering. FIG. 4 shows a comparative example of this Example 2, in which a SiO film 12 having a film thickness λ / 4 and a film thickness λ / on a substrate 11 made of PMMA.
The ZrO 2 film of No. 2 and the SiO 2 film 13 of λ / 4 in thickness are sequentially formed by vacuum evaporation (Comparative Example 2).
【００１０】表１は以上の実施例１，２および比較例
１，２の表面の撥水性の検査結果を示し、実施例１，２
の接触角はいずれも１１５°であり、大きな撥水性を有
しているのに対し、比較例１，２はいずれも撥水性を有
していないことが判明している。Table 1 shows the surface water repellency test results of Examples 1 and 2 and Comparative Examples 1 and 2 described above.
It was found that the contact angles of No. 1 and No. 2 each had a large water repellency, while Comparative Examples 1 and 2 did not have water repellency.
【００１１】[0011]
【表１】 [Table 1]
【００１２】また、実施例１，２の最表層に幅１８ｍｍ
のセロハンテープ（商品名）を接着し、その接着面に対
し、約４５°の角度でテープを取り除く密着性試験を行
った。さらに実施例１，２の光学部材の対環境試験とし
て、−２０℃→常温（２０〜２５℃）→＋６０℃を５回
繰り返す熱衝撃試験を行った。この結果、いずれの試験
においても成膜初期および対環境試験後における膜剥離
および異常はみられなかった。また、分光反射率を測定
したところ、実施例１，２はいずれも初期性能としての
基本的な光学特性を有していた。The width of the outermost layer of Examples 1 and 2 is 18 mm.
A cellophane tape (trade name) was adhered, and an adhesion test was performed to remove the tape from the adhered surface at an angle of about 45 °. Further, as an environmental test of the optical members of Examples 1 and 2, a thermal shock test was repeated five times, that is, -20 ° C → normal temperature (20 to 25 ° C) → + 60 ° C. As a result, no film peeling or abnormality was observed in any of the tests at the initial stage of film formation and after the environmental test. Further, when the spectral reflectance was measured, both Examples 1 and 2 had basic optical characteristics as initial performance.
【００１３】[0013]
【発明の効果】本発明の光学素子部材は撥水性を有する
だけでなく、通常の光学膜に使用する材料のみによって
構成されているため、有機物を使用する部材に比べて非
常に高い耐久性と耐磨耗性を有し、しかも高い光学性能
を有している。The optical element member of the present invention not only has water repellency, but is composed of only materials used for ordinary optical films, and thus has much higher durability than members using organic substances. It has abrasion resistance and high optical performance.
【００１４】また、光学膜の全てをスパッタリングのみ
で成膜するか真空蒸着とスパッタリングの双方の成膜を
行う成膜装置を使用することができ、これにより真空中
の成膜後にさらに大気中で成膜するよりも少ない工程
で、撥水性を有する光学部材を製造できる。Further, it is possible to use a film forming apparatus for forming the entire optical film only by sputtering, or for forming both the vacuum vapor deposition and the sputtering, so that after the film formation in vacuum, the film is further formed in the atmosphere. An optical member having water repellency can be manufactured with fewer steps than film formation.
【図１】本発明の実施例１の断面図である。FIG. 1 is a cross-sectional view of a first embodiment of the present invention.
【図２】本発明の実施例２の断面図である。FIG. 2 is a sectional view of a second embodiment of the present invention.
【図３】比較例１の断面図である。FIG. 3 is a sectional view of Comparative Example 1.
【図４】比較例２の断面図である。FIG. 4 is a cross-sectional view of Comparative Example 2.
１ 基板 ２ Ａｌ2 Ｏ3 膜 ３ ＺｒＯ2 膜 ４ ＭｇＦ2 膜 ５ ＭｇＦ2 スパッタリング膜1 Substrate 2 Al 2 O 3 Film 3 ZrO 2 Film 4 MgF 2 Film 5 MgF 2 Sputtering Film
Claims (1)
よって成膜したフッ化マグネシウムによって構成されて
いることを特徴とする光学部材。1. An optical member characterized in that the outermost layer in contact with air is composed of magnesium fluoride formed by sputtering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09366392A JP3278194B2 (en) | 1992-03-19 | 1992-03-19 | Optical components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09366392A JP3278194B2 (en) | 1992-03-19 | 1992-03-19 | Optical components |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05264803A true JPH05264803A (en) | 1993-10-15 |
| JP3278194B2 JP3278194B2 (en) | 2002-04-30 |
Family
ID=14088639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09366392A Expired - Fee Related JP3278194B2 (en) | 1992-03-19 | 1992-03-19 | Optical components |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3278194B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116590677A (en) * | 2023-04-17 | 2023-08-15 | 哈尔滨工业大学 | Moon dust protective coating with high transmittance and low adhesion on surface of optical lens and preparation method thereof |
-
1992
- 1992-03-19 JP JP09366392A patent/JP3278194B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116590677A (en) * | 2023-04-17 | 2023-08-15 | 哈尔滨工业大学 | Moon dust protective coating with high transmittance and low adhesion on surface of optical lens and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3278194B2 (en) | 2002-04-30 |
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